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1. 发明专利

JP2000100920A WAFER HOLDING DEVICE 失效
公开(公告)号：JP2000100920A
公开(公告)日：2000-04-07
申请号：JP26381898
申请日：1998-09-18
申请人： HITACHI LTD
发明人： TOMITA MASAMICHI , HOSODA YUJI , HOKOTANI YOSHIO
IPC分类号： H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To improve the holding device of a wafer to be mounted on an electrostatic chuck. SOLUTION: Three notches, having plan cross-section, are provided on the side face of the wafer fixing electrostatic chuck of a wafer treatment and evaluation device, and three stepped positioning pins 9 are provided on a gripper 6. Also, different from the above, three cylindrical notches are provided on the side face side of the electrostatic chuck, and three stepped positioning pins are provided on the gripper with which a wafer carrying structure can be switched. According to this structure, the area of notches for release from the gripper 5 of the electrostatic chuck d2 can be made small, and as it is unnecessary to notch the center part of the electrostatic chuck, the attraction of the electrostatic chuck can be improved, deformation of the wafer 7 when it is attached and lowering of the patterning accuracy and inspection accuracy caused by the above-mentioned deformation can be prevented.

2. 发明专利

JPH0315297B2 失效
公开(公告)号：JPH0315297B2
公开(公告)日：1991-02-28
申请号：JP395879
申请日：1979-01-19
申请人： HITACHI LTD
发明人： TODOKORO HIDEO , HOKOTANI YOSHIO
IPC分类号： H01J3/02 , H01J19/70 , H01J37/073

3. 发明专利

JPS6151737A Electronic lens 失效
标题翻译：电子镜头
公开(公告)号：JPS6151737A
公开(公告)日：1986-03-14
申请号：JP17231085
申请日：1985-08-07
申请人： Hitachi Ltd
发明人： KONDO YOSHIMASA , KUBOTA SHIGEO , TAKAHASHI TOSHIO , OZASA SUSUMU , HOKOTANI YOSHIO
IPC分类号： H01J37/141
CPC分类号： H01J37/141
摘要： PURPOSE:To reduce temperature drift or the like of electron rays while cooling generation of heat with good efficiency by providing a radiation fin on the peripheral part of an electromagnetic coil. CONSTITUTION:A coil 18 wound in layers is molded in resin with good thermal conduction while being insulation-fixed. The peripheral part of said resin mold part is provided with a fin 20. Further, a magnetic path 21 holding an electromagnetic coil is provided with a feed-in opening 22 and a discharge opening 23 of cooling air. Thereby, when cooling air is ventilated from the feed-in opening 22, heat transferred to the resin 19 is discharged through the fin 20 of the resin mold part while holding the temperature of the electronic lenses almost constant. Accordingly, deformation of parts due to heat is reduced thus reducing drift or the like of electron rays so as to improve drawing accuracy and increase reliability.
摘要翻译：目的：通过在电磁线圈的周边部分设置辐射翅片来降低电子束的温度漂移等，同时以高效率冷却发热。构成：缠绕在层上的线圈18被模制成具有良好导热性的树脂，同时绝缘固定。所述树脂模具部件的周边部分设置有翅片20.另外，保持电磁线圈的磁路21设置有冷却空气的入口22和排出口23。因此，当冷却空气从进入开口22通风时，传递到树脂19的热量通过树脂模具部件的翅片20排出，同时保持电子透镜的温度几乎恒定。因此，由于热而引起的零件的变形减少，从而减少电子束的漂移等，从而提高拉拔精度并提高可靠性。

4. 发明专利

JPS6055621A DEVICE FOR EXPOSING TO ELECTRONIC BEAM 失效
公开(公告)号：JPS6055621A
公开(公告)日：1985-03-30
申请号：JP16313383
申请日：1983-09-07
申请人： HITACHI LTD
发明人： HOKOTANI YOSHIO
IPC分类号： G03F7/20 , H01L21/027 , H01L21/30
摘要： PURPOSE:To obtain higher throughput by providing a turn table for supporting and shifting samples to be drawn whose rotation is combined with the linear movement of the center of its rotation. CONSTITUTION:Electron beams 4 focussed by electronic lenses 5 and 6 scan over samples 2 to be drawn, in cooperation with a deflecting power source 11, a deflecting coil 8 and a deflecting plate 9. At the same time, the elctron beams 4 are turned ON and OFF by a blanking plate 7 operated by the signals from the power source 10. A large number of samples 2 set on the circumference of a turn table 1 are drawn only in the width of electrostatic deflection 14 during one rotatin of the turn table 1 in the direction R. During another rotation, the turn table 1 is slightly shifted in the direction X by the width of the electrostatic deflection 14. Thus, the drawn region of the sample proceeds from 12 to 13 as the turn table 1 rotates. In such a manner, the samples can be shifted finitely and smoothly without any intermittent actions, and moreover, several tens of samples can be drawm at the same time.

