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1. 发明专利

JP2003249188A ELECTRON BEAM IRRADIATION EQUIPMENT AND ELECTRON BEAM IRRADIATION METHOD 审中-公开
公开(公告)号：JP2003249188A
公开(公告)日：2003-09-05
申请号：JP2002049258
申请日：2002-02-26
申请人： JEOL LTD , SONY CORP
发明人： NORIOKA SETSUO , MIYOKAWA TOSHIAKI , DATE NAOKI , SASAKI JUN , AKI YUICHI , MIURA YOSHIHISA
IPC分类号： G21K5/04 , A61N5/00 , G01N23/00 , G01Q30/02 , G01Q30/20 , G01T1/29 , G11B7/004 , G11B7/09 , G11B7/26 , G21G5/00 , H01J37/04 , H01J37/18 , H01J37/20 , H01J37/21 , H01J37/252 , H01J37/304 , H01J37/305
摘要： PROBLEM TO BE SOLVED: To realize highly precise recording by easily and correctly focusing electron beam corresponding to an original recording 1 in an electron beam irradiating equipment which records data with irradiation of the electron beam to the original recording 1. SOLUTION: A focusing stage 30, which is positioned alongside the original recording 1 and is equipped with a knife edge 134 and a Faraday cup 131, is arranged on a slide table 6 of a supporting mechanism 2 which supports the original recording 1. When recording, the electron beam first irradiates the focusing stage 30 for focusing, then the original recording 1 for recording. COPYRIGHT: (C)2003,JPO

2. 发明专利

JP2006260999A Electrode ring and electron microscope 审中-公开
标题翻译：电极环和电子显微镜
公开(公告)号：JP2006260999A
公开(公告)日：2006-09-28
申请号：JP2005078546
申请日：2005-03-18
申请人： Jeol Ltd , Sony Corp , ソニー株式会社 , 日本電子株式会社
发明人： MUTO KOICHI , MIURA YOSHIHISA , MIYOKAWA TOSHIAKI , KOIZUMI MITSURU
IPC分类号： H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide an electrode ring and an electron microscope capable of suppressing a variation in electric field distribution around the axial center of a hollow hole serving as a passage path of an electron beam and secondary electrons emitted from a sample.
SOLUTION: This electrode ring 1 disposed facing the sample 9 irradiated by the electron beam is provided with an insulating cylinder 5 wherein a first electrode 6 is formed on an end face facing the sample 9 and a second electrode 2 is formed on the other end surface and a cylindrical resistor 4 having the hollow hole 3 serving as the passage path of the electron beam with one end face connected with the first electrode 6 and the other end surface connected with the second electrode 2 and inserted in an insulating cylinder 5.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够抑制作为电子束的通路的中空孔的轴心周围的电场分布的变化的电极环和电子显微镜以及从样品发出的二次电子。解决方案：面对由电子束照射的样品9设置的电极环1设置有绝缘筒5，其中第一电极6形成在面向样品9的端面上，第二电极2形成在另一端面和圆筒形电阻器4，其具有作为电子束的通路的中空孔3，其一端面与第一电极6连接，另一端面与第二电极2连接并插入绝缘筒5中（C）2006年，JPO＆NCIPI

3. 发明专利

JPS628437A PARTICLE BEAM MICRO-ANALYZER 失效
公开(公告)号：JPS628437A
公开(公告)日：1987-01-16
申请号：JP14739385
申请日：1985-07-04
申请人： JEOL LTD
发明人： SAITO MASAKI , MIYOKAWA TOSHIAKI
IPC分类号： H01J37/22 , H01J37/252
摘要： PURPOSE:To facilitate focusing by arranging a marker member having light transmitting portion and blocking portion at the subject face position or optically equivalent position of objective lens. CONSTITUTION:When arranging a marker board 14 at the subject face of objective lens 11, cross image of markers 15a, 15b is focused on the image face S of objective lens 11. Upon matching of the surface of sample 4 and the image face S, the marker image is focused on the surface of sample under just focus state thus to enable observation of marker image and sample image. The imaging lens system comprising an objective lens 11 and an eye lens 12 is previously focused to the image face S of the objective lens 11, to move the sample 4 up and down along the optical axis while observing the marker image thus to most clarify the marker image on the sample and to arrange the sample at the position of the subject face S resulting in considerable facilitation of focusing.

