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1. 发明专利

JPS6165956A Feed screw system 失效
标题翻译：进料螺杆系统
公开(公告)号：JPS6165956A
公开(公告)日：1986-04-04
申请号：JP18445384
申请日：1984-09-05
申请人： Canon Inc
发明人： TAKAHASHI KAZUO
IPC分类号： F16H25/20
摘要： PURPOSE: To prevent variation in revolution torque of a feed screw system and production of a backlash thereof by dividing a nut part into two nuts, sensing a reaction force in the direction of the feed shaft of both nuts, and placing relative revolutional quantity of both the nuts under the negative control.
CONSTITUTION: When a reaction force is produced during revolution of a feed screw shaft 4 between both nuts 1 and 2 due to lead error of a screw shaft, the intensity of the reaction force is sensed by a reaction force detector 23. When the detecting signal of the reaction force detector is sent to a main controller 24, the main controller drives a fine-revolution mechanism 15 via a fine- revolution mechanism driver 21 to a little vary relative revolutional quantities of both the nuts. Variation rate of revolutional torque of the feed screw shaft is thereby moderated so that stable feeding operation having high precision can be attained.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：为了防止进给螺杆系统的转矩变化，并通过将螺母部分分成两个螺母来产生其间隙，检测两个螺母进给轴方向的反作用力，并将两个螺母的相对旋转量坚果在负面控制之下。构成：当由于螺杆轴的导程误差而在进给螺杆轴4的旋转期间产生反作用力时，由于反作用力检测器23检测到反作用力的强度。当检测信号反作用力检测器被发送到主控制器24，主控制器经由微型转动机构驱动器21驱动细旋转机构15，从而稍微改变两个螺母的相对旋转量。因此进给丝杠轴的转动扭矩的变化率变得缓和，从而可以获得高精度的稳定的进给操作。

2. 发明专利

JPS6162656A Feed screw system 失效
标题翻译：进料螺杆系统
公开(公告)号：JPS6162656A
公开(公告)日：1986-03-31
申请号：JP18256284
申请日：1984-09-03
申请人： Canon Inc
发明人： TAKAHASHI KAZUO
IPC分类号： F16H25/20
摘要： PURPOSE: To maintain the torque fluctuation during steady revolution minimum by variably controlling the pre-loads on a feed screw shaft and nuts detected as turning torque or the torque fluctuation.
CONSTITUTION: A minute displacement device 15 for variably controlling the space in the feed axial direction between a first nut 1 and a second nut 2 which are fitted to a feed screw shaft 4 with the nut section divided into two pieces is provided. A detecting means 16 for detecting the turning torque or the torque fluctuation of the feed screw shaft 4 is also provided, and this system consists of a main control unit 24 for controlling the drive of the minute displacement device 15 according to the output of this detecting means 16 and a specified control signal and a command device 25 for sending control signals to the main control unit 24. The torque fluctuation during steady revolution can be maintained minimum by this constitution.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：通过可变地控制进给螺杆轴上的预载荷和检测为转矩或转矩波动的螺母，来保持稳定转速期间的扭矩波动。本发明提供了一种用于可变地控制进给轴向方向上的微小位移装置15，该第一螺母1和第二螺母2安装在进给螺杆轴4上，螺母段被分成两部分。还设置有用于检测进给螺杆轴4的转矩或转矩波动的检测装置16，该系统包括：主控制单元24，用于根据该检测的输出来控制微小位移装置15的驱动; 装置16和指定的控制信号以及用于向主控制单元24发送控制信号的指令装置25.通过这种结构，稳定转速期间的转矩波动可以保持最小。

