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    • 2. 发明专利
    • Steam generator, and flow resistance adjusting method for cooling water in steam generator
    • 蒸汽发生器和蒸汽发生器冷却水的流阻调整方法
    • JP2007147163A
    • 2007-06-14
    • JP2005342411
    • 2005-11-28
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • WATAKABE HISATOINOUE TOMOYUKI
    • F22B1/16G21D1/00
    • G21D1/02F22B1/023F22B1/162F22B37/002Y02E30/40
    • PROBLEM TO BE SOLVED: To suppress deterioration of heat recovery efficiency by adjusting flow resistance of primary cooling water flowing through a heat transfer tube bank in regard to a steam generator, and a flow resistance adjusting method for the cooling water in the steam generator.
      SOLUTION: The heat transfer tube group 38 comprised of a plurality of heat transfer tubes 37 comprising reverse U-shapes and carrying the primary cooling water is arranged in a shell 31, and an end of each heat transfer tube 37 is supported by a tube plate 33. By fixing a lower part semi-spherical mirror part 39 to a lower end of the shell 31, an inlet side water chamber 41 communicated with one end of each heat transfer tube 37 is provided, an outlet side water chamber 42 communicated with another end of each heat transfer tube 37 is provided, and two flow resistance adjusting plates 51, 52 are detachably provided as flow resistance adjusting means for the primary cooling water, on an inlet nozzle 43 provided on the inlet side water chamber 41.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:通过调节流过传热管组的蒸汽发生器的一次冷却水的流动阻力来抑制热回收效率的劣化,以及用于蒸汽中的冷却水的流动阻力调节方法 发电机。 解决方案:包括反向U形并承载一次冷却水的多个传热管37的传热管组38布置在壳体31中,并且每个传热管37的一端由 管板33.通过将下部半球形镜部39固定到壳体31的下端,设置有与每个传热管37的一端连通的入口侧水室41,出口侧水室42 与每个传热管37的另一端连通,并且在设置在入口侧水室41上的入口喷嘴43上可拆卸地设置两个流阻阻力调节板51,52作为主冷却水的流阻调节装置。 版权所有(C)2007,JPO&INPIT
    • 3. 发明专利
    • Substrate cleaning apparatus
    • 基板清洁装置
    • JP2012033820A
    • 2012-02-16
    • JP2010173718
    • 2010-08-02
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • INOUE TOMOYUKISASAGAWA EISHIROMUROTANI KOJI
    • H01L21/304B08B1/04B08B3/02B08B3/04H01L31/042
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a substrate cleaning apparatus capable of preventing electrodeposition from occurring during a substrate cleaning process and observing the substrate status.SOLUTION: A substrate cleaning apparatus comprises: a cleaning part for cleaning a substrate 12 on which a power generation layer is formed; a carrying-in part that is provided on the upstream side of the cleaning part and carries the substrate 12 from a substrate carrying-in port to the cleaning part; a drying part for drying a power generation layer of the cleaned substrate 12; a carrying-out part that is provided on the downstream side of the drying part and carries the dried substrate 12 to a substrate carrying-out port; light shielding means 9 for shielding light falling on the carrying-in part except for the substrate carrying-in port, the cleaning part, the drying part, and the carrying-out part except for the substrate carrying-out port; an observation window 10 provided in the light shielding means; and light transmission means for shielding at least a part of wavelengths that contribute to generation of the power generation layer among lights falling from the observation window 10 and setting the power generation voltage of the power generation layer to 1/10 or below of the power generation voltage when at least a part of the wavelengths is not shielded.
    • 要解决的问题:提供一种能够防止在基板清洗处理中发生电沉积并观察基板状态的基板清洗装置。 解决方案:一种基板清洁装置,包括:用于清洁其上形成有发电层的基板12的清洁部件; 所述搬运部设置在所述清扫部的上游侧,将所述基板12从基板搬入口向所述清扫部输送; 用于干燥清洁的基板12的发电层的干燥部; 所述进出部分设置在所述干燥部的下游侧,并将干燥后的基板12承载于基板搬出口; 遮光装置9,用于遮蔽除了基板输入口,清洁部分,干燥部分和除了基板输出端口之外的传送部分之外的传送部分上的光; 设置在遮光装置中的观察窗10; 以及光传输装置,用于屏蔽从观察窗10落下的光中有助于产生发电层的波长的至少一部分,并将发电层的发电电压设定为发电量的1/10以下 当至少一部分波长不被屏蔽时,电压。 版权所有(C)2012,JPO&INPIT
    • 4. 发明专利
    • Water supply ring for heat exchanger
    • 热交换器供水环
    • JP2006029704A
    • 2006-02-02
    • JP2004210570
    • 2004-07-16
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • INOUE TOMOYUKIMIZUTANI TOSHIYUKISHIMAMURA KENGOYASUDA TAKANORIKAWAKAMI RYOICHIHIRANO HIROSHI
    • F22B1/16F22D11/00G21D1/00
    • Y02E30/40
    • PROBLEM TO BE SOLVED: To provide a water supply ring for a heat exchanger having a foreign matter catching function and a water hammer generation prevention function.
