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    • 7. 发明专利
    • Plasma processing device
    • 等离子体加工装置
    • JP2014141710A
    • 2014-08-07
    • JP2013010821
    • 2013-01-24
    • Y S Denshi Kogyo Kkワイエス電子工業株式会社
    • SUGITA YOSHIO
    • C23C8/32H05H1/46
    • PROBLEM TO BE SOLVED: To provide a plasma processing device such that many works having been subjected to simultaneous plasma processing have uniform quality.SOLUTION: A plasma processing device comprises: a work processing part 8 which comprises an induction heating coil 5, a high-frequency plasma generation electrode 7, a heating high-frequency oscillator 9, and a high-frequency oscillator 10 for plasma and performs plasma processing; work processing parts 8-1 to 8-100 where 100 work processing parts 8 are provided side by side; a chamber formation body 12 having a work set part 4; a chamber 14 comprising the chamber formation body 12 and a chamber formation body 13 which can be placed in a chamber closing state and a chamber opening state and has the work processing parts 8-1 to 8-100; work set means 25 for automatically supplying unprocessed works 2N to all work set parts 4 at a time; and work taking-out means 26 for automatically taking out works 2T having been processed at a time.
    • 要解决的问题:提供等离子体处理装置,使得许多已经经受同时等离子体处理的工件具有均匀的质量。解决方案:等离子体处理装置包括:工件处理部分8,其包括感应加热线圈5, 高频等离子体产生电极7,加热高频振荡器9和用于等离子体的高频振荡器10,进行等离子体处理; 工作处理部8-1〜8-100,其中100个加工部8并排设置; 具有工作部件4的腔室形成体12; 包括腔室形成体12的腔室14和能够被置于腔室关闭状态和腔室打开状态并具有工作处理部件8-1至8-100的腔室形成体13; 工件设定装置25,用于一次自动地将未处理的作品2N提供给所有工作组件4; 以及用于自动取出一次处理的作品2T的作业取出单元26。
    • 8. 发明专利
    • Plasma generator
    • 等离子发生器
    • JP2010212234A
    • 2010-09-24
    • JP2010029019
    • 2010-02-12
    • Y S Denshi Kogyo Kkワイエス電子工業株式会社
    • SUGITA YOSHIO
    • H05H1/46C23C16/52H01L21/3065
    • PROBLEM TO BE SOLVED: To provide a plasma generator in which an electromagnetic radiation is not caused and moreover a rigid vapor deposition film formation on a chamber inner wall does not occur.
      SOLUTION: The plasma generator is composed of a chamber 2 grounded in a zero potential, a plasma generating electrode 3 arranged inside the chamber 2 and generates plasma, a self-exciting type high frequency oscillator part 6, a shield 9 composed of the chamber 2 and a high frequency oscillator shielding cover 7 for covering the high frequency oscillator part 6 integrated with the chamber 2 in a conductive state, a middle point connection 8 grounding a middle point of a transformer 5 and the chamber 2 in the zero potential, an oscillator power supply 10 for supplying power to the oscillator 4, a working electrode forming part 11 arranged in the chamber 2 in an insulated state with the chamber 2, and a bias forming power supply 12 which impresses a bias voltage to the working electrode forming part 11 and is grounded in the zero potential with the shield 9.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供不引起电磁辐射的等离子体发生器,并且不会在室内壁上形成刚性气相沉积膜。 解决方案:等离子体发生器由在零电位接地的腔室2,布置在室2内部的等离子体产生电极3产生等离子体,自激式高频振荡器部分6,屏蔽体9由 腔室2和高频振荡器屏蔽盖7,用于覆盖导电状态下与腔室2集成的高频振荡器部分6;中点连接8将变压器5的中点和腔室2接地处于零电位 用于向振荡器4供电的振荡器电源10,与腔室2以绝缘状态配置在腔室2中的工作电极形成部分11以及向工作电极施加偏压的偏压成形电源12 形成零件11,并用屏蔽9接地零电位。版权所有(C)2010,JPO&INPIT
    • 9. 发明专利
    • Induction heating device
    • 感应加热装置
    • JP2006278315A
    • 2006-10-12
    • JP2006024835
    • 2006-02-01
    • Y S Denshi Kogyo Kkワイエス電子工業株式会社
    • SUGITA YOSHIO
    • H05B6/10B23B31/117B23P11/02H05B6/42
    • B23P11/027
    • PROBLEM TO BE SOLVED: To provide an induction heating device simply and quickly exchanging induction heating coils.
      SOLUTION: The device comprises an induction heating coil 4, a support body 5, a support body attaching part 9 to attach the support body 5 disposed in front of a step-up transformer 6, and support body fixing means 10a, 10b, 10c, and 10d that are right and left two each and four in total and disposed at the attaching part 9, puts the support body 5 to the attaching part 9 to press and fix it with a simple single operation by hand, and also releases the pressing condition by the simple single operation.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供感应加热装置简单快速地交换感应加热线圈。 解决方案:该装置包括感应加热线圈4,支撑体5,安装在升压变压器6前方的支撑体5的支撑体安装部9以及支撑体固定装置10a,10b ,10c,10d分别是左右两个和四个,并且设置在安装部9处,将支承体5固定在安装部9上,用简单的单手操作将其固定,也释放 按压状态由简单的单一操作。 版权所有(C)2007,JPO&INPIT
    • 10. 发明专利
    • Cutter holder heating method, and shrink-fitting device
    • 切割机加热方法和收缩装置
    • JP2003025158A
    • 2003-01-29
    • JP2001210329
    • 2001-07-11
    • Y S Denshi Kogyo Kkワイエス電子工業株式会社
    • SUGITA YOSHIO
    • B23P11/02C21D9/00H05B6/10
    • B23P11/027
    • PROBLEM TO BE SOLVED: To provide a cutter holder heating method capable of realizing a shrink-fitting device capable of efficiently induction-heating a small cuter holder to hold a cutter such as a very small drill from a cutter holding condition to a cutter drawing condition, and a shrink-fitting device.
      SOLUTION: When drawing the fitted cutter 9, the current runs only in the cutter holder 8, but does not run in the cutter 9 as shown in Fig. 2 because the depth of a current penetration is smaller than the wall thickness of 1 mm of the cutter holder. Thus, if the cutter 9 is drawn before the heat is sufficiently transferred, the cutter can be reliably drawn from a cutter holding hole 7 which is thermally expanded.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:提供一种切割机保持器加热方法,其能够实现能够有效地感应加热小切割器保持器以将诸如非常小的钻头的切割器从切割器保持状态保持到切割器拉伸条件的收缩装置 ,以及收缩装置。 解决方案:当绘制装配的切割器9时,电流仅在切割器保持器8中运行,但是不会在切割器9中延伸,如图3所示。 2,因为电流穿透的深度小于刀架的1mm的壁厚。 因此,如果切割器9在热被充分转移之前被拉出,则切割器可以从热膨胀的切割器保持孔7被可靠地拉出。