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1. 发明专利

JP2006189462A Inspection method and its device 有权
标题翻译：检验方法及其设备
公开(公告)号：JP2006189462A
公开(公告)日：2006-07-20
申请号：JP2006073725
申请日：2006-03-17
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： IKEDA YOKO , KONISHI JIYUNKO , IWATA HISAFUMI , TAKAGI YUJI , OBARA KENJI , NAKAGAKI AKIRA , ISOGAI SHIZUSHI , OZAWA YASUHIKO
IPC分类号： G01N21/956 , G06T1/00 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To reduce an analysis time and to improve the analysis accuracy by improving a user interface.
SOLUTION: This device comprises an image pickup apparatus for photographing a plurality of images in a workpiece; a storage means for storing the pickup images picked by the image pickup apparatus; and a displaying means having a first area for displaying the plurality of pickup images stored in the storage means and a plurality of second areas classifying the images according to the feature of the pickup images. This device comprises an analysis unit constituted so as to move the plurality of pickup images from the first area to the second areas on the screen and classify the plurality of pickup images on the second areas.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：通过改进用户界面来缩短分析时间并提高分析精度。解决方案：该装置包括用于拍摄工件中的多个图像的图像拾取装置; 存储装置，用于存储由图像拾取装置拾取的拾取图像; 以及显示装置，具有用于显示存储在存储装置中的多个拾取图像的第一区域和根据拾取图像的特征对图像进行分类的多个第二区域。该装置包括分析单元，其被构造成将多个拾取图像从第一区域移动到屏幕上的第二区域，并将多个拾取图像分类在第二区域上。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2001243906A SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JP2001243906A
公开(公告)日：2001-09-07
申请号：JP2000058022
申请日：2000-02-29
申请人： HITACHI LTD
发明人： YAMAGUCHI SATOSHI , IIIZUMI TAKASHI , KOMURO OSAMU , MOROKUMA HIDETOSHI , MAEDA TATSUYA , ARIMA JUNTARO , OZAWA YASUHIKO
IPC分类号： H01L21/66 , G01N23/04 , G01Q10/00 , G01Q20/00 , G01Q30/02 , G01Q30/04 , G21K7/00 , H01J37/22 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To operate a scanning electron microscope with high precision and high speed by curtailing a process for inspection position setting or an input operation or the like. SOLUTION: With the scanning electron microscope furnished with a function of specifying a required position according to a previously registered pattern, a means for setting kinds of patterns, intervals between a plurality of parts constituting the patterns, and information concerning dimension of parts constituting the patterns, and a means for forming a pattern image constituted by a plurality of parts according to the information given are provided.

3. 发明专利

JP2001188906A METHOD AND DEVICE FOR AUTOMATIC IMAGE CALSSIFICATION 失效
公开(公告)号：JP2001188906A
公开(公告)日：2001-07-10
申请号：JP37288699
申请日：1999-12-28
申请人： HITACHI LTD
发明人： NAKAGAKI AKIRA , TAKAGI YUJI , SHIMODA ATSUSHI , OBARA KENJI , ISOGAI SHIZUSHI , OZAWA YASUHIKO
IPC分类号： G01N21/88 , G01N21/94 , G06T7/00
摘要： PROBLEM TO BE SOLVED: To solve the problem that image processing parameters need to manually be tuned to secure high precision of classification. SOLUTION: Plural values are previously set as image processing parameters, a feature quantity is calculated by using all of those parameter values, and only feature values which are suitable for classification in the case of the classification processing are selected and classified to solve the mentioned problem.

4. 发明专利

JP2000123771A SCANNING ELECTRON MICROSCOPE AND DEFECTIVE POSITION ANALYSIS METHOD USING IT 失效
公开(公告)号：JP2000123771A
公开(公告)日：2000-04-28
申请号：JP29648198
申请日：1998-10-19
申请人： HITACHI LTD
发明人： NAKAGAKI AKIRA , TAKAGI YUJI , SHIMODA ATSUSHI , OBARA KENJI , OZAWA YASUHIKO , BABA HIDEHARU , ISOGAI SHIZUSHI , WATANABE KENJI , SHISHIDO CHIE
IPC分类号： H01J37/22 , G01N21/88 , G01N21/956 , G01N23/225
摘要： PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of automatically and correctly taking an image of an objective board without generating artitaets in a provided digital image even in the case of taking the image of any objective board with any magnification, determining the position of a defective part, and analyzing the feature quantity of the defective part and the nature thereof in relation to the defective part, and to provide a defective part analysis method using the scanning electron microscope. SOLUTION: This scanning electron microscope is provided with: a switch control part 108 to control a scanning means 104 by at least switching it so as to provide in a switched fashion, a low-magnification digital image signal based on a wide image-taking visual field and a high-magnification digital image signal based on a narrow image-taking visual field from an A/D converting part 116; and beam spot diameter control parts 203, 106, 110, 105, 109, 101 to control the spot diameter of an electron beam on the surface of an objective board by switching it when the control is performed by switching with the switching control part. This defective part analysis method employs the scanning electron microscope.

