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    • 1. 发明专利
    • Method of producing superconducting oxide material
    • 生产超导氧化物材料的方法
    • JP2009252641A
    • 2009-10-29
    • JP2008101536
    • 2008-04-09
    • Japan Steel Works Ltd:TheNational Institute Of Advanced Industrial & Technology株式会社日本製鋼所独立行政法人産業技術総合研究所
    • NAKAMURA TETSUSHIGESATO RYOSUKEKOYANAGI KUNIHIKOEBISAWA TAKASHIOTSU HIDEHIKOSOMA MITSUGITSUCHIYA TETSUOKUMAGAI TOSHIYATSUKADA KENICHI
    • H01B13/00C01G1/00C01G3/00H01L39/24
    • PROBLEM TO BE SOLVED: To provide a method of producing a superconducting oxide material that achieves the same effect as that obtained by back irradiation even when forming a thinner film by overglazing without limiting laser irradiation conditions and even when forming films on both sides of a substrate.
      SOLUTION: The method of producing an epitaxially grown superconducting coating material includes: a process (1) of applying a solution of metallic organic compound having an oxide for forming a superconducting material onto the substrate and drying it; a provisional firing process (2) of pyrolizing an organic matter in the metallic organic compound; and a full-scale firing process (3) of performing conversion into a superconducting material, wherein, when a laser is irradiated between the processes (1) and (2), a scattering mechanism is disposed immediately before a surface coated with the solution of metallic organic compound where the superconducting material is formed, and a laser, after being once scattered, is irradiated to the organic compound solution.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种制造超导氧化物材料的方法,即使在不限制激光照射条件的情况下甚至当在两侧形成膜时,通过过度玻璃形成较薄的膜也能获得与通过反向照射获得的效果相同的效果 的基底。 解决方案:制备外延生长的超导涂层材料的方法包括:将具有用于形成超导材料的氧化物的金属有机化合物溶液施加到基底上并干燥的方法(1) 对金属有机化合物中的有机物进行热处理的暂时烧制工序(2) 以及进行超导材料的转换的全尺寸焙烧工序(3),其中,当在工序(1)和(2)之间照射激光时,散射机构紧接在被涂覆有 其中形成超导材料的金属有机化合物和被一次散射的激光照射到有机化合物溶液上。 版权所有(C)2010,JPO&INPIT
    • 4. 发明专利
    • Bilayer thin-film structure, trilayer thin-film structure containing superconductive substance, and manufacturing method therefor
    • 双层薄膜结构,含有超导材料的TRILAYER薄膜结构及其制造方法
    • JP2011038175A
    • 2011-02-24
    • JP2009188585
    • 2009-08-17
    • Japan Steel Works Ltd:TheNational Institute Of Advanced Industrial Science & Technology株式会社日本製鋼所独立行政法人産業技術総合研究所
    • SATO RYOSUKETERAO KATSUHIRONAKAMURA TETSUSHIGEEBISAWA TAKASHISOMA MITSUGITSUCHIYA TETSUOTSUKADA KENICHIYAMAGUCHI IWAO
    • C23C14/34H01B12/06H01B13/00
    • Y02E40/642
    • PROBLEM TO BE SOLVED: To provide an Al
      2 O
      3 -CeO
      2 bilayer thin-film structure which has a CeO
      2 layer having the lattice constant varied and can provide a superconductive film having a high critical current on the CeO
      2 face side by the effect of the CeO
      2 layer; an Al
      2 O
      3 -CeO
      2 -superconductive substance trilayer thin-film structure in which the superconductive film having the high critical current on the CeO
      2 face side has been formed by using the Al
      2 O
      3 -CeO
      2 bilayer thin-film structure and by utilizing the CeO
      2 layer having the lattice constant varied; and a manufacturing method therefor.
