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1. 发明专利

JPS63228600A SYNCHROTRON EMITTED LIGHT GENERATOR 失效
公开(公告)号：JPS63228600A
公开(公告)日：1988-09-22
申请号：JP6098287
申请日：1987-03-18
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE , HITACHI SERVICE ENG
发明人： IKEGUCHI TAKASHI , MATSUMOTO MANABU , UEDA SHINJIRO , SONOBE TADASHI , MURASHITA TATSU , IDO SATOSHI , KUROISHI KAZUO
IPC分类号： H05H13/04

2. 发明专利

JPS5796527A DEVICE FOR ADJUSTING SPECIMEN POSITION FOR ELECTRON BEAM EXPOSURE APPARATUS 失效
公开(公告)号：JPS5796527A
公开(公告)日：1982-06-15
申请号：JP17347180
申请日：1980-12-09
申请人： NIPPON TELEGRAPH & TELEPHONE , HITACHI LTD
发明人： TAKAMOTO KIICHI , IDO SATOSHI , KOMATA FUJIO , KUBOTA SHIGEO
IPC分类号： G03B27/58 , H01J37/34 , H01L21/027
摘要： PURPOSE:To simplify a specimen holding tool and to perform accurate positioning which is readily fabricated and adjusted, by rotating the specimen in the specimen holding tool fixed under an optical microscope in the X and Y directions or in a horizontal plane by an external mechanism. CONSTITUTION:The specimen holding tool 8, wherein the specimen 12 is set on a specimen pushing plate 11, is provided on a table 3. The specimen holding tool 8 is compressed and fixed by positioning blocks 5 and 6 and a plate spring 7. The specimen 12 is placed on the specimen pushing plate 11 and pushed to the upper surface of the specimen holding tool 8 by the force of the spring 10. Marks 13 and 14 of the specimen 12 are optically read by the microscope. An attracting device 18 is lifted through an opening 4 of the table 3 and a hole 9 in the specimen holding tool 8 so that it is properly positioned, attracts the specimen pushing plate 11. The device 18 is rotated in the X and Y directions or in the horizontal plane, and the specimen is accurately positioned.

3. 发明专利

JPS63198300A SYNCHROTRON EMITTED LIGHT GENERATOR 失效
公开(公告)号：JPS63198300A
公开(公告)日：1988-08-16
申请号：JP2828187
申请日：1987-02-12
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE , HITACHI SERVICE ENG
发明人： MATSUMOTO MANABU , IKEGUCHI TAKASHI , UEDA SHINJIRO , SONOBE TADASHI , MURASHITA TATSU , IDO SATOSHI , KUROISHI KAZUO
IPC分类号： H05H7/00 , H05H13/04

4. 发明专利

JPS57139607A POSITION MEASURING EQUIPMENT 失效
公开(公告)号：JPS57139607A
公开(公告)日：1982-08-28
申请号：JP2432981
申请日：1981-02-23
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE
发明人： KATOU YASUO , HOKOTANI YOSHIO , OZASA SUSUMU , IDO SATOSHI , FUJINAMI AKIHIRA
IPC分类号： G03B27/34 , G01B11/00 , G01B11/02 , G01C3/06 , H01L21/027 , H01L21/30
摘要： PURPOSE:To measure the position of the surface of an object with high accuracy even if the reflectance of the surface differs from place to place by controlling the intensity of the light source in such a manner that the quantity of the light which enters a detector after being reflected by a small light spot on the object is to be the standard value established beforehand. CONSTITUTION:The light from a semiconductor laser 11 is focused on the surface of an object 14 through a diaphragm 12 and a lens 13. At the time the diameter of the spot is made less than ten times of the measurement error. The reflected light is forcused on a detector 16 through a lens 15. When the spot on the surface of the object 14 moves from position A to position A', the image on the detector 16 moves from B to B' and the output voltage difference a-b of terminals a and b of the detector 16 changes according to the displacement of the image. The output c of an amplifier 17 corresponding to a+b is fed back to the semiconductor laser 11 by an amplifier 19 so as to become equal to the standard voltage. The ratio of a-b to a+b is put out through the amplifier 17 and a divider. With this constitution, the position of the object can be measured with high accuracy even if the reflectance of the surface differs from place to place.

