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51. 发明专利

JP2002260296A ELECTRON BEAM IRRADIATION DEVICE AND METHOD 失效
公开(公告)号：JP2002260296A
公开(公告)日：2002-09-13
申请号：JP2001054741
申请日：2001-02-28
申请人： SONY CORP
发明人： SASAKI JUN , AKI YUICHI , MIURA YOSHIHISA
IPC分类号： G03F7/20 , G01Q30/16 , G11B7/26 , G11B9/10 , G21K5/10 , H01J37/305
摘要： PROBLEM TO BE SOLVED: To carry out high precision recording by making focusing easy and accurate for the electron beam to the original 1 in an electron beam irradiation device that makes recording by irradiating the original 1 with the electron beam. SOLUTION: On the slide table 6 of a support mechanism 2 which supports the original 1, a focusing stage 30 is provided at the side adjacent to the original 1. When recording, the electron beam is first irradiated to the focusing stage 30 for focusing, then to the original 1 for recording.

52. 发明专利

JP2001242300A ELECTRON BEAM IRRADIATION DEVICE 失效
公开(公告)号：JP2001242300A
公开(公告)日：2001-09-07
申请号：JP2000057374
申请日：2000-03-02
申请人： SONY CORP
发明人： AKI YUICHI , KONDO TAKAO , TAKEDA MINORU , YAMAMOTO MASANOBU , MASUHARA SHIN , KASHIWAGI TOSHIYUKI
IPC分类号： G21K5/04 , G11B7/26 , G11B11/105 , G11B23/00 , G21K5/00 , H01J37/09 , H01J37/30 , H01J37/301 , H01J37/305
摘要： PROBLEM TO BE SOLVED: To provide an electron beam irradiation device capable of avoiding effectively scattering of an electron beam, and avoiding installation of a large- scale vacuum chamber. SOLUTION: This device is equipped with a support part 4 for supporting an electron beam irradiation object 3 to which the electron beam 2 is irradiated, and an electron beam irradiation head 6 facing to the electron beam irradiation object at minute intervals and having an electron beam outgoing hole 5 for irradiating the electron beam 2 to the electron beam irradiation object 3. The device has a constitution in which an electron beam passage 20 communicating with the electron beam outgoing hole 5 is installed in the electron beam irradiation head 6, and one or more ring-shaped gas absorbing grooves 61, 62 opened to the opposite face to the electron beam irradiation object are formed on the periphery of the centered electron beam outgoing hole 5, and a vacuum pump is connected to the electron beam passage 20 and the ring-shaped gas absorbing grooves 61, 62 to keep the electron beam passage at high vacuum.

53. 发明专利

JP2000150620A TRANSPORTER 失效
公开(公告)号：JP2000150620A
公开(公告)日：2000-05-30
申请号：JP31607798
申请日：1998-11-06
申请人： SONY CORP
发明人： SATO SHUZO , AKI YUICHI , KONDO TAKAO
IPC分类号： B24B37/04 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a small-sized transporter which has no possibility of contaminating objects to be transported. SOLUTION: A transporter is provided with supplying means 24a and 34b which respectively supply positive- and negative-pressure gases and a floating means 31 on which the gas supplying ports 31a and 31b of the means 34a and 34b are provided and, at the same time, a porous body 32 is arranged in the positive-pressure gas supplying port 31a of the supplying means 34a and which floats an object to be transported in a state where the means 31 does not come into contact with the bottom face of the object.

54. 发明专利

JP2000100002A ORIGINAL OPTICAL DISK RECORDING DEVICE 失效
公开(公告)号：JP2000100002A
公开(公告)日：2000-04-07
申请号：JP26535398
申请日：1998-09-18
申请人： SONY CORP
发明人： AKI YUICHI , KONDO TAKAO , OGAWA KATSUMI , ITOU IETOSHI , YOSHIDA TETSUYUKI
IPC分类号： G11B7/085 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide an original optical disk recording device capable of performing highly accurate recording in an original optical disk by directly controlling the relative position between the rotational center of the original optical disk and a spot with a simple structure. SOLUTION: This device is provided with a rotary table 13 where an original optical disk D is placed and rotary-driven, a light irradiating means for performing recording by irradiating the original optical disk placed on the rotary table with a light beam to form a spot, a guiding mechanism 12 for supporting the rotary table 13 to be movable linearly, an electromagnetic actuator 16 for driving the guiding mechanism to linearly move the rotary, table and a control means 20 for driving and controlling the electromagnetic actuator 16. This device is further provided with a position detecting means 15 provided on the guiding mechanism to detect position information regarding the relative position between the spot formed by the light irradiating means and the rotational center of the original optical disk, and the control means drives and controls the electromagnetic actuator while feeding back the position information from the position detecting means.

