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    • 4. 发明专利
    • SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
    • JPH07211075A
    • 1995-08-11
    • JP580394
    • 1994-01-24
    • HITACHI LTDHITACHI ENG CO LTD
    • AKIYAMA NOBORUNAMETAKE MASATAKEIWAMURA MASAHIROMITSUMOTO KINYAOKUTSU MITSUHIKO
    • G11C11/41
    • PURPOSE:To suppress an integration area and the increase of a power consumption and facilitate high speed transmission by a method wherein the lengths of wiring from address edge detecting circuits to distribution circuits through an integrated pulse generating circuit are reduced. CONSTITUTION:An integrated pulse generating circuit 7 and a first distribution circuit 8 are provided on the middle part of a semiconductor chip 15. Two address edge detecting circuits 6 are provided near the circuit 7 taking corresponding input address buffers 4 into account. Four second distribution circuit 9 are provided near the circuit 8 and corresponding memory blocks 1. Eight third distribution circuits 10 are provided near the corresponding circuits 9 and corresponding memory mats 2. With this constitution, the length of a first bus line BL1 can be smaller than the sum of the length of a second bus line BL2 and the length of a third bus line BL3. Therefore, the capacity values of the output loads of the circuits 6 and 7 can be reduced and the speed of charge/discharge caused by the transition of the ATD pulses which are the outputs of the circuits 6 and the ATD integrated pulse which is the output of the circuit 7 can be increased and the circuit constants of the circuit 6 can be reduced and the area can be reduced.
    • 6. 发明专利
    • MULTILAYER INTERCONNECTION STRUCTURE
    • JPS62268144A
    • 1987-11-20
    • JP11058286
    • 1986-05-16
    • HITACHI LTD
    • MISAWA YUTAKANAMETAKE MASATAKEKAWAMATA SHIGERU
    • H01L21/768H01L21/31H01L21/3205H01L23/522
    • PURPOSE:To improve the degree of integration by operating an insulating layer consisting of either an organic film or the laminate film of the organic film and an inorganic film in order to ensure flatness in the surface, to which a wiring layer must be formed, and working an insulating layer composed of the inorganic film in order to secure stress resistance and damp-proofing. CONSTITUTION:Both insulating layers consisting of only an organic material or the organic material and an inorganic material and only the inorganic material are employed as insulating layers partitioning three layers or more of wiring layers on a substrate surface. Organic films made up of polyimide resin are used as the insulating films 30, 70 in a first layer and a third layer, thus sufficiently ensuring flatness in the surfaces, to which each wiring layer must be shaped, though the wiring layers are formed over three layers or more. A multilayer interconnection structure resists stress from the outside because an inorganic film is employed as the second layer insulating film 50, and damp-proofing can be kept sufficiently because an inorganic film is used as a protective film 90 besides the second layer insulating film 50. Accordingly, the flattening of stepped sections and the coexistence of the increase in resistance against stress and the holding of damp proofing are enabled, thus improving the degree of integration.
    • 7. 发明专利
    • METHOD OF DETECTING END POINT OF ETCHING
    • JPS62171127A
    • 1987-07-28
    • JP1190386
    • 1986-01-24
    • HITACHI LTD
    • FUKUDA TAKUYAMISAWA YUTAKANAMETAKE MASATAKE
    • H01L21/302H01L21/3065
    • PURPOSE:To detect the end point of etching with high sensitivity and accuracy, by utilizing a phenomenon that an amount of regulator reflection of unidirectional light applied onto the surface of a substance to be etched is varied by the height of a step of the surface of the substance to be etched. CONSTITUTION:Plasma is generated in an etching apparatus 3 and thereby a board to be processed is etched. In parallel with etching, a laser beam 5 of 633(nm) is applied to a desired region of a surface to be etched in the board to be processed, and regular reflection light 7 and plasma light are led into an optical filter 9 by a condenser 8. By this filter, only the desired regular reflection light 7 obtained from the laser beam 5 is separated, and a variation in the intensity thereof is detected by a light intensity detecting device 11. A light S reflected in the direction other than the direction of a desired reflection angle theta by the surface of a step (h) formed between a pattern 15 exposed on the surface by etching and a film 16 is not contained in the regulator reflection light 7, and the mount of light in the direction of the desired angle thetadecreases dependently on the step (h). Since the intensity of the regular reflection light detected from the point of time at which etchback is ended lowers sharply, the end of the etchback can be detected distinctly.
