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1. 发明专利

JPS61186851A ACOUSTIC ANALYZING DEVICE 失效
公开(公告)号：JPS61186851A
公开(公告)日：1986-08-20
申请号：JP2672685
申请日：1985-02-14
申请人： JEOL LTD , NIPPON STEEL CORP
发明人： TAGUCHI ISAMU , TAGATA SHOJIRO
IPC分类号： G01N29/04 , G01N29/00 , G01N29/14
摘要： PURPOSE:To analyze the composition, crystalline property, etc., of a sample easily in a short time without polishing nor cleaning the surface of the sample by twisting the sample electromagnetically and detecting an acoustic wave generated by the sample at this time. CONSTITUTION:The sample 3 is formed in a rod shape and supported by support plates 2 and 5. Further, a coil 6 is provided at the periphery of the sample 3 supported by the support plate 5. Acoustic wave detectors 14a-14d are pro vided between the support plates 2 and 5. The coil 6 consists of two coils 6a and 6b, which are applied with electric power having a phase shift to give the sample 3 torque clockwise and counterclockwise. Then, the sample 3 generates the sound when applied with the torque and restoring itself by being released from the torque. This sound is detected by the acoustic wave detectors 14a-14d to analyze the composition, crystalline property, etc., of the sample by analyzing the frequency. Thus, the sample is twisted to generate the sound and an acoustic analysis is taken, so the sample is analyzed easily.

2. 发明专利

JPS6162850A Density analysis processing system for automatic multifunctional analyzer 失效
标题翻译：用于自动多功能分析仪的密度分析处理系统
公开(公告)号：JPS6162850A
公开(公告)日：1986-03-31
申请号：JP14892884
申请日：1984-07-18
申请人： Jeol Ltd , Nippon Steel Corp
发明人： TANAKA HIDEO , TAGATA SHOJIRO , SUZUMI JIYUN
IPC分类号： H01J37/252 , G01N23/225 , H01J37/22
CPC分类号： G01N23/2251
摘要： PURPOSE:To enable non-destructive analysis in a desired area, by outputting a color map image of density from various quantum signals generated from a sample with the irradiation of electron beams. CONSTITUTION:A concentration calculating section 31 calculates the density by weight about raw data of characteristic X rays, reflected electrons and the like by surface scanning. A density value comparative computation section 32 decides on foreign matters, precipitates, defects and the like according to given conditions about the density by weight. A level-wise sorting section 33 performs a level-wise sorting in a desired percentage division centered on the average density separately for each area. A color coding section 34 provides a color coding for display corresponding to each area thus sorted by level. A display control section 35 accomplishes a processing for indication on a color graphic display.
摘要翻译：目的：通过从电子束照射中从样品产生的各种量子信号中输出密度的色图图像，以实现所需区域的非破坏性分析。构成：浓度计算部31通过表面扫描计算关于特征X射线，反射电子等的原始数据的重量密度。密度值比较计算部32根据关于重量密度的给定条件来判定异物，析出物，缺陷等。逐级分选部分33以对于每个区域分别集中在平均密度上的所需百分比进行逐级排序。颜色编码部分34提供对应于按照级别排序的每个区域的显示的颜色编码。显示控制部分35完成在彩色图形显示器上的指示处理。

3. 发明专利

JPS6162849A Density curve analytical system of automatic multifunctional analyser 失效
标题翻译：自动多功能分析仪的密度曲线分析系统
公开(公告)号：JPS6162849A
公开(公告)日：1986-03-31
申请号：JP14892784
申请日：1984-07-18
申请人： Jeol Ltd , Nippon Steel Corp
发明人： TANAKA HIDEO , TAGATA SHOJIRO , SUZUMI JIYUN
IPC分类号： H01J37/252 , G01N23/225 , H01J37/22
CPC分类号： G01N23/2251
摘要： PURPOSE:To enable analysis in an arbitrary analytical area in a non-destructive state, by outputting a density color map image from various quantum signal generated from a specimen by the irradiation of an electron beam. CONSTITUTION:A density calculation part 31 performs plane scanning to calculate the wt. density of an element with respect to the raw data of characteristic X-rays or a reflected electron. A level classification processing part 32 divides, for example, wt. density into (n) equal parts between max. and min. densities and performs level classification processing centering around the average density so as to obtain arbitrary %-sections. A color classification processing part 33 performs the color classification processing of display corresponding to each section. A display control part 34 performs processing for displaying a map image on color graphic display according to the color classification.
摘要翻译：目的：通过从电子束的照射从样本产生的各种量子信号中输出浓度色图，可以在无损状态的任意分析区域进行分析。构成：密度计算部31进行平面扫描，计算重量。相对于特征X射线的原始数据或反射电子的元素的密度。水平分类处理部32例如分割重量。密度（n）最大值之间相等和最小以平均密度为中心进行水平分类处理，以获得任意的％分割。颜色分类处理部33进行与各部相对应的显示的颜色分类处理。显示控制部分34执行根据颜色分类在彩色图形显示上显示地图图像的处理。

