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    • 2. 发明专利
    • Method for producing oxide superconductor film having alleviated internal stress
    • 用于生产含有内部应力的氧化物超导体膜的方法
    • JP2012236744A
    • 2012-12-06
    • JP2011106931
    • 2011-05-12
    • Japan Steel Works Ltd:The株式会社日本製鋼所National Institute Of Advanced Industrial Science & Technology独立行政法人産業技術総合研究所
    • NAKAMURA TETSUSHIGEKITADA NORITAKASATO RYOSUKETERAO KATSUHIROSOMA MITSUGITSUCHIYA TETSUOTSUKADA KENICHIYAMAGUCHI IWAO
    • C30B29/22C01G1/00C30B1/04C30B31/20H01B12/06H01B13/00
    • Y02E40/642
    • PROBLEM TO BE SOLVED: To form a film of a superconductive material on a sapphire substrate having a film thickness of ≥300 nm by suppressing generation of a microcrack, and to provide a method for producing the same.SOLUTION: In this method for producing an oxide superconductive material, a superconductive thin film material which is epitaxially grown on a substrate is produced through: a step (1) of applying an organic compound solution of a metal whose oxide forms a superconductive material onto a substrate so as to be dried; a laser irradiation step (2) of photolyzing an organic component in the organic compound of the metal by an excimer laser which is ultraviolet light; a temporary calcining step (3) of thermally decomposing the organic component in the organic compound of the metal; and a glost firing step (4) of performing conversion into a superconductive material. In the method, before performing the glost firing step, laser irradiation is performed only to a predetermined spot to intermingle an a-axially grown precursor spot with a c-axially grown precursor spot in the superconductive material, and then the glost firing step is performed, and thus only the predetermined spot is c-axially grown, to thereby alleviate internal stress of the superconductive material.
    • 要解决的问题:通过抑制微裂纹的产生,在具有≥300nm的膜厚的蓝宝石衬底上形成超导材料的膜,并提供其制造方法。 解决方案:在该氧化物超导材料的制造方法中,通过以下步骤制造在衬底上外延生长的超导薄膜材料:(1)施加氧化物形成超导体的金属的有机化合物溶液 材料在基材上以便被干燥; 激光照射步骤(2),其通过紫外光的准分子激光将金属的有机化合物中的有机成分光解; 将金属的有机化合物中的有机成分热分解的临时烧成工序(3) 以及进行转换成超导材料的烧制步骤(4)。 在该方法中,在进行灼烧步骤之前,只对预定的点进行激光照射,以将超轴向生长的前体斑点与c轴向生长的前体斑点混合在超导材料中,然后进行釉面烧制步骤 ,因此只有预定点被c轴向生长,从而减轻超导材料的内应力。 版权所有(C)2013,JPO&INPIT
    • 3. 发明专利
    • Bilayer thin-film structure, trilayer thin-film structure containing superconductive substance, and manufacturing method therefor
    • 双层薄膜结构,含有超导材料的TRILAYER薄膜结构及其制造方法
    • JP2011038175A
    • 2011-02-24
    • JP2009188585
    • 2009-08-17
    • Japan Steel Works Ltd:TheNational Institute Of Advanced Industrial Science & Technology株式会社日本製鋼所独立行政法人産業技術総合研究所
    • SATO RYOSUKETERAO KATSUHIRONAKAMURA TETSUSHIGEEBISAWA TAKASHISOMA MITSUGITSUCHIYA TETSUOTSUKADA KENICHIYAMAGUCHI IWAO
    • C23C14/34H01B12/06H01B13/00
    • Y02E40/642
    • PROBLEM TO BE SOLVED: To provide an Al
      2 O
      3 -CeO
      2 bilayer thin-film structure which has a CeO
      2 layer having the lattice constant varied and can provide a superconductive film having a high critical current on the CeO
      2 face side by the effect of the CeO
      2 layer; an Al
      2 O
      3 -CeO
      2 -superconductive substance trilayer thin-film structure in which the superconductive film having the high critical current on the CeO
      2 face side has been formed by using the Al
      2 O
      3 -CeO
      2 bilayer thin-film structure and by utilizing the CeO
      2 layer having the lattice constant varied; and a manufacturing method therefor.
