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1. 发明专利

JP5952622B2 回転シャフトの軸方向位置検出装置とそのターボ分子ポンプ用途有权
标题翻译：旋转轴和其涡轮分子泵应用的轴向位置检测装置
公开(公告)号：JP5952622B2
公开(公告)日：2016-07-13
申请号：JP2012091487
申请日：2012-04-13
申请人：エスケーエフ・マグネティック・メカトロニクス
发明人：シュレーダー,ウルリッヒ
IPC分类号： F04D19/04 , F16C32/04 , G01D5/20
CPC分类号： G01D5/2013 , F04D19/048 , F04D27/001 , F04D29/051 , F04D29/058 , F16C32/0446 , F16C32/0476 , F16C32/0489

2. 发明专利

JP2014087257A Mobile apparatus, exposure equipment, and method for manufacturing device 有权
标题翻译：移动装置，曝光装置和制造装置的方法
公开(公告)号：JP2014087257A
公开(公告)日：2014-05-12
申请号：JP2013222686
申请日：2013-10-25
申请人： Nikon Corp , 株式会社ニコン
发明人： ARAI YOICHI , MORIMOTO SHIGE , MICHEL PHARAND
IPC分类号： H02K41/03 , H01L21/027 , H01L21/68 , H02K5/20 , H02K9/19
CPC分类号： H02K7/09 , F16C32/0468 , F16C32/0476
摘要： PROBLEM TO BE SOLVED: To simplify a structure of a wafer stage device including a planar motor.SOLUTION: Exposure equipment includes a wafer stage device 20 having a surface plate 30. The surface plate 30 includes: a mother board 36 having a plurality of output connectors that can be respectively connected to input connectors of a plurality of coil units 50 constituting a planar motor for driving a wafer stage 24, for distributing power to the plurality of coil units 50 via the input and output connectors; and a manifold plate 34 arranged so as to be overlapped with the mother board 36, and having a plurality of second joints that can be respectively connected to first joints of the plurality of coil units 50, for distributing a coolant to the plurality of coil units 50 via the first and second joints. The plurality of coil units 50 are regularly arranged along one surface of the mother board 36.
摘要翻译：要解决的问题：为了简化包括平面电动机的晶片台装置的结构。解决方案：曝光装置包括具有表面板30的晶片台装置20.表面板30包括：母板36，其具有多个输出可以分别连接到构成用于驱动晶片台24的平面电动机的多个线圈单元50的输入连接器的连接器，用于经由输入和输出连接器将功率分配给多个线圈单元50; 以及配置成与母板36重叠的歧管板34，并且具有可分别连接到多个线圈单元50的第一接头的多个第二接头，用于将冷却剂分配到多个线圈单元 50通过第一和第二关节。多个线圈单元50沿着母板36的一个表面规则地布置。

