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1. 发明专利

JP2006030017A Probe and minute sample pickup mechanism 审中-公开
标题翻译：探索和分钟抽样机制
公开(公告)号：JP2006030017A
公开(公告)日：2006-02-02
申请号：JP2004210199
申请日：2004-07-16
申请人： Aoi Electronics Co Ltd , Sii Nanotechnology Inc , アオイ電子株式会社 , エスアイアイ・ナノテクノロジー株式会社
发明人： MUNEKANE MASANAO , IWASAKI KOJI , KONNO TAKASHI , HAYASHI HIROKI
IPC分类号： G01N1/00 , G01N1/28 , H01J37/20
CPC分类号： H01J37/20 , B25J7/00 , B25J15/12 , G01N1/32 , H01J2237/20264
摘要： PROBLEM TO BE SOLVED: To provide a mechanism having a contact sensing function of a sample and a probe applying no damage to the sample at the time of the approach to the sample, capable of rapidly and certainly handling the minute sample, not selecting the material of the sample and having a simple structure.
SOLUTION: This probe mechanism and the sample pickup mechanism have a leading end member comprising a needle-like body which achieves the contact with the sample provided to an observation device or an analyzer and is equipped with a driving electrostatic actuator and a means for monitoring the change in the electrostatic capacity between the electrodes of the electrostatic actuator. The contact of the probe with the sample can be detected by the monitor means.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供具有样品接触感应功能的机构和在接近样品时不对样品造成伤害的探针，能够快速且肯定地处理微小样品，而不是选择样品的材料并具有简单的结构。解决方案：该探针机构和样品拾取机构具有前端构件，其包括针状体，其实现与提供给观察装置或分析器的样品的接触，并且配备有驱动静电致动器和装置用于监测静电致动器的电极之间的静电容量的变化。探头与样品的接触可由监视器检测。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2006026826A Nano-gripper device 有权
标题翻译： NANO-GRIPPER设备
公开(公告)号：JP2006026826A
公开(公告)日：2006-02-02
申请号：JP2004210566
申请日：2004-07-16
申请人： Aoi Electronics Co Ltd , Sii Nanotechnology Inc , アオイ電子株式会社 , エスアイアイ・ナノテクノロジー株式会社
发明人： KONNO TAKASHI , HAYASHI HIROKI , TANI TOSHIHIDE , MUNEKANE MASANAO , IWASAKI KOJI
IPC分类号： B81B3/00 , B25J7/00 , B25J15/08 , H02N1/00
CPC分类号： B25J7/00 , B25J15/00
摘要： PROBLEM TO BE SOLVED: To provide a nano-gripper device which allows the operator to positively and easily check whether a sample is gripped or not, and can grip the sample in a suitable state.
SOLUTION: Each drive section 6 of the nano-gripper device has a fixed electrode and a movable electrode for driving an arm 3. The fixed electrode 60a and the movable electrode 61a function to drive the left arm 3, and the movable electrode 61a is elastically supported on a base stand 7 by a support section 62. Similarly the arm 3 is elastically supported on the base stand 7 by a support section 63. When voltage is supplied to a gap between the electrodes 60a, 61a, the movable electrode 61a moves rightward by Coulomb force to drive the arm 3 in a closing direction. Then determination as to whether or not the sample is gripped is made based on an electric capacity between the electrodes 60a, 61a, detected by detection circuits 91A, 91B, and a change in the electric capacity between the electrodes 60b, 61b.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种纳米夹具装置，其允许操作者积极和容易地检查样品是否被夹持，并且可以以合适的状态夹持样品。解决方案：纳米夹持装置的每个驱动部分6具有固定电极和用于驱动臂3的可动电极。固定电极60a和可动电极61a用于驱动左臂3和可动电极 61a通过支撑部分62弹性地支撑在基座7上。类似地，臂3通过支撑部分63弹性地支撑在基座7上。当电压被提供给电极60a，61a之间的间隙时，可动电极 61a通过库仑力向右移动以沿闭合方向驱动臂3。然后基于由检测电路91A，91B检测的电极60a，61a之间的电容和电极60b，61b之间的电容的变化，确定是否夹持样品。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2006026827A Nano-gripper device with length measuring function 审中-公开
标题翻译：具有长度测量功能的NANO-GRIPPER设备
公开(公告)号：JP2006026827A
公开(公告)日：2006-02-02
申请号：JP2004210567
申请日：2004-07-16
申请人： Aoi Electronics Co Ltd , Sii Nanotechnology Inc , アオイ電子株式会社 , エスアイアイ・ナノテクノロジー株式会社
发明人： KONNO TAKASHI , HAYASHI HIROKI , TANI TOSHIHIDE , OI MASAMICHI , MUNEKANE MASANAO , IWASAKI KOJI
IPC分类号： B81B3/00 , B81B7/02 , G01B7/00 , G01M99/00
CPC分类号： G01B7/02
摘要： PROBLEM TO BE SOLVED: To provide a nano-gripper device with a length measuring function, which can grip a sample, and can measure the size of the sample by gripping the same.
