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21. 发明专利

JPH01243746A FAULT DIAGNOSTIC SYSTEM 失效
公开(公告)号：JPH01243746A
公开(公告)日：1989-09-28
申请号：JP6939688
申请日：1988-03-25
申请人： HITACHI LTD
发明人： NAKAMURA TSUTOMU , SHINNAI KOSUKE , SUZUKI MICHIO , SASAKI RYOICHI
摘要： PURPOSE:To clearly display candidate parts of fault parts from the ones at higher probability by separating the fault part in a fault state generated in a network based on fault information and the fault generation history information of the fault parts. CONSTITUTION:A center device 100 successively execute polling to multiplexing devices 101 and 102, and the fault information is collected as its response data. At such a time, the center 100 first exchanges commands to set a connection with the multiplexing device 101 and 102, and after the completion of the connection setting, it collects the fault information. Based on the fault information and the fault generation history information of the fault part, the fault part in the fault state generated in the network is separated.

22. 发明专利

JPS62213448A CONSTITUTION SYSTEM FOR TRUNK CIRCUIT 失效
公开(公告)号：JPS62213448A
公开(公告)日：1987-09-19
申请号：JP5476586
申请日：1986-03-14
申请人： HITACHI LTD
发明人： HOSHI TORU , MIZUHARA NOBORU , SUZUKI MICHIO , KASHIO JIRO
IPC分类号： H04L12/40 , H04L12/44
摘要： PURPOSE:To facilitate the forming of a local area network by connecting plural data terminal equipments to an exchange via a telephone set having dialing function and an interface and connecting the exchange to the trunk circuit. CONSTITUTION:A signal from plural data terminal equipments (DTE) 202-1-202-m is fed to an exchange (SW) 201 via telephone sets (TEL) 204 -204 having a dialing function and exchange interfaces (LIF) 206 -206 . The output of the SW 201 is fed to a trunk circuit (TRK) 208. A signal is separated to individual channel by a demultiplexer DMX 209 of the TRK 208, rate adaptors RA 211 -211-m restore the signal to the signal having the sane form as the output of the DTE and the result is sent to a bus 215 via a driver 213. The signal on bus is returned to the SW 201 via the receiver 214, RAs 212 -212 and a multiplexer 210 and sent to all DETs. Thus, the constitution of the LAN is facilitated to connect one terminal equipment to the plural number of LANs.

23. 发明专利

JPS60214238A Fine particle detector 失效
标题翻译：精细粒子检测器
公开(公告)号：JPS60214238A
公开(公告)日：1985-10-26
申请号：JP7088584
申请日：1984-04-11
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： SAITOU SUSUMU , SUZUKI MICHIO , SUDA TADASHI , HACHIKAKE YASUO , TSUKADA KAZUYA
IPC分类号： G01N21/53 , G01N15/02 , G01N15/14 , G01N21/39 , G01N21/49
CPC分类号： G01N15/0205 , G01N15/14 , G01N2021/391
摘要： PURPOSE:To detect fine particles in an aerosol stably with high precision by arranging a detection cell through which the aerosol to be measured is passed in an external resonator which resonates with the output of a laser oscillator, and measuring scattered light. CONSTITUTION:The laser output light 6 from the laser oscillator 1 is made incident on the Fabry-Perot optical resonator constituted by placing mirrors 2 and 2' opposite to each other. Laser light 8 is reflected repeatedly between mirrors 2 and 2' to obtain a value nearly equal to the light intensity in the laser resonator. The aerosol 7 to be measured is passed through a detection cell 3 in the resonator from a suction nozzle 4 while crossing the laser luminous flux and discharged through a discharge nozzle 5. Laser light scattered by fine particles in the aerosol is converged through a condenser lens optical system 9 and converted into an electric signal by a photodetector 10.
摘要翻译：目的：通过在与激光振荡器的输出共振的外部谐振器中设置待测量气溶胶通过的检测单元，并测量散射光，以高精度稳定地检测气溶胶中的微粒。构成：将来自激光振荡器1的激光输出光6入射到通过将镜子2和2'彼此相对放置而构成的法布里 - 珀罗光学谐振器。激光8在反射镜2和2'之间反复反射以获得几乎等于激光谐振器中的光强度的值。被测量的气溶胶7在与激光光束交叉的同时从吸嘴4通过谐振器中的检测单元3，并通过排出喷嘴5排出。气溶胶中的细颗粒散射的激光被会聚在聚光透镜光学系统9，并由光电检测器10转换成电信号。

