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1. 发明专利

JPH03233395A SOUND WAVEPROPAGATION TIME MEASURING METHOD 失效
公开(公告)号：JPH03233395A
公开(公告)日：1991-10-17
申请号：JP2712090
申请日：1990-02-08
申请人： MARINE INSTR CO LTD
发明人： ISHIHARA TAKASHI
IPC分类号： G01P5/00 , G01B17/00 , G01F1/66 , G01K11/24 , G04F10/00
摘要： PURPOSE:To accurately measure sound wave propagation time by using two or more sound waves with the same amplitude and different frequencies, and setting a specific point where the zero-cross of the sound wave with the highest frequency occurs as the time of start and completion of the sound wave propagation time. CONSTITUTION:First and second transmission wave outgoing circuits 1, 2 transmit ultrasonic signals W1, W2 with different frequencies, respectively. Electroacoustic converters 4, 5 perform the mutual exchange of an electrical signal and an acoustic signal. An outgoing reference detection circuit 3 detects the point nearest to a zero- cross point from a positive direction to a negative direction of the signal W2 out of the zero-cross points in the positive and negative directions of the signals W1, W2. Also, the circuit 3 outputs a pulse of positive potential to a propagation time measuring circuit 14 when the potential of the signals W1, W2 go less than the ground potential. A reception circuit 12 for outgoing reference detection is comprised similarly, however, it detects the signal delaying by the propagation time between the converters 4, 5 behind the circuit 3. When the pulse from the circuit 3 is outputted, the circuit 14 starts the measurement of the propagation time, and counts the time until no pulse is outputted from the circuit 12.

2. 发明专利

JPH03217039A INSPECTION OF WIRE BONDING AND WIRE BONDER 失效
公开(公告)号：JPH03217039A
公开(公告)日：1991-09-24
申请号：JP1070190
申请日：1990-01-22
申请人： MARINE INSTR CO LTD
发明人： KAMIHARASHI TAKASHI
IPC分类号： H01L21/60 , H01L21/66
摘要： PURPOSE:To perform an inspection, even if a wire bonder is in operation, without requiring to take out a lead frame from a magazine for inspection by constituting the title method so that the arbitrary picture of a bonded lead frame picked up through an image-pickup device can be stored in a picture memory and reproduced. CONSTITUTION:An apparatus is equipped with a carrier means 3 for carrying a lead frame 4 to a bonding stage, a bonding means 1 for positioning the carried lead frame 4 and displacing a wire-holding tool relatively to the lead frame 4 and semiconductor pellet to perform bonding, a magazine 2 for housing the bonded lead frame 4, an image pickup means 6 provided between the bonding means 1 and housing magazine 2 and a picture storing and reproducing means 9 having a picture memory capable of writing and reading an image-picked up picture, and an arbitrary picture of the bonded lead frame picked up by the image pickup device 6 according to a picture storage starting command is stored in the picture memory and the stored picture can be read from the picture memory and reproduced.

3. 发明专利

JPH03198731A METHOD FOR WATCHING WIDTH OF NET MOUTH OF TRAWLNET 失效
公开(公告)号：JPH03198731A
公开(公告)日：1991-08-29
申请号：JP33915789
申请日：1989-12-27
申请人： MARINE INSTR CO LTD
发明人： YAMATANI KYOZO
IPC分类号： A01K73/02 , A01K75/00
摘要： PURPOSE:To draw a trawlnet in maximum efficiency by providing echo sounder transmitter and receiver for detecting laterally inclined directions, where directional main shaft passes through maximum width point of right and left ends of net mouth, in the center of upper part or lower part of net mouth of trawlnet. CONSTITUTION:A transmission circuit 11 is controlled by timing pulse from a timing generating circuit 12 to switch contact points of a switch 10 in the order of (a), (b), (c) and (d), and a driving signal is successively applied to each echo sounder- transmitting and -receiving devices 2, 3, 8 and 9 for detection of upper direction, lower direction, lower direction inclined to the right and lower direction inclined to the left. Then supersonic waves S1, S2, S3 and S4 are emitted from these transmitting and receiving devices to each receive the reflecting waves. Then, every output signals are applied through these contact points (a) to (d) of the switch 10 with a receiving circuit 13 to detect and amplify these waves and these waves are transmitted from an echo sounder transmitter 4 through a modulation circuit 14 and a transmission circuit 15. An echo sounder receiver 6 on a ship side records received signals through a demodulation circuit 18 on a recording device 20. On one hand, distances WL and WR ranging from the center of net mouth 1a to the left end and the light end are measured by the demodulated signals to an operation circuit 22 and displayed on a display 23.