3. 发明专利

JPS59208243A Method of vibration isolating and device thereof 失效
标题翻译：振动隔离方法及其装置
公开(公告)号：JPS59208243A
公开(公告)日：1984-11-26
申请号：JP8279083
申请日：1983-05-13
申请人： Canon Inc
发明人： TAKAHASHI KAZUO
IPC分类号： F16F13/00 , F16F13/04 , F16F15/00 , F16F15/02 , F16F15/023 , H01L21/02
CPC分类号： F16F15/023 , F16F15/022 , F16F15/0232
摘要： PURPOSE:To enable to absorb the horizontal component of vibration of low frequency, by making use of rolling friction and viscous resistance on the isolating device of the vibration to be used for a manufacturing device of a semiconductor. CONSTITUTION:A frame 2 of the bottom of a main body 1 of a machine such as a manufacturing device of a semiconductor is supported by an air cushion 3 absorbing the vertical component of vibration. The air cushion 3 is secured to a pedestal 8a through a support 8, the support 8 is sticked in a stretching state by at least two elastic springs 11 which are arranged in the horizontal direction and confronted with each other in an oil tank 6 and at the same time the pedestal 8a is mounted on the bottom of the oil tank through a rolling unit 9. As high viscous oil 7 for braking and lubrication is being put within the oil tank 6, a horizontal component of the vibration of low frequency is absorbed.
摘要翻译：目的：通过利用半导体制造装置所使用的振动隔离装置上的滚动摩擦和粘性阻力，能够吸收低频振动的水平分量。构成：诸如半导体制造装置的机器主体1的底部的框架2由吸收垂直振动分量的气垫3支撑。气垫3通过支撑件8固定到基座8a上，支撑件8通过至少两个在水平方向上布置并在油箱6中彼此面对的弹性弹簧11处于拉伸状态同时基座8a通过滚动单元9安装在油箱的底部上。由于用于制动和润滑的高粘性油7被放入油箱6内，所以吸收低频振动的水平分量。

4. 发明专利

JPS61131442A Alignment device 失效
标题翻译：对齐设备
公开(公告)号：JPS61131442A
公开(公告)日：1986-06-19
申请号：JP25192784
申请日：1984-11-30
申请人： Canon Inc
发明人： AYADA NAOKI , YAMAMURA MITSUGI , HAMAZAKI FUMIYOSHI , KOSUGI MASAO , TAKAHASHI KAZUO , SEKI MITSUAKI
IPC分类号： H01L21/30 , G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F9/7088 , G03F7/70058 , G03F7/70725 , G03F9/7026 , G03F9/7057
摘要： PURPOSE:To enable to obtain an extremely high mathcing precision by a method wherein whether to make a wafer shift to the reticle side or to the wafer side is discriminated according to the metered result of the deviation amount between the reticle and the wafer. CONSTITUTION:The deviation amounts between a reticle reference mark RKR (L) on a lens PQ and the reticle set mark RSR (L) of a reticle RT in the left and right X and Y directions are detected by a detector 18R (1). Whether or not the even value of each metered value of these deviation amounts is within the allowable value is discriminated and when the even value does not still reach within the allowable value, each pulse motor PX and PY of a reticle stage RS and the lens PQ are again made to drive and the reticle stage RS is made to shift until the even value does reach within the allowable value. When the CPU discriminates that the even value reached within the allowable value, the exposing region of the reticle RT is set and the opening region of a blade BL is set so that a central circuit pattern part CP and left and right scribing regions SCR (L) are made to expose.
摘要翻译：目的：通过根据掩模版和晶片之间的偏移量的计量结果来识别是否将晶片移动到标线片侧或晶片侧的方法，能够获得极高的算术精度。构成：通过检测器18R（1）检测透镜PQ上的掩模版基准标记RKR（L）与左，右X方向和Y方向上的标线片RT的标线集合标记RSR（L）之间的偏差量。鉴别出这些偏差量的每个计量值的偶数值是否在容许值内，并且当偶数值不能达到允许值时，分划板台RS的每个脉冲电机PX和PY以及透镜PQ 再进行驱动，并使标线片台RS移动直到偶数值达到允许值内。当CPU识别到达到允许值内的偶数值时，设置标线RT的曝光区域，并且将刀片BL的开口区域设定为使得中央电路图案部CP和左右划线区域SCR（L ）被暴露。