4. 发明专利

JPH02132741A ELECTRON BEAM DEVICE 失效
公开(公告)号：JPH02132741A
公开(公告)日：1990-05-22
申请号：JP28527388
申请日：1988-11-11
申请人： JEOL LTD
发明人： NORIOKA SETSUO , MIYOKAWA TOSHIAKI
IPC分类号： H01J37/04 , H01J37/141 , H01J37/248
摘要： PURPOSE:To obtain a scan electron microscope image having high resolution and picture quality by controlling the excitation of an electron lens based on the signal showing the voltage applied to a first anode and the signal displaying the voltage applied to a second anode. CONSTITUTION:The means is provided which generates the signal showing the excitation quantity of an electron lens, needed to minimize a sample irradiation electron beam diameter based on the signal displaying the voltage applied to a first anode 2 and the signal showing the voltage applied to a second anode 3, and required to maximize a sample irradiation electron beam current value in the condition of the minimized diameter, and the excitation of the electron lens is controlled based on a signal generated. That is, a table is memorized in a memory 12, the table shows the excitation current value in a focusing lens 10, needed to minimize the sample irradiation electron beam diameter to the various set values of acceleration voltage Va, and required to maximize the sample irradiation electron beam current value in the condition of the minimized diameter. Consequently a scan electron microscope image having high resolution and picture quality can be obtained by even an unskilled operator.

5. 发明专利

JPH01159943A ELECTRON BEAM OPENING ANGLE CONTROL DEVICE IN ELECTRON MICROSCOPE 失效
公开(公告)号：JPH01159943A
公开(公告)日：1989-06-22
申请号：JP31720187
申请日：1987-12-15
申请人： JEOL LTD
发明人： MATSUTANI MIYUKI , MIYOKAWA TOSHIAKI
IPC分类号： H01J37/141 , H01J37/04
摘要： PURPOSE:To provide optimum open angle without replacing diaphragm in a wide range of probe current by furnishing three stages of focusing lenses whose focal distances can be changed independently in linkage with the probe current, and installing a diaphragm for open angle control ahead the main surface of the final stage focusing lens. CONSTITUTION:When the distance Z4 of a specimen from an objective lens 4 is varied, a command part 9 sends signal to an objective lens power supply 14 for focusing, and at the same time, sends a signal to a focusing lens interlock device 8 by reference to requisite probe current Ip, distance Z4, and acceleration voltage. When probe current Ip is given, the probe dia. d obtained on the specimen 5 shall be minimized, and therefore, signals are sent to No.1-No.3 focusing lens power supplies 11-13 from the focusing lens interlock device 8 so that the equation of probe dia. d differential with the open angle alpha5 of an electron probe for irradiation on the specimen 5 nullifies. Thereby the open angle alpha5 will be optimum value even with varying probe current Ip for constant acceleration voltage V and operating distance Z4, and change in the astigmatism generated in the focusing lenses 1-3 will be undistinctive.

6. 发明专利

JPS62241246A AUTOMATIC FOCUSING DEVICE OF OPTICAL MICROSCOPE FOR X-RAY MICROANALYZER OF THE LIKE 失效
公开(公告)号：JPS62241246A
公开(公告)日：1987-10-21
申请号：JP8388286
申请日：1986-04-11
申请人： JEOL LTD
发明人： SAITO MASAKI , MIYOKAWA TOSHIAKI
IPC分类号： H01J37/252 , G02B7/28 , H01J37/21
摘要： PURPOSE:To make it possible to perform automatic focusing regardless of a form of a sample surface by driving the sample stage in comparing the stored quantity of electricity with the signal obtained in detecting the marker image projected on the sample surface with a monitor camera. CONSTITUTION:A maker plate provided with a marker is arranged inside an optical microscope 20 to be used for an X-ray microanalyzer or the like, and the marker image is projected on a sample and the projected image is inputted to the monitor camera 21 through a reflection mirror or a semitransparent mirror. Then, the peak value or the like which changes corresponding to a focusing degree is obtained in detecting the image signal by the detection circuit 22 and it is stored in the CPU 23. Then, it is compared with a quantity of electricity which has been stored previously, and the output of comparison drives the stage through a motor 25 and adjusts the height of a sample. Accordingly, even when the sample surface is of mirror-like finish or the like on which contrast is hard to be formed, automatic focusing can be easily performed.