5. 发明专利

JPS57204128A PRECISE SHIFTER 失效
公开(公告)号：JPS57204128A
公开(公告)日：1982-12-14
申请号：JP8818681
申请日：1981-06-10
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE
发明人： MORIYAMA SHIGEO , HOKOTANI YOSHIO , IDO SATOSHI , KOMATA FUJIO
IPC分类号： H01L21/68 , H01L21/027 , H01L21/30
摘要： PURPOSE:To position a two-dimensional moving table accurately at an origin by mounting the light source or one of light receivers of a detector detecting the quantity of the moving table moved to the moving table and the other to a rest frame. CONSTITUTION:The moving table consisting of an X table 1 with a driving motor 8 and a Y table 4 is positioned at the origin by means of the detector, in which a wafer 4' is attached onto the moving table while the light source 10 with a lens system 11 is mounted, a position sensor 12 is arranged to the rest frame at a position corresponding to the light source 10 and these are combined. On the other hand, the quantity of the table moved is detected by means of a laser interference measuring machine 7. Accordingly, the table can easily be positioned with the accuracy of + or -1mum without depending upon the mechanical accuracy of the moving base because the position of the origin can be defined from direct relationship between the Y table and the rest frame.

6. 发明专利

JPS57147238A ELECTRON RAY DRAWING DEVICE 失效
公开(公告)号：JPS57147238A
公开(公告)日：1982-09-11
申请号：JP3129981
申请日：1981-03-06
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE
发明人： OZASA SUSUMU , TAKAMOTO KIICHI , IDO SATOSHI
IPC分类号： H01J37/20 , H01J37/02 , H01J37/305 , H01L21/027
摘要： PURPOSE:To make the temperature of the titled device constant by simple constitution, and to improve the accuracy of drawing by cooling the electron ray drawing device by an isothermal gas. CONSTITUTION:The temperature of wafer in a wafer tank 10 is kept by a thermostat 11. The isothermal gas obtained through a heat exchanger 12, a copper pipe 13, etc. thereof are immersed in water of the water tank 10, is forwarded to each section 14 of the device. When air is used particularly as the gas, the structure of the device can be simplified because the gas need not be recovered and the gas used can be released into a room. When a conventional thermostat is employed, the temperature of the device can be made constant by simple constitution is which only a gas pump 9 and the heat exchanger 12 are added, and the accuracy of drawing is improved.

7. 发明专利

JPS55116108A POSITIONING CONTROL SYSTEM 失效
公开(公告)号：JPS55116108A
公开(公告)日：1980-09-06
申请号：JP2347879
申请日：1979-03-02
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE
发明人： HAMAMOTO NOBUO , ICHINO KAZUO , IDO SATOSHI
IPC分类号： G05D3/00 , G05B19/19 , G05D3/12 , H01L21/027 , H01L21/30
摘要： PURPOSE:To make it possible to position a movable body in a short time and with extremely-high precision (+ or -2mum or less) by driving the movable body at a high speed ater setting a threshold value to zero forcibly, and then by driving it at a low speed after setting the threshold value to a preset value. CONSTITUTION:Once a start signal for the start of operation is received from computer 12, high-speed pulses are outputted to motor driver 4 by using the decision (coincidence) signal of comparator 7 until the threshold level reaches target value 10, so as to obtain the target value rapidly. When the output signal of laser wavemeter 13 agrees with target value 10, driver pulses are stopped temporarily for as long as a certain time to damp vibrations, but when the current value is not within the range of the threshold value (window) due to an overrun or insufficient run at this time, it is judged from the output of window comparator 8 that every time one low-speed pulse is outputted, it is within the range of the threshold value, and until the threshold value this operation is repeated to obtain the target value.