5. 发明专利

JPS6165959A Ball screw system 失效
标题翻译：球螺系统
公开(公告)号：JPS6165959A
公开(公告)日：1986-04-04
申请号：JP18445684
申请日：1984-09-05
申请人： Canon Inc
发明人： TAKAHASHI KAZUO
IPC分类号： F16H25/22 , B23Q5/56 , B23Q11/04
CPC分类号： B23Q5/56 , B23Q11/04
摘要： PURPOSE:To prevent variation in revolutional torque of a ball screw system and production of a backlash thereof by dividing a nut part into two nuts, sensing a variation in revolutional torque of the ball screw shaft, and placing a distance between both the nuts in the direction of feed screw thereof under the negative control. CONSTITUTION:When a ball screw shaft 4 is varied in revolutional torque during revolution of the ball screw shaft 4 due to lead error thereof, the rate of variation in torque is sensed by a torque variation sensor 23. When the detecting signal of the torque variation sensor is sent to a main controller 24, the main controller drives a fine-displacement device 15 via a fine-revolution mechanism driver 22, whereby a little varying relative revolutional quantities of a main nut 1 and a sub nut 2. Excessive revolutional torque of the ball screw shaft will then be moderated and variation in revolutional torque be reduced.
摘要翻译：目的：为了防止滚珠丝杠系统的旋转扭矩发生变化，并通过将螺母部分分成两个螺母产生其间隙，检测滚珠丝杠轴的转动扭矩的变化，并在两个螺母之间放置一定距离进给螺杆的方向为负控制。构成：当滚珠丝杠轴4由于其引导误差而在旋转螺杆轴4的旋转期间的转动扭矩变化时，由转矩变化传感器23检测转矩的变化率。当扭矩变化的检测信号传感器被发送到主控制器24，主控制器经由微型转动机构驱动器22驱动精细位移装置15，由此主螺母1和副螺母2的相对旋转角变化很小。过大的转动扭矩然后滚珠丝杠轴将受到调节，减小转动扭矩的变化。

6. 发明专利

JPS6165957A Feed screw system 失效
标题翻译：进料螺杆系统
公开(公告)号：JPS6165957A
公开(公告)日：1986-04-04
申请号：JP18445484
申请日：1984-09-05
申请人： Canon Inc
发明人： TAKAHASHI KAZUO
IPC分类号： F16H25/20 , H01L21/67 , H01L21/68
摘要： PURPOSE: To prevent variation in revolutional torque of a feed screw system and production of a backlash thereof by dividing a nut part into two nuts, sensing a reaction force in the direction of the feed shaft of both the nuts, and placing relative revolutional quantity of both the nuts under the negative control.
CONSTITUTION: When a reaction force is produced during revolution of a feed screw shaft 4 between both nuts 1 and 2 due to lead error of a screw shaft, the intensity of the reaction force is sensed by a reaction force detector 23. When the detecting signal of the reaction force detector is sent to a main controller 24, the main controller drives a fine-displacement device 15 consisting of a piezo element and so forth via a fine-displacement device driver 22, whereby a little displacing both the nuts to vary a distance therebetween in the direction of the feed shaft. Variation in revolution torque of the feed screw may thereby be moderated so that stable feeding operation having high precision can be attained.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：为了防止进给螺杆系统的旋转扭矩发生变化，并通过将螺母部分分成两个螺母产生其间隙，检测两个螺母进给轴方向的反作用力，并将相对旋转量两个坚果都在负面控制之下。构成：当由于螺杆轴的导程误差而在进给螺杆轴4的旋转期间产生反作用力时，由于反作用力检测器23检测到反作用力的强度。当检测信号反作用力检测器被发送到主控制器24，主控制器通过精细位移装置驱动器22驱动由压电元件等构成的精细位移装置15，由此两个螺母稍微移位以改变在进给轴的方向上的距离。因此，进给螺杆的转矩的变化可以缓和，从而可以获得高精度的稳定的进给操作。