      SOLUTION: Even when water of a secondary cooling system is taken into a water supply ring main body 53 from a water supply nozzle 40 in a short time to raise level of water of the secondary cooling system in a steam generator 1000, all the amount of steam remaining in the water supply ring main body 53 is exhausted to the outside of the water supply ring main body 53 until level of water of the secondary cooling system reaches height of an upper face of the water supply ring main body 53 by providing many holes 55 for water supply on an upper part face of the water supply ring main body 53. Or, when steam remaining in the water supply ring main body 53 is cooled by water of the secondary cooling system and is shrunk, the steam is absorbed into the water supply ring main body 53 through many holes 55 to suppress "water hammer" phenomenon. Since many holes 55 are provided on the upper part face of the water supply ring main body 53, foreign matter does not drop into the steam generator 1000 through many holes 55 for water supply.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供具有异物捕获功能和水锤产生防止功能的热交换器的供水环。 解决方案:即使二次冷却系统的水在短时间内从供水喷嘴40进入供水环主体53,以提高蒸汽发生器1000中的二次冷却系统的水位,全部 供水环主体53中残留的蒸汽量被排出到供水环主体53的外部,直到二次冷却系统的水位达到供水环主体53的上表面的高度为止 在供水环主体53的上部面上设置许多用于供水的孔55.或者,当供水环主体53中残留的蒸汽被二次冷却系统的水冷却并且被收缩时,蒸汽是 通过许多孔55吸收到供水环主体53中以抑制“水锤”现象。 由于在供水环主体53的上表面上设置有许多孔55,所以异物不会通过许多用于供水的孔55落入蒸汽发生器1000中。 版权所有(C)2006,JPO&NCIPI
    • 5. 发明专利
    • Vibration control device, and heat exchanger using it
    • 振动控制装置和使用它的热交换器
    • JP2007078308A
    • 2007-03-29
    • JP2005269882
    • 2005-09-16
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • KAWAKAMI RYOICHIABE IWAJIHIRANO HIROSHIKAGUCHI HITOSHIINOUE TOMOYUKINAKAJIMA NORITAKAYAMAZAKI MASATOHASEGAWA TAKEHISA
    • F28F9/00F28D7/16F28F9/013
    • PROBLEM TO BE SOLVED: To provide an easy-to-assemble vibration control device positively securing an interval of a steady arm, and positively preventing its movement. SOLUTION: The vibration control device is characterized in that it is provided with a plurality of steady arms 29 with both ends fixed to a tube plate 11, and attached between a plurality of heat transfer tubes 13 having U-shaped free ends so as to contact with each of adjacent heat transfer tubes 13, pluralities of end type spacers 42 and intermediate spacers 44 interposed between adjacent steady arms 29, and having fitting grooves 57 for fitting the steady arms 29 on a fitting face 55 facing one of the steady arms 29, and bolts 45 joining the steady arms 29 and the adjacent end type spacers 42 and intermediate spacers 44 on both sides. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种易于组装的振动控制装置,其可靠地固定稳定臂的间隔,并且积极地防止其运动。 解决方案:振动控制装置的特征在于,其具有多个稳定臂29,两个稳定臂29的两端固定在管板11上,并且安装在具有U形自由端的多个传热管13之间 与相邻的传热管13中的每一个接触,多个端部型隔离件42和中间间隔件44插入在相邻的稳定臂29之间,并且具有用于将稳定臂29装配到装配面55上的嵌合槽57, 臂29和连接稳定臂29和相邻端部间隔件42以及两侧的中间间隔件44的螺栓45。 版权所有(C)2007,JPO&INPIT
    • 6. 发明专利
    • Steam generator
    • 蒸汽发生器
    • JP2012220043A
    • 2012-11-12
    • JP2011083115
    • 2011-04-04
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • KAWAKAMI RYOICHISHIMAMURA KENGONAKAGAWA TOMOYAINOUE TOMOYUKI
    • F22B1/16
    • F22B1/023