24. 发明专利

JPS6038956A DATA TRANSMISSION SYSTEM 失效
公开(公告)号：JPS6038956A
公开(公告)日：1985-02-28
申请号：JP14638583
申请日：1983-08-12
申请人： HITACHI LTD
发明人： SUZUKI MICHIO , HIYAMA KUNIO , HOSHI TOORU , TAKENOUCHI HIROO , KONASE TOSHIAKI
IPC分类号： H04L25/38 , H04L25/06 , H04L29/10
摘要： PURPOSE:To reduce the number of connection lines between data terminal line terminators by sampling the level of lines T and R in a speed, e.g., 10 times the data transmission speed, and transmitting alternately the information after the said sampling in a speed >= twice the sampling speed while putting plural bits together. CONSTITUTION:A level sampling circuit 1 samples the level state of the line R in a speed faster than the data transmission speed, e.g., 10 times in an interface converter CONV2 of the line terminator side. When a Manchester coding circuit 14 receives a transmission request, the circuit 14 transmits data to a line L in a speed being twice the sampling speed from a shift register 13, transmits a transmission end signal to a transmission direction control circuit 3 through a signal line 6 when the transmission of data is finished. When the data from the line L is received in an interface converter CONV1 at the data terminal device DTE side waiting for the reception from the CONV2 at the data terminal DTE side, the data is inputted to a Manchester decoding circuit 15 and transmitted to a shift register 16 after decoding. Thus, the data terminal line terminators are connected by a couple of lines in realizing the data exchange system or the like connecting the DTE in accordance with the interface protocol of the CCITT recommendations X.20.

25. 发明专利

JPS5939019A Clean storage box 失效
标题翻译：清洁储物盒
公开(公告)号：JPS5939019A
公开(公告)日：1984-03-03
申请号：JP14765882
申请日：1982-08-27
申请人： Hitachi Ltd
发明人： SUZUKI MICHIO , FUKUDA MUNEHARU
IPC分类号： B08B15/02 , H01L21/02 , H01L21/673
CPC分类号： H01L21/67017 , B08B15/02 , H01L21/02 , H01L21/67386 , H01L21/67393
摘要： PURPOSE: To suppress increase of working cost of a clean room to minimum, by a method wherein air of high purity obtained using an air fliter of very excellent performance is supplied to limited narrow space of the storage room.
CONSTITUTION: A clean air 3 filtered during passing through an upper air filter 2 is supplied to a clean storage box 1 through a stainless duct 4 and flowed downwards out of a bottom part 5 with punching. The duct 4 and the storage box 1 are connected with a flange 6 and can be easily separated thereby inside of the duct 4 and the storage box 1 can be easily washed.
COPYRIGHT: (C)1984,JPO&Japio
摘要翻译：目的：为了将洁净室的工作成本提高到最小限度，通过使用具有非常优异性能的空气喷射器获得的高纯度空气被提供给储藏室的狭窄空间的方法。构成：在通过上部空气过滤器2时过滤的清洁空气3通过不锈钢管道4供应到干净的储存箱1，并通过冲孔从底部5向下流出。管道4和储藏箱1与凸缘6连接，并且可以容易地从管道4的内部分离，并且储存箱1可以容易地洗涤。