SOLUTION: Each drive section 6 of the nano-gripper device has a fixed electrode and a movable electrode for driving an arm 3. The fixed electrode 60a and the movable electrode 61a function to drive the left arm 3, and the movable electrode 61a is elastically supported on a base stand 7 by a support section 62. Similarly the arm 3 is elastically supported on the base stand 7 by a support section 63. When voltage is supplied to a gap between the electrodes 60a, 61a, the movable electrode 61a moves rightward by Coulomb force to drive the arm 3 in a closing direction. Then the dimension of the sample can be measured based on an electric capacity between the electrodes 60a, 61a and an electric capacity between the electrodes 60b, 61b assumed when the arms 3 grip the sample, and a relationship between an interval between the arms 3 and the electric capacity stored in a memory circuit 93.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供具有可以抓住样品的长度测量功能的纳米夹具装置，并且可以通过夹持样品来测量样品的尺寸。解决方案：纳米夹持装置的每个驱动部分6具有固定电极和用于驱动臂3的可动电极。固定电极60a和可动电极61a用于驱动左臂3和可动电极 61a通过支撑部分62弹性地支撑在基座7上。类似地，臂3通过支撑部分63弹性地支撑在基座7上。当电压被提供给电极60a，61a之间的间隙时，可动电极 61a通过库仑力向右移动以沿闭合方向驱动臂3。然后可以基于电极60a，61a之间的电容和当臂3夹持样品时假设的电极60b，61b之间的电容以及臂3和3之间的间隔之间的关系来测量样品的尺寸存储在存储器电路93中的电容。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2008157673A Method for forming grasping surface of sample grasping member 审中-公开
标题翻译：成形砂浆成形表面的方法
公开(公告)号：JP2008157673A
公开(公告)日：2008-07-10
申请号：JP2006344412
申请日：2006-12-21
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： MUNEKANE MASANAO
IPC分类号： G01N1/28 , H01J37/20 , H01J37/305
CPC分类号： H01J37/3056 , H01J37/20 , H01J2237/2007 , H01J2237/204 , H01J2237/31745
摘要： PROBLEM TO BE SOLVED: To solve the problem wherein there is an attitude change and angular shift in a fine sample, caused by a leading end shape in the mechanism for grasping the fine sample, and the fine sample cannot be grasped in a desired attitude.
SOLUTION: The grasping surface parallel to a charged particle beam such as FIB, or the like, can be formed by applying processing to a grasping member 18, and the dust adhered to the grasping surface is also removed. When the fine sample represented by a TEM sample is formed in the apparatus irradiated with the charged particle beam by the etching due to the charged particle beam to be transported, the sample is etched in the irradiation direction of the charged particle beam and the grasping surface 19 of the grasping member 18 can be processed in the same direction as that of the cross section processing of the sample; accordingly, the sample and the grasping surface 19 can be formed into parallel surfaces and the changes in the attitude of the sample, when the sample is grasped, can be reduced.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题为了解决由用于抓取细样品的机构中的前端形状导致的细样品中的姿态变化和角位移的问题，并且细样品不能被抓住期望的态度解决方案：通过对把持部件18进行加工，可以形成与FIB等带电粒子束平行的把持面，并且除去附着在抓握面上的尘埃。当通过TEM样品表示的细小样品由于要输送的带电粒子束通过蚀刻而在被带电粒子束照射的装置中形成时，沿带电粒子束的照射方向和抓握表面蚀刻样品可以沿与样品的横截面加工相同的方向加工把持部件18，因此，样本和把持面19可以形成为平行的表面，并且当抓取样本时样品的姿态的变化可以减小。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2007039106A Thin small sheet chip holder using elastic material 审中-公开
标题翻译：使用弹性材料的小型薄片夹
公开(公告)号：JP2007039106A
公开(公告)日：2007-02-15
申请号：JP2005227069
申请日：2005-08-04
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： MUNEKANE MASANAO
IPC分类号： B65D73/00 , B65D81/03 , B65D81/133 , B65D85/38
CPC分类号： H01J37/20 , B81C99/002 , H01J2237/2007
摘要： PROBLEM TO BE SOLVED: To provide a small chip sheet holder capable of stably holding only a part of the small chip sheet in freely detachable manner or carrying it by reducing the breakage due to the contact with an adhesive, distortion or breakage generated in being attached/detached.