4. 发明专利

JPH06290728A SPECIMEN COOLING APPARATUS FOR SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JPH06290728A
公开(公告)日：1994-10-18
申请号：JP7387193
申请日：1993-03-31
申请人： FINE CERAMICS CENTER , JEOL LTD
发明人： SUGAWARA YOSHIHIRO , ITOU WATARU , SASAKI YUKICHI , TAGATA SHOJIRO
IPC分类号： H01J37/20 , H01J37/28
摘要： PURPOSE:To provide a specimen cooling apparatus for a scanning electron microscope which can shift in a short time from specimen observation in normal temperature state, to specimen observation in cooled state. CONSTITUTION:A vacuum bellows 13 is attached to the chamber wall 16 of a specimen exchange chamber 3. A cooling medium transporting pipe 12 is led into the specimen exchange chamber 3 from the atmospheric side through a O-ring seal hole 17 formed in one end of the vacuum bellows 13. So as to shift specimen observation from its normal temperature state to its cooled state after the exchange of the specimen, a specimen holder 8 to which the cooling medium transporting pipe 12 is connected is installed in the specimen exchange chamber 13 and previous exhaust is carried out, and then the specimen holder 8 is transferred to a specimen conveying stage 2 by a specimen exchange rod 7 and the holder 8 is attached to the stage 2. The transfer is carried out in such a way that the cooling medium transporting pipe 12 moves through an O-ring seal hole 17. By carrying out the observation of a specimen 11 in this condition while a sluice valve 6 is being opened, the observation is shifted in a short time to cooled specimen observation without exposing the specimen chamber 1 to the atmosphere.

5. 发明专利

JPS63259949A SAMPLE ANALYZING DEVICE 失效
公开(公告)号：JPS63259949A
公开(公告)日：1988-10-27
申请号：JP9471587
申请日：1987-04-17
申请人： JEOL LTD
发明人： TAGATA SHOJIRO
IPC分类号： G01N23/225 , H01J37/22 , H01J37/252
摘要： PURPOSE:To simplify a display, by converting only a found out average characteristic X-ray intensity value into a weight concentration value to be displayed. CONSTITUTION:When an operator designates an element 1 by means of a keyboard so as to know the average concentration value in a region S relating to the element 1, an average concentration value calculation element designation unit 18 sends a signal for designating the element 1 to a write-read control part 10. The control part 10 reads only the characteristic X-ray intensity value data of a picture element contained in a region S in a picture memory region A1 to send them to an average intensity value calculation unit 12 for converting them into the weight concentration value to be displayed.

6. 发明专利

JPS6391947A X-RAY MICROANALYZER 失效
公开(公告)号：JPS6391947A
公开(公告)日：1988-04-22
申请号：JP23574386
申请日：1986-10-03
申请人： JEOL LTD
发明人： TAGATA SHOJIRO , MIYOKAWA TOSHIAKI , SAITO MASAKI , MATSUTANI MIYUKI
IPC分类号： G01N23/225 , G01N21/88 , G01N21/94 , G01N21/956 , H01J37/22 , H01J37/252 , H01L21/66
摘要： PURPOSE:To confirm positions of fine flaws, stuck fine grains, etc. on the sample surface to allow the X-ray analysis by radiating the laser light to the sample and forming a dark field image by the scattered light. CONSTITUTION:A helium-neon leser oscillator 16 is provided on an optical microscope performing the X-ray analysis by projecting an electron beam 1 to a sample 5 such as a wafer moved by a moving device 6. When the laser light from the oscillator 16 is radiated, the scattered light is generated by flaws, fine grains, etc. on the surface of the sample 5 to form a dark field image, and a luminescent spot is generated on an image pick-up device 15. The sample is moved via the device 6 so that this luminescent spot is located at the cross mark point of the device 15, and the electron beam is radiated, then positions of fine flaws and stuck fine grains on the sample surface are confirmed, and X-ray analysis can be performed.