26. 发明专利

JPS58200540A Cleaning method for semiconductor wafer 失效
标题翻译：半导体波形清洗方法
公开(公告)号：JPS58200540A
公开(公告)日：1983-11-22
申请号：JP8300482
申请日：1982-05-19
申请人： Hitachi Ltd
发明人： SUZUKI MICHIO , HASHIMOTO NAOTAKA
IPC分类号： B01D61/14 , H01L21/304
CPC分类号： H01L21/02019 , H01L21/3046
摘要： PURPOSE:To realize an ultra-clarifying and washing process, through which minute foreign matters of approximately 0.1mum are not attached, with excellent reproducibility by washing a wafer by water, immersing it in an immersion liquid consisting of a liquid having high solubility to water and drying it by steam while ultra-filtering the immersion liquid at all times. CONSTITUTION:The Si specular wafer 1 is etched by a composition etching liquid, replaced instantaneously with a deionized pure water, and washed by flowing water. The wafer 1 is immersed instantaneously in an immersion tank 5 into which isopropyl alcohol 4 is entered after washing by water, and trnsferred to a steam drier 6. Isopropyl alcohol flows into a temporary reservoir 8 through a cartridge filter 7 and is pressured by a pump 9, and passes through ultrafilter membranes 10 utilizing polyimide films and returns to the immersion tank 5. On the other hand, foreign matters and high molecular substances in isopropyl alcohol are obstructed by the ultrafilter membranes 10, and thrown away to the outside through a concentrated-liquid discharge port 11. A Daiflon solvent 12 is stored to the lower section of the steam drier 6 as a drying treating liquid, and heated, and the wafer 1 is exposed to the vapor of the treating liquid 12.
摘要翻译：目的：为了实现超净化和洗涤过程，通过其不附着约0.1μm的微小异物，通过用水洗涤晶片具有优异的再现性，将其浸入由具有高溶解度的液体组成的浸液中并通过蒸汽干燥，同时对浸渍液进行超滤。构成：通过组合物蚀刻液蚀刻Si镜面晶片1，用去离子纯水瞬间取代，并用流动的水洗涤。将晶片1瞬间浸入浸入水槽5中，异丙醇4在水中洗涤后进入其中，并转移到蒸汽干燥器6中。异丙醇通过筒式过滤器7流入临时储存器8，并通过泵并且使用聚酰亚胺膜通过超滤膜10并返回到浸渍槽5.另一方面，异丙醇中的异物和高分子物质被超滤膜10阻挡，并通过浓缩物向外排出 - 液体排出口11.将Daiflon溶剂12作为干燥处理液体储存在蒸汽干燥机6的下部，并加热，将晶片1暴露于处理液12的蒸气。

27. 发明专利

JPS58125844A VACUUM PROCESSING DEVICE 失效
公开(公告)号：JPS58125844A
公开(公告)日：1983-07-27
申请号：JP758982
申请日：1982-01-22
申请人： HITACHI LTD
发明人： TSUJIMOTO KAZUNORI , MIZUTANI TATSUMI , SUZUKI MICHIO
IPC分类号： H01L21/02 , H01L21/00 , H01L21/68
摘要： PURPOSE:To reduce the velocity of flow of the jet of an introducing gas, and to prevent the adhesion of dust onto the surface of a substrate by providing the supply port of the introducing gas with a duct-shaped shielding box. CONSTITUTION:The duct-shaped shielding box 4 is set up adjoined to the supply port 2 of the introducing gas, the jet of the gas is made collide, the velocity of flow is reduced sufficiently, and the gas is discharged from an opening. The opening section is formed downward to prevent the deposition of dust, and the gas is discharged from a large number of small holes. A substrate case 3 is covered with a cover 8, the substrate is protected when the gas is supplied into a vacuum chamber, and pleats are formed to the floor surface 9 of the vacuum chamber to prevent the fly-up of dust. In said constitution, the gas is introduced from a vacuum state in a short time and can be brought to atmospheric pressure, and the adhesion of dust onto the surface of the substrate can be obviated.

