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    • 2. 发明专利
    • Laser beam machining method and apparatus
    • 激光束加工方法和装置
    • JP2008272794A
    • 2008-11-13
    • JP2007119497
    • 2007-04-27
    • Cyber Laser Kkサイバーレーザー株式会社
    • KAMATA MASANAOSUMIYOSHI SATOMITSUJIKAWA SUSUMU
    • B23K26/06B23K26/00B23K26/067B23K26/40B23K101/40G02F1/37H01S3/00
    • PROBLEM TO BE SOLVED: To provide a method for efficiently machining with an ultrashort pulse. SOLUTION: A first laser ultrashort pulsed light having a near infrared first wavelength and a second laser ultrashort pulsed light having an ultraviolet region second wavelength which is wavelength-converted from the first laser ultrashort pulsed light using a nonlinear optical crystal unit are emitted to a workpiece, wherein the emission is performed with delayed time within 100 ps given to the first laser light. As a result, machining efficiency (ratio of machining quantity to irradiation energy) is increased and also, for example, the light quantity of the first laser light passing through a workpiece is reduced to mitigate damage to the substrate, so that machining quality is improved. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种用于超短脉冲高效加工的方法。 解决方案:发射具有近红外第一波长的第一激光超短脉冲光和具有紫外区第二波长的第二激光超短脉冲光,该第二波长是使用非线性光学晶体单元从第一激光超短脉冲光波长转换的。 到工件,其中以给定给第一激光的100ps内的延迟时间进行发射。 结果,加工效率(加工量与照射能量的比例)增加,并且例如通过工件的第一激光的光量减少以减轻对基板的损坏,从而提高加工质量 。 版权所有(C)2009,JPO&INPIT
    • 5. 发明专利
    • Optical power adjusting device
    • 光功率调节装置
    • JP2005079356A
    • 2005-03-24
    • JP2003308138
    • 2003-08-29
    • Cyber Laser Kkサイバーレーザー株式会社
    • SUMIYOSHI SATOMISHIRATORI AKIRAOTANI YOSHIHISAMATSUMOTO TETSUKO
    • G02F1/39H01S3/10
    • PROBLEM TO BE SOLVED: To freely adjust the power of each wavelength component of laser light having a plurality of wavelength components. SOLUTION: There is provided a laser apparatus including a laser light generating apparatus for generating laser light having a plurality of wavelength components including a first wavelength component and a second wavelength component in the direction of a different optical axis for every component. There is provided an output power adjusting device of the laser apparatus, wherein a first shield for preventing the first wavelength component from transmitting therethrough is held at a position where the beam of the first wavelength component is diffused such that the position thereof with respect to the beam is variable, a second shield for preventing the second wavelength component from transmitting is held at a position where the beam of the second wavelength component is diffused such that the position thereof with respect to the beam is variable, and further the power of every wavelength component is adjusted by determining the position of each shield such that the beam corresponding to the wavelength component is not shielded by the shield or is wholly or partially shielded. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:可以自由调节具有多个波长分量的激光的每个波长分量的功率。 解决方案:提供了一种激光装置,其包括:激光发生装置,用于产生具有包括第一波长分量和第二波长分量的多个波长分量的激光,该波长成分在每个分量的不同光轴方向上。 提供了一种激光装置的输出功率调节装置,其中用于防止第一波长分量透射的第一屏蔽件被保持在第一波长分量的光束被扩散的位置,使得其相对于 光束是可变的,用于防止第二波长分量发射的第二屏蔽被保持在第二波长分量的光束被扩散的位置,使得其相对于光束的位置是可变的,而且每个波长的光焦度 通过确定每个屏蔽的位置来调整分量,使得对应于波长分量的光束不被屏蔽屏蔽或者完全或部分屏蔽。 版权所有(C)2005,JPO&NCIPI
    • 6. 发明专利
    • Laser device of module structure
    • 模块结构的激光器件
    • JP2005039066A
    • 2005-02-10
    • JP2003274721
    • 2003-07-15
    • Cyber Laser Kkサイバーレーザー株式会社
    • TAMAKI YUSUKESEKIDA HITOSHISAKUMA JUNTOMITAKA TOMOFUMIASAKAWA YUICHI
    • G02F1/37G02F1/39H01S3/094H01S3/10H01S3/23
    • PROBLEM TO BE SOLVED: To connect a seed laser and an excitation laser to an amplifier through optical fibers by generating a high-frequency repeat pulses from a femtosecond laser. SOLUTION: A femtosecond laser device consists of a seed laser device for generating seed laser light ≤ 1 picosecond, a reproducing amplifier or a multipath amplifier for amplifying seed laser light and a Q switch oscillation laser device to which Nd or Yb is added in order to excite the amplifier. The laser device is also provided with an excitation laser (1) capable of suppressing pulse energy to 10J/cm 2 and less and having repeating frequency ≥ 1kHz, and a seed laser (2) capable of suppressing an output to peak power ≤ 10MW/cm 2 . Seed laser light and excitation laser light are inputted to the amplifier through optical fibers. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:通过从飞秒激光产生高频重复脉冲,通过光纤将种子激光和激发激光器连接到放大器。 解决方案:飞秒激光装置由用于产生≤1皮秒的种子激光的种子激光装置,用于放大种子激光的再现放大器或多径放大器和添加有Nd或Yb的Q开关振荡激光装置 以激励放大器。 激光装置还具有能够将脉冲能量抑制到10J / cm 2以下且具有重复频率≥1kHz的激励激光器(1),能够抑制 输出峰值功率≤10MW / cm 2 SP SP。 种子激光和激发激光通过光纤输入放大器。 版权所有(C)2005,JPO&NCIPI
    • 8. 发明专利
    • Laser device
    • 激光装置
    • JP2014170839A
    • 2014-09-18
    • JP2013041977
    • 2013-03-04
    • Cyber Laser Kkサイバーレーザー株式会社
    • SUMIYOSHI SATOMIISHII YASUSHI
    • H01S3/13G02F1/35H01S3/00H01S3/0941
    • PROBLEM TO BE SOLVED: To solve problems of a high output laser device, one of which is that optical axis deviation caused by multiple overlapped factors due to heat generated because of high output does not reach a workable state as a laser device unless several hours are waited for an entire device to reach thermal equilibrium if it is not controlled, and another is that operation is stopped due to deterioration of parts caused by suddenly occurring thermal factors.SOLUTION: A technique of the invention distinguishes a heat generation factor that occurs in the vicinity of a heat source excitation semiconductor laser and a heat generation factor that occurs due to environmental temperature and absorption of transmitted laser, places control units suited to each of them, appropriately controls information between the control units by a computer program, and thereby is able to substantially shorten the rise time of the laser device, including a defect caused by an accidental factor.
    • 要解决的问题:为了解决高输出激光装置的问题,其中之一是由于由于高输出而产生的热量而由多个重叠因素引起的光轴偏差作为激光装置不能达到可工作状态,除非几个小时是 等待整个设备达到热平衡,如果不受控制,另一个是由于突然发生的热因素导致的部件的劣化而停止运行。解决方案:本发明的技术区分了在 热源激发半导体激光器的附近以及由于环境温度和透射激光的吸收而发生的发热因子,使得适合于它们的控制单元通过计算机程序适当地控制控制单元之间的信息,从而能够 以显着缩短激光装置的上升时间,包括由意外因素引起的缺陷。