SOLUTION: A sheet shape member 11 having elasticity is provided with an insection 12 capable of inserting and holding a part of the small chip sheet 13 in freely detachable manner.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够以可自由拆卸的方式稳定地保持小片状片的一部分或通过减少由于与粘合剂的接触而导致的断裂而携带的小片片保持器，产生变形或断裂在附加/分离。解决方案：具有弹性的片状构件11设置有能够以可自由拆卸的方式插入和保持小片状片13的一部分的切口12。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2006093102A Probe approaching method and charged particle beam device 有权
标题翻译：探测方法和充电粒子束装置
公开(公告)号：JP2006093102A
公开(公告)日：2006-04-06
申请号：JP2005190941
申请日：2005-06-30
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： MUNEKANE MASANAO
IPC分类号： H01J37/28 , G01N23/225 , G01R31/28
CPC分类号： G01N23/04 , G01N1/32 , H01J2237/31749 , Y10S977/851 , Y10S977/881
摘要： PROBLEM TO BE SOLVED: To provide an approaching method for a probe to accurately and softly contact a minute testpiece only by operating a manipulator with microscopic observation without requiring special detecting means, and to provide a device for executing the same.
SOLUTION: The probe 1 is tilted so that its front end approaches the target position of the testpiece 5. In this state, the probe 1 is moved to a direction where the front end of the probe 1 corresponds to the front end of the shade of the probe 1 at the target position on an observation screen while using the microscope for a charged particle beam to observe a distance between the front end of the probe 1 and the target position.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了仅仅通过在不需要特殊检测装置的情况下操作具有微观观察的操纵器的探针才能精确地和轻柔地接触微型试样的接近方法，并且提供用于执行该微型试验片的装置。
解决方案：探头1倾斜使其前端靠近试件5的目标位置。在该状态下，探针1移动到探头1的前端对应于在观察屏幕上的目标位置处的探针1的阴影，同时使用显微镜对带电粒子束观察探针1的前端与目标位置之间的距离。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2005135761A Correction method for machining focus position using fib, and apparatus executing same 审中-公开
标题翻译：使用FIB加工聚焦位置的校正方法及其执行机器
公开(公告)号：JP2005135761A
公开(公告)日：2005-05-26
申请号：JP2003370970
申请日：2003-10-30
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： MUNEKANE MASANAO
IPC分类号： B82B3/00 , B23K15/00 , B81C99/00 , C23C16/48 , C23C16/52 , H01J37/21 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide a fine machining method using an FIB, capable of performing modeling, without the occurrence of focal point blurs, even if the height dimension becomes larger, in a structure formation, where fine machining is required, and to provide an apparatus for executing this.
SOLUTION: A correction method for a machining focus position employs an FIB-processing device having a monitoring SEM8, arranges an ion lens-barrel so as to irradiate the FIB from the vertical direction to the surface of a testpiece on a stage 7, also observes a change of the testpiece in modeling by arranging the SEM lens-barrel 8 so as to have electronic beams from the vertical direction irradiated to the FIB, and then corrects the focal position of the ion beam 2, by sending a control signal to an ion optical system 3 for displacing the stage 7 in Z direction by an amount of movement, away from the focal position of ion beams, when the position of a machining portion moves away from the focal position of the ion beams.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种使用FIB的精细加工方法，即使在高度尺寸变大时也能够进行造型而不发生焦点模糊，在需要进行精细加工的结构形成中，并提供用于执行该设备的装置。解决方案：加工对焦位置的校正方法采用具有监视SEM8的FIB处理装置，布置离子透镜镜筒，以便从垂直方向将FIB照射到台架7上的试样的表面还通过配置SEM透镜镜筒8使得从垂直方向照射到FIB的电子束，然后通过发送控制信号来校正离子束2的焦点位置来观察造型中的试样的变化到离子光学系统3，当加工部分的位置远离离子束的焦点位置时，离子光学系统3用于使载物台7沿Z方向移动远离离子束的焦点位置的移动量。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2005310757A Device and method for manufacturing three-dimensional fine structure 审中-公开
标题翻译：用于制造三维细微结构的装置和方法
公开(公告)号：JP2005310757A
公开(公告)日：2005-11-04
申请号：JP2005073315
申请日：2005-03-15
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： IWASAKI KOJI , MUNEKANE MASANAO
IPC分类号： B81C99/00 , A61N5/00 , B82B3/00 , G21G5/00 , H01J37/30 , H01J37/31 , H01J37/317 , B81C5/00
CPC分类号： H01J37/20 , B23K15/08 , B23P15/32 , B81C99/0095 , B81C2201/0143 , H01J37/3056 , H01J37/31 , H01J2237/20214 , H01J2237/206 , H01J2237/31732 , H01J2237/31735 , H01J2237/3174
摘要： PROBLEM TO BE SOLVED: To provide a device for manufacturing a three-dimensional fine structure which is simple, high in throughput and accuracy, capable of manufacturing a rotation-symmetric three-dimensional fine structure having smooth surface, and to provide a manufacturing method of the above structure.