28. 发明专利

JPS57145455A VOICE PACKET BRANCHING AND INSERTING DEVICE 失效
公开(公告)号：JPS57145455A
公开(公告)日：1982-09-08
申请号：JP2986281
申请日：1981-03-04
申请人： HITACHI LTD
发明人： TOKI RIYUUICHI , SUGANO MINORU , KATOU TAKAO , WATANABE MASATAKA , SUZUKI MICHIO , TERADA MATSUAKI
IPC分类号： H04Q11/04 , H04L12/64
摘要： PURPOSE:To obtain a voice packet branching/inserting device which can be easily increased with high economical performance, by storing both a telephone terminal and a data terminal. CONSTITUTION:A voice packet producing circuit 16 detects the voice given from a telephone terminal 14 and converts the voice into a data to carry out the packeting. A voice first-in/first-out storing circuit 2 stores the above-mentioned packet in the first-in/first-out system and delivers it in the same system. A first-in/first-out storing circuit 5 detects the packet given from a data terminal 15 to store and deliver it in the first-in/first-out system. Furthermore a packet selector circuit 4 selects alternately in the first-in/first-out system the outputs of the received packets given from the circuits 4 and 5 to transmit it to a circuit. As a result, an increase is facilitated with a low cost for a voice packet branching/inserting device.

29. 发明专利

JPS5630629A INSPECTION JIG FOR OPTICAL TYPE FACE PLATE FAULT DETECTOR 失效
公开(公告)号：JPS5630629A
公开(公告)日：1981-03-27
申请号：JP10610079
申请日：1979-08-22
申请人： HITACHI LTD , HITACHI ELECTR ENG
发明人： HACHIKAKE YASUO , EGARASHI ETSUROU , SUZUKI MICHIO
IPC分类号： G01B11/00 , G01N21/88 , G01N21/93 , G01N21/95 , G01N21/956
摘要： PURPOSE:To obtain an inspection jig easy to handle and having high inspection accuracy by providing stepped parts each having a width dimension larger than the diameter of a light spot irradiated from a detector, on a face plate in a combination of a plurality of rows. CONSTITUTION:Stepped parts 2 each having a width dimension larger than the diameter D of a light spot irradiated from an optical type fault detector and having a thickness dimension d of several steps, is provided on a face plate 1 in a combination of a plurality of rows. For example, on the surface of the silicone wafer 1, there are provided rectilear silicone stepped parts 2 each having the thickness d of suitable four steps, and a pattern width w larger than the diameter D of the light spot irradiated are arranged and formed, four each in three directions, i.e., rectangular direction, and 45 deg. direction. The relation of a scattered light detecting signal voltage v of the light receiver 4 with respect to the thickness d of the stepped part is measured in advance, and the measured relation is used for the presumption of the size of the fault forming a linear shape and inspection of the detection function of the detector.

30. 发明专利

JPS5570042A FABRICATING METHOD OF SEMICONDUCTOR DEVICE HAVING ISOLATING OXIDE REGION 失效
公开(公告)号：JPS5570042A
公开(公告)日：1980-05-27
申请号：JP13517979
申请日：1979-10-22
申请人： HITACHI LTD
发明人： HAYASAKA AKIO , NODA HIDEO , SUZUKI MICHIO , KONDOU HIROYUKI
IPC分类号： H01L21/76 , H01L21/31 , H01L21/316 , H01L21/331 , H01L29/73
摘要： PURPOSE:To prevent a base electrode from occurrence of leaked channel there under in a semiconductor device by diffusing gallium from the surface of an isolating oxide layer to thereby terminate the pn-junction of an oxide isolating (LOCOS) element under the isolating oxide layer. CONSTITUTION:An n -type buried layer is provided on a p-type silicon substrate 1 to epitaxially grow a silicon layer 3 and to coat it with a mask consisting of an oxide film 4 and a silicon nitride film 5. Then, it is selectively oxidized to thereby form an isolating oxide region 7 and remove a silicon nitride film 6b on the base region so as to then diffuse boron therein. Then, gallium is diffused though thin portion of the oxide film 9 and the isolating oxide region 7 thus formed on the surface to thus form a p-type region 10 on an island region 3b. Further, an emitter region 11 and an electrode 13 are formed thereat. Thus, a collector junction is terminated under the isolating oxide region 7 separated from the base electrode 13b to thereby prevent leaked current thereat.

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