5. 发明专利

JPS598332A Shifter for sample 失效
标题翻译：更换样品
公开(公告)号：JPS598332A
公开(公告)日：1984-01-17
申请号：JP11680082
申请日：1982-07-07
申请人： Hitachi Ltd , Nippon Telegr & Teleph Corp
发明人： MORIYAMA SHIGEO , HARADA TATSUO , HOKOTANI YOSHIO , IDO SATOSHI , KOMATA FUJIO
IPC分类号： H01J37/20 , H01L21/027 , H01L21/30
CPC分类号： H01J37/20
摘要： PURPOSE:To form a conductive mechanism by a material made of steel by encasing the conductive mechanism in a second vacuum vessel adjacent to the inside of a sample chamber and setting up a differential exhaust seal to a partition wall section into which the conductive mechanism penetrates. CONSTITUTION:The conductive mechanisms 3, 5, 7 are encased in the second vacuum vessel 11 adjacent to the inside of the sample chamber 10. The differential exhaust seal 8 is set up to the penetrating section of the conductive mechanisms 3, 5, 7 in the partition wall between the vessel 11 and the sample chamber 10. Consequently, high vacuum in the sample chamber 10 can be kept easily even when the degree of vacuum in the vessel 11 is lower than that in the sample chamber 10 by approximately one figure. Accordingly, parts made of steel of excellent durability can be used as feed screws, nuts, bearings, etc. constituting the conductive mechanisms.
摘要翻译：目的：通过将导电机构包围在与样品室内部相邻的第二真空容器中并且将导电机构穿透的分隔壁部分设置差动排气密封来形成由钢制成的材料的导电机构。构成：导电机构3,5,7被封装在邻近样品室10内部的第二真空容器11中。差动排气密封件8设置在导电机构3,5,7的穿透部分中容器11和样品室10之间的分隔壁。因此，即使当容器11中的真空度比样品室10中的真空度低约一个数字时，样品室10中的高真空也可以容易地保持。因此，可以使用构成导电机构的进给螺杆，螺母，轴承等优异耐久性的钢制零件。

6. 发明专利

JPS5812970B2 失效
公开(公告)号：JPS5812970B2
公开(公告)日：1983-03-11
申请号：JP1792475
申请日：1975-02-14
申请人： HITACHI LTD
发明人： TODOKORO HIDEO , HOKOTANI YOSHIO
IPC分类号： H01J1/304 , H01J1/30 , H01J3/38

7. 发明专利

JPS57139607A POSITION MEASURING EQUIPMENT 失效
公开(公告)号：JPS57139607A
公开(公告)日：1982-08-28
申请号：JP2432981
申请日：1981-02-23
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE
发明人： KATOU YASUO , HOKOTANI YOSHIO , OZASA SUSUMU , IDO SATOSHI , FUJINAMI AKIHIRA
IPC分类号： G03B27/34 , G01B11/00 , G01B11/02 , G01C3/06 , H01L21/027 , H01L21/30
摘要： PURPOSE:To measure the position of the surface of an object with high accuracy even if the reflectance of the surface differs from place to place by controlling the intensity of the light source in such a manner that the quantity of the light which enters a detector after being reflected by a small light spot on the object is to be the standard value established beforehand. CONSTITUTION:The light from a semiconductor laser 11 is focused on the surface of an object 14 through a diaphragm 12 and a lens 13. At the time the diameter of the spot is made less than ten times of the measurement error. The reflected light is forcused on a detector 16 through a lens 15. When the spot on the surface of the object 14 moves from position A to position A', the image on the detector 16 moves from B to B' and the output voltage difference a-b of terminals a and b of the detector 16 changes according to the displacement of the image. The output c of an amplifier 17 corresponding to a+b is fed back to the semiconductor laser 11 by an amplifier 19 so as to become equal to the standard voltage. The ratio of a-b to a+b is put out through the amplifier 17 and a divider. With this constitution, the position of the object can be measured with high accuracy even if the reflectance of the surface differs from place to place.

8. 发明专利

JPS5516321A ELECTROSTATIC RADIANT TYPE ELECTRONIC GUN 失效
公开(公告)号：JPS5516321A
公开(公告)日：1980-02-05
申请号：JP8840778
申请日：1978-07-21
申请人： HITACHI LTD
发明人： FUKUHARA SATORU , TODOKORO HIDEO , HOKOTANI YOSHIO
IPC分类号： G01Q90/00 , H01J37/073
摘要： PURPOSE:To easily change from low-energy electric beam to high-energy electric beam and vice versa while keeping the radiant beam constant, by allowing to externally vary the position of a cathode or control guid in a vacuum atmosphere. CONSTITUTION:An electric beam 19, radiated from a cathode 11 and passed through an anode 13, is focused by an electric lens 16 and irradiated upon a test material. These elements are all in a vacuum container 18. The cathode 11 and a control guid 12 are isolated each other by the insulator 21 and connected to an insulated power source through a high voltage cable. A d-c power source 15 and a switch 14 are disposed within the insulated power source. The switching action by the switch 14 causes the control guid 12 to be at the same potential either as the cathode 11 or as the ground. This simple arrangement enables easy switching operations between the low and the high-energy electric beams, and simplifies the operation.

9. 发明专利

JPS53128263A ELECTRONIC GUN 失效
公开(公告)号：JPS53128263A
公开(公告)日：1978-11-09
申请号：JP4266077
申请日：1977-04-15
申请人： HITACHI LTD
发明人： TODOKORO HIDEO , HOKOTANI YOSHIO
IPC分类号： H01J37/073 , H01J29/46 , H01J29/48 , H01J37/26
摘要： PURPOSE:To omit the mechanical matching with the optical axis by installing multi-divided lead-out anodes to the intermediate position between the cathode and the anode.

10. 发明专利

JPS53114382A SAMPLE DIFFERENTIAL EQUIPMENT OF ELECTRIC DISTORTION DRIVING TYPE 失效
公开(公告)号：JPS53114382A
公开(公告)日：1978-10-05
申请号：JP2797577
申请日：1977-03-16
申请人： HITACHI LTD
发明人： ISHIKAWA KIYOSHI , HOKOTANI YOSHIO
IPC分类号： H01L41/09 , H01L41/08 , H02N2/00
摘要： PURPOSE:To move an object at high precision by controlling the moving speed of a plane substrate through the combination of freely-selected operation times of an electrostatic clutch.

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