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1. 发明专利

JP2015021787A 機能素子、電子機器、および移動体有权
标题翻译：功能元件，电子设备和移动体
公开(公告)号：JP2015021787A
公开(公告)日：2015-02-02
申请号：JP2013148615
申请日：2013-07-17
申请人：セイコーエプソン株式会社 , Seiko Epson Corp
发明人： TANAKA SATORU
IPC分类号： G01P15/125 , B81B3/00 , H01L29/84
CPC分类号： B81B3/0021 , B81B3/0013 , B81B3/0051 , B81B2201/0235 , B81B2201/0242
摘要：【課題】正確に物理量を検出することができる機能素子を提供する。【解決手段】本発明に係る機能素子100は、第1軸に沿って変位可能な可動体20と、可動体20を連結部40で支持する固定部30と、可動体20から延出している可動電極部8と、可動電極部8に対向して配置されている固定電極部71と、固定部30から延出し、可動電極部8の側面と対向する対向部61aを備えた延出部61と、を含み、対向部61aと可動電極部8との間の距離L1は、固定電極部71と可動電極部8との間の距離L2よりも小さい。【選択図】図1
摘要翻译：要解决的问题：提供能够精确地检测物理量的功能元件。解决方案：根据本发明的功能元件100包括：能够沿着第一轴线移位的可移动体20; 用于通过联接部分40支撑可动体20的固定部分30; 从可动体20延伸的可动电极部8; 与可动电极部8相对配置的固定电极部71; 以及延伸部61，其从固定部30延伸并设置有与可动电极部8的侧面相对的相对部61a。相对部61a与可动电极部8之间的距离L1小于固定电极部71和可动电极部8。

2. 发明专利

JP2014021037A Mems device, electronic module, electronic apparatus, and moving body 审中-公开
标题翻译： MEMS器件，电子模块，电子设备和移动体
公开(公告)号：JP2014021037A
公开(公告)日：2014-02-03
申请号：JP2012162382
申请日：2012-07-23
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： FURUHATA MAKOTO , TANAKA SATORU
IPC分类号： G01C19/5747 , B81B7/02 , G01C19/5769 , H01L29/84
CPC分类号： B81B3/0018 , B81B3/0086 , B81B7/0006 , B81B2207/012
摘要： PROBLEM TO BE SOLVED: To provide a MEMS device capable of suppressing parasitic capacitance generated between wiring lines.SOLUTION: A MEMS device includes: a base substrate; a first wiring line arranged on the base substrate by a first structure; a second wiring line arranged on the base substrate by the first structure and a second structure connected to the first structure; and a MEMS element in which the first wiring line and the second wiring line are connected to each other and which is arranged on the base substrate. The first wiring line and the second wiring line have an intersection part crossing each other. In the intersection part, the first structure of the first wiring line and the second structure of the second wiring line cross each other.
摘要翻译：要解决的问题：提供能够抑制在布线之间产生的寄生电容的MEMS器件。解决方案：MEMS器件包括：基底; 通过第一结构布置在所述基底基板上的第一布线; 通过所述第一结构布置在所述基底基板上的第二布线和与所述第一结构连接的第二结构; 以及其中第一布线和第二布线彼此连接并布置在基底上的MEMS元件。第一布线和第二布线具有交叉部分彼此交叉。在交叉部分中，第一布线的第一结构和第二布线的第二结构彼此交叉。

