专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2005240952A Magnetic bearing device and turbo-type vacuum pump 审中-公开
标题翻译：磁力轴承装置和涡轮式真空泵
公开(公告)号：JP2005240952A
公开(公告)日：2005-09-08
申请号：JP2004054281
申请日：2004-02-27
申请人： Ebara Corp , Ebara Densan Ltd , 株式会社荏原製作所 , 株式会社荏原電産
发明人： OCHIAI TOSHIHARU , SEKIGUCHI SHINICHI , MIYAMOTO MATSUTARO , NAKAZAWA TOSHIHARU
IPC分类号： G01B7/30 , F04D19/04 , F04D29/04 , F04D29/056 , F04D29/058 , F16C32/04 , G01B7/00 , H02K7/09
CPC分类号： F16C32/0476 , F16C32/0446 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of reducing the influence of a thermal expansion of a rotary shaft due to high temperature, preventing the amount of whirling caused by unbalance of a rotary shaft from being superposed on the output value of an axial displacement sensor, mounting the axial displacement sensor in a place other than an end of the rotary shaft, and stably controlling a position in the axial direction of the rotary shaft. SOLUTION: The magnetic bearing device is equipped with at least a pair of axial magnetic bearings 5a, 5b for magnetically levitating a rotary shaft 1, at least one axial displacement sensor 6 for detecting an axial levitating position of the rotary shaft 1, a magnetic bearing control device 17 for controlling exciting current of the axial magnetic bearings 5a, 5b so as to magnetically levitate the rotary shaft 1 at a prescribed position on the basis of the output value of the axial displacement sensor 6. A sensor target 7 concentric with the rotary shaft 1 is provided to the vicinity of a high-temperature part of the rotary shaft 1. The axial displacement sensor 6 is arranged in a position opposed to the sensor target 7. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够降低由于高温导致的旋转轴的热膨胀的影响的磁轴承装置，防止由旋转轴的不平衡引起的旋转量叠加在输出端上轴向位移传感器的值，将轴向位移传感器安装在旋转轴的端部以外的位置，并稳定地控制旋转轴的轴向位置。解决方案：磁性轴承装置配备有至少一对用于磁悬浮旋转轴1的轴向磁轴承5a，5b，至少一个用于检测旋转轴1的轴向悬浮位置的轴向位移传感器6，磁轴承控制装置17，其用于控制轴向磁轴承5a，5b的励磁电流，以便根据轴向位移传感器6的输出值将旋转轴1磁化悬浮在规定的位置。传感器目标7同心旋转轴1设置在旋转轴1的高温部附近。轴向位移传感器6配置在与传感器目标7相对的位置。（C）2005，JPO＆NCIPI

2. 发明专利

JP2004112877A Brake controller for rotating machine 有权
公开(公告)号：JP2004112877A
公开(公告)日：2004-04-08
申请号：JP2002269138
申请日：2002-09-13
申请人： Ebara Corp , Ebara Densan Ltd , 株式会社荏原製作所 , 株式会社荏原電産
发明人： OCHIAI TOSHIHARU , NAKAZAWA TOSHIHARU , OYAMA ATSUSHI , SASAKI TAKAHIKO
IPC分类号： H02P27/06 , H02P5/41
摘要： PROBLEM TO BE SOLVED: To provide a brake controller capable of assuring an optimum power consumption in a regenerative power consumption means which consumes regenerative power. SOLUTION: This controller device is provided with a regenerative power detection portion (8) for detecting regenerative power regenerated on the power supply side from an electric motor, a regenerative power consumption portion (4) consuming the regenerative power, a regenerative power control unit (5) for controlling power consumption in the regenerative power consumption portion (4) based on the detected results of the regenerative power detection portion (8), and a rotational speed detection circuit (6) and an inverter control unit (22) for controlling generated regenerative power energy. Preferably, the regenerative power control unit (5) is controlled so that regenerative power may be consumed at fixed current, voltage or electric power by the regenerative power consumption portion (4). COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2002372046A Magnetic bearing device 审中-公开
标题翻译：磁力轴承装置
公开(公告)号：JP2002372046A
公开(公告)日：2002-12-26
申请号：JP2001181998
申请日：2001-06-15
申请人： Ebara Corp , Ebara Densan Ltd , 株式会社荏原製作所 , 株式会社荏原電産
发明人： OYAMA ATSUSHI , NAKAZAWA TOSHIHARU
IPC分类号： G01B7/00 , F16C32/04
CPC分类号： F16C32/0448 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To miniaturize a magnetic bearing device by dispensing with a distance sensor.
SOLUTION: Ring-shaped two electromagnets 10a, 10b and permanent magnets 16a, 16b are mounted through a controlled member 30, and a PWM power source 15 applies the electric power to a bridge circuit composed of the electromagnets and two load elements 17a, 17b. A signal processing circuit 18 receives signals from output terminals OUT1 and OUT2 of the bridge circuit, and operates the difference in amplitudes of the receives signals. When the controlled member 30 is displaced in the a or b direction, the difference in amplitudes is not zero, so that the signal processing circuit 18 operates the adjustment voltage to equalize inductances of two electromagnets 10a, 10b. The adjustment voltage is compensated by a compensating circuit 14 to stabilize the close circuit characteristic of a control system, and supplied to the PWM power source 15, whereby the PWM power source 15 adjusts the outputted average voltage by modulating pulse widths.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：通过分配距离传感器来小型化磁性轴承装置。解决方案：环形两个电磁铁10a，10b和永磁体16a，16b通过受控构件30安装，PWM电源15将电力施加到由电磁体和两个负载元件17a，17b组成的桥式电路。信号处理电路18从桥接电路的输出端子OUT1和OUT2接收信号，并操作接收信号的振幅差。当受控构件30在a或b方向上移位时，幅度差不为零，使得信号处理电路18操作调节电压以均衡两个电磁体10a，10b的电感。调整电压由补偿电路14补偿以稳定控制系统的闭路特性，并提供给PWM电源15，由此PWM电源15通过调制脉冲宽度来调节输出的平均电压。