8. 发明专利

JPH01311600A SYNCHROTRON RADIATION LIGHT GENERATOR 失效
公开(公告)号：JPH01311600A
公开(公告)日：1989-12-15
申请号：JP13933488
申请日：1988-06-08
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE
发明人： UEDA SHINJIRO , SONOBE TADASHI , IKEGUCHI TAKASHI , MATSUMOTO MANABU , KOBARI TOSHIAKI , KAKIUCHI SHUNJI , IDO SATOSHI , MURASHITA TATSU
IPC分类号： H05H7/14 , H05H13/04
摘要： PURPOSE:To extend the life of a charged particle beam and stabilize the SOR light by capturing gas molecules, photoelectrons and ions generated by the radiation of the SOR light. CONSTITUTION:The DC voltage is applied using a beam duct 2 as a cathode and an absorber 5 as an anode. Gas molecules and photoelectrons are emitted by the action of the synchrotron radiation light (SOR light). Some of the photoelectrons are pulled and captured by the absorber 5 side along the electric field. The other photoelectrons collide with the gas molecules and ionize them. The ionized gas molecules are pulled to the duct 2 side serving as the cathode and captured by the wall face. The gas emitted by the radiation of the SOR light and the residual gas in the duct are removed, the degree of vacuum in the duct is improved, ions are captured by the duct wall. The life of the electron beam is thereby extended.

9. 发明专利

JPS6427200A RADIATION LIGHT GENERATING DEVICE FOR SYNCHROTRON 失效
公开(公告)号：JPS6427200A
公开(公告)日：1989-01-30
申请号：JP18101587
申请日：1987-07-22
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE , HITACHI SERVICE ENG
发明人： MATSUMOTO MANABU , IKEGUCHI TAKASHI , UEDA SHINJIRO , KOBARI TOSHIAKI , SONOBE TADASHI , MURASHITA TATSU , IDO SATOSHI , KUROISHI KAZUO
IPC分类号： H05H13/04
摘要： PURPOSE:To improve vacuum discharge performance and extend the life of a charged particle beam by forming a radiation light drawing out duct in a shape widening from a branching point toward an exit side. CONSTITUTION:A radiation light drawing out duct 4 branching on the outer circumferential side of a charged particle beam duct at a deflection section and extending in the tangential direction with respect to the orbit of a charged particle beam circulating within the beam duct is made of a widening shape widening from the branching point toward an exit side by a larger widening angle than that of the widening of the radiation light. This prevents gas from being discharged due to the irradiation of the radiation light within the radiation light drawing out duct 4. At the same time the conductance of the gas flow in the duct 4 increases and a new discharge is constituted for discharging gas in a charged particle beam duct 1 of the deflection section outside to improve gas discharge performance.

10. 发明专利

JPS57148356A SAMPLE HOLDING DEVICE 失效
公开(公告)号：JPS57148356A
公开(公告)日：1982-09-13
申请号：JP3260481
申请日：1981-03-09
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE
发明人： HOKOTANI YOSHIO , MIYATA TOSHIMITSU , IDO SATOSHI , KOMATA FUJIO
IPC分类号： B25B11/00 , H01L21/67 , H01L21/68 , H01L21/683
摘要： PURPOSE:To enable to perform steady attraction at a low application voltage of several hundred volts as well as to eliminate the dielectric breakdown of a sample by a method wherein, when the sample is electrostatically attracted to the supporting member consisting of a semiconductive dielectric, the dielectric is composed of cellulose carbon or graphite wherein the volume resistivity of the dielectric is formed at 10 -10 OMEGA/cm. CONSTITUTION:An attracting stand, consisting of a semiconductive dielectric (b) which electrostatically attracts a conductive sample (a), is formed by the material consisting of the cellulosic carbon, pyrolytic graphite and the like, volume resistivity of which is prescribed at 10 -10 OMEGA/cm. Then, an electrode (c) is coated on the back of the dielectric (b), and the sample (a) is electrostatically attracted on the surface of the dielectric (b) by applying voltage to the sample (a) and the electrode (c). Accordingly, the electrostatic attraction force of several kg/cm can be obtained by applying a low voltage of several hundred volts, and also the dielectric breakdown phenomenon of the sample, which is the intrinsic defect of an electrostatic chuck, can be prevented.

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