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1. 发明专利

JP2001127042A METHOD OF ETCHING SILICON 失效
公开(公告)号：JP2001127042A
公开(公告)日：2001-05-11
申请号：JP30582199
申请日：1999-10-27
申请人： HITACHI LTD , HITACHI KASADO ENG CO LTD , HITACHI TECHNO ENG
发明人： KUWABARA KENICHI , SHIMADA TAKESHI , YAMAMOTO NAOHIRO , KIKKAI MOTOHIKO , SAKAGUCHI MASAMICHI , YASUNAMI HISAO , ISHIMARU KATSUHISA
IPC分类号： H01L21/302 , C23F4/00 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a process by which stable productivity can be obtained by reducing aged change of etching property, in the etching of silicon. SOLUTION: In an etching method for silicon using the plasma of chlorine gas, the out gas ratio within the plasma is reduced by adding gas having the same components as the gas being discharged as the out gas from the surface of the part within an etching chamber to the chlorine gas.

2. 发明专利

JP2001085399A PLASMA TREATMENT APPARATUS 失效
公开(公告)号：JP2001085399A
公开(公告)日：2001-03-30
申请号：JP25823399
申请日：1999-09-13
申请人： HITACHI LTD , HITACHI KASADO ENG CO LTD
发明人： FURUSE MUNEO , NAWATA MAKOTO , KAZUMI HIDEYUKI , SAKAGUCHI MASAMICHI , KUWABARA KENICHI
IPC分类号： H01L21/302 , C23F4/00 , H01L21/3065 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To uniformize the etching rate distribution in the plane of a wafer by setting the distance between the supply of high frequencies and the wafer to be subject to processing, such as etching, to an integral multiples of λ/2, where λ is the wavelength of high frequency used, in a plasma treatment apparatus. SOLUTION: In a plasma treatment apparatus, the distance between the lower face of a quartz plate 3 to a wafer 10 to be subjected to a processing such as etching is set to an integral multiples of λ/2, where λ is the wavelength of microwave supplied from a magnetron 1. Thereby, the in-plane etching rate distribution of the wafer 10 to be subjected to a processing such as etching can be uniformized.

3. 发明专利

JPH08152234A METHOD AND EQUIPMENT FOR REPLACING OIL IN REFRIGERATING MACHINE 失效
公开(公告)号：JPH08152234A
公开(公告)日：1996-06-11
申请号：JP29618994
申请日：1994-11-30
申请人： HITACHI LTD
发明人： KUWABARA KENICHI , SUZUKI HARUO , ISHIMOTO MASAKI , MURAMOTO SHUJI
IPC分类号： F25B45/00
摘要： PURPOSE: To obtain a method for executing an operation for replacement of oil while operating a refrigerating machine in an ordinary manner, without collecting a refrigerant outside the machine, when the replacement of the oil inside the machine is necessary, and to obtain equipment for replacement of the oil which is used for the operation. CONSTITUTION: Regarding a method for replacing oil in a refrigerating machine wherein a refrigerating cycle is constructed by having an evaporator 1, a condenser 3 and a compressor 2 having an oil tank 2b, first the oil in the oil tank 2b of the compressor is replaced, the refrigerating machine is then operated and a process wherein part of a refrigerant in the evaporator 1 is led to a refrigerant collecting device 4 and the oil melting in the refrigerant is separated by a heating means 5, a process wherein the refrigerant wherefrom the oil is separated by the heating means 5 is restored to the evaporator 1, a process wherein the separated oil is discharged outside the machine and a process wherein fresh oil for replacement is supplied to the oil tank 2b of the compressor in accordance with the quantity of the discharged oil are performed in the course of the operation of the refrigerating machine.

4. 发明专利

JPH0278451A PURGE UNIT EQUIPPED WITH OIL RISE PREVENTING MECHANISM 失效
公开(公告)号：JPH0278451A
公开(公告)日：1990-03-19
申请号：JP22873188
申请日：1988-09-14
申请人： HITACHI LTD
发明人： KUWABARA KENICHI
IPC分类号： B03C3/00
摘要： PURPOSE:To electrically prevent rise of oil mist by imparting electric charge to oil by an electrode of the bottom part of an oil tank and covering the outer periphery of an eliminator by the electrodes which are oppositely arranged while pinching an insulator therewith and imparting electric potential to oil mist. CONSTITUTION:The inlet holes 2, 3 of exhaust gas and oil are provided to an oil tank 1 and also an oil pump 9 is provided to the lower part of the oil tank 1 and an extraction pump 8 is provided to the upper part thereof and the inlet aperture of the extraction pump 8 is surrounded by an eliminator 7. Electric charge is imparted to oil of the bottom part of the oil tank 1 by both a power source device 10 and an electrode 11 and also the outer periphery of the eliminator 7 is covered with the electrodes 4, 6 which are oppositely arranged while pinching an insulator 5 therewith and electric potential is imparted to oil mist by a power source device 12. As a result, rise of oil mist can be electrically prevented.