4. 发明专利

JP2004132537A Magnetic bearing control device 审中-公开
公开(公告)号：JP2004132537A
公开(公告)日：2004-04-30
申请号：JP2003099494
申请日：2003-04-02
申请人： Ebara Corp , Ebara Densan Ltd , Tokyo Denki Univ , 学校法人東京電機大学 , 株式会社荏原製作所 , 株式会社荏原電産
发明人： OYAMA ATSUSHI , NAKAZAWA TOSHIHARU , YOSHIDA TOSHIYA
IPC分类号： F16C32/04
CPC分类号： F16C32/0457 , F16C32/0448 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a sensor-less magnetic bearing control device having a simple system structure without requiring a special digital arithmetic processing.
SOLUTION: A bias voltage source 12 for supplying a bias current required to maintain the linear characteristic of electromagnets, and a control current source 7 for supplying the exciting current required to control a rotor to be floated for support at a desirable position, while overlapping with the bias current from the bias voltage source, are connected to the electromagnets 10 and 11 forming a magnetic bearing. The exciting current output from the control current source is supplied to the pair of electromagnets, which are arranged opposite to each other, at an opposite duty ratio by controlling the magnetic bearing control voltage source to modulate an amplitude of the pulse. The duty ratio is controlled so that impedance of each of the pair of electromagnets, which changes in response to position of the rotor 13, becomes equal to each other.
COPYRIGHT: (C)2004,JPO

5. 发明专利

JP2005022059A Grinder and grinding method 审中-公开
标题翻译：研磨和研磨方法
公开(公告)号：JP2005022059A
公开(公告)日：2005-01-27
申请号：JP2003270460
申请日：2003-07-02
申请人： Ebara Corp , Ebara Densan Ltd , 株式会社荏原製作所 , 株式会社荏原電産
发明人： ISHII YU , SATO KAZUKI , NAKAZAWA TOSHIHARU
IPC分类号： B24B41/047 , B23B19/02 , B24B7/04 , B24B49/10 , F16C32/04 , F16C32/06 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a grinder and a grinding method which automatically stabilizes or varies a relative positional relation between a ground object and a grinding tool in real time, and immediately detects abnormal grinding in real time, without trusting engineer's intuition or experience.
SOLUTION: The grinder 1 comprises a turn table 10 for holding and rotating a semiconductor wafer (ground object) W and a grinding tool 40 to which a grinding wheel 45 is attached and that rotates and drives. The grinder 1 grinds the ground surface of the semiconductor wafer W into a flat surface by relatively moving the semiconductor wafer W and the grinding tool 40 while the grinding wheel 45 of the grinding tool 40 is pressed onto the semiconductor wafer W held by the turn table 10. Aside from a bearing (air spindle) 49 for pivoting a driving shaft 47 for rotating the grinding tool 40, a magnetic bearing 60 for controlling the attitude of the grinding tool 40 is installed near the grinding tool 40.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种实时自动稳定或改变地面物体和研磨工具之间的相对位置关系的研磨机和研磨方法，并且不用信任工程师的直觉即时检测异常磨削。或经验。研磨机1包括用于保持和旋转半导体晶片（地面物体）W的转台10和安装有砂轮45并被旋转和驱动的研磨工具40。研磨机1通过相对移动半导体晶片W和研磨工具40将半导体晶片W的地表面研磨成平坦表面，同时研磨工具40的砂轮45被按压到由转台所保持的半导体晶片W上除了用于使用于使研磨工具40旋转的驱动轴47的轴承（空气主轴）49之外，用于控制研磨工具40的姿态的磁轴承60安装在研磨工具40附近。版权所有：（C）2005，JPO＆NCIPI