4. 发明专利

JPH03177037A MECHANISM AND METHOD FOR DETECTING OFF-SET AMOUNT BETWEEN TOOL AND CAMERA OF BONDING DEVICE 失效
公开(公告)号：JPH03177037A
公开(公告)日：1991-08-01
申请号：JP31440989
申请日：1989-12-05
申请人： MARINE INSTR CO LTD
发明人： TAKANO TADASHI , NISHIMAKI KOUJI
IPC分类号： H01L21/60
摘要： PURPOSE:To enable accurate computation and measurement of an off-set amount without carrying out temporary bonding on a sample by automatically calculating and computing the center of a tool of a bonding head through a tool edge detector. CONSTITUTION:A tool edge detector 10 of a bonding head 9 is mounted on a device box 12, and the light projected from a fiber impinges on the tool edge part of the bonding head 9 and reflected light therefrom is received by the tool edge detector 10 and is photoelectrically converted therein and is input to a control circuit. Further, a camera 1 and the bonding head 9 are moved in the XY directions by an XY table driving mechanism to take the image of the tool edge detector 10 so that the position thereof can be stored. The center of the tool is computed from the coodinates of the tool edge of the bonding head obtained by the tool edge detector 10, and the off-set amount between the tool and the camera 1 is detected by the control circuit. Thus, the off-set amount can accurately be determined and moreover the measuring time can be reduced so that working efficiency can be improved.

5. 发明专利

JPH03160737A TAPE BONDING METHOD 失效
公开(公告)号：JPH03160737A
公开(公告)日：1991-07-10
申请号：JP29980489
申请日：1989-11-20
申请人： MARINE INSTR CO LTD
发明人： MIURA MASAAKI , MIYOSHI HIDEAKI
IPC分类号： H01L21/60
摘要： PURPOSE:To do bonding surely by calculating the quantity of relative slippage between a lead and a bump, and compensating this quantity of slippage by an XY direction and/or rotation and angle displacing means so as to bond a lead with the bump on a chip. CONSTITUTION:By positioning a lead 15 formed on a table 13 and relatively displacing a chip 14 arranged on a table 10, the lead 15 and the bump 16 on the chip 14 are accorded relatively, and then the lead 15 and the bump 16 on the chip 14 are bonded one by one. Hereupon, the bump 16 on the chip 14 to be bonded facing an optional lead 15 picked up by a camera 9 is selected, and the quantity of relative slippage between the lead 15 and the bump 16 is calculated, and the quantity of slippage is compensated by an XY direction and/or rotation angle displacing means so as to bond the lead 15 with the bump 16 on the chip 14. Hereby, even if there is relative slippage between the lead 15 on the tape 13 side and the bump 16 on the chip 14 side, it is compensated within an effective bonding range and the bonding can be done automatically.

6. 发明专利

JPH03155153A LEAD FRAME CONVEYING MECHANISM AND CONVEYING METHOD THEREFOR 失效
公开(公告)号：JPH03155153A
公开(公告)日：1991-07-03
申请号：JP29399989
申请日：1989-11-14
申请人： MARINE INSTR CO LTD
发明人： URAMOTO IWAMI , MIYOSHI HIDEAKI , NOMURA HISASHI
IPC分类号： H01L23/50
摘要： PURPOSE:To improve timing efficiency of a lead frame feeding step and to prevent damage of the frame due to vibration, etc., by providing means for switching conveying means having two or more mechanisms for conveying lead frames in parallel to guide means movably a perpendicular to the guide means. CONSTITUTION:The shaft 10a of a cylinder 10 protrudes to move a loader unit 9 to a state in Fig. 4, thereby supplying a lead frame onto a conveying passage of a conveying mechanism 7 from a direction of an arrow. When the frame is detected by a sensor 12, the rotation of a belt driving motor 8 is stopped. Thereafter, the cylinder 10 is operated in a sucking direction to move the unit 9 to a state in Fig. 5. In this case, the conveying passages of the conveying mechanisms 6, 7 coincide with the conveying passages of guide rails 3a, 3b having a bonding stage and the conveying passage of a conveying mechanism 4 to stop. The frame placed on the rails of the mechanism 7 is pressed to guide surfaces on the rails 3a, 3b by a cylinder 19.

