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    • 1. 发明专利
    • RECOMBINATION TYPE LOCAL ENVIRONMENT CONTROLLING CHAMBER
    • JPS6071831A
    • 1985-04-23
    • JP18134883
    • 1983-09-29
    • HITACHI PLANT ENG & CONSTR COHITACHI LTD
    • HIRANO MIKIOFUKUDA MUNEHARUSHIKI YOSHIKAZUMINAGAWA MITSURU
    • F24F3/00F24F3/16F24F13/02
    • PURPOSE:To make the shifting of blowing units possible without putting down a ceiling and the like, remodeling and the like so as to enable to supply conditioned and dust-removed air having optimum quantity and blow-off direction into an environmental chamber by a structure wherein lattice frames are arranged at boundary surfaces between blast side and suction side in order to detachably install the blowing units, suction plates and the like thereonto. CONSTITUTION:A first lattice frame 38 is arranged at a boundary surface between a mixing chamber 24 and an environment controlling chamber 26 and blowing units 44 are detachably attached on the surfaces of coffers at predetermined positions of the lattice frame 38, the surfaces of coffers at the remaining positions are covered by detachable cover plates 46. The environment controlling chamber 26 and a return chamber 28 are divided by a second lattice frame 58 on the surfaces of coffers at predetermined positions of which detachable grills 60 and the like are attached and the surfaces of coffers at the remaining positions of which are covered by detachable cover plates 62. Dampers 64, by means of the opening of each blade of which the quantity and direction of suction air flow is controlled, are provided below the grilles 60. Because the blowing units 44 are detachably installed onto the lattice frame 38, the units 44 can be easily shifted and installed again in response to the productive facilities with no large-scale engineering work.
    • 2. 发明专利
    • Clean storage box
    • 清洁储物盒
    • JPS5939019A
    • 1984-03-03
    • JP14765882
    • 1982-08-27
    • Hitachi Ltd
    • SUZUKI MICHIOFUKUDA MUNEHARU
    • B08B15/02H01L21/02H01L21/673
    • H01L21/67017B08B15/02H01L21/02H01L21/67386H01L21/67393
    • PURPOSE: To suppress increase of working cost of a clean room to minimum, by a method wherein air of high purity obtained using an air fliter of very excellent performance is supplied to limited narrow space of the storage room.
      CONSTITUTION: A clean air 3 filtered during passing through an upper air filter 2 is supplied to a clean storage box 1 through a stainless duct 4 and flowed downwards out of a bottom part 5 with punching. The duct 4 and the storage box 1 are connected with a flange 6 and can be easily separated thereby inside of the duct 4 and the storage box 1 can be easily washed.
      COPYRIGHT: (C)1984,JPO&Japio
    • 目的:为了将洁净室的工作成本提高到最小限度,通过使用具有非常优异性能的空气喷射器获得的高纯度空气被提供给储藏室的狭窄空间的方法。 构成:在通过上部空气过滤器2时过滤的清洁空气3通过不锈钢管道4供应到干净的储存箱1,并通过冲孔从底部5向下流出。 管道4和储藏箱1与凸缘6连接,并且可以容易地从管道4的内部分离,并且储存箱1可以容易地洗涤。