6. 发明专利

JP2005273637A Failure predicting system for gas discharger such as vacuum pump 审中-公开
标题翻译：气体排放器故障预报系统如真空泵
公开(公告)号：JP2005273637A
公开(公告)日：2005-10-06
申请号：JP2004092630
申请日：2004-03-26
申请人： Ebara Densan Ltd , 株式会社荏原電産
发明人： OYAMA ATSUSHI , NAKAZAWA TOSHIHARU
IPC分类号： F04B49/10 , F04B37/16
摘要： PROBLEM TO BE SOLVED: To provide a failure predicting system enabling maintenance of a monitored object to be performed at the correct timing.
SOLUTION: The failure predicting system 1 for monitoring a gas discharger used for discharging gas generated in a manufacturing process such as a semiconductor producing process, comprises an oscillator 14 provided in a casing of the gas discharger and/or gas atmosphere in piping near the gas discharger; an exciting element 13 capable of oscillating the oscillator 14; a oscillation detecting element 15 for detecting oscillation generated by the oscillator 14; and a protecting device 12 controlling an action of the exciting element 13, receiving an output signal of the oscillation detecting element 15, memorizing changes in a structure of the oscillator 14, and detecting that the change exceeds a predetermined threshold to output.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种故障预测系统，使得能够在正确的时机执行被监视对象的维护。解决方案：用于监测用于在诸如半导体制造工艺的制造过程中产生的气体排出的气体放电器的故障预测系统1包括设置在气体放出器的壳体中的振荡器14和/或管道中的气体气体靠近气体放电器; 能振荡振荡器14的励磁元件13; 用于检测由振荡器14产生的振荡的振荡检测元件15; 以及保护装置12，其控制励磁元件13的动作，接收振荡检测元件15的输出信号，存储振荡器14的结构的变化，并且检测出该变化超过预定阈值以输出。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2014057506A Canned motor, vacuum pump 有权
标题翻译： CANNED电机，真空泵
公开(公告)号：JP2014057506A
公开(公告)日：2014-03-27
申请号：JP2013012284
申请日：2013-01-25
申请人： Ebara Corp , 株式会社荏原製作所
发明人： HOZUMI TAKASHI , YOSHIDA SHINYA , KOJIMA YOSHINORI , INADA TAKANORI , NAKAZAWA TOSHIHARU
IPC分类号： H02K5/128
摘要： PROBLEM TO BE SOLVED: To reduce the thickness of a resin can.SOLUTION: A canned motor coupled with a vacuum pump and being used as a rotary drive source of a vacuum pump includes a stator core, a rotor arranged on the inside of the stator core, and a nonconductive can disposed between the stator core and the rotor, isolating the stator core and the rotor, and using resin, ceramics or their composite material as the material. The can is bonded to the stator core by an adhesive.
摘要翻译：要解决的问题：减小树脂罐的厚度。解决方案：与真空泵耦合并用作真空泵的旋转驱动源的固定马达包括定子芯，转子，其布置在定子的内部铁心和定子铁心与转子之间设置有非导电体，隔离定子铁心和转子，并使用树脂，陶瓷或其复合材料作为材料。罐通过粘合剂结合到定子芯上。