      SOLUTION: The Al
      2 O
      3 -CeO
      2 bilayer thin-film structure has CeO
      2 having the lattice constant of the CeO
      2 layer varied, which is formed by preparing a thin film structure having a CeO
      2 layer with a thickness of 20-300 nm on an Al
      2 O
      3 single crystal layer with a thickness of 0.4-1.0 mm and irradiating the thin film structure with a laserbeam having an energy density of 1 mJ/cm
      2 to 250 mJ/cm
      2 by 1,000-1,000,000 pulses. The Al
      2 O
      3 -CeO
      2 -superconductive substance trilayer thin-film structure has a superconductive thin-film with a thickness of 100-800 nm provided on the CeO
      2 layer side of the above Al
      2 O
      3 -CeO
      2 bilayer thin-film structure. The method for manufacturing the structures is disclosed.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了提供具有CeO 2 2 双层薄膜结构 具有晶格常数的> 2 层变化,并且可以通过CeO 2 SBS 2 的作用在CeO 2 SBB 2面上提供具有高临界电流的超导膜。 层; 其中在CeO上具有高临界电流的超导膜的导电物质三层薄膜结构的Al 2 3 -CeO 2 已经通过使用Al 2 3 -CeO 2 双层薄膜结构形成了 2 面侧, 通过利用晶格常数变化的CeO 2 层; 及其制造方法。 解决方案:Al 2 3 -CeO 2 双层薄膜结构具有CeO 2 具有 CeO 2 层的晶格常数变化,其通过在Al 2 O 3上制备厚度为20-300nm的具有CeO 2 S / SiO 2的薄膜结构而形成, SB> 2 > 3 单晶层,并用能量密度为1mJ / cm 2的激光束照射薄膜结构, / SP>至250mJ / cm 2 / SP> 1,000-1,000,000个脉冲。 超导材料三层薄膜结构具有厚度为100-800的超导薄膜,具有超导薄膜,其厚度为100-800 nm,在上述Al 2 SB 3薄膜的CeO 2 层侧上提供。 结构体。 公开了制造结构的方法。 版权所有(C)2011,JPO&INPIT
    • 4. 发明专利
    • Method of producing superconducting oxide material
    • 生产超导氧化物材料的方法
    • JP2009252641A
    • 2009-10-29
    • JP2008101536
    • 2008-04-09
    • Japan Steel Works Ltd:TheNational Institute Of Advanced Industrial & Technology株式会社日本製鋼所独立行政法人産業技術総合研究所
    • NAKAMURA TETSUSHIGESATO RYOSUKEKOYANAGI KUNIHIKOEBISAWA TAKASHIOTSU HIDEHIKOSOMA MITSUGITSUCHIYA TETSUOKUMAGAI TOSHIYATSUKADA KENICHI
    • H01B13/00C01G1/00C01G3/00H01L39/24
    • PROBLEM TO BE SOLVED: To provide a method of producing a superconducting oxide material that achieves the same effect as that obtained by back irradiation even when forming a thinner film by overglazing without limiting laser irradiation conditions and even when forming films on both sides of a substrate.
      SOLUTION: The method of producing an epitaxially grown superconducting coating material includes: a process (1) of applying a solution of metallic organic compound having an oxide for forming a superconducting material onto the substrate and drying it; a provisional firing process (2) of pyrolizing an organic matter in the metallic organic compound; and a full-scale firing process (3) of performing conversion into a superconducting material, wherein, when a laser is irradiated between the processes (1) and (2), a scattering mechanism is disposed immediately before a surface coated with the solution of metallic organic compound where the superconducting material is formed, and a laser, after being once scattered, is irradiated to the organic compound solution.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种制造超导氧化物材料的方法,即使在不限制激光照射条件的情况下甚至当在两侧形成膜时,通过过度玻璃形成较薄的膜也能获得与通过反向照射获得的效果相同的效果 的基底。 解决方案:制备外延生长的超导涂层材料的方法包括:将具有用于形成超导材料的氧化物的金属有机化合物溶液施加到基底上并干燥的方法(1) 对金属有机化合物中的有机物进行热处理的暂时烧制工序(2) 以及进行超导材料的转换的全尺寸焙烧工序(3),其中,当在工序(1)和(2)之间照射激光时,散射机构紧接在被涂覆有 其中形成超导材料的金属有机化合物和被一次散射的激光照射到有机化合物溶液上。 版权所有(C)2010,JPO&INPIT