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1. 发明专利

JPH1026330A WASTE INCINERATING SYSTEM AND ITS OPERATING AND CONTROLLING METHOD 失效
公开(公告)号：JPH1026330A
公开(公告)日：1998-01-27
申请号：JP18201596
申请日：1996-07-11
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： SUNOU MEGUMI , ISHIMARU HITOSHI , ISHIGAKI YUKIO , KOYAMA KAZUHITO , TOKUNAGA KENJI
IPC分类号： F23G5/50 , F23G5/16
摘要： PROBLEM TO BE SOLVED: To realize functioning by reducing harmful substance contained in waste incinerating exhaust gas by high removing ratio. SOLUTION: This waste incinerating system comprises a reforming combustion system unit having a fuel reforming unit 15 for reforming mixed gas 36 to gas 14 containing hydrogen with the air 12 as oxidizer, and a combustor 16 for burning the gas 14 with refuse incinerating exhaust gas 7 as oxidizer to generate clean exhaust gas 17. It further comprises a control system unit having an oxygen concentration control system unit for controlling a flow rate of the air 13 based on results of sensing flow rate change of the gas 7 and oxygen concentration change to control oxygen concentration of gas supplied to the reforming combustion system unit, and a combustion temperature control system unit for controlling flow rates of crude fuel 11 and vapor 12 based on result of sensing a temperature of the gas 17 to control combustion temperature of the reforming combustion system unit.

2. 发明专利

JPH0242102A METHOD FOR RECOVERING THERMAL ENERGY AND APPARATUS THEREOF 失效
公开(公告)号：JPH0242102A
公开(公告)日：1990-02-13
申请号：JP19205988
申请日：1988-08-02
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： ASAO TAKASHI , KUROSAWA KAZUHIRO , TAJIMA KAZUYUKI , TOKUNAGA KENJI , UEDA YOSHIO , KURIBAYASHI TETSUZO
IPC分类号： F01D25/08 , F01K13/00 , F01K23/02 , F01K25/10 , F02C6/18 , F02C7/06 , F02G5/00 , F02G5/04
摘要： PURPOSE:To aim at improvement of the total efficiency of a plant by recovering the exhaust heat of the cooling circulating system of the bearings of the main engine of a power generation plant and the attached auxiliary equipments thereof and cooling the cooling medium fluid of the cooling circulating system. CONSTITUTION:In a generator installation 8 by power generated by a gas turbine installation providing an air compressor 4, a combustor 5 and a gas turbine 6, an absorbing type heat pump installation 19 is provided. Fluid used in a heat energy using installation is introduced to the absorbing type heat pump installation 19 to be heat-exchanged the exhaust heat of a bearing cooling water system and the thermal energy of another heat resource installation to rise the temperature thereof. Freshwater which is the medium of the exhaust heat of a bearing cooling water system is led to the absorbing type heat pump installation 19 by a forced pump 2 for a shaft cooling water heat pump to be cooled by the evaporator of the installation 19 and then to be supplied to the cooling water system of respective equipments.

3. 发明专利

JPH09125914A WASTE INCINERATION HEAT UTILIZATION SYSTEM 失效
公开(公告)号：JPH09125914A
公开(公告)日：1997-05-13
申请号：JP29015095
申请日：1995-11-08
申请人： HITACHI LTD , HITACHI ENG CO LTD , WAB HITACHI ENG SERVICE KK
发明人： OKUZAWA TSUTOMU , SUGITA NARIHISA , KOYAMA KAZUHITO , HATAMIYA SHIGEO , AJIRO YASUKO , YAMADA AKIRA , KAJI RYUICHI , TOKUNAGA KENJI , MATSUMURA JUBE , NISHIMOTO JUICHI
IPC分类号： F01D15/10 , F01K23/10 , F01K27/02
摘要： PROBLEM TO BE SOLVED: To enhance the total heat utilization rate of a waste incineration heat utilization system, say, a power generating system using heat produced by the incineration of waste, by reducing the amount of heat required for preventing exhaust gas coming from its waste incinerator from becoming white fume. SOLUTION: In a waste incineration heat utilization system, which has at least an incinerator 1 for incinerating wastes, a boiler 2 for producing steam by use of the heat of incineration of the incinerator, and an exhaust gas reheater 6 which, in order to prevent exhaust gas from the incinerator from becoming white fume, heats the exhaust gas while using a part of the steam as a heat source, a water eliminator 9 for eliminating water in the exhaust gas is placed on the upstream side of the exhaust gas reheater 6 to lower a white fume preventing temperature through the elimination of water in the exhaust gas so as to reduce the amount of heat (amount of steam) required for reheating of the exhaust gas. Preferably, a coolant in which heat is stored in ice by a refrigerator 12 by use of night power is circulated by the water eliminator 9 to eliminate the water through condensation.