3. 发明专利

JP2013217772A Physical quantity sensor and electronic apparatus 有权
标题翻译：物理量传感器和电子设备
公开(公告)号：JP2013217772A
公开(公告)日：2013-10-24
申请号：JP2012088607
申请日：2012-04-09
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TANAKA SATORU
IPC分类号： G01P15/125 , B81B3/00 , H01L29/84
CPC分类号： B81B3/0018 , B81B3/0021
摘要： PROBLEM TO BE SOLVED: To provide a physical quantity sensor that can be miniaturized and can have a good noise characteristic.SOLUTION: A physical quantity sensor 100 comprises: a substrate 10; a movable body 20 which has first and second sections 20a and 20b and in which a first movable electrode portion 21 is provided in the first section 20a; beam portions 30 and 32 which support the movable body 20 so as to be able to be displaced; and a first fixed electrode portion 50 which is disposed on the substrate 10 so as to face the first movable electrode portion 21. The width of the first section 20a in a second axis Q2 direction orthogonal to a first axis Q1 direction is smaller than the width of the second section 20b in the second axis Q2 direction. The first fixed electrode portion 50 is provided at a position overlapping an end 24 of the first section 20a in the second axis Q2 direction in plan view, and is provided in a range of 0.0500X≤L≤0.816X assuming that the width of the first section 20a in the second axis Q2 direction is X and the width of a portion of the first fixed electrode portion 50 in the second axis Q2 direction overlapping the movable body 20 in plan view is L.
摘要翻译：要解决的问题：提供可以小型化并且可以具有良好噪声特性的物理量传感器。解决方案：物理量传感器100包括：基板10; 具有第一和第二部分20a和20b并且第一可动电极部分21设置在第一部分20a中的可移动体20; 梁部分30和32，其支撑可移动体20以便能够移位; 以及第一固定电极部分50，其以与第一可动电极部分21相对的方式设置在基板10上。第一部分20a在与第一轴线Q1方向正交的第二轴线Q2方向上的宽度小于宽度在第二轴线Q2方向上的第二部分20b。第一固定电极部分50设置在与俯视图中的第二轴线Q2方向上的第一部分20a的端部24重叠的位置处，并且设置在0.0500X≤L≤0.816X的范围内，假定第二轴Q2方向的第一部分20a是X，并且第一固定电极部分50的在平面图中与移动体20重叠的第二轴线Q2方向上的宽度是L.

4. 发明专利

JP2013213734A Physical quantity sensor and electronic apparatus 有权
标题翻译：物理量传感器和电子设备
公开(公告)号：JP2013213734A
公开(公告)日：2013-10-17
申请号：JP2012084155
申请日：2012-04-02
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TANAKA SATORU
IPC分类号： G01P15/125 , B81B3/00 , G01C19/5747 , H01L29/84
CPC分类号： B81B3/0021 , B81B7/0006 , B81B2203/0163
摘要： PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of reducing its size and preventing electrostatic force from being applied to a spring part.SOLUTION: A physical quantity sensor 100 according to the present invention comprises a substrate 10, a fixed part 23 fixed to the substrate 10, and a movable electrode part 50, and includes: a movable body 26 capable of being displaced in a first axis direction; fixed electrode parts 52, 54 provided on the substrate 10 and facing the movable electrode part 50; a spring part 30 that connects the fixed part 23 to an end part 26a of the movable body 26 and that has a first extension part 31a extending from the fixed part 23 along a second axis intersecting the first axis direction, a turning part 31b connected to the first extension part 31a, and a second extension part 31c extending from the turning part 31b along the second axis; and a wall part 40 provided outside the first extension part 31a and the turning part 31b of the spring part 30 in a planar view. The spring part 30 and the wall part 40 are electrically connected.
摘要翻译：要解决的问题：提供能够减小其尺寸并防止静电力施加到弹簧部件的物理量传感器。解决方案：根据本发明的物理量传感器100包括基板10，固定部分23固定基板10和可动电极部50，具有能够沿第一轴方向位移的可动体26，设置在基板10上并面向可动电极部50的固定电极部52,54; 将固定部23与可动体26的端部26a连接并具有从固定部23沿着与第一轴方向交叉的第二轴延伸的第一延伸部31a的弹簧部30，与第一延伸部31a连接的转动部31b 第一延伸部31a和从转动部31b沿着第二轴延伸的第二延伸部31c; 以及在平面图中设置在第一延伸部31a和弹簧部30的转动部31b的外侧的壁部40。弹簧部分30和壁部分40电连接。

