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    • 1. 发明专利
    • Robot system and method of controlling the same
    • 机器人系统及其控制方法
    • JP2010263273A
    • 2010-11-18
    • JP2009110467
    • 2009-04-30
    • Seiko Epson Corpセイコーエプソン株式会社
    • ONISHI HAJIMEINAZUMI MITSUHIRO
    • H04N5/232B25J13/08B25J19/04G06T1/00
    • PROBLEM TO BE SOLVED: To provide a robot system for precisely detecting the position of a workpiece from blur images obtained by imaging the workpiece.
      SOLUTION: The robot system includes: a robot 10 that works on a workpiece W, a stage 72 that places the workpiece W and has a marker 74 emitting light of a plurality of wavelengths, and an imaging apparatus 20 for capturing the image of the workpiece W and that of the marker 74 as the same image. The robot system also includes: a point diffusion function calculation section 35 for extracting a trajectory image 100 of the marker 74 from a deteriorated image B including a motion blur captured by the imaging apparatus 20 to calculate a point diffusion function from the trajectory image 100; an image generation section 37 for generating a non-deteriorated original image from the deteriorated image B by converting the deteriorated image B by the calculated point diffusion function; and a position calculation section 39 for calculating a position of the workpiece W from the generated original image.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种用于通过对工件进行成像而获得的模糊图像来精确地检测工件的位置的机器人系统。 机器人系统包括:在工件W上工作的机器人10,放置工件W并具有发射多个波长的光的标记74的台72以及用于捕获图像的成像装置20 的工件W和标记74的相同图像。 机器人系统还包括:点扩散函数计算部分35,用于从包括由成像装置20捕获的运动模糊的退化图像B提取标记74的轨迹图像100,以从轨迹图像100计算点扩散函数; 图像生成部37,用于通过将劣化图像B转换为计算出的点扩散函数,从劣化图像B生成未劣化的原始图像; 以及用于从所生成的原始图像计算工件W的位置的位置计算部39。 版权所有(C)2011,JPO&INPIT
    • 2. 发明专利
    • Optical element, its manufacturing method, optical module and optical transmission device
    • 光学元件及其制造方法,光学模块和光学传输装置
    • JP2005166870A
    • 2005-06-23
    • JP2003402582
    • 2003-12-02
    • Seiko Epson Corpセイコーエプソン株式会社
    • ONISHI HAJIME
    • H01L31/00H01L33/10H01L33/30H01L33/40H01S5/183H01L33/00
    • PROBLEM TO BE SOLVED: To provide an optical element for improving element efficiency by reducing unnecessary light absorbance in the inside of the element. SOLUTION: The optical element includes a first conductive semiconductor substrate 110 providing a recess 220 on a main face 110a, a DBR mirror layer 101 provided in the recess 220 and comprising the multilayer film of a true semiconductor, a first conductive semiconductor layer 102 provided at least on the DBR mirror layer 101, a second conductive semiconductor layer 104 provided upward of the first conductive semiconductor layer 102, a first electrode 109 provided on the main face 110a and a reverse side of face 110b of the semiconductor substrate 110, and a second electrode 107 provided on the second conductive semiconductor 104. The depth d1 of the recess 220 is formed to be the same as the thickness d2 of at least the DBR mirror layer 101 and larger than the thickness d2 of the DBR mirror layer 101. The first conductive semiconductor layer 102 is formed so as to be brought into contact with the semiconductor substrate 110. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:通过减少元件内部的不必要的吸光度来提供用于提高元件效率的光学元件。 解决方案:光学元件包括:第一导电半导体衬底110,其在主面110a上提供凹部220,设置在凹部220中并包括真半导体的多层膜的DBR镜层101,第一导电半导体层 至少设置在DBR镜层101上,设置在第一导电半导体层102上方的第二导电半导体层104,设置在主面110a上的第一电极109和半导体衬底110的面110b的反面, 以及设置在第二导电半导体104上的第二电极107.凹部220的深度d1形成为与至少DBR镜层101的厚度d2相同,并且大于DBR镜层101的厚度d2 第一导电半导体层102形成为与半导体衬底110接触。版权所有(C)2005,JPO&NCIPI
    • 3. 发明专利
    • Optical element, manufacturing method thereof, and optical module
    • 光学元件,其制造方法和光学模块
    • JP2007027365A
    • 2007-02-01
    • JP2005206662
    • 2005-07-15
    • Seiko Epson Corpセイコーエプソン株式会社
    • ONISHI HAJIMEMOCHIZUKI MASAMITSU
    • H01S5/026H01S5/183
    • H01S5/18311H01S5/02288H01S5/0264H01S5/0425H01S5/209H01S2301/18
    • PROBLEM TO BE SOLVED: To provide an optical element which can control film thickness of a photodetecting element of higher accuracy and a manufacturing method of the same, and also to provide an optical module.