    • PROBLEM TO BE SOLVED: To provide a steam generator capable of preventing a second recirculation coolant from being mixed with a secondary coolant supplied from a supply channel even if there is no partition plate.SOLUTION: This steam generator comprises a pipe group sheath arranged at predetermined intervals against the inner wall of the cylinder portion, a high temperature side heat transfer pipe group and a low temperature side pipe group each of which includes a plurality of inverted U-shaped heat transfer tubes, a tube plate that fixes the edges of a plurality of transfer tubes, a steam separator that separates the second recirculation coolant and steam, a water supply channel that supplies the secondary coolant into the pipe group sheath in a condition where the second recirculation coolant is isolated therefrom, a second recirculation coolant injection part located on the tube plate side of the pipe group sheath that injects the second recirculation coolant into the high temperature side heat transfer tube group, and a second water supply coolant injection part that injects the second water supply coolant supplied from the water supply channel into the low temperature side heat transfer tube group. The second recirculation coolant injection part and second water supply coolant injection part are regulated to maintain the relationship that the flow velocity of coolant with a relatively larger flow rate should be slower between the second recirculation coolant and second water supply coolant.
    • 要解决的问题:提供一种能够防止第二再循环冷却剂与从供应通道供应的二次冷却剂混合的蒸汽发生器,即使没有隔板。 解决方案:该蒸汽发生器包括以预定间隔布置在气缸部分的内壁上的管组护套,高温侧传热管组和低温侧管组,每个管组包括多个倒U 形状的传热管,固定多个转移管的边缘的管板,分离第二再循环冷却剂和蒸汽的蒸汽分离器,在第二再循环冷却剂和蒸汽中分离第二再循环冷却剂和蒸汽的供水通道, 所述第二再循环冷却剂与所述第二再循环冷却剂隔离,所述第二再循环冷却剂喷射部分位于所述管组护套的管板侧,将所述第二再循环冷却剂注入所述高温侧传热管组;以及第二供水冷却剂喷射部, 将从供水通道供应的第二供水冷却剂注入低温侧热传递 r管组。 调节第二再循环冷却剂喷射部分和第二供水冷却剂喷射部分以保持在第二再循环冷却剂和第二供水冷却剂之间具有相对较大流量的冷却剂的流速应较慢的关系。 版权所有(C)2013,JPO&INPIT
    • 7. 发明专利
    • Support structure for heat transfer tube
    • 热交换器支撑结构
    • JP2007271157A
    • 2007-10-18
    • JP2006096948
    • 2006-03-31
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • INOUE TOMOYUKIOGAWA NAOTERUHIRANO HIROSHISHIODA MASAO
    • F28F9/013F22B1/16F22B37/20G21D1/00
    • F28D7/06F22B1/162F22B37/204F28F9/0131
    • PROBLEM TO BE SOLVED: To provide a heat transfer tube support structure capable of preventing deterioration of reliability and durability of a heat transfer tube.
      SOLUTION: In a steam generator (a heat exchanger) having a lower part drum (a vessel), the heat transfer tubes 13 provided in the lower part drum, and tube support plates 25 provided in the lower part drum and opened with heat transfer tube insertion holes 26 in a thickness direction, support parts 27 receiving the heat transfer tubes 13 are provided in axial middle parts of the heat transfer tube insertion holes 26 in an inner face of the heat transfer tube insertion holes 26, and an area between the support part 27 and each opening end of the heat transfer tube insertion holes 26 is an inclined plane 28 heading toward radial outer sides of the heat transfer tube insertion holes 26 as each approaches an opening end side.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 解决的问题:提供能够防止传热管的可靠性和耐久性劣化的传热管支撑结构。 解决方案:在具有下部鼓(容器)的蒸汽发生器(热交换器)中,设置在下部鼓中的传热管13和设置在下部滚筒中的管支撑板25打开, 传热管插入孔26在厚度方向上,在传热管插入孔26的内表面上的传热管插入孔26的轴向中间部分设有容纳传热管13的支承部27, 在支撑部27与传热管插入孔26的各开口端之间,是分别接近开口端侧的朝向传热管插入孔26的径向外侧的倾斜面28。 版权所有(C)2008,JPO&INPIT