5. 发明专利

JP2012065304A Piezoelectric vibration device, method of manufacturing the same, and method of adjusting resonant frequency 审中-公开
标题翻译：压电振动装置，其制造方法和调谐谐振频率的方法
公开(公告)号：JP2012065304A
公开(公告)日：2012-03-29
申请号：JP2011093343
申请日：2011-04-19
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： WADA MITSUHIRO , KATO TATSU , TANAKA SATORU
IPC分类号： H03H3/08 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/23 , H01L41/253 , H03H9/145 , H03H9/25
CPC分类号： H03H3/10 , H03H9/25 , H03H2003/0442 , Y10T29/42
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric vibration device capable of raising a resonant frequency while preventing the increase in surface roughness and structural breakage, a method of manufacturing the piezoelectric vibration device, and a method of adjusting the resonant frequency.SOLUTION: The method of manufacturing the piezoelectric vibration device having a surface acoustic wave element 10 includes a step of forming a functional film 4 for increasing a velocity of a wave on a surface of the surface acoustic wave element 10. Also, the Young's modulus of the functional film 4 is higher than the Young's modulus of each of an excitation electrode 2 and a piezoelectric body 1, and the density of the functional film 4 is lower than the density of each of the excitation electrode 2 and the piezoelectric body 1. Thus, it is possible to develop frequency rise due to elastic modulus rise while suppressing the influence of frequency drop due to a mass addition effect to thereby raise the resonant frequency of the surface acoustic wave element.
摘要翻译：解决的问题：提供能够提高谐振频率同时防止表面粗糙度和结构断裂增加的压电振动装置，压电振动装置的制造方法和调节谐振频率的方法。解决方案：制造具有表面声波元件10的压电振动装置的方法包括形成用于增加表面声波元件10的表面上的波速的功能膜4的步骤。另外，功能膜4的杨氏模量高于激发电极2和压电体1的杨氏模量，功能膜4的密度低于激发电极2和压电体的密度因此，可以通过弹性模量上升而产生频率上升，同时抑制由于质量相加效应引起的频率下降的影响，从而提高表面声波元件的共振频率。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2010220164A Lamb-wave resonator and oscillator 审中-公开
标题翻译：喇叭波共振器和振荡器
公开(公告)号：JP2010220164A
公开(公告)日：2010-09-30
申请号：JP2009067545
申请日：2009-03-19
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TANAKA SATORU
IPC分类号： H03H9/25 , H01L41/09 , H01L41/18 , H03B5/30 , H03H9/145
CPC分类号： H03H9/1457 , H03H9/02228 , H03H9/02551 , H03H9/14538
摘要： PROBLEM TO BE SOLVED: To provide a Lamb-wave resonator for suppressing vertical vibration leakage in a Lamb-wave transmission direction. SOLUTION: In this Lamb-wave resonator 1, an IDT electrode 20 including bus bar electrodes 21d, 22d for connecting one-side ends of electrode digits 21a-21c, 22a, 22b and formed by inserting tips of the plurality of electrode digits into one another, and a pair of reflectors 25, 26 are provided on one principal surface of a crystal substrate 10; when it is assumed that the wavelength of the Lamb waves and the thickness of the crystal substrate are λ and t, respectively, 0 COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供用于抑制兰姆波传输方向上的垂直振动泄漏的兰姆波谐振器。解决方案：在兰姆波谐振器1中，包括用于连接电极数字21a-21c，22a，22b的一侧端的母线电极21d，22d的IDT电极20，并且通过插入多个电极并且在晶体基板10的一个主表面上设置一对反射体25,26; 当假设兰姆波的波长和晶体基板的厚度分别为λ和t时，满足0