4. 发明专利

JPH0370846A HEAT RECOVERING DEVICE AND OPERATING METHOD THEREOF 失效
公开(公告)号：JPH0370846A
公开(公告)日：1991-03-26
申请号：JP20682489
申请日：1989-08-11
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： INABA YOSHIAKI , TOKUNAGA KENJI , SHIMIZU AKIHIRO , KURIBAYASHI TETSUZO
IPC分类号： F02C6/18 , F01K3/00 , F01K23/10 , F02G5/02 , F24V30/00 , F28D20/00
摘要： PURPOSE:To effectively use energy by providing a vessel containing a reacting material heated by an exhaust gas and separated from a reacted material and generating a reaction heat when bonded with the reacted material, and a chemical heat accumulator device disposed in the vessel and containing a heat exchanging pipeline for passing a heat medium. CONSTITUTION:A high temperature gas is applied from a heating apparatus 1 to the first vessel 5 of the first chemical heat accumulator device 2 of first and second chemical heat accumulator devices 2, 2', and a low temperature gas after heat-exchanged by a heat exchanger 3 is applied to the gas duct of the second vessel 7' of the other chemical heat accumulator device 2'. Further, a heated heat medium is obtained from the heat exchanging pipeline 18 of the first vessel 5' of the other chemical heat accumulator device 2'.

5. 发明专利

JP2000294471A CLEAN ROOM 失效
公开(公告)号：JP2000294471A
公开(公告)日：2000-10-20
申请号：JP9514799
申请日：1999-04-01
申请人： HITACHI LTD
发明人： KOIKE ATSUYOSHI , TOKUNAGA KENJI
IPC分类号： H01L21/02 , F24F7/06 , F24F13/32
摘要： PROBLEM TO BE SOLVED: To reduce the running cost of a clean room by reducing the energy consumption. SOLUTION: The air supplied to the supply chamber 11 of a clean room 10 is blown into a clean chamber 12 as a vertical downward laminar air flow, after the dust contained in the air is removed by means of a fan filter unit 14 and discharged to a discharge chamber 13 through a grating 15. The air supplied to the clean chamber 12 is blown into the loading areas 26 of clean benches 16 as vertical downward laminar air flows by means of air conditioners 22. While the air passes through the air conditioners 22, the temperature and moisture of the air are adjusted to prescribed values by means of the air conditioners 22. Since the air conditioners 22 which adjust the temperature and moisture of the air are respectively installed to the clean benches 16 and temperature and moisture adjustment are only required for the air supplied to the clean benches 16, the energy consumed for adjusting the temperature and moisture of the air can be reduced and, consequently, the running cost of the clean room 10 can be reduced.

6. 发明专利

JPH09283587A SEMICONDUCTOR DEVICE MANUFACTURING METHOD 失效
公开(公告)号：JPH09283587A
公开(公告)日：1997-10-31
申请号：JP8793196
申请日：1996-04-10
申请人： HITACHI LTD
发明人： TOKUNAGA KENJI , ITO FUMIKAZU , KOIKE ATSUYOSHI , FUJISAWA ATSUSHI , ITO KATSUHIKO
IPC分类号： H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To ensure a clean environment for a wafer in a semiconductor production line system and improve the productivity of the entire line. SOLUTION: A hermetic pod adaptive to a minienvironment is used at bay- to-bay transport and stock works. In a stoker the pod is opened and closed to take out cassettes which are then carried by an AGV etc., into a bay and fed to processors. The cleanness in the bay is kept at a high level, while the cleanness in a transport zone between the bays may be dropped to a medium level, thus reducing the power consumption of FFU. Thus it is possible to improve the cleanness around the wafer and suppress the apparatus size and cost from rising.

7. 发明专利

JPH09178146A WASTE POWER GENERATING SYSTEM 失效
公开(公告)号：JPH09178146A
公开(公告)日：1997-07-11
申请号：JP33851295
申请日：1995-12-26
申请人： HITACHI LTD
发明人： OKUZAWA TSUTOMU , KOYAMA KAZUHITO , HATAMIYA SHIGEO , AJIRO YASUKO , KAJI RYUICHI , TOKUNAGA KENJI
IPC分类号： F01D15/10 , F01K27/02 , F22B1/18 , F22G1/16 , F23C99/00 , F23G5/46 , F23C11/00
摘要： PROBLEM TO BE SOLVED: To reduce NOx contained in combustion gas being an overheat source of vapor produced in a refuse burning boiler, and obtain replenishment water and ensure high efficiency of a system. SOLUTION: For overheating vapor 5 obtained from a refuse burning boiler 6 with an overheater in a waste power generating system, there are provided a fuel reformer 13 for reforming a stock material into hydrogen-containing gas 19, and a combustor 12 for combusting the hydrogen-containing gas 19 reformed by the fuel reformer 13 and air, etc., to produce combustion gas 24. The combustion gas 24 produced in the combustor 12 is used in the overheater 10 as a heat source.