      SOLUTION: The optical element 100 in the manufacturing method of an optical element comprises a vertical cavity surface-emitting semiconductor laser 140, and a photodetecting element 120 for detecting the light emitted from the vertical cavity surface-emitting semiconductor laser. The manufacturing method of an optical element comprises the steps of (a) laminating a first mirror 102, an active layer 103, a second mirror layer 104, a light-absorbing layer, an etching stopper layer, and a semiconductor layer to form a contact layer at the upper part of a substrate 101; (b) forming at least a light-absorbing layer 112, an etching stopper layer 115, and a contact layer 113 by patterning the semiconductor layer; (c) forming an electrode 110 at the upper part of the contact layer; and (d) etching a part of the contact layer, until the upper part of the etching stopper layer is exposed.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种能够以更高精度控制光电元件的膜厚的光学元件及其制造方法,并且还提供一种光学模块。 解决方案:光学元件的制造方法中的光学元件100包括垂直腔表面发射半导体激光器140和用于检测从垂直腔表面发射半导体激光器发射的光的光电检测元件120。 光学元件的制造方法包括以下步骤:(a)层叠第一反射镜102,有源层103,第二镜面层104,光吸收层,蚀刻停止层和半导体层,以形成接触 在基板101的上部的层; (b)通过对半导体层进行构图来形成至少一个光吸收层112,一个蚀刻停止层115和一个接触层113; (c)在接触层的上部形成电极110; 和(d)蚀刻接触层的一部分,直到暴露出蚀刻停止层的上部。 版权所有(C)2007,JPO&INPIT
    • 4. 发明专利
    • Optical element
    • 光学元件
    • JP2006140188A
    • 2006-06-01
    • JP2004326174
    • 2004-11-10
    • Seiko Epson Corpセイコーエプソン株式会社
    • NISHIDA TETSUROONISHI HAJIME
    • H01S5/183
    • PROBLEM TO BE SOLVED: To provide an optical element comprising a surface emission laser having good high frequency characteristics, and a light receiving element for detecting a part of laser light emitted from the surface emission laser.
      SOLUTION: The optical element 100 comprises a surface emission laser 130, an MSM light receiving element 120 for detecting a part of laser light emitted from the surface emission laser 130. The surface emission laser 130 comprises a first mirror 102 formed above a substrate 101, an active layer 103 formed above the first mirror 102, and a second mirror 104 formed above the active layer 103. The MSM light receiving element 120 comprises a light absorption layer 111 formed above the second mirror 104, a first electrode 112 formed above the light absorption layer 111, and a second electrode 113 formed above the light absorption layer.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种包括具有良好高频特性的表面发射激光器的光学元件和用于检测从表面发射激光器发射的一部分激光的光接收元件。 解决方案:光学元件100包括表面发射激光器130,用于检测从表面发射激光器130发射的激光的一部分的MSM光接收元件120.面发光激光器130包括:第一反射镜102,其形成在 基板101,形成在第一反射镜102上方的有源层103以及形成在有源层103上方的第二反射镜104.MSM光接收元件120包括形成在第二反射镜104上方的光吸收层111,形成的第一电极112 在光吸收层111上方形成的第二电极113和形成在光吸收层上的第二电极113。 版权所有(C)2006,JPO&NCIPI
    • 5. 发明专利
    • Optical element and its manufacturing method, optical module, and optical transmission device
    • 光学元件及其制造方法,光学模块和光学传输装置
    • JP2005019599A
    • 2005-01-20
    • JP2003180859
    • 2003-06-25
    • Seiko Epson Corpセイコーエプソン株式会社
    • ONISHI HAJIMEIMAI YASUTAKA
    • H01L31/10H01S5/183
    • PROBLEM TO BE SOLVED: To provide an optical element which is improved in high-frequency characteristics and is reduced in consumption power by preventing an increase in resistance thereof, to provide its manufacturing method, and also to provide an optical module and an optical transmission device, both including the optical element.
