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    • 9. 发明专利
    • ELECTRIC CHARACTERISTIC ANALYZER
    • JPH10214584A
    • 1998-08-11
    • JP1818497
    • 1997-01-31
    • HITACHI LTD
    • TANAKA SHIGERUTAKAHASHI KENYAMADA SEIICHISHOJI MORITAKA
    • G01N23/22H01J37/20H01J37/244H01J37/28
    • PROBLEM TO BE SOLVED: To specify an arbitrary position of a sample and achieve measurement of electric characteristics of the sample at the arbitrary position without any sample machining by using a sample stage provided with at least two metallic micro probes, which can be moved at a predetermined pitch in X-, Y- and Z-directions, and a scanning electron microscope capable of confirming the surface of the sample and the tip of the micro probe. SOLUTION: Micro probes 2 and a sample holder fixed to various lead wires are placed on a sample stage 4 of a scanning electron microscope(SEM). A ceramics sample having an appropriate size is stuck to the sample holder, and then, the micro probes 2 are visually moved near the surface of the sample. Thereafter, the SEM is vacuum-exhausted, thus generating an electron beam. In work for confirming the sample and the tip of the micro probe 2, PZT ceramic 3 (driving element of the micro probe) is driven to finely adjust the micro probe 2 in an arbitrary position after determination of an observed region. Consequently, it is possible to grasp electric properties of the arbitrary fine region in the sample.
    • 10. 发明专利
    • PRODUCTION OF CERAMIC LINEAR RESISTOR
    • JPH1036168A
    • 1998-02-10
    • JP19457496
    • 1996-07-24
    • HITACHI LTDJAPAN RES DEV CORP
    • MOTOWAKI NARIHISATAKAHASHI KENTANAKA SHIGERUMAEDA KUNIHIRO
    • C04B35/453H01C7/10
    • PROBLEM TO BE SOLVED: To obtain a ceramic linear resistor aiming at a highly withstanding property by blending specific four components and burning the mixture, and a breaker stably functioning up to a high temperature by using the highly withstanding ceramic linear resistor. SOLUTION: This ceramic linear resistor is obtained by blending 68-90mol% Zn based on ZnO, 5-20mol% Al based on Al2 O3 , 3-10mol% Mg based on MgO and >=1mol% at least one of ZnAl2 O4 and MgAl2 O4 , and sintering the mixture. A resistor element 1 obtained by inserting an insulating rod 2 into an insulating tube 3, is housed in a resistor unit 4 of a breaker shown in the figure, and a bushing 10 for protecting an electric circuit is installed therein. By air from an air tank 9, a piston 7 for opening and closing operations is actuated, main contact points 6a, 6b for turning on electricity are opened for applying the electricity to the resistor unit 4 connected in parallel, and rear resisting contact points 5a, 5b are opened to complete a breaking function. A turning on function is to close the resistor contacting points 5a, 5b by the piston 7 for the opening and closing operations, turn on the electricity to the resistor unit 4 and close the main contacting points 6a, 6b.