      SOLUTION: The Al
      2 O
      3 -CeO
      2 bilayer thin-film structure has CeO
      2 having the lattice constant of the CeO
      2 layer varied, which is formed by preparing a thin film structure having a CeO
      2 layer with a thickness of 20-300 nm on an Al
      2 O
      3 single crystal layer with a thickness of 0.4-1.0 mm and irradiating the thin film structure with a laserbeam having an energy density of 1 mJ/cm
      2 to 250 mJ/cm
      2 by 1,000-1,000,000 pulses. The Al
      2 O
      3 -CeO
      2 -superconductive substance trilayer thin-film structure has a superconductive thin-film with a thickness of 100-800 nm provided on the CeO
      2 layer side of the above Al
      2 O
      3 -CeO
      2 bilayer thin-film structure. The method for manufacturing the structures is disclosed.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了提供具有CeO 2 2 双层薄膜结构 具有晶格常数的> 2 层变化,并且可以通过CeO 2 SBS 2 的作用在CeO 2 SBB 2面上提供具有高临界电流的超导膜。 层; 其中在CeO上具有高临界电流的超导膜的导电物质三层薄膜结构的Al 2 3 -CeO 2 已经通过使用Al 2 3 -CeO 2 双层薄膜结构形成了 2 面侧, 通过利用晶格常数变化的CeO 2 层; 及其制造方法。 解决方案:Al 2 3 -CeO 2 双层薄膜结构具有CeO 2 具有 CeO 2 层的晶格常数变化,其通过在Al 2 O 3上制备厚度为20-300nm的具有CeO 2 S / SiO 2的薄膜结构而形成, SB> 2 > 3 单晶层,并用能量密度为1mJ / cm 2的激光束照射薄膜结构, / SP>至250mJ / cm 2 / SP> 1,000-1,000,000个脉冲。 超导材料三层薄膜结构具有厚度为100-800的超导薄膜,具有超导薄膜,其厚度为100-800 nm,在上述Al 2 SB 3薄膜的CeO 2 层侧上提供。 结构体。 公开了制造结构的方法。 版权所有(C)2011,JPO&INPIT
    • 5. 发明专利
    • Laser beam irradiation method and apparatus
    • 激光束辐射方法和装置
    • JP2010036236A
    • 2010-02-18
    • JP2008205098
    • 2008-08-08
    • Japan Steel Works Ltd:The株式会社日本製鋼所
    • NAKAMURA TETSUSHIGESATO RYOSUKEKOYANAGI KUNIHIKOTERAO KATSUHIROEBISAWA TAKASHIOTSU HIDEHIKO
    • B23K26/00B23K26/04B23K26/073B23K26/08H01L21/268H01L21/31
    • PROBLEM TO BE SOLVED: To provide a laser beam irradiation method and apparatus, which can perform uniform machining by eliminating adverse effects of heat when a photolytic reaction is caused on a substrate by laser beam irradiation. SOLUTION: In the laser beam irradiation method, the photolytic reaction is caused by irradiating a raw film precursor formed on the substrate with a laser beam in producing a thin film on the substrate. The laser beam is radiated while the substrate is rotated in the planar direction and is moved along the planar direction relative to a position to be irradiated with the laser beam. The irradiation apparatus includes a supporting section which supports the substrate on which the raw film is formed, a rotating mechanism which rotates the substrate, a moving mechanism which moves the substrate along the planar direction, a laser beam irradiation means which irradiates the substrate with the laser beam, and a controlling section which causes the photolytic reaction on the raw film by irradiating the substrate with the laser beam by the laser beam irradiation means while the substrate is rotated in the planar direction by the rotating mechanism and is moved relatively along the planar direction by the moving mechanism. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种激光束照射方法和装置,其可以通过在激光束照射下在基板上引起光解反应时消除热的不利影响而进行均匀的加工。 解决方案:在激光束照射方法中,通过用激光束照射形成在基板上的原料膜前驱物在基板上产生薄膜而引起光解反应。 激光束在基板沿平面方向旋转时被辐射并且相对于要被激光束照射的位置沿平面方向移动。 照射装置包括:支撑部,其支撑形成有原料膜的基板;旋转基板的旋转机构;沿着平面方向移动基板的移动机构;激光束照射装置, 激光束,以及控制部,其通过激光束照射装置在激光束照射基板的同时通过旋转机构在平面方向上旋转而沿着平面方向相对移动而在原料膜上引起光解反应, 方向由移动机构。 版权所有(C)2010,JPO&INPIT