55. 发明专利

JPH11288535A DISK ORIGINAL PLATE PREPARING DEVICE 失效
公开(公告)号：JPH11288535A
公开(公告)日：1999-10-19
申请号：JP8760198
申请日：1998-03-31
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： G11B11/10 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To cut a highly precise and dense pit pattern etc., to a disk original plate by electron beams. SOLUTION: An original plate rotating mechanism part 12 rotate-driving a disk original plate 1 and an electron beam emitting head mechanism part 13 emitting electronic beam are constituted to make either one of the mechanism parts as a fixed part with respect to a vacuum tank 11 and the other mechanism part as a rotating part. For example, the part 12 is made the fixed part arranging the mounting part 26 of the plate 1 within a tank and arranging a driving part 24 in the outside of the tank through a static-pressure bearing 18. An electron beam emitting head mechanism part 13 is mounted to a head fitting member 35 rotatably supported to the tank 11 through a static-pressure bearing part 22 so that an electron beam axis L1 is eccentric with respect to the center of the rotation 01. The part 13 moves in the radial direction along an orbit in the state of a circular arc with respect to the rotating plate 1.

56. 发明专利

JPH11288534A DISK ORIGINAL PLATE PREPARING DEVICE AND ITS METHOD 失效
公开(公告)号：JPH11288534A
公开(公告)日：1999-10-19
申请号：JP8759998
申请日：1998-03-31
申请人： SONY CORP
发明人： YAJIMA TAKASHI , AKI YUICHI , KASHIWAGI TOSHIYUKI
IPC分类号： G11B11/10 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To cut a highly precise and dense pit pattern, etc., to a disk original plate by electron beams. SOLUTION: This device is provided with a shaft driving mechanism 12 which adjust-moves the outputting shaft 28 of an original plate rotating mechanism part 11 position-mounting a disk original plate 1 to rotate-drive it, in the axial direction and a sensor 44 measuring an opposite interval to the main surface of the plate 1 is installed to the electron beam emitting face 36a of an electron beam emitting means 13. The variation of the interval between the face 36a and the plate 1 is measured by the sensor 44 and the part 11 is moved in the axial direction by the mechanism 12 to keep the interval to be a fine interval where the electron beams are hardly affected even in the atmosphere.

57. 发明专利

JPH10122826A FILM THICKNESS MEASURING DEVICE AND METHOD 失效
公开(公告)号：JPH10122826A
公开(公告)日：1998-05-15
申请号：JP29324396
申请日：1996-10-15
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： G01B11/06 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To reduce the measurement error of the film thickness of a light transmissive resin and to improve measurement accuracy by taking the image of a double-layer optical disk into an image-processing device, judging that the image of a reflection film has been formed clearly, and retaining the judgement constantly. SOLUTION: A lighting optical system 40 emits light beams LA1 for measuring film thickness downward from a front side lower end and performs displacement so that the focal point of the beams LA1 can be vibrated up and down at a fast speed. In this manner, the optical system 40 allows the beams LA1 to enter a double-layer optical disk 20 that is sucked and retained by a suction retention part 19 of a rotary drive part 11 from the side of a reverse side 20A, and at the same time, the beams LA1 are emitted to the reflection film of the disk 20 successively, thus receiving reflection beams LA2 obtained, and hence the film thickness of the light transmission resin of the disk 20 can be measured based on the reflection beams LA2 received. A device 10 rotates the disk 20 relatively rapidly, and averages the reflection beams LA2 obtained from the plane part, the bit, and the groove of the disk 20.