7. 发明专利

JP2000182558A SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JP2000182558A
公开(公告)日：2000-06-30
申请号：JP35622498
申请日：1998-12-15
申请人： JEOL LTD
发明人： MIYOKAWA TOSHIAKI
IPC分类号： H01J37/141 , H01J37/145 , H01J37/244 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of increasing detection efficiency of secondary electrons in a simple constitution. SOLUTION: A secondary electron detector 11 is placed on a composite object lens 1, the inner diameter of a lower magnetic pole 5 of a magnetic field type object lens 2 is made larger than that of an upper magnetic pole 4, and the inner diameter of an upper electrode 7 of a electrostatic type object lens 3 which comprises an upper electrode 7 of a ground potential and a lower electrode 8 of a negative potential is made larger than that of a lower electrode 8 of the lens 3.

8. 发明专利

JPH09312142A SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JPH09312142A
公开(公告)日：1997-12-02
申请号：JP12822196
申请日：1996-05-23
申请人： JEOL LTD
发明人： MIYOKAWA TOSHIAKI
IPC分类号： H01J37/153 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To obtain a scanning electron microscope with its superior operability capable of controlling a specified electronic optical system without excessively changing an input signal even at low magnification. SOLUTION: When adjusting the focus of an electron beam EB irradiated on a sample 13, that variation quantity is input to an input device 26. This input (x) is supplied to a CPU25, but a magnification M is already set for the CPU25. The CPU25 calculates X=(k/Mn ).x from the input variation quantity x and magnification M, where k and n denote device-specific constants. The CPU25 employs a variation quantity X obtained by calculation as a parameter variation quantity and supplies it to an object lens control circuit 21. The energizing strength of an object lens 12 is varied depending upon this parameter variation quantity X.

9. 发明专利

JPH08255589A SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JPH08255589A
公开(公告)日：1996-10-01
申请号：JP5719295
申请日：1995-03-16
申请人： JEOL LTD
发明人： MIYOKAWA TOSHIAKI
IPC分类号： H01J37/141 , H01J37/09 , H01J37/28
摘要： PURPOSE: To provide a scanning electron microscope allowing the application of a compact and inexpensive configuration, and having the good repeatability of an image point, even when an open angle control lens is adjusted. CONSTITUTION: The image point of an open angle control lens 14 is controlled so as to become an image point I1 under an objective lens 8. This lens 8 focuses an electron beam finely on a sample 9 after the convergence thereof through the lens 14. Also, the open angle α of an electron beam irradiated to the sample 9 is kept at an optimum value via the change of the excitation of the lens 14 and the shift of the image point of the lens 14 along an optical axis. Furthermore, the lens 14 is weakly excited and, therefore, the constitution element thereof can be made compact. Also, a magnetic material of low hysteresis such as permalloy can be used as a yoke material. Thus, the effect of hysteresis can be almost eliminated, and the repeatability of the image point I1 can be remarkably improved.

10. 发明专利

JPH07226180A ELECTRON BEAM DEVICE 失效
公开(公告)号：JPH07226180A
公开(公告)日：1995-08-22
申请号：JP1437894
申请日：1994-02-08
申请人： JEOL LTD
发明人： MIYOKAWA TOSHIAKI
IPC分类号： H01J37/141 , H01J37/244
摘要： PURPOSE:To provide an electron beam device by which detecting efficiency of a secondary electron is heightened and a secondary electron image of high image quality can be obtained. CONSTITUTION:An electric field based on voltage impressed on a front surface of a detector 22 is formed in the vicinity of an opening 21 of an inside magnetic pole 18. A secondary electron which is generated from a sample 14 by this electric field and proceeds upward while spirally moving in an objective lens 13, is bent in the detector 22 direction, and is made incident on a secondary electron detector 22, and is detected. The detecting signal is supplied to a cathode-ray tube 24 in synchronism with a scanning signal to a deflection coil 15 through an amplifier 23, and a secondary electron image in an optional area of the sample is displayed on the cathode-ray tube 24.

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