    • 8. 发明专利
    • Plasma processing method and processing device
    • 等离子体处理方法和处理装置
    • JP2012142324A
    • 2012-07-26
    • JP2010291972
    • 2010-12-28
    • Japan Steel Works Ltd:The株式会社日本製鋼所
    • TORAMARU MASAMITSUEBISAWA TAKASHIYONEUCHI TOSHIFUMIODAJIMA TAMOTSU
    • H01L21/205C23C16/24
    • PROBLEM TO BE SOLVED: To provide a plasma processing method and processing device capable of efficiently producing a film-forming seed, and forming a high quality thin film.SOLUTION: A plasma processing device comprises a reaction chamber 1 storing processed body 3 and forming a thin film on the processed body 3; a stage 4 disposed in the reaction chamber 1, and holding the processed body 3; a first gas supplying portion 10 for supplying first gas into the reaction chamber 1; a second gas supplying portion 14 for supplying second gas different from the first gas into the reaction chamber 1; and a high frequency plasma source 7 for generating high frequency discharge in the reaction chamber 1. In the reaction chamber 1, the first gas plasmatized by the high frequency discharge, and the second gas suppressing plasmatization are contacted with each other to cause decomposition reaction, and on the basis of the decomposition reaction, a thin film is formed on the processed body 3 held on the stage 4.
    • 要解决的问题:提供能够有效地生产成膜种子并形成高质量薄膜的等离子体处理方法和处理装置。 解决方案:等离子体处理装置包括:反应室1,储存处理体3并在处理体3上形成薄膜; 设置在反应室1中的台架4,并且保持处理体3; 用于将第一气体供应到反应室1中的第一气体供应部分10; 用于将不同于第一气体的第二气体供给到反应室1中的第二气体供给部14; 以及用于在反应室1中产生高频放电的高频等离子体源7.在反应室1中,通过高频放电等离子体化的第一气体和第二气体抑制等离子体化相互接触引起分解反应, 并且在分解反应的基础上,在保持在载物台4上的加工体3上形成薄膜。(C)2012,JPO&INPIT
    • 9. 发明专利
    • Semiconductor thin film substrate, and method of manufacturing semiconductor crystal thin film
    • 半导体薄膜基板及制造半导体晶体薄膜的方法
    • JP2010238897A
    • 2010-10-21
    • JP2009084972
    • 2009-03-31
    • Japan Steel Works Ltd:The株式会社日本製鋼所
    • TAKAHASHI MASASHIEBISAWA TAKASHI
    • H01L21/20H01L21/336H01L29/786
    • PROBLEM TO BE SOLVED: To prevent protrusions from being formed on the surface of a crystal thin film during crystallizing an amorphous thin film by melt heating.
      SOLUTION: During crystallization by the melt heating, a buffer layer 3 buffering the volume change of the amorphous thin film 4 when crystallized by being melt at least its surface side and solidified is provided below the thin film 4. By merely adding one simple step of forming the buffer layer, the height of protrusions of the crystallized thin film can be sufficiently low in crystallization, resulting in a sufficiently thin insulating film. Furthermore, it is not necessary to introduce useless steps of such as polishing and etching when the protrusions are formed, thereby, enabling to achieve effects of such as prevention of the occurrence of contamination, improvement of the yield, and improvement of manufacturing efficiency.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了防止在通过熔融加热使无定形薄膜结晶期间在晶体薄膜的表面上形成突起。 解决方案:在通过熔融加热结晶期间,缓冲层3缓冲非晶薄膜4的体积变化,当通过至少熔化至少其表面侧并固化而结晶化时,设置在薄膜4的下方。通过仅添加一个 形成缓冲层的简单步骤,结晶化薄膜的突起的高度可以足够低的结晶化,从而形成足够薄的绝缘膜。 此外,当形成突起时,不需要引入诸如抛光和蚀刻的无用步骤,从而能够实现防止污染发生,提高产量和提高制造效率的效果。 版权所有(C)2011,JPO&INPIT