7. 发明专利

JPS6165109A Non-contact type fine displacement meter 失效
标题翻译：非接触式精细位移仪
公开(公告)号：JPS6165109A
公开(公告)日：1986-04-03
申请号：JP18647084
申请日：1984-09-07
申请人： Canon Inc
发明人： TAKAHASHI KAZUO
IPC分类号： H01L21/67 , G01B7/00 , G01B21/00 , H01L21/66
摘要： PURPOSE: To expand a measuring range by controlling an interval between a substance to be measured and a displacement measuring probe fixedly by an air pad and constituting an electrostatic capacity type displacement/electric signal converter of a movable electrode and a fixed electrode which are fixed to the other end of a probe supporting a probe.
CONSTITUTION: Air of fixed pressure is supplied to the displacement measuring probe 5 and balanced with a measuring pressure applied from a measuring pressure applying mechanism 10 so that a distance between the probe 5 and the substance 4 to be measured is always kept at a fixed value. When the position of the substance to be measured is moved from 4 to 4a, the probe 5 is pushed up and the pushed-up variable is regarded as a value obtained by multiplying a distance from a free supporting point 7 by a proportional rate to move the movable electrode 8. Consequently, the electrostatic capacity between the fixed electrode 9 and the movable electrode 8 is changed and the change is mechanically measured to measure the positional change of the measured substance 4.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：通过气垫固定控制待测物质与位移测量探头之间的间隔并构成可动电极和固定电极的静电电容型位移/电信号转换器来扩大测量范围，固定到探针的另一端支撑探针。构成：将固定压力的空气供给到位移测量用探针5，并用从测量压力施加机构10施加的测量压力进行平衡，使得探针5与被测量物质4之间的距离始终保持在固定值。当被测物质的位置从4移动到4a时，探头5被向上推，上推变量被认为是通过将自由支撑点7的距离乘以比例速率而获得的值来移动可移动电极8.因此，固定电极9和可动电极8之间的静电电容发生变化，机械地测量变化，以测量被测物质4的位置变化。

8. 发明专利

JPS6163028A Movable guiding device 失效
标题翻译：可移动导向装置
公开(公告)号：JPS6163028A
公开(公告)日：1986-04-01
申请号：JP18380384
申请日：1984-09-04
申请人： Canon Inc
发明人： TAKAHASHI KAZUO
IPC分类号： B65G43/00 , B23Q1/26 , F16C29/00 , F16C29/02 , F16C29/04 , G03F7/20 , H01L21/027 , H01L21/30 , H01L21/68
CPC分类号： G03F7/70716 , B23Q1/262 , F16C29/00 , F16C29/02 , F16C29/04 , F16C2322/39 , H01L21/682
摘要： PURPOSE: To accomplish improvement in setting of a stop position and in reduction of positioning time by a method wherein two guide means, having a rolling member or a sliding member, are provided between two members on which relative displacement in the direction vertical to the moving surface and in the direction at right angle to the moving direction within the moving surface, is obstructed.
CONSTITUTION: The first guide means is formed by providing the guide shoes 21a and 21b of a table 19 on a pair of parallel and horizontal faced guide rails 20a and 20b of a substrate 17 through the intermediary of roller bearings 22a, and 22b. The second guide mens consists of a vertical guide rail 24 provided in a fixed manner on the substrate 17, a sliding guide shoe 25 attached to the lower part of the table 19 and a pressing roller unit 27, and a guide shoe 25 is provided at two placed, the entrance part and the inner part of the second guide means. The weight of the table 19 is supported by a guide, with which the upper and the lower relative displacements are inhibited, composed of the rolling members 22a and 22b producing a rolling friction, the guide with which the relative displacement in lateral direction is inhibited is constituted by a sliding member 27, and its precharge pressure is variably controlled, thereby enabling to improve the setting of stop position and to accomplish the reduction in positioning time.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：通过这样一种方法来实现停止位置的设定和缩短定位时间的改进，其中具有滚动构件或滑动构件的两个引导装置设置在两个构件之间，在两个构件之间沿垂直于移动的方向的相对位移表面和与移动表面内的移动方向成直角的方向被阻挡。构成：第一引导装置是通过将辊子轴承22a和22b的中间部分设置在基板17的一对平行和水平的导轨20a和20b的一对平面的导轨20a和20b上而形成的。第二引导件由固定地设置在基板17上的垂直导轨24，安装在工作台19的下部的滑动导向板25和加压辊单元27以及引导靴25设置在两个放置，第二引导装置的入口部分和内部部分。工作台19的重量由导向件支撑，上下相对位移被阻止，由滚动构件22a和22b组成，产生滚动摩擦，横向相对位移被限制的导向器是由滑动构件27构成，并且其预充压力被可变地控制，从而能够改善停止位置的设定并实现定位时间的缩短。