    • 9. 发明专利
    • SEMICONDUCTOR RESIN PACKAGE
    • JPS61159752A
    • 1986-07-19
    • JP20485
    • 1985-01-07
    • HITACHI LTD
    • SOGA TASAOYATSUNO KOMEISAWAHATA MAMORUNAKANO FUMIOKOBAYASHI FUMIYUKINAMETAKE MASATAKE
    • H01L23/34H01L23/28H01L23/29H01L23/31H01L23/473H01L25/10
    • PURPOSE:To obtain a high output and large-sized chip loading module pressure-contacting type semiconductor package having thermal fatigue-resistance of quintuple or more of structure, in which a bare chip is loaded, and excellent heat dissipating properties by coating the periphery of an Si chip joined onto an organic multilayer substrate having a large thermal expansion coefficient with a specific resin in specific structure. CONSTITUTION:The titled package has structure, in which the upper surfaces of chips 1 are not coated and the height of resins 12 in the periphery of the chips 1 is equalized to the upper surfaces of the chips 1 and flattened, structure, in which the height of the resins 12 is formed in a shape lower than the upper surfaces of the chips 1, or structure in which high thermal conductive plates in size larger than the chips 1 are bonded or soldered to the upper surfaces of the chips 1 in an extent that heat resistance is not increased, the upper surfaces of the high thermal conductive plates are not coated and the height of the resins 12 in the periphery of the chips 1 is made equal to or lower than the height of the upper surface of said high thermal conductive plates. The upper surfaces of the chips 1 or the upper surfaces of the high thermal conductive plates are brought into contact with a thermal conductor and cooled, or cooled through a metal and a high thermal conductive resin. A material manufactured by dispersing and mixing a low expanding material such as quartz and a granular elastic material such as rubber particles for improving the fluidity and flexibility of the resin to an epoxy resin or a polyimide resin is employed as a material for the coating resin 12.
    • 10. 发明专利
    • Level shift circuit and power conversion unit
    • 电平转换电路和电源转换单元
    • JP2011193419A
    • 2011-09-29
    • JP2010060169
    • 2010-03-17
    • Hitachi Ltd株式会社日立製作所
    • SAKURAI NAOKISAKANO JUNICHINAMETAKE MASATAKE
    • H03K19/0185H02M7/48H03K17/56
    • H03K19/0175
    • PROBLEM TO BE SOLVED: To provide a level shift circuit for transmitting a control signal from a low voltage side circuit not easily giving malfunction to a high voltage side circuit even when there is a production variation in a semiconductor device during a variation in power-source voltage. SOLUTION: In the level shift circuit, when a power-source voltage variation dV/dt of a high voltage side occurs and influences on a logic level of a circuit, passing-through of a malfunction signal is masked and prevented in first and second logic circuits, by a signal from a time-constant generation circuit or a portion where a power voltage variation occurs in advance, by utilizing the fact that this variation occurs both at a set side and a reset side. When the power-source voltage variation dV/dt is generated at a high voltage side, sufficient allowance in the timing of this masking prevents an erroneous signal from being transmitted to a flip-flop, and a control signal is transmitted from a low voltage side circuit not giving malfunction to a high voltage side circuit, even when there is a production variation in each element in semiconductor processes. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了提供一种电平移位电路,用于将低电压侧电路的控制信号发送到高电压侧电路不容易产生故障,即使当在变化期间半导体器件中存在生产变化时 电源电压。 解决方案:在电平移位电路中,当发生高电压侧的电源电压变化dV / dt并影响电路的逻辑电平时,首先屏蔽并防止故障信号的通过 和第二逻辑电路,通过利用来自设定侧和复位侧的这种变化的事实,通过来自时间常数生成电路的信号或事先发生电力电压变化的部分。 当在高电压侧产生电源电压变化dV / dt时,在该掩蔽的定时中的充分允许阻止了将错误信号发送到触发器,并且控制信号从低电压侧发送 电路不会对高压侧电路造成故障,即使半导体工艺中的每个元件都存在生产变化。 版权所有(C)2011,JPO&INPIT