8. 发明专利

JP2010127119A Dry vacuum pump unit 审中-公开
标题翻译：干式真空泵单元
公开(公告)号：JP2010127119A
公开(公告)日：2010-06-10
申请号：JP2008300100
申请日：2008-11-25
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KASHIWABARA SATOSHI , NIIMURA YOSHIHIRO , SEKIGUCHI SHINICHI , NAKAZAWA TOSHIHARU , OYAMA ATSUSHI
IPC分类号： F04C29/00 , F04C23/00 , F04C25/02
摘要： PROBLEM TO BE SOLVED: To provide a small and lightweight dry vacuum pump unit easy carriable by handling.
SOLUTION: This dry vacuum pump unit includes a pump part 21 comprising a pair of pump rotors 32a and 32b and a pump casing 30 having an intake port 21a and an exhaust port 21b, and a motor part 20. The motor part 20 is a magnet coupling type DC brushless motor having a pair of magnet rotors and integrally mutually synchronously anti-rotating the pair of pump rotors without using a timing gear. The pump casing 30 is constituted of aluminum or an aluminum alloy, and the pump rotors 32a and 32b are provided by fitting and fixing a screw composed of aluminum or an aluminum alloy or forming and fixing a screw composed of resin material, on the outer periphery of rotary shafts 31a and 31b composed of a steel material.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一个小而轻便的干式真空泵单元，通过处理便于携带。解决方案：该干式真空泵单元包括：泵部21，其包括一对泵转子32a和32b;以及具有进气口21a和排气口21b的泵壳体30以及电动机部件20.马达部件20 是一种具有一对磁体转子的磁体耦合型直流无刷电动机，并且在不使用正时齿轮的情况下整体地相互同步地防转动一对泵转子。泵壳30由铝或铝合金构成，泵转子32a，32b通过将由铝或铝合金构成的螺钉嵌合固定，或者在外周形成固定由树脂材料构成的螺杆由钢材构成的旋转轴31a，31b。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2014074380A Dry vacuum pump device 有权
标题翻译：干式真空泵装置
公开(公告)号：JP2014074380A
公开(公告)日：2014-04-24
申请号：JP2012222878
申请日：2012-10-05
申请人： Ebara Corp , 株式会社荏原製作所
发明人： IWASAKI KOICHI , NAKAZAWA TOSHIHARU , YOSHIDA SHINYA , OYAMA ATSUSHI
IPC分类号： F04C25/02 , F04C28/06 , F04C28/28
摘要： PROBLEM TO BE SOLVED: To provide a dry vacuum pump that can be stably operated without causing a failure of a motor and an inverter when a load is increased.SOLUTION: A dry vacuum pump device 1 comprises: at least one pump unit; and a control device 5 for controlling the pump unit. The pump unit comprises: a dry vacuum pump 2; a motor 3 for driving the dry vacuum pump 2; and an inverter 4 for controlling the rotational speed of the motor 3. The control device 5 has a function of switching an output current limit value of the inverter 4 from a first current limit value to a second current limit value. The first current limit value is a continuous rated current value, which is the maximum current value that can be continuously passed through the motor 3 by the inverter 4, and the second current limit value is larger than the continuous rated current value.
摘要翻译：要解决的问题：提供一种干式真空泵，其能够在负载增加时不会引起电动机和逆变器的故障而稳定地运行。解决方案：干式真空泵装置1包括：至少一个泵单元; 以及用于控制泵单元的控制装置5。泵单元包括：干式真空泵2; 驱动干式真空泵2的马达3; 以及用于控制电动机3的转速的逆变器4.控制装置5具有将逆变器4的输出电流限制值从第一限流值切换到第二限流值的功能。第一电流限制值是连续的额定电流值，其是由逆变器4连续通过电动机3的最大电流值，并且第二电流限制值大于连续额定电流值。

10. 发明专利

JP2012055042A Power supply device 审中-公开
标题翻译：电源设备
公开(公告)号：JP2012055042A
公开(公告)日：2012-03-15
申请号：JP2010193978
申请日：2010-08-31
申请人： Ebara Corp , 株式会社荏原製作所
发明人： OSUGA TORU , OYAMA ATSUSHI , NAKAZAWA TOSHIHARU
IPC分类号： H02M7/48 , H02M3/155 , H02M7/493 , H02P27/06
摘要： PROBLEM TO BE SOLVED: To provide a power supply device capable of responding to a demand for transient large power, with small size.SOLUTION: The power supply device includes a cutoff unit for supplying/shielding a commercial power source, and inverters 11 and 21 for outputting a drive power of arbitrary frequency to motors M1 and M2. The inverters 11 and 21 include a rectification part for rectifying a commercial power supply, and a smoothing part for smoothing the voltage rectified by the rectification part. An output part of the smoothing part is equipped with a frequency conversion part consisting of a switching element. A transient power supply part 14 is provided in which, when an output power of the frequency conversion part comes to be a predetermined value or higher, a shortfall power is supplied to the frequency conversion part, from a capacitor of the smoothing part or from a capacitor 12 for supplying power, which is separately installed, and when the output power of the frequency conversion part comes to be a predetermined value or less, the capacitor 12 for power supply is charged with the rectification part. Thus, with a load fluctuation of an output power relative to the input power to the inverters 11 and 21 being averaged in terms of time, the component on the high order side of the frequency conversion part and the capacity of equipment are miniaturized.
摘要翻译：要解决的问题：提供能够响应于具有小尺寸的瞬态大功率的需求的电源装置。解决方案：电源装置包括用于提供/屏蔽商用电源的切断单元以及用于向马达M1和M2输出任意频率的驱动功率的反相器11和21。逆变器11和21包括用于整流商用电源的整流部分和用于平滑由整流部分整流的电压的平滑部分。平滑部的输出部配备有由开关元件构成的变频部。提供了一个瞬时电源部分14，其中当频率转换部分的输出功率达到预定值或更高时，从平滑部分的电容器或从平滑部分的电容器向频率转换部分提供短缺功率用于供电的电容器12，分开安装，当变频部的输出功率为规定值以下时，电源用电容器12由整流部分充电。因此，相对于反相器11和21的输入功率的输出功率的负载波动在时间上被平均化，变频部分的高阶侧的分量和设备的容量被小型化。版权所有（C）2012，JPO＆INPIT

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式