7. 发明专利

JP2008098974A Lamb wave type high frequency device 审中-公开
标题翻译：拉姆波型高频器件
公开(公告)号：JP2008098974A
公开(公告)日：2008-04-24
申请号：JP2006278407
申请日：2006-10-12
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TANAKA SATORU
IPC分类号： H03H9/25 , H01L41/09 , H01L41/18
摘要： PROBLEM TO BE SOLVED: To attain a Lamb wave type high frequency resonator with highly precise resonance frequency and excellent frequency temperature characteristics with a simple structure.
SOLUTION: The Lamb wave type high frequency resonator 10 has: a piezoelectric substrate 20 comprised of crystal; a comb-line IDT electrode 30 formed on the surface 21 of the piezoelectric substrate 20; and an adjustment film 60 comprised of materials with density different from those of the piezoelectric substrate 20, and formed at least in an area where the Lamb wave is propagated on the rear surface 22 of the piezoelectric substrate 20. The Lamb wave type high frequency resonator 10 with the highly precise resonance frequency and the excellent frequency temperature characteristics is provided in the simple structure by properly controlling thickness (t) of the adjustment film 60.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：以简单的结构获得具有高精度共振频率和优异的频率温度特性的兰姆波型高频谐振器。解决方案：兰姆波型高频谐振器10具有：由晶体构成的压电基片20; 形成在压电基板20的表面21上的梳状IDT电极30; 以及由与压电基板20的密度不同的材料构成的调整膜60，至少形成在兰姆波在压电基板20的背面22上传播的区域。兰姆波型高频谐振器通过适当地控制调节膜60的厚度（t），以简单的结构提供具有高精度共振频率和优异的频率温度特性的图10。（C）2008，JPO＆INPIT