5. 发明专利

JP2002032438A METHOD AND SYSTEM FOR ENERGY SERVICE BUSINESS 失效
公开(公告)号：JP2002032438A
公开(公告)日：2002-01-31
申请号：JP2000214142
申请日：2000-07-14
申请人： HITACHI LTD
发明人： SAKAUCHI MASAAKI , CHIBA JUNICHI , KUWABARA KENICHI , KAMO SADAICHI
IPC分类号： G06Q50/00 , G06Q50/06 , H02J3/00 , G06F17/60
摘要： PROBLEM TO BE SOLVED: To make it easy to take energy-saving countermeasures. SOLUTION: An energy service provider bears the cost to take the energy saving countermeasures for object facilities, measures the energy consumption after the energy-saving countermeasures are taken, and compares the measured value with energy consumption before the energy-saving countermeasures stored previously in a database to calculate the reduction amount of the energy cost, and receives at least part of the reduction amount, so the customer need not invest for facilities for energy-saving facilities and need not plan for its collection, so that it becomes easy to introduce the energy-saving countermeasures.

6. 发明专利

JP2000310452A TURBO REFRIGERATOR 失效
公开(公告)号：JP2000310452A
公开(公告)日：2000-11-07
申请号：JP11932499
申请日：1999-04-27
申请人： HITACHI LTD
发明人： KUWABARA KENICHI , URAKI YASUO
IPC分类号： F25B1/053
摘要： PROBLEM TO BE SOLVED: To provide a turbo refrigerator capable of prolonging a lifetime and stably operating by avoiding a fault or an accident even in the case of a low cooling water inlet temperature or a lowered evaporating pressure. SOLUTION: The turbo refrigerator for capacity controlling by an evaporator 1, a condenser 2, a turbo compressor 3 and an inlet guide vane 4 provided at an inlet of the compressor 3 comprises a temperature detecting means 8 provided at a cooling water inlet of the condenser 2, and a controller for controlling an opening of the vane 4 in response to a temperature signal of cooling water detected by the means 8.

7. 发明专利

JP2000074506A Compression refrigerating machine with built-in motor 审中-公开
标题翻译：具有内置电机的压缩式制冷机
公开(公告)号：JP2000074506A
公开(公告)日：2000-03-14
申请号：JP23972798
申请日：1998-08-26
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： NAKAGAWA KOJI , URAKI YASUO , TERASAKI MASATOSHI , KUWABARA KENICHI
IPC分类号： F25B1/00
CPC分类号： F25B2341/0011 , F25B2341/0013
摘要： PROBLEM TO BE SOLVED: To reduce the energy loss of a compression refrigerating machine with built-in motor caused when the rotor of the built-in motor or a gear stirs a refrigerant atmosphere by reducing the pressure in the motor or gear chamber by sucking a refrigerant staying in the motor or gear chamber.
SOLUTION: A compression refrigerating machine with built-in motor is provided with a motor 1, a motor chamber 3, a gear 4, a gear chamber 4, a compressor 6, a condenser 7, an evaporator 8, and pipelines connecting the compressor 6, condenser 7, and evaporator 8 to each other. In the refrigerating machine, a liquid ejector 9 is installed to the pipeline of a liquid refrigerant flowing to the evaporator 8 from the condenser 7 and the motor chamber 3 and gear chamber 5 are connected to the sucking section of the ejector 9 so as to reduce the pressure in either one or both of the chambers 3 and 5 by sucking the refrigerant staying in either one or both of the chambers 3 and 5.
COPYRIGHT: (C)2000,JPO
摘要翻译：要解决的问题：为了降低内置电机的压缩制冷机的能量损失，当内置电机或齿轮的转子通过吸入电机或齿轮室中的压力来降低制冷剂气氛时，制冷剂停留在电机或齿轮室中。解决方案：具有内置电动机的压缩式制冷机具有电动机1，电动机室3，齿轮4，齿轮室4，压缩机6，冷凝器7，蒸发器8和连接压缩机6的管路，冷凝器7和蒸发器8。在制冷机中，将液体喷射器9安装在从冷凝器7流向蒸发器8的液体制冷剂的管路上，马达室3和齿轮室5与喷射器9的吸引部连接，从而减少通过吸入停留在腔室3和5中的一个或两个中的制冷剂，腔室3和5中的一个或两个的压力。