3. 发明专利

JP2012251662A Magnetic bearing device, and solid-liquid separator with the same mounted thereon 有权
标题翻译：磁力轴承装置及其安装的固体液体分离器
公开(公告)号：JP2012251662A
公开(公告)日：2012-12-20
申请号：JP2012193128
申请日：2012-09-03
申请人： Tokyo Univ Of Science , 学校法人東京理科大学 , Cms:Kk , 株式会社シーエムエス
发明人： OSHIMA MASAHIDE
IPC分类号： F16C32/04 , B04B1/20 , B04B9/12
CPC分类号： F16C32/0476 , F16C32/0459 , F16C2320/42
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of keeping predetermined rigidity when power of an electromagnet is on, and of touching down to a bearing when the power is turned off, and having small leakage of magnetic flux in an eccentric direction while effectively acting on eccentricity perpendicular to a control direction; and a solid-liquid separator with the magnetic bearing device mounted thereon.SOLUTION: Two electromagnetic iron cores 29a, 29b are protruded on a lower surface of a stator core 29. Between the two electromagnetic iron cores 29a, 29b, one annular slot 49 is formed. On the inner side of the annular slot 49 and the electromagnetic iron core 29a and the outer side of the annular slot 49 and the electromagnetic iron core 29b, winding wires are arranged, respectively. Meanwhile, on the upper surface of the rotor core 35, magnetic materials 51, 53 are annularly protruded with a rotating axis as the center so as to face the electromagnetic iron cores 29a, 29b. Between the magnetic materials 51, 53, an annular permanent magnet 55 is firmly fixed.
摘要翻译：要解决的问题：提供一种能够在电磁铁接通时保持预定刚度并且在断电时与轴承相接触的磁性轴承装置，并且具有小的磁通量泄漏偏心方向，同时有效地作用于垂直于控制方向的偏心; 以及安装有磁性轴承装置的固液分离器。解决方案：两个电磁铁芯29a，29b突出在定子芯29的下表面上。在两个电磁铁芯29a，29b之间形成一个环形槽49。在环形槽49的内侧和电磁铁芯29a以及环形槽49的外侧和电磁铁芯29b上分别布置绕组线。同时，在转子铁芯35的上表面上，磁性材料51,53以旋转轴为中心环状地突出，以面对电磁铁芯29a，29b。在磁性材料51,53之间，牢固地固定环形永磁体55。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP4788351B2 Fuel cell for the supercharger 有权
公开(公告)号：JP4788351B2
公开(公告)日：2011-10-05
申请号：JP2006011060
申请日：2006-01-19
申请人：株式会社ジェイテクト
发明人：拓知上山 , 裕豊宮川 , 学谷口
IPC分类号： F04D29/056 , F04D17/10 , F04D29/057 , F04D29/058 , F16C27/02 , F16C32/04 , H01M8/04 , H01M8/06
CPC分类号： F04D29/05 , F16C17/024 , F16C32/0402 , F16C32/0476 , F16C2360/42 , F16C2360/44
摘要： A fuel-cell compressed-air supplying device 6 includes a centrifugal compressor 12 provided in a casing 11, and a bearing device 14 for supporting a rotation shaft 13 of the compressor 12. The bearing device 14 includes a pair of radial foil bearings 21 and 22 provided coaxially with the rotation shaft 13 for supporting the rotation shaft 13 in the radial direction, and an axial magnetic bearing 23 facing to the rotation shaft 13 in the axial direction for supporting the rotation shaft 13 in the axial direction. Axial electromagnets 24 and 25 of the axial magnetic bearing 23 are integrated with the radial foil bearings 21 and 22, respectively.

5. 发明专利

JP4779761B2 Fuel cell compressor 有权
公开(公告)号：JP4779761B2
公开(公告)日：2011-09-28
申请号：JP2006094366
申请日：2006-03-30
申请人：株式会社ジェイテクト
发明人：拓知上山 , 裕豊宮川 , 学谷口
IPC分类号： F04D29/058 , F04D27/00 , F04D29/056 , F16C32/04 , H01M8/00 , H01M8/06
CPC分类号： F16C32/0402 , F04D25/0606 , F04D29/057 , F04D29/058 , F16C17/024 , F16C17/24 , F16C32/0476 , F16C2360/42 , F16C2360/44
摘要： A bearing device supporting a rotation shaft (13) of a fuel cell compressor (1) includes a pair of radial foil bearings (21,22) and mounted in concentric relation to the rotation shaft and supporting the rotation shaft in a radial direction, and an axial magnetic bearing (23) opposed to the rotation shaft in an axial direction and supporting the rotation shaft in the axial direction. A control device (61) includes bearing life diagnostic unit for accumulating times during which a rotational speed of the rotation shaft has been below a predetermined value, so as to obtain a cumulative contact time, thereby judging a bearing lifetime.