7. 发明专利

JPH0354827A CLEANING DEVICE 失效
公开(公告)号：JPH0354827A
公开(公告)日：1991-03-08
申请号：JP18893889
申请日：1989-07-24
申请人： MARINE INSTR CO LTD
发明人： FURUKAWA HARUHIKO , ASAKA ATSUYASU
IPC分类号： B08B3/12 , H01L21/304
摘要： PURPOSE:To enable the even highmegasonic cleaning process to be performed efficiently by a method wherein a swing base provided with a holder formed in tapered shape and holding an element to be cleaned up is swung and impressed with ultrasonic waves. CONSTITUTION:An element 2 to be cleaned up is inserted downward into a holder 3 to be held by the tapered surface of the holder 3. When the element 2 is impressed with ultrasonic waves with high frequency at high acceleration by a vibrator 8, the oblique lined parts 2a, 2b of the element 2 are not irradiated with the ultrasonic waves. Accordingly, a swing part 6 is driven to vertically extend and contract a rod 10 for oscillating a swing base 5 so that the element 2 may be cleaned up even if the shadows 2a, 2b are irradiated with the ultrasonic waves.

8. 发明专利

JPH0311817A OPTIONAL PATTERN PULSE TRAIN GENERATING CIRCUIT 失效
公开(公告)号：JPH0311817A
公开(公告)日：1991-01-21
申请号：JP14539089
申请日：1989-06-09
申请人： MARINE INSTR CO LTD
发明人： ICHIYAMA YUZO
IPC分类号： H03K3/72
摘要： PURPOSE:To generate an optional pulse train in a short processing time by providing a reference pulse train pattern and expanding/compressing the reference pulse train pattern longitudinally and laterally based on an expansion/ compression coefficient for the axis of ordinate and the axis of abscissa. CONSTITUTION:A counter 1 counts a pulse number outputted from a pulse train output block 5 and a multiplier 2 multiplies the coefficient K2 of expansion/compression of the axis of abscissa with a counted value of the counter 1. A reference pulse train pattern is stored in a memory 3, the output of the multiplier 2 is given as an address and the value of the reference pulse train pattern corresponding to the address is outputted. A multiplier 4 multiplies the coefficient K1 of expansion/compression of the axis of ordinate with the output of the memory 3 and an output subjected to expansion/compression of the axis of ordinate is obtained in response to the coefficient K1. Then the output is converted into a pulse train finally with the block 5 and an optional pulse train pattern is outputted in a form subjected to the expansion/compression of the axis of ordinate and the axis of abscissa is implemented.

9. 发明专利

JPH038351A WIRE BONDING METHOD 失效
公开(公告)号：JPH038351A
公开(公告)日：1991-01-16
申请号：JP14225789
申请日：1989-06-06
申请人： MARINE INSTR CO LTD
发明人： MIYOSHI HIDEAKI
IPC分类号： H01L21/60
摘要： PURPOSE:To improve work efficiency of bonding and to enable high quality of bonding by performing the recognition and memory works of the positions of all leads to be bonded next during wire bonding work. CONSTITUTION:Individual position coordinates of leads are sought based on the coordinate standard of a lead position at the position of a prestage 15 one pitch on this side of a bonding stage 14. That is, a lead position recognition camera 17, which is fixed to an X-Y table 16 being placed on an X-Y table 11 and performing horizontal shift different from the X-Y table 11, catches detection marks 6-1 and 6-2, being the coordinates of the leads 4, by the X-Y table 16 being operated according to the distance of the standard position of the lead 4 stored in a recognition storage device 18, and it recognizes the position coordinate of the lead 4 and stores it in the recognition storage device 18. Next, by shifting a table 10 pitch by pitch and shifting a table 11 according to the coordinate of the standard position of a pad 3 being stored, wire bonding is done by a bonding tool 12.

10. 发明专利

JPH02250340A WIRE BONDING 失效
公开(公告)号：JPH02250340A
公开(公告)日：1990-10-08
申请号：JP7045089
申请日：1989-03-24
申请人： MARINE INSTR CO LTD
发明人： NISHIMAKI KOUJI
IPC分类号： H01L21/60
摘要： PURPOSE:To collectively correct a relative displacement of lead posts and to execute an automatic bonding operation by a method wherein a relative positional relationship or a displacement amount between the individual lead posts is computed from a detection point, coordinates of a regular bonding point are corrected on the basis of this computed data and a bonding operation is executed on the basis of the corrected coordinates. CONSTITUTION:An output of a camera 3 is input to a binary-coding circuit 5 through an amplifier 4; a binary-coded signal is input to a monitor 6 and also input to a judgment circuit 7. The judgment circuit 7 decides a detection range of a plurality of lead posts (a) to (e) and, at the same time, computes a displacement amount between regular detection points of the lead posts (a) to (e) and actual bonding points. This judged result is output to a control circuit 8; regular bonding points are corrected; after that, a bonding operation is executed by using an X-Y table driving mechanism 9. Thereby, a relative positional relationship between the lead posts can be judged simultaneously; positions of these displacement amounts can be corrected; the bonding operation can be executed automatically without requiring the time.

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