SOLUTION: A sample stand (rotative stand) 1 is mounted on a precision rotation axis 32 continuously rotating the sample stand in high precision, and an optional rotation-symmetric three-dimensional fine structure is manufactured by applying an FIB deposition in an FIB chamber while making the sample stand 1 rotate continuously, or applying cutting work on upper surface or side surface like a general lathe through an FIB etching.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：为了提供一种制造简单，生产能力和精度高的三维精细结构的装置，能够制造具有光滑表面的旋转对称三维细微结构，并提供一种上述结构的制造方法。解决方案：将样品台（旋转台）1安装在高精度地连续旋转样品台的精密旋转轴32上，并且通过将FIB沉积施加于其中来制造可选的旋转对称三维细微结构 FIB室在使样品台1连续旋转的同时，通过FIB蚀刻，像普通车床一样在上表面或侧面进行切割加工。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2005249717A Tem sample preparation method 有权
标题翻译： TEM样品制备方法
公开(公告)号：JP2005249717A
公开(公告)日：2005-09-15
申请号：JP2004063849
申请日：2004-03-08
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： MUNEKANE MASANAO
IPC分类号： G01N1/32 , G01N1/28 , H01J37/20 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide a technique capable of transferring surely a TEM sample to a fixing block by a probe of a manipulator, while observation-confirming a cut-separated condition by an SIM image, in a method for cutting out and preparing the TEM sample from a sample main body by an FIB device.
SOLUTION: This method includes a step for preparing a sheetlike cut-out piece 2 and a support part 6 for supporting the cut-out piece in the large sample main body 1 by FIB etching, a step for separating the cut-out piece 2 from the sample main body by the FIB etching, and a step for applying force onto the cut-out piece 2 from the probe by operating the micro-manipulator, while observing the SIM image, to confirm the separation of the cut-out piece from a sample.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种能够通过机械手的探头将TEM样品确定地传递到定影块的技术，同时通过SIM图像观察确认切割分离的条件，在切割方法中并通过FIB装置从样品主体制备TEM样品。解决方案：该方法包括用于通过FIB蚀刻来制备片状切割片2和用于支撑大样本主体1中的切口的支撑部分6的步骤，用于分离切口通过FIB蚀刻从样品主体构成的片2，以及通过操作微型操作器在探测器上对切割片2施加力的步骤，同时观察SIM图像，以确认切口的分离一个样品。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2005158714A Needle part defect correction method of manipulator, and needle member set 有权
标题翻译：手动部件缺陷修正方法及手指部件
公开(公告)号：JP2005158714A
公开(公告)日：2005-06-16
申请号：JP2004311196
申请日：2004-10-26
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： MUNEKANE MASANAO
IPC分类号： H01J37/31 , B23P6/00 , B23P19/04 , H01J37/305
CPC分类号： H01J37/3056 , Y10T29/49718 , Y10T29/4973 , Y10T29/49732 , Y10T29/49746 , Y10T29/49885 , Y10T29/49995
摘要： PROBLEM TO BE SOLVED: To provide a technique capable of carrying out repair and regeneration in a vacuum chamber without extracting and changing defective parts when the abrasion or breakage of a probe of a probe microscope, the flection or breakage of a micro-manipulator, or the abrasion or breakage of micro-tweezers occur. SOLUTION: When abrasion or fracture of a needle part 4 of a manipulator provided in an FIB device is confirmed in a microscope image, a lost structure of the needle part is repaired by CVD using an FIB, or when it is confirmed in a microscope image that the needle part 4 of the manipulator provided in the FIB device is in a bent state, the part is cut by etching using an FIB to form a normal structure at a tip of the cut part with the CVD using an FIB to repair the needle part. The application is also applied to tweezers having two needles held as a pair to be used. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在真空室中进行修复和再生而不会在探针显微镜的探针的磨损或破裂的情况下提取和改变有缺陷的部分的技术，操纵器或微镊子的磨损或破损发生。解决方案：在显微镜图像中确认设置在FIB装置中的机械手的针部4的磨损或断裂时，使用FIB通过CVD修复针部的损失结构，或者当确认为设置在FIB装置中的机械手的针部4处于弯曲状态的显微镜图像，通过使用FIB的蚀刻来切割该部分，以使用FIB至CVD的切割部分的尖端处形成法线结构修理针部分。该应用也适用于具有两根被保持为待使用的针的镊子。版权所有（C）2005，JPO＆NCIPI

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