      SOLUTION: The optical element 100 comprises a semiconductor substrate 110 of a first conductivity type which is formed with a concave portion 220 with a bottom face 220a and a side wall 220b, a DBR mirror layer 101 of the first conductivity type which is installed on top of the bottom face 220a, and a layer 103 of a second conductivity type which is installed above the DBR mirror layer 101. An end face 101a of the DBR mirror layer 101 and the side wall 220b are joined together.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 解决的问题:提供一种通过防止其电阻增加而提高高频特性并降低功耗的光学元件,提供其制造方法,并且还提供一种光学模块和 光传输装置,均包括光学元件。 解决方案:光学元件100包括第一导电类型的半导体衬底110,其形成有具有底面220a和侧壁220b的凹部220,第一导电类型的DBR镜面101为 安装在底面220a的顶部,第二导电类型的层103安装在DBR镜面101的上方.DBR镜层101和侧壁220b的端面101a接合在一起。 版权所有(C)2005,JPO&NCIPI
    • 6. 发明专利
    • Bonding method and method of manufacturing sealed type device
    • 粘合方法和制造密封型设备的方法
    • JP2011129591A
    • 2011-06-30
    • JP2009284439
    • 2009-12-15
    • Seiko Epson Corpセイコーエプソン株式会社
    • ONISHI HAJIMEITO YOSHIFUMI
    • H01L23/02
    • PROBLEM TO BE SOLVED: To provide a bonding method capable of achieving easy bonding while controlling a bonding region of a member to which a bonding film has been transferred, so that the bonding film in a desired shape can be easily transferred to a surface of the member; and to provide a method of manufacturing a sealed type device in which the sealed type device with high reliability can be efficiently manufactured. SOLUTION: Two bonding film transfer sheets have a base material and a first bonding film 31 formed thereon, and a base material and a second bonding film 32 formed thereon, respectively. The former has a part of the first bonding film 31 transferred corresponding to an energy-imparted region of a case 2, and the latter has a part of the second bonding film 32 transferred corresponding to an energy-imparted region of a cover body 4. The bonding films 31 and 32 each includes an atomic structure including a siloxane bond, and a leaving group bonded to the siloxane bond, and the case 2 and cover body 4 are bonded together through the transferred parts to constitute a quartz oscillator 1. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了提供一种能够在控制已经转移接合膜的部件的接合区域的同时实现容易的接合的接合方法,使得能够容易地将期望形状的接合膜转移到 构件表面; 并且提供一种制造密封型装置的方法,其中可以有效地制造具有高可靠性的密封型装置。 解决方案:两个接合膜转移片分别具有基材和形成在其上的第一接合膜31,分别形成在基材和第二接合膜32上。 前者具有与壳体2的能量赋予区域对应地转移的第一接合膜31的一部分,后者具有与盖体4的能量赋予区域对应的第二接合膜32的一部分。 接合膜31和32各自包括包含硅氧烷键的原子结构和与硅氧烷键接合的离去基团,壳体2和盖体4通过转印部分结合在一起,构成石英振荡器1.

      版权所有(C)2011,JPO&INPIT

    • 8. 发明专利
    • Robot arm device, and method and program for controlling robot arm device
    • 机器人ARM设备,以及用于控制机器人ARM设备的方法和程序
    • JP2010125582A
    • 2010-06-10
    • JP2008306051
    • 2008-12-01
    • Seiko Epson Corpセイコーエプソン株式会社
    • ONISHI HAJIME
    • B25J19/04B25J13/08G01B11/00G05B19/19G06T1/00
    • PROBLEM TO BE SOLVED: To solve a problem that, since an image picked up by a camera is blurred due to a shake of camera while being attached to a robot arm and an image of a product or a component with an unclear outline is generated, a position of the product or the component cannot be calculated by the use of the image. SOLUTION: A robot arm device 100 includes the camera 20 picking up the image of the product or the component, an acceleration detection part 21 detecting acceleration, the robot arm to which the camera 20 and the acceleration detection part 21 are attached, and a position calculation part 45 calculating the position of the product or the component by using the image, and a timing control part 44 controlling timing to pick up the image by the camera 20 in accordance with the acceleration. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:为了解决由于摄像机拾取的图像由于在附接到机器人手臂时的相机震动而变得模糊,并且产品或具有不清晰轮廓的部件的图像 ,则不能通过使用图像来计算产品或组件的位置。 解决方案:机器人手臂装置100包括拾取产品或部件的图像的照相机20,检测加速度的加速度检测部21,安装了照相机20和加速度检测部21的机器人手臂, 以及位置计算部分45,通过使用该图像来计算产品或部件的位置;以及定时控制部分44,控制由相机20根据加速度拾取图像的定时。 版权所有(C)2010,JPO&INPIT
    • 9. 发明专利
    • Surface emitting device and manufacturing method thereof
    • 表面发射装置及其制造方法
    • JP2006261520A
    • 2006-09-28
    • JP2005079183
    • 2005-03-18
    • Seiko Epson Corpセイコーエプソン株式会社
    • ONISHI HAJIMENISHIDA TETSURO
    • H01S5/183
    • H01S5/0261H01L27/15H01S5/0207H01S5/0425H01S5/06226H01S5/06825H01S5/18311H01S5/18338H01S5/3081H01S2301/176
    • PROBLEM TO BE SOLVED: To provide a surface emitting device improving reliability by preventing electrostatic destruction and a manufacturing method thereof, with respect to the surface emitting device and the manufacturing method thereof.