6. 发明专利

JP2008275102A Bearing device 有权
标题翻译：轴承装置
公开(公告)号：JP2008275102A
公开(公告)日：2008-11-13
申请号：JP2007120889
申请日：2007-05-01
申请人： Jtekt Corp , 株式会社ジェイテクト
发明人： OTSUBO KAZUYOSHI
IPC分类号： F16C32/06 , F16C32/04
CPC分类号： F16C32/0444 , F16C32/0476 , F16C32/0614 , F16C32/0692
摘要： PROBLEM TO BE SOLVED: To provide a bearing device capable of performing finer positioning of a main shaft and realizing high positioning accuracy.
SOLUTION: A main thrust bearing part 21 includes a first regulating part 211 for generating a first thrust force with respect to a first face 11a of a main shaft part 1, and a second regulating part 212 for generating a second thrust force with respect to a second face 12a of the main shaft part 1. An adjustable thrust bearing part 4 includes a third opposing face 41b opposed in a non-contact manner to a third face 13a of the main shaft part 1 and generates a changeable adjustable thrust force with respect to the third face 13a. A control part 5 actively changes the adjustable thrust force by moving the third opposing face 41b based on displacement of the main shaft part 1 in the thrust direction. In an equilibrium state, the change amount of the adjustable thrust force of the main shaft part 1 with respect to a predetermined displacement is smaller than a total of the change amount of the first thrust force and the second thrust force with respect to the predetermined displacement.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供能够进行主轴更精细的定位并且实现高定位精度的轴承装置。主推力轴承部21包括：第一调节部211，其相对于主轴部1的第一面11a产生第一推力;第二限制部212，用于产生第二推力，相对于主轴部1的第二面12a。可调节推力轴承部4包括与主轴部1的第三面13a以非接触方式相对的第三相对面41b，并且产生可变的可调推力相对于第三面13a。控制部5基于主轴部1在推力方向上的位移而使第三相对面41b移动而主动地改变可调节推力。在平衡状态下，主轴部1相对于预定位移的可调推力的变化量小于第一推力和第二推力相对于预定位移的变化量的总和。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2007247619A Compressor for fuel cell 有权
标题翻译：燃料电池压缩机
公开(公告)号：JP2007247619A
公开(公告)日：2007-09-27
申请号：JP2006075824
申请日：2006-03-20
申请人： Jtekt Corp , 株式会社ジェイテクト
发明人： TANIGUCHI MANABU , KAMIYAMA HIROTOMO , MIYAGAWA HIROTOYO
IPC分类号： F04D29/058 , F04D29/056 , H01M8/00 , H01M8/04 , H01M8/06
CPC分类号： F16C32/0476 , F04D29/052 , F04D29/058 , F16C17/024 , F16C32/0402 , F16C2360/44
摘要： PROBLEM TO BE SOLVED: To provide a compressor for a fuel cell favorable for use in high speed rotation and superior in durability. SOLUTION: A bearing device 14 supporting a rotary shaft 13 for the compressor 1 for the fuel cell is provided with a pair of radial foil bearings 21, 22 provided concentrically to the rotary shaft 13 and supporting the rotary shaft 13 from a radial direction, and an axial magnetic bearing 23 opposing to the rotary shaft 13 from an axial direction and supporting the rotary shaft 13 from the axial direction. A control device 61 for an axial magnetic bearing includes a target floating position operation part 73 for moving an axial direction target floating position of the rotary shaft 13 to an anti-impeller side with accompanying increase of rotation speed. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种有利于高速旋转并且耐久性优异的燃料电池用压缩机。解决方案：支撑用于燃料电池的压缩机1的旋转轴13的轴承装置14设置有一对径向箔片轴承21,22，其同心地设置在旋转轴13上并且从径向支撑旋转轴13 方向，以及从轴向与旋转轴13相对的轴向磁轴承23，其从轴向支撑旋转轴13。用于轴向磁轴承的控制装置61包括目标浮动位置操作部73，用于随着旋转速度的增加而将旋转轴13的轴向目标浮动位置移动到反叶轮侧。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2007192116A Supercharger for fuel cell 有权
标题翻译：燃料电池超级电容器
公开(公告)号：JP2007192116A
公开(公告)日：2007-08-02
申请号：JP2006011066
申请日：2006-01-19
申请人： Jtekt Corp , 株式会社ジェイテクト
发明人： KAMIYAMA HIROTOMO , TANIGUCHI MANABU , MIYAGAWA HIROTOYO
IPC分类号： F04D17/10 , F04D29/057 , F04D29/058 , F16C27/02 , F16C32/00 , F16C32/04 , H01M8/04 , H01M8/06
CPC分类号： F16C17/024 , F16C32/0402 , F16C32/0476 , F16C2360/42 , F16C2360/44
