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    • 4. 发明专利
    • GAS CONTROLLED STABILIZED OUTPUT GAS LASER DEVICE
    • JPH0661567A
    • 1994-03-04
    • JP21284092
    • 1992-08-10
    • HITACHI LTD
    • OGURA SATOSHISASAKI HIROHARUKUBOTA YOSHIMASAKAWAKUBO YUKIO
    • H01S3/036H01S3/134
    • PURPOSE:To stabilize gas laser output without using a special power supply control system by changing laser gas density through laser gas pressure adjustment and by adjusting gain through increase and decrease thereof. CONSTITUTION:When laser beam 21' is detected by a laser power meter 23, detected output is sent to a laser output control device 31 through a laser output signal line 30 in accordance with an arrow 32. Output of a laser beam 21 is calculated by using sensitivity of the laser power meter 23 and laser beam distribution rate of a beam splitter 22, deflection to an objective value is obtained and an instruction for changing a volume of a variable volume gas chamber 4 is sent to a gas chamber volume control device 16 through a gas chamber volume control signal line 29. Therefore, output of the laser beam 21 can be stabilized by performing gain control of laser gas 5 which is laser medium through density adjustment for changing a pressure of the laser gas 5 in the inside of a laser tube 1 by providing physical function as indicated by arrow 33 to the variable volume gas chamber 4 in accordance with an instruction to change a volume of the variable volume gas chamber 4.