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    • 63. 发明专利
    • Semiconductor element and method for manufacturing the same
    • 半导体元件及其制造方法
    • JP2003332563A
    • 2003-11-21
    • JP2002141842
    • 2002-05-16
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • UCHIDA MASAOKITAHATA MAKOTOMIYANAGA RYOKOTAKAHASHI KUNIMASAKUSUMOTO OSAMUYAMASHITA MASAYA
    • C23C16/42H01L21/205H01L29/47H01L29/861H01L29/872
    • PROBLEM TO BE SOLVED: To provide a silicon carbide semiconductor element operable even when displacement or micro-pipe or the like is contained. SOLUTION: At the time of forming an epitaxial layer 12 on a silicon carbide substrate 11, a growth condition is selected so that the upper part of a micro- pipe 18 existing in the silicon carbide substrate 11 can be filled. There is a case that the micro-pipe 18 is not filled in the silicon carbide substrate 11, and that a failure 19 succeeding the micro-pipe 18 is grown in the epitaxial layer 12 in accordance with the shape of the micro-pipe 18 or the selected growth condition. In that case, the failure 19 is buried in the middle of the growth so as not to be grown to the upper face of the epitaxial layer 12. Then, a shot key electrode 14 and an upper electrode 16 are formed on the epitaxial layer 12, and an ohmic electrode 15 and a lower electrode 17 are formed under the silicon carbide substrate 11. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供即使在容纳位移或微管等时也可操作的碳化硅半导体元件。 解决方案:在碳化硅衬底11上形成外延层12时,选择生长条件使得可以填充存在于碳化硅衬底11中的微管18的上部。 存在微管18未填充在碳化硅衬底11中的情况,并且随着微管18的形状而在外延层12中生长随后的微管18的故障19,或者 选择的生长条件。 在这种情况下,故障19被埋在生长的中间,以便不生长到外延层12的上表面。然后,在外延层12上形成射击键电极14和上电极16 ,并且在碳化硅衬底11之下形成欧姆电极15和下电极17.版权所有(C)2004,JPO
    • 65. 发明专利
    • Semiconductor device and its manufacturing method
    • 半导体器件及其制造方法
    • JP2003303966A
    • 2003-10-24
    • JP2002108757
    • 2002-04-11
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • KUSUMOTO OSAMUKITAHATA MAKOTOUCHIDA MASAOTAKAHASHI KUNIMASAYAMASHITA MASAYAMIYANAGA RYOKO
    • H01L21/28H01L21/329H01L21/336H01L29/12H01L29/47H01L29/78H01L29/861H01L29/872
    • PROBLEM TO BE SOLVED: To provide a semiconductor device having a high breakdown voltage and a low resistance, and its fabricating method. SOLUTION: A part of an Si substrate 1 located in a first region Re1 is removed selectively by sand blasting to set the thickness of a second region Re2 at 400 μm and the thickness of a recess, i.e., the first region Re1, at 200 μm. An n-epitaxial layer 3 is formed on the side of the Si substrate 1 opposite to the recessed side. The n-epitaxial layer 3 is partially implanted with ions to form a p well 4 and a source region 5. A gate insulation film 6, a gate electrode 9, a source electrode 8 and a drain electrode 7 are formed such that the first region Re1 of the Si substrate 1 and the n-epitaxial layer 3 becomes an operating region. Sheet resistance can be decreased in the first region Re1 of the Si substrate 1 because the operating region is thick and a mechanical strength can be held in the second region Re2. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供具有高击穿电压和低电阻的半导体器件及其制造方法。 解决方案:通过喷砂选择性地去除位于第一区域Re1中的Si衬底1的一部分,以将第二区域Re2的厚度设定为400μm,并且凹部的厚度即第一区域Re1, 在200μm。 在Si衬底1的与凹入侧相反的一侧上形成n外延层3。 n外延层3部分地注入离子以形成p阱4和源极区5.栅极绝缘膜6,栅极9,源电极8和漏电极7形成为使得第一区域Re1 的Si衬底1和n外延层3成为工作区域。 由于操作区域较厚,并且在第二区域Re2中保持机械强度,因此在Si衬底1的第一区域Re1中可以减小薄层电阻。 版权所有(C)2004,JPO