摘要： PROBLEM TO BE SOLVED: To provide a supercharger for a fuel cell favorable in use at high-speed rotation and excellent in durability. SOLUTION: The supercharger 6 for a fuel cell is provided with a centrifugal compressor 12 provided in a casing 11 and a bearing device 14 supporting a rotary shaft 13 of a compressor 12. The bearing device 14 is provided with a pair of radial foil bearings 21, 22 provided concentrically with a rotary shaft 13 and supporting the rotary shaft 13 from a radial direction, and a group of axial magnetic bearings 23 opposed to the rotary shaft 13 from the axial direction and supporting the rotary shaft 13 from the axial direction. The axial magnetic bearing 23 includes an axial electromagnet 24 and a permanent magnet 25 opposing via a flange part 32 provided on the rotary shaft 13. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种在高速旋转中有利的燃料电池用增压器，并且耐久性优异。解决方案：用于燃料电池的增压器6设置有设置在壳体11中的离心式压缩机12和支撑压缩机12的旋转轴13的轴承装置14.轴承装置14设置有一对径向箔片轴承21,22与旋转轴13同心地从径向方向支撑旋转轴13，以及一组轴向磁轴承23，其从轴向与旋转轴13相对并且从轴向支撑旋转轴13 方向。轴向磁轴承23包括通过设置在旋转轴13上的凸缘部分32相对的轴向电磁体24和永久磁铁25.版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2005240963A Flywheel type energy storing device 审中-公开
标题翻译： FLYWHEEL型能源储存装置
公开(公告)号：JP2005240963A
公开(公告)日：2005-09-08
申请号：JP2004054621
申请日：2004-02-27
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MORI SATOSHI , SATO TADASHI
IPC分类号： F03G3/08 , F16C32/04 , H02J15/00 , H02K7/02 , H02K7/09
CPC分类号： F16C32/0485 , F16C32/0476 , F16C32/0497 , F16C2361/55
摘要： PROBLEM TO BE SOLVED: To provide a flywheel type energy storing device capable of reducing energy loss, reducing size, mutually converting an electric energy and rotational kinetic energy to each other, and having a high practical usage value. SOLUTION: This flywheel type energy storing device of outer rotor type is provided with a magnetic floating power generator/motor 16 which functions a magnetic bearing which supports a rotary body 15 having an outer rotor type flywheel 15f in the inside of a casing 10 in the radial direction with no contact, a motor, and a generator with a pair of rotor 19 and a stator 18. This floating power generator/motor includes a vertically disposed main shaft 17, a magnetic bearing support surface 15a for floating is formed at an upper surface of the rotor body 15, and a magnetic bearing pole portion 28 for floating having a permanent magnet 27 is disposed at a position facing the support surface, thus supporting the self-weight of the rotor body 15 by the magnetic force of the permanent magnet 27. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供能够减少能量损失，减小尺寸，相互将电能和旋转动能相互转换并具有高实际使用价值的飞轮式能量储存装置。解决方案：外转子式的飞轮式储能装置设置有磁浮动发电机/电动机16，该磁浮动发电机/电动机16用于支撑在壳体内部具有外转子型飞轮15f的旋转体15的磁轴承电动机和具有一对转子19和定子18的发电机。该浮动发电机/电动机包括垂直设置的主轴17，形成用于浮动的磁轴承支撑表面15a 在转子体15的上表面，具有永磁体27的用于浮动的磁轴承极部28设置在与支撑面相对的位置，从而通过转子体15的磁力支撑转子体15的自重永久磁铁27.版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2005522632A Exhaust gas turbocharger 有权
公开(公告)号：JP2005522632A
公开(公告)日：2005-07-28
申请号：JP2003584501
申请日：2003-03-08
申请人：フォルシュングスツェントルムユーリッヒゲーエムベーハー , ボルグワーナーインク
发明人：ジェンスヴォルフジャイル , ヨハンカーフレメレイ , マティーアスラング
IPC分类号： F02B39/00 , F01D25/16 , F04D25/04 , F04D29/04 , F04D29/041 , F04D29/048 , F16C32/04 , F16C39/06 , F16F15/18
CPC分类号： F04D25/04 , F04D29/051 , F04D29/058 , F05B2240/51 , F05B2240/511 , F05B2240/515 , F05D2220/40 , F16C32/0476 , F16C2360/24
摘要：【課題】できるだけ疲労を少なくし、不調の原因とならず、振動の傾向を無くすことのできる排気ガスターボチャージャのベアリングシステムを形成する。
【解決手段】排気ガスターボチャージャ(１)は、タービン車（４）および圧縮車（３）が取付られかつラジアルベアリング（５、６）および少なくとも１つのアキシャルベアリング（９）によって案内されるシャフト（２）を有している。ラジアルベアリング（５、６）は、軸方向磁気流れを発生する永久磁石(23〜31）を有する受動磁気ベアリングとして具体化されている。アキシャルベアリング（９）は、電磁石(55)、軸方向センサおよび電磁石(55)に影響を与える電流を制御するためのコントローラを有する能動磁気ベアリングとして具体化されている。

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