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    • 3. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPH11233671A
    • 1999-08-27
    • JP2750098
    • 1998-02-09
    • FUJI ELECTRIC CO LTD
    • MOROZUMI AKIRA
    • H01L23/12H01L25/07H01L25/18
    • PROBLEM TO BE SOLVED: To suppress the stress acting on ceramics and to prevent the deterioration of insulation owing to a crack by providing the junction part of an outer lead-through terminal and one copper plate by means of solder on a side further inside than the edge of the copper plate by a specified dimension. SOLUTION: Copper plates 2b and 2c are stuck on both faces of a ceramics substrates 2a (thickness of 0.635 mm). A semiconductor chip 3 is mounted on a copper plate 2c (thickness of 0.3 mm). The other copper plate 2b (thickness 0.2 mm) is fixed to the inner side of a heat discharge metal base 1. An outer lead-through terminal 4 is mounted on the copper plate 2c. The junction part of the outer lead-through terminal 4 and the copper plate 2c by solder is set to the side further inside than the edge of the copper plate 2c by at least 3 mm. Thus, maximum main stress deteriorates as the position of the solder connection part of the terminal becomes further than the edge part of the copper plate, and generated stress becomes 130 Mpa by setting it further into the inner side by 3 mm from the edge part. The stress generated is not more than the breaking stress of ceramics (aluminum nitride), and substrate damage can be prevented.
    • 5. 发明专利
    • POWER SEMICONDUCTOR MODULE
    • JP2002203942A
    • 2002-07-19
    • JP2000402127
    • 2000-12-28
    • FUJI ELECTRIC CO LTD
    • KOBAYASHI TAKATOSHIMIYASAKA TADASHIYAMADA KATSUMIMOROZUMI AKIRA
    • H01L23/12H01L23/373H01L25/07H01L25/18H02M7/00
    • PROBLEM TO BE SOLVED: To optimize a ceramic substrate, the quality of material in a metal base, dimensions, a junction material, and a boding method for improving reliability and for lengthening a life in a power semiconductor module. SOLUTION: In this power semiconductor module, a package integrated with terminal is combined with the circuit assembly body of the metal base 1, ceramic substrate 2 and power semiconductor chip 9. In this case, in the ceramic substrate, a front circuit plate 8b and a back plate 8c are joined to both the surfaces of a ceramic plate 8a, and the metal base is soldered to the ceramic substrate. Also, the metal base is made of copper and a copper alloy having a thermal conductivity of 250 W/mK or more, and the plate thickness is set to 3.9 to 6 mm. In the ceramic substrate, the thickness of the ceramic plate is set to 0.1 to 0.65 mm, the thicknesses of the front circuit and back plates are set to 0.1 to 0.5 mm, the external dimensions are set to 50 mm×50 mm maximum, aspect ratio is prescribed from 1:1 to 1:1.2, solder having a melt point of 183 to 250 deg.C is used, and the layer thickness is set to 0.1 to 0.3 mm for bonding the metal base to the ceramic substrate by solder.
    • 9. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPH0851169A
    • 1996-02-20
    • JP18570794
    • 1994-08-08
    • FUJI ELECTRIC CO LTD
    • TOBA SUSUMUMOROZUMI AKIRASHIGETA FUMIO
    • H01L23/12H01L23/373
    • PURPOSE:To reduce deformation of an insulating substrate even when stress is generated by the difference of thermal expansion coefficients between a semiconductor element body and the insulating substrate by composing a substrate made of a metal supporting the semiconductor element of steel. CONSTITUTION:Low cost steel is used as the material of a substrate 1 made of a metal. The deformation of a substrate 1 is reduced even when substrate stress is generated by the difference of thermal expansion coefficients with a semiconductor by employing steel having a larger elastic coefficient than copper, and the breakdown of the insulating substrate 2 or the breakdown or characteristic change of a transistor chip 31 and a diode chip 32 can be prevented. When a cooling fin 9 is made of aluminum, the erosion of Al in the cooling fin is reduced by using steel having a small contact potential difference with Al in place of copper having large contact potential difference with Al. When the clad material of a steel material and copper is employed as the material of the substrate made of the metal brought into contact with the cooling fin, the thermal expansion coefficient of the clad material can be brought close to that of a semiconductor material or the insulating material of the insulating substrate.