5. 发明专利

JPH0698876A METHOD FOR IMAGE RECONSTRUCTION OF MR IMAGING APPARATUS 失效
公开(公告)号：JPH0698876A
公开(公告)日：1994-04-12
申请号：JP24952492
申请日：1992-09-18
申请人： HITACHI LTD
发明人： SATO NORIO , HIROSE HIROSHI , OZAWA YASUHIKO , HAYAKAWA KOICHI
IPC分类号： A61B5/055 , G01R33/28 , G01R33/32
摘要： PURPOSE:To facilitate the observation of an interested area and the determination of positional relationship by setting different coefficient for the interest area and other areas to multiplying image values by respective coefficients during the reconstruction. CONSTITUTION:Values of pixels 24 on an arbitrary tomographic surface are divided by arbitrary marks at points of 20-23 from data of an image 15 during the reconstruction to calculate the image values at respective locations. When the coefficient for the area 18 is represented by A and the coefficient for the area 19 by B, among the image values at the respective locations at the points 20-23, the image values positioned at 21-22 are multiplied by the coefficient A and the image values at other locations by the B to calculate values of the pixels 24 as new image values. The image values are calculated for all pixels on the tomographic surface 16 by this procedure to reconstruct new images of the tomographic surface 16. Here, the coefficient B for the area 19 is made smaller sufficiently than the coefficient A for the area 18 thereby facilitating the observation of the interested area 18 and the determination of positional relationship in the new images of the tomographic surface 16.

6. 发明专利

JPH04343835A MAGNETIC RESONANCE IMAGE PROCESSING METHOD 失效
公开(公告)号：JPH04343835A
公开(公告)日：1992-11-30
申请号：JP11581891
申请日：1991-05-21
申请人： HITACHI LTD
发明人： OZAWA YASUHIKO
IPC分类号： A61B5/055 , G01R33/28 , G01R33/32
摘要： PURPOSE:To improve the data storage means of a magnetic resonance imaging device and to increase the speed of data processing because in the magnetic resonance imaging device data on measurement required for reconfiguring images generally have more than two dimensions and have large amounts. CONSTITUTION:Data on measurement are converted into complex amplitude information and stored on a medium such as a film, a dry plate and a thermoplastic film. The medium is subjected to Fourier transform using a Fourier transform optical system, whereby desired reconfigured images can be obtained. Therefore, image reconfiguring is performed by Fourier transform using light and so high-speed processing is made possible.

7. 发明专利

JPH0318350A MAGNETIC RESONANCE IMAGING DEVICE 失效
公开(公告)号：JPH0318350A
公开(公告)日：1991-01-25
申请号：JP15307589
申请日：1989-06-15
申请人： HITACHI LTD
发明人： OZAWA YASUHIKO , SUKEGAWA KAZUYA
IPC分类号： H01J37/22 , A61B5/055 , G01R33/28 , G01R33/32
摘要： PURPOSE:To immediately project the part desired to be observed to the center of a display by providing means for inputting respective sets of coordinate information of the lines crossing tomographic images on the display screen means for inputting the coordinate information of a point on the line and means for positioning the plane intersecting with the tomographic image face and one point at the central point of the display. CONSTITUTION:The tomographic face to be further obtd. is assigned on the tomographic image obtd. on the display 116 and the coordinate information at the points a, b on this tomographic face is taken out by the 1st means 51 and the output thereof is inputted to the 2nd means 52. The coordinate information at the points a, b is converted to the coordinate system in a magnet, by which the converted coordinate information a', b' are obtd. The matrix M to convert the information to the section B to be photographed is then determined by the 3rd means 53 in accordance with the coordinate information a', b' and further, the visual field L at the section B is determined from the distance of the coordinate information a', b' by the 4th means 54. The visual field L is so changed that the output O'' from the 8th means is deviated in position to the center by the 5th' means. The signal detecting zone omegaf corresponding the visual field L is computed and determined from this visual field by the 5th means 55.

8. 发明专利

JPH01293857A MRI IMAGE TAKING METHOD 失效
公开(公告)号：JPH01293857A
公开(公告)日：1989-11-27
申请号：JP12655388
申请日：1988-05-24
申请人： HITACHI LTD , HITACHI INSTRUMENTS ENG
发明人： NAGASHIMA MITSUNOBU , OZAWA YASUHIKO
IPC分类号： A61B10/00 , A61B5/055 , G01N24/08 , G01R33/48
摘要： PURPOSE:To prevent the lowering of the S/N ratio of a tomographic image and to suppress the generation of phase modulation, by determining the timing of data sam pling for measuring a nuclear magnetic resonance signal and also determining the time delay from the generation of the signal to the data sampling. CONSTITUTION:The same substance placed in different environments as a sample or substances having different properties are used to be irradiated with a 90 deg. pulse and a 180 deg. pulse as a high frequency magnetic field so as to provide the first time between both pulses and, after said 180 deg. pulse is allowed to irradiate, an inclined magnetic field is applied in the third direction to generate a nuclear magnetic reso nance signal, and the second time from the irradiation with the 180 deg. pulse to the generation of the nuclear magnetic resonance signal and the first time are changed to calculate time difference maximizing the magnitude of the nuclear magnetic reso nance signal with respect to the time difference between the second and first times. If this time difference is set to a measuring delay time tD to adjust the applying timing of the inclined magnetic field in the third direction, the negation effect of the nuclear magnetic signals by the substances is not generated and, therefore, an S/N ratio is not deteriorated and no phase strain is generated in a reconstituted image.

9. 发明专利

JPS62240039A NMR IMAGING APPARATUS 失效
公开(公告)号：JPS62240039A
公开(公告)日：1987-10-20
申请号：JP8297186
申请日：1986-04-10
申请人： HITACHI LTD
发明人： OZAWA YASUHIKO
IPC分类号： A61B10/00 , A61B5/055 , G01N24/08 , G01R33/48

10. 发明专利

JPS61162939A LOCAL MAGNIFYING IMAGE PICK-UP SYSTEM IN NMR IMAGING 失效
公开(公告)号：JPS61162939A
公开(公告)日：1986-07-23
申请号：JP462485
申请日：1985-01-14
申请人： HITACHI LTD
发明人： SANO KOICHI , YAMAGATA NOBUTAKE , OZAWA YASUHIKO , KOIZUMI HIDEAKI
IPC分类号： H04N5/30 , A61B5/055 , A61B10/00 , G01N24/08 , G01R33/48

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