8. 发明专利

JP2008054163A Lamb-wave type high-frequency resonator 审中-公开
标题翻译：拉姆波型高频谐振器
公开(公告)号：JP2008054163A
公开(公告)日：2008-03-06
申请号：JP2006230188
申请日：2006-08-28
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TANAKA SATORU
IPC分类号： H03H9/25 , H01L41/09 , H01L41/18 , H03H9/145
摘要： PROBLEM TO BE SOLVED: To provide a Lamb-wave type high-frequency resonator that has a high Q value, high phase velocity and superior frequency temperature characteristics.
SOLUTION: The Lamb-wave type high-frequency resonator 10 has a liquid crystal substrate 20, an IDT electrode 30 constituted by interposing a first cross finger electrode 31 and a second cross finger electrode 32 into the main surface of the liquid crystal substrate 20 and reflectors 40, 50 arranged on both sides of the traveling direction of the Lamb wave of the IDT electrode 30. If the crossing width between the first cross finger electrode 31 and the second cross finger electrode 32 is W and the wavelength of the Lamb wave is λ, the crossing width W is set within a range, expressed by 21λ≤W≤54λ. In addition, the IDT electrode 30 is formed so that the segmentation angle of the liquid crystal substrate 20 and the propagating direction of the Lamb wave become (0, θ, 0) by Euler angle representation and within a range, in which the angle θ is expressed as being 35 degrees ≤θ≤47.2 degrees, normalized substrate thickness t/λ, expressed by a relation between the thickness t of the liquid crystal substrate 20 and the wavelength λ of the Lamb wave, set to be within a range of 0.176≤t/λ≤1.925.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有高Q值，高相速度和优异的频率温度特性的兰姆波型高频谐振器。解决方案：兰姆波型高频谐振器10具有液晶基板20，IDT电极30，其通过将第一交叉指状电极31和第二交叉指状电极32插入到液晶的主表面中基板20和布置在IDT电极30的兰姆波的行进方向的两侧的反射器40,50。如果第一交叉指状电极31和第二十字指状电极32之间的交叉宽度为W，并且波长兰姆波为λ，交叉宽度W设定在由21λ≤W≤54λ表示的范围内。此外，IDT电极30形成为使得液晶基板20的分割角度和兰姆波的传播方向通过欧拉角表示成为（0，θ，0）并且在其中角度θ 表示为35度≤θ≤47.2度，归一化基板厚度t /λ，由液晶基板20的厚度t与兰姆波的波长λ之间的关系表示，设定在0.176的范围内 ≤T/λ≤1.925。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2007251910A Lamb wave type high frequency device, method for manufacturing lamb wave type high frequency device 有权
标题翻译：拉姆波型高频器件，用于制造拉姆波型高频器件的方法
公开(公告)号：JP2007251910A
公开(公告)日：2007-09-27
申请号：JP2006209507
申请日：2006-08-01
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TANAKA SATORU
IPC分类号： H03H9/25 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/23 , H01L41/312 , H01L41/313 , H01L41/337 , H03H3/08
CPC分类号： H03H9/02228 , H03H3/02 , H03H9/02023 , H03H9/1014 , H03H2003/027 , Y10T29/42
摘要： PROBLEM TO BE SOLVED: To provide a Lamb wave type high frequency device whose structural strength is increased and which achieves stable characteristics and to provide its manufacturing method by which cracks hardly occur during manufacturing process steps and the yield ratio can be improved. SOLUTION: The Lamb wave type high frequency device 10 is composed of a piezoelectric substrate 20 on one major surface of which IDT electrodes 30 are formed and a reinforcing substrate 50 which is bonded to the other major surface of the piezoelectric substrate 20. A space 54 of an area larger than a region where Lamb wave is propagated is provided on the bonding plane between the piezoelectric substrate 20 and the reinforcing substrate 50. The method for manufacturing the Lamb wave type high frequency device 10 includes a step for forming a concave part 53 corresponding to the space 54 in the reinforcing substrate 50, a step for forming a sacrifice layer in the concave part 53, a step for polishing the thick plate of the piezoelectric substrate 20 into a predetermined thickness after bonding the thick plate of the piezoelectric substrate 20 and the reinforcing substrate 50, a step for forming the IDT electrodes 30 and reflectors 41 and 42 and a step for forming the space 54 by removing the sacrifice layer. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供结构强度提高并且实现稳定特性的兰姆波型高频装置，并且提供其在制造工艺步骤中几乎不发生裂纹的制造方法，并且可以提高屈服比。解决方案：兰姆波型高频器件10由形成有IDT电极30的一个主表面上的压电基片20和与压电基片20的另一主表面接合的加强基片50组成。在压电基板20和增强基板50之间的接合面上设置有大于兰姆波传播区域的区域的空间54.该兰姆波型高频装置10的制造方法包括：对应于加强基板50中的空间54的凹部53，在凹部53中形成牺牲层的工序，将压电基板20的厚板在将厚板压电基板20和加强基板50，用于形成IDT电极30和反射器41和42的步骤以及通过移除形成空间54的步骤 ving牺牲层。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2015031645A 物理量センサー、電子機器、および移動体有权
标题翻译：物理量传感器，电子设备和移动单元
公开(公告)号：JP2015031645A
公开(公告)日：2015-02-16
申请号：JP2013163001
申请日：2013-08-06
申请人：セイコーエプソン株式会社 , Seiko Epson Corp
发明人： TANAKA SATORU
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08 , H01L29/84
CPC分类号： G01P15/125 , B81B2201/0235 , G01C19/5719 , G01P2015/0814
摘要：【課題】配線のレイアウトを単純にし、小型化を図ることができる物理量センサーを提供する。【解決手段】本発明に係る物理量センサー100は、基板10と、基板10上に配置され、第1支持軸Q1まわりに変位可能であり、且つ、第1可動電極部24aを備えた第1可動体20aと、基板10上に配置され、第2支持軸Q2まわりに変位可能であり、且つ、第2可動電極部23bを備えた第2可動体20bと、平面視で、第1可動電極部24aおよび第2可動電極部23bに重なって基板10上に配置されている固定電極部53と、を含む。【選択図】図1
摘要翻译：要解决的问题：通过简化布线布置来提供能够缩小尺寸的物理量传感器。解决方案：根据本发明的物理量传感器100包括：电路板10; 设置在电路板10上的能够围绕第一支撑轴线Q1移动并且设置有第一可动电极部分24a的第一可移动体20a; 设置在电路板10上的能够围绕第二支撑轴线Q2移动并设置有第二可动电极部分23b的第二移动体20b; 以及在第一可动体24a和第二可移动体23b的顶部上平面地配置在电路基板10上的固定电极部53。

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