58. 发明专利

JPH0773490A FOCAL POINT CONTROLLER AND METHOD OF STABILIZING IT 失效
公开(公告)号：JPH0773490A
公开(公告)日：1995-03-17
申请号：JP23914993
申请日：1993-08-31
申请人： SONY CORP
发明人： AKI YUICHI , SUZUKI AKITOSHI
IPC分类号： G11B7/095 , G11B7/125 , G11B7/26
摘要： PURPOSE:To accurately and stably control a focal point by controlling the outgoing light quantity of a controlling light source and controlling the light quantity of reflected return beam. CONSTITUTION:A master disk 2 is successively irradiated with light beam L1 for exposure based on the recording data, and after the light beam L10 from the controlling light source 10 is synthesized with the L1, the light beam L10 is cast on the master disk 2 through an objective lens 6. A reflected beam L11 is received by a photoelectric conversion means 14, and the objective lens 6 is moved and controlled so that the light beam L1 focuses on the master disk 2 based on signals S10A, S10B outputted from the photoelectric conversion means 14 at a signal level according to the incident position and the light quantity of the reflected beam L11 incident on a light receiving surface 14A. The outgoing light quantity of the controlling light source 10 is controlled by a control means 17 based on the signals S10A, S10B so that total sum of the light quantity of the reflected beam L11 incident on the light receiving surface 14A of the photoelectric conversion means becomes a fixed level.

59. 发明专利

JPH06341506A POSITIONING DEVICE 失效
公开(公告)号：JPH06341506A
公开(公告)日：1994-12-13
申请号：JP15448993
申请日：1993-05-31
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： B23Q5/44 , B23Q5/56 , F16H25/20 , F16H25/24
摘要： PURPOSE:To let an accurate positioning device free of jarring be realized by providing the device with a pre-load means applying pre-load to a feed nut in the specified direction, and making it possible to adjust the aforesaid pre-load to a desired value when a driven section is positioned at a desired position via the feed nut with the feed screw rotated. CONSTITUTION:When a rotating drive section 9 is driven so as to allow its rotation to be transmitted to a feed screw 13 via a speed increase/decrease section 8 and a rotational shaft joint 11, a feed nut 15 engaged with the feed screw 13 is moved to the direction indicated by an arrow head (a), and a driven section 2 connected to the feed nut 15 by a connecting member 14 is moved to the same direction, so that for example, the optical means of an optical disc master exposure means rested over the driven section is moved with high accuracy. In this case, the supply of high pressure from a pressure source 17 which is adjusted to a desired value by a pressure control section 18, permits contact surface pressure between the feed screw 13 and the feed nut 15 to be kept roughly constant. By this constitution, friction torque is restrained from fluctuating, so that accuracy in positioning can thereby be enhanced.

60. 发明专利

JPH06313439A ROTARY SHAFT JOINT 失效
公开(公告)号：JPH06313439A
公开(公告)日：1994-11-08
申请号：JP12796193
申请日：1993-04-30
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： F16D3/74
摘要： PURPOSE:To 3 a rotary shaft joint capaple of improving further damping characteristics of vibration by filling and/or attaching non-metallic elastic member to the inner and/or outer front surface of a metallic elastic member of rotary shaft joint. CONSTITUTION:A bellows-type flexible shaft joint 10 is formed by a bellows body part 14 formed by a metallic elastic member between a supporting part 12 for fitting and fixing a driving shaft to a fitting hole 12A and a supporting part 16 for fitting and fixing a driven shaft to a fitting hole 16A. Resin or rubber is foam-filled in the bellows body part 14, and a damping material layer 15 having high damping capacity is formed. Accordingly, when the bellows-type flexible shaft joint 10 receives torsional vibration, the constitution member composed of the supporting members 12, 16 and the bellows body part 14 generates the periodic elastic deformation, and vibration is damped by internal loss or transmission. In this case, vibrational energy is transmitted to not only the constitution member but also the damping material layer 15. And the vibrational energy is rapidly consumed by large energy loss inside the damping material layer 15, thereby vibration is damped for a short period.

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