8. 发明专利

JPH0972205A ELECTRIC POWER GENERATION AND DISTILLED WATER PRODUCING SYSTEM USING EXHAUST-HEAT GENERATED BY INCINERATING WASTE MATERIAL 失效
公开(公告)号：JPH0972205A
公开(公告)日：1997-03-18
申请号：JP22987995
申请日：1995-09-07
申请人： HITACHI LTD
发明人： YAMADA AKIRA , SHIMODA MAKOTO , KAJI RYUICHI , TOKUNAGA KENJI , ISHIGAKI YUKIO
IPC分类号： F01K7/10 , F01K27/02 , F23G5/00
摘要： PROBLEM TO BE SOLVED: To keep a fixed amount of electric power generation by mixing a fixed amount of steam which is extracted from steam generated by exhaust heat and introduced to a steam turbine with remaining steam which is reduced to the pressure and the temperature nealy equal to those of exhaust steam of the steam turbine to make source for heating distilled liquid. SOLUTION: A specified flow of steam generated by a steam generator 2 is distributed to a turbine 3 by a steam distributor 10 via a route 110 and remaining steam is distributed to a route 130. A pressure-reducing and temperature-reducing device 12 is set at the pressure and the temperature nealy equal to those of exhaust steam of the turbine 3 flowing a route 120 and is supplied with distilled water via a route 171. Steam which is reduced to the pressure and the temperature nealy equal to those of exhaust steam of the turbine 3 flowing a route 120 is mixed with the steam in the route 120 via a route 132 and introduced to a distillation device 5 via a route 123. Condensed water whose heat is utilized as specified is introduced and circulated to a route 150, a water supply pump 9 and the steam generator 2 via a route 190.

9. 发明专利

JPH08312310A POWER GENERATION SYSTEM USING WASTE 失效
公开(公告)号：JPH08312310A
公开(公告)日：1996-11-26
申请号：JP12109695
申请日：1995-05-19
申请人： HITACHI LTD
发明人： KOYAMA KAZUHITO , SUGITA NARIHISA , OKUZAWA TSUTOMU , HATAMIYA SHIGEO , AJIRO YASUKO , YAMADA AKIRA , KAJI RYUICHI , TOKUNAGA KENJI
IPC分类号： F01D15/10 , C01B3/38 , F01K3/24 , F01K27/02 , F23G5/46
摘要： PURPOSE: To improve the efficiency of a system by reducing the volume of NOx contained in combustion gas, which is a super heat source of the steam generated in a waste incineration boiler. CONSTITUTION: In a power generation system using waste, in order to superheat the steam 5, which is obtained from a waste incineration boiler, by a superheating device 10 a fuel reformer 13 for reforming raw fuel into gas 19 containing hydrogen and a burner 12, which generates combustion gas 24 by combusting the gas 19 containing hydrogen, which is reformed by the fur reformer 13, and air 23 are provided for making the combustion gas 24 generated by the burner 12 be the superheat source of the superheating device 10.

10. 发明专利

JPS6372141A MANUFACTURE OF SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPS6372141A
公开(公告)日：1988-04-01
申请号：JP21578186
申请日：1986-09-16
申请人： HITACHI LTD
发明人： TOKUNAGA KENJI , KOIKE ATSUYOSHI , IKEDA SHUJI
IPC分类号： H01L21/302 , H01L21/3065 , H01L21/3205
摘要： PURPOSE:To obtain an etching process stable and excellent in repeatability of cross sectional shapes, by exchanging an isotropic etching process and an anisotropic etching process with a boundary of an intermediate layer interposed between multilayer interconnection. CONSTITUTION:An upper side wiring 2 is processed in accordance with a pattern of a resist 4 by the use of resist light in an isotropic etching process, so that an isotropic etching region 5 is formed. This isotropic etching region 5 is formed in a tapered etching structure in which the cross sectional area of this region is made smaller downwards. Luminous spectra of an intermediate layer 3 below the isotropic etching region 5 are detected at that time. If the intermediate layer 3 is made of tantalum, for example, the luminous spectrum of tantalum is detected when the intermediate layer 3 is exposed in the end of the isotropic etching precess. Just at the time of this detection, the etching method is exchanged from the isotropic etching to the anisotropic etching. Thus, a wiring structure excellent in repeatability of cross sectional shapes can be obtained.

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