7. 发明专利

JPH06231717A SAMPLE ANALYZING METHOD X-RAY MICROANALYZER 失效
公开(公告)号：JPH06231717A
公开(公告)日：1994-08-19
申请号：JP29633593
申请日：1993-11-26
申请人： JEOL LTD
发明人： TAGATA SHOJIRO
IPC分类号： G01N23/225 , H01J37/22 , H01J37/252
摘要： PURPOSE:To display a graph correlatively showing the attitude of frequency distribution of the characteristic X-ray intensities taken by picture elements of two elements in a noticeable area in a color mapping image. CONSTITUTION:As elements to be correlatively displayed, elements theta1 and theta2 are designated by a keyboard 7. The data for picture elements contained in a designated area S of the stored data of an image memory area A1 and the data for picture elements contained in the area S of the stored data of an image memory area A2 are transmitted to a correlative graphic data forming part 17. In the correlative graphic data forming part 17, the date for the i-th picture element contained in the area S stored in the image memory area A2 is proportionally converted into the Y-coordinate yi of the i-th display point, which is then transmitted to a display control part 20.

8. 发明专利

JPS63259950A SAMPLE ANALYZING DEVICE 失效
公开(公告)号：JPS63259950A
公开(公告)日：1988-10-27
申请号：JP9471687
申请日：1987-04-17
申请人： JEOL LTD
发明人： TAGATA SHOJIRO
IPC分类号： G01N23/225 , H01J37/22 , H01J37/252
摘要： PURPOSE:To make it possible to know uniformity of concentration by graphically displaying the frequency distribution of characteristic X-ray intensity taken by a picture element contained in a designated region. CONSTITUTION:In case an operator indicates excecution of correlative graphic display together with designation of a region, so as to simultaneously and correlatively know also the state of distribution of other elements, a function disignating unit 14 sends a control signal to a function selecting unit 15 to set it. The data of an picture element contained in a region S of the housed data in the picture memory regions A1 and A2 are sent to a correlative graphic data creating unit 17 through the function selecting unit 15 and the processed and created data are sent to a display control unit 20 to be displayed.

9. 发明专利

JPS63118643A SCANNING ELECTRON MICROSCOPE OR SIMILAR DEVICE FOR ATTAINING CRYSTAL AZIMUTH DISTRIBUTION IMAGE 失效
公开(公告)号：JPS63118643A
公开(公告)日：1988-05-23
申请号：JP26492586
申请日：1986-11-07
申请人： JEOL LTD
发明人： TAGATA SHOJIRO
IPC分类号： G01N23/207 , G01N23/225 , H01J37/22 , H01J37/28
摘要： PURPOSE:To check plural azimuth distribution images of crystal particles in a short period by making an electron beam incident on each picture element point on a sample surface while switching the angle of incidence and moving the sample surface to obtain a detection signal and comparing it with a reference value. CONSTITUTION:An electron beam 1 is deflected by coils 2 and 3 to obtain an electron beam 1', and this electron beam is projected to a sample 4. The angle formed between the electron beam 1' and the X direction is defined as an azimuth angle phi, and that between the electron beam 1 and the sample surface 4 is defined as an inclination angle theta. Three kinds of desired specific crystal azimuth (phia, thetaa, phib, thetab, phic, thetac) are set, and the electron beam 1' is projected to each picture element on the sample surface 4 while auccessively switched to these crystal azimuthal angles. The sample surface 4 is moved in X and Y directions and is scanned. The reflected electron beam from the sample surface 4 is detected by a detector 5, and the detection value is compared with the reference value to display distribution images of crystal particles having one azimuth and another on a CRT 14. Since the angle of incidence of the electric beam is automatically switched and the sample is moved two-dimensionally, distribution images of crystal particles are detected in a wide range with a high precision at a short period.

10. 发明专利

JPS6273546A ANALYZING DEVICE FOR NON-METAL INTERVENING MATERIAL 失效
公开(公告)号：JPS6273546A
公开(公告)日：1987-04-04
申请号：JP21419885
申请日：1985-09-26
申请人： JEOL LTD
发明人： TAGATA SHOJIRO
IPC分类号： G01N23/203 , H01J37/28
摘要： PURPOSE:To make automatic retrieval and free setting of the lattice intervals and the lattice point number possible, by radiating an electron beam to a sample in a manner of lattice points instead of using a glass plate with vertical and horizontal lattice lines according to JIS. CONSTITUTION:The measurement program in a floppy disk 17 is operated by the key board operation at a console 16, and a computer 12 issues an instruction. This instruction is converted into an analog signal by a D/A convertor 10, and X and Y direction scanning signals which have stepping saw tooth wave forms are sent to a scanning power supply 5. The numbers and the widths of the steps of the stepping saw tooth wave forms are previously set by the instruction from the floppy disk. The scanning power supply 5 lets the electron beam scan on the surface of a sample 7 by supplying deflection currents, which have wave forms analogous to the stepping saw tooth wave forms, to a scanning coil 3.

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