      SOLUTION: This surface emitting device 100 has a substrate 101 including a first surface 101a and a second surface 101b having a surface index different from the surface index of the first surface 101a; a light-emitting section 140 including a first conductive type first semiconductor layer 102 formed above the first surface 101a, an active layer 103 and a second conductive type second semiconductor layer 104; and a rectifying section 120 including a second conductive type first semiconductor layer 112 and a first conductive type second semiconductor layer 114 formed above the first semiconductor layer 112. The first semiconductor layer 102 of the light-emitting section 140 and the first semiconductor layer 112 of the rectifying section 120 are formed in the same process, and include the same impurities. The light-emitting section 140 and the rectifying section 120 are electrically connected in parallel, and the rectifying section 120 has a rectifying function opposite to that of the light-emitting section 140.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种通过防止静电破坏而提高可靠性的表面发射器件及其制造方法,涉及表面发射器件及其制造方法。 解决方案:该表面发射器件100具有包括第一表面101a和表面指数不同于第一表面101a的表面指数的第二表面101b的基底101; 包括形成在第一表面101a上方的第一导电类型的第一半导体层102,有源层103和第二导电型第二半导体层104的发光部140; 以及整流部120,其包括形成在第一半导体层112上方的第二导电型第一半导体层112和第一导电型第二半导体层114.发光部140的第一半导体层102和第一半导体层112 整流部120以相同的工序形成,并且包括相同的杂质。 发光部140和整流部120并联电连接,整流部120具有与发光部140的整流功能相反的整流功能。(C)2006,JPO&NCIPI
    • 10. 发明专利
    • Optical element and its manufacturing method
    • 光学元件及其制造方法
    • JP2006049428A
    • 2006-02-16
    • JP2004225612
    • 2004-08-02
    • Seiko Epson Corpセイコーエプソン株式会社
    • ONISHI HAJIMEKANEKO TAKEO
    • H01S5/183H01L31/12H01S5/026
    • PROBLEM TO BE SOLVED: To provide an optical element provided with a light emission and a light reception as well as its manufacturing method. SOLUTION: The optical element 100 is provided with a light emission part 140 which includes a first semiconductor layer 102 which is arranged above a substrate 101 from the side of the substrate 101, an active layer 103 and a second semiconductor layer 104, and a light receiver 120 which includes a first contact layer 111 which is arranged above the light emitter 140 from the side of the light emitter 140, an optical absorption layer 112, and a second contact layer 113. The area of the upper surface of the optical absorption layer 112 is larger than that of the lower surface thereof, and the area of the upper surface of the second contact layer 113 is larger than that of the upper surface of the optical absorption layer 112. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种具有发光和光接收的光学元件及其制造方法。 解决方案:光学元件100设置有发光部分140,该发光部分140包括从衬底101一侧布置在衬底101上方的第一半导体层102,有源层103和第二半导体层104, 以及光接收器120,其包括从发光器140的一侧设置在发光器140上方的第一接触层111,光吸收层112和第二接触层113。 光吸收层112大于其下表面,并且第二接触层113的上表面的面积大于光吸收层112的上表面的面积。(C) 2006年,JPO&NCIPI