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    • 1. 发明专利
    • SEMICONDUCTOR MEMORY DEVICE
    • JPH06334147A
    • 1994-12-02
    • JP11813093
    • 1993-05-20
    • HITACHI LTDHITACHI VLSI ENG
    • YOSHIDA MASAHIRO
    • H01L27/10H01L27/105H01L27/108H01L29/784
    • PURPOSE:To make a memory cell region and a peripheral-circuit formation region flat while the high operating characteristic of a memory cell for a high- integration and large-capacity DRAM is being maintained. CONSTITUTION:The main face of a substrate 1 constituting a semiconductor chip is divided into a first element formation region to a fourth element formation region S1 to S4. The first and third element formation regions S1, S3 out of them are used as formation regions for ordinary planar transistors, a tall element which constitutes a memory cell array 11 is formed in the region S1, and an element which constitutes a peripheral circuit 13 such as a control circuit, a clock generation circuit or the like is formed in the region S3. SOI structures are formed respectively of silicon oxide films 2B, 2D and silicon thin films 3B, 3D in the second and fourth element formation regions S2, S4, an element which constitutes peripheral circuits (a driver, a sense amplifier, a decoder and the like) which is of a simple MOS structure and whose height is low is formed in the region S2, and an element which constitutes a substrate- bias generation circuit generating a substrate-bias voltage is formed in the region S4.
    • 2. 发明专利
    • MEMORY TESTER
    • JPH06148283A
    • 1994-05-27
    • JP29405992
    • 1992-11-02
    • HITACHI LTDHITACHI VLSI ENG
    • YOSHIDA MASAHIROKITAME TETSUYA
    • G01R31/3183G01R31/28H01L21/66
    • PURPOSE:To set a register while looking a screen by visually displaying the address scanning range of an indicated memory evaluation pattern and to dispense with the correction of a program at each time of alteration. CONSTITUTION:The address scanning range necessary for a display screen 130 is indicated and a window control part 90 develops a screen address on a chip address. The screen address is converted to the register of a pattern program by an inverse address scrambler 80 to be stored. Further, a main program is started to compile the pattern program and a pattern generator 60 generates the test pattern to a device DUT 40 to be measured. Logical data and timing are synthesized to form a test waveform to measure the DUT 40. The generated address of the generator 60 is converted to the address matched with the cell arrangement in a memory to be measured and this address is converted to a display screen address by the window control part 90 and the fail bit map of the memory is displayed to evaluate the DUT 40.