8. 发明专利

JPH11166770A TURBO REFRIGERATING MACHINE 失效
公开(公告)号：JPH11166770A
公开(公告)日：1999-06-22
申请号：JP33265797
申请日：1997-12-03
申请人： HITACHI LTD
发明人： KUWABARA KENICHI , URAKI YASUO , FURUSAWA SHINPEI
IPC分类号： F25B1/00 , F25B1/053
摘要： PROBLEM TO BE SOLVED: To obtain a turbo refrigerating machine having a plurality of compressors in which the bearing of the speed increasing gear of the compressor is protected against seizure. SOLUTION: A turbo refrigerating machine comprises an evaporator, a condenser, a plurality of compressors, motors for driving the compressors, and a first Venturi drive piping system circulating the lubricant in the oil tank of the compressor through a Venturi. The turbo refrigerating machine further comprises piping systems 301, 302 for coupling a second Venturi drive piping systems 8, 58 circulating the lubricant in the oil tanks 3, 53 of compressors through Venturi 9, 59 with the negative pressure side of a Venturi inserted into the second Venturi drive piping system from the oil tank of one compressor to the other compressor, and on/off valves 10, 60 in the piping systems 301, 302.

9. 发明专利

JPH1123094A WATER HEAT SOURCE HEAT PUMP 失效
公开(公告)号：JPH1123094A
公开(公告)日：1999-01-26
申请号：JP17838097
申请日：1997-07-03
申请人： HITACHI LTD
发明人： NAKAGAWA KOJI , KEMI YUICHI , URAKI YASUO , KUWABARA KENICHI , TERASAKI MASATOSHI
IPC分类号： F25B19/00 , F25B27/00 , F25B27/02
摘要： PROBLEM TO BE SOLVED: To make use of the heat energy that heat source such as municipal sewerage or the like has, with a device excellent in maintainability, and further, making use of the hot water or water made of evaporated or recondensed heat source water as water resources. SOLUTION: Heat source water is evaporated directly into a refrigerant by an evaporator 2, and after compression with a compressor 1, its heat is exchanged with that of the hot water with a condenser 6. Furthermore, the condensed heat source water produced here is accumulated in a reservoir tank 7 prior to utilization. The ceiling faces of the evaporator 2 and the reservoir tank 7 are made 10 m or more higher than the water level of the heat source water, and the dirty heat source water is supplied and evaporated by only the suction of a pump 5, whereby the removal of the dirt, etc., by the heat source water becomes easy. Moreover, for the compressor, a centrifugal compressor not using oil as a lubricant is used to prevent the pollution by oil of the water resources being accumulated in a water reservoir tank 7 prior to utilization.

10. 发明专利

JPH10176873A HEAT PUMP DEVICE AND CONTROL METHOD THEREFOR 失效
公开(公告)号：JPH10176873A
公开(公告)日：1998-06-30
申请号：JP33335096
申请日：1996-12-13
申请人： HITACHI LTD
发明人： KUWABARA KENICHI , MINOWA RYOHEI
IPC分类号： F25B25/02
摘要： PROBLEM TO BE SOLVED: To improve the load factor of a turbo heat pump by a method wherein, during heating operation, hot water, the temperature of which is increased by the turbo heat pump, is caused to pass through an absorption cold and hot water unit to increase temperature, and the turbo heat pump and the absorption type cold and hot water unit are controlled so that a hot water outlet temperature is adjusted to a specified temperature. SOLUTION: During heating operation, valves 10 and 11 are opened and heat source water is inputted to a vaporizer 1 of a turbo heat pump THP through a flow passage 7 by a pump 9. Further, a three-way valve 21 is switched and hot water at a cold and hot water return head 12A is caused to flow to a condenser 2 of a THP through pipings 19 and 26 by a pump 30. Hot water flowing out from the condenser 2 is caused to flow to the condenser of an absorption cold and hot water unit AHU and further flows through a valve 18, and hot water the temperature of which is increased is guided to a cold and hot water header 12B. In this case, the outlet hot water temperature of the condenser 2 is detected by a temperature sensor 27, and by controlling the THP and the AHU so that the outlet hot water temperature is adjusted to a specified temperature, the load factor of the THP is increased and energy efficiency is improved.

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