9. 发明专利

JPS6161429A Sample transferring device 失效
标题翻译：样品传送装置
公开(公告)号：JPS6161429A
公开(公告)日：1986-03-29
申请号：JP18256484
申请日：1984-09-03
申请人： Canon Inc
发明人： TAKAHASHI KAZUO
IPC分类号： B61J3/02 , B61J3/00 , B65G35/00 , B65G54/02 , H01L21/67 , H01L21/677 , H01L21/68
摘要： PURPOSE: To enable a sample to travel at a region unlimitedly and at a constant speed by a method wherein the movable table, whereon the sample is mounted, is made to freely travel without applying any external force to the movable table at the region excluding the starting point and the endpoint.
CONSTITUTION: An inertia energy is applied to a movable table 1, whereon a sample 8 is mounted, by a hammer 3 in an impact manner for making the movable table 1 shift to the direction of the endpoint from the starting point. Whereby the movable table 1 starts travel on a guide 2 for the direction of the endpoint at a high speed and a constant speed. A region, where the vibration of the movable table is sufficiently attenuated and the travelling speed of the movable table 1 can be regarded as a constant speed, is decided by the magnitude of the inertia energy applied to the movable table 1 at the starting point and the magnitude of the inertial mass of the movable table 1. After travelling the effective travelling region, the movable table 1 is standstilled by a brake 4 being provided near the endpoint at the endpoint.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：为了使样品能够通过一种方法无限制地以恒定的速度行进，其中将样品安装在其上的可移动台被制成自由行进，而不会在除起点和终点。构成：通过锤3以冲击方式对可移动台1施加惯性能量的可动台1施加惯性能量，使得可动台1从起点向终点方向移动。其中可移动台1以高速和恒定的速度开始在端点方向的导轨2上行进。可移动工作台的振动充分衰减的区域和可动台1的行进速度可以被认为是恒定速度，由在起点处施加到可动台1的惯性能量的大小决定，可移动工作台1的惯性质量的大小。在行进有效行驶区域之后，可移动工作台1被设置在端点附近的端点附近的制动器4。

10. 发明专利

JPS61131444A Alignment device 失效
标题翻译：对齐设备
公开(公告)号：JPS61131444A
公开(公告)日：1986-06-19
申请号：JP25192984
申请日：1984-11-30
申请人： Canon Inc
发明人： AYADA NAOKI , YAMAMURA MITSUGI , HAMAZAKI FUMIYOSHI , KOSUGI MASAO , TAKAHASHI KAZUO , SEKI MITSUAKI
IPC分类号： H01L21/30 , G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F9/7088 , G03F7/70058 , G03F7/70725 , G03F9/7026 , G03F9/7057
摘要： PURPOSE:To realize an extremely precise alignment by a method wherein a quotient is obtained, together with a surplus, by dividing the quantity of movement by the resolution factor of a pulse motor, the quotient is the portion that is to be covered by a pulse motor, and the surplus is the portion to be covered by another trimming means. CONSTITUTION:With a pulse motor ZW provided with a migration resolution of 2mum, a microprocessor 40Z supplies a quantity of migration DELTAd1 consisting of some units of 2mum to a register 41Z for migration up the axle Z of a wafer. As the result, the wafer surface position is now within approximately 2mum from the focal plane position. Here, the distance to the wafer surface is measured again. When air sensor nozzles AG1-AG4 have measured distances d9-d12, the microprocessor 40Z this time gives to a register 43Z an instruction DELTAd2=d0-(d9+d10+d11+d12)/4, regarding the direction and quantity of the migration of a piezoelectric element PZ. The register 43Z stores the instruction and at the some time, outputs the same to a digital analog converter 44Z and a piezo-electric element driving voltage generating circuit 46Z.
摘要翻译：目的：为了通过一种方法实现极精确的对准，其中通过将脉冲电动机的分辨率除以移动量除以脉冲电动机的分辨率，得到一个商与多余的一样，商是被脉冲覆盖的部分电机，剩余部分被另一个修整装置覆盖。构成：使用提供迁移分辨率为2mum的脉冲电动机ZW，微处理器40Z将一些由2mum的单位组成的迁移DELTAd1提供给寄存器41Z，用于沿晶片的轴Z迁移。结果，晶片表面位置现在在距焦平面位置大约2μm的范围内。这里，再次测量与晶片表面的距离。当空气传感器喷嘴AG1-AG4具有测量距离d9-d12时，微处理器40Z此时向寄存器43Z提供关于迁移的方向和数量的指令DELTAd2 = d0-（d9 + d10 + d11 + d12）/ 4 的压电元件PZ。寄存器43Z存储指令，并且在某一时间将其输出到数字模拟转换器44Z和压电元件驱动电压生成电路46Z。

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