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1. 发明专利

JPS60190834A Nozzle of fine particle detector 失效
标题翻译：细颗粒探测器喷嘴
公开(公告)号：JPS60190834A
公开(公告)日：1985-09-28
申请号：JP3267985
申请日：1985-02-22
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： IWATANI FUKUO , YAMADA KUNIO , TSUKADA KAZUYA , TAKAMI KATSUMI , SUDA TADASHI , TAKAHASHI KENSAKU
IPC分类号： G01N21/53 , G01N1/22 , G01N15/00
CPC分类号： G01N1/2202 , G01N2001/2223
摘要： PURPOSE:To obtain a high-speed, stable laminar air of aerosol, by providing a nozzle so that the outer screen of the aerosol comprises two or more layers having different speeds. CONSTITUTION:At the outside of an original pipe, a pipe 10, which can be slidden in the axial direction, is further provided. Second clean air 11 is introduced into this pipe, and the second layer screen is formed. In order to make aerosol 3 into a stable laminar air, speeds V1 and V2 are made approximately equal and an appropriate intermediate value between the speed V2 and the zero speed is imparted to a speed V3. It is necessary to determine the speed V3 empirically. In present invention, the speed V3 is adjusted by providing a sliding mechanism in the pipe 10, moving the pipe 10 in the axial direction, and changing the interval between tips 12' and 12'' of a nozzle 12. Thus the high-speed, stable laminar air of the aerosol can be obtained.
摘要翻译：目的：通过提供喷嘴使得气溶胶的外屏幕具有不同速度的两层或多层，以获得高速稳定的气溶胶层流空气。构成：在原管的外侧，进一步设置能够沿轴向切断的管道10。将第二清洁空气11引入该管中，形成第二层筛。为了使气溶胶3成为稳定的层流空气，速度V1和V2大致相等，将速度V2和零速度之间的适当中间值赋予速度V3。有必要经验性地确定速度V3。在本发明中，通过在管10中设置滑动机构，使管10沿轴向移动，并且改变喷嘴12的尖端12'和12“之间的间隔来调节速度V3。因此，高速，可以获得气溶胶的稳定层流空气。

2. 发明专利

JPS58206949A Inspecting device of defect 失效
标题翻译：检查缺陷设备
公开(公告)号：JPS58206949A
公开(公告)日：1983-12-02
申请号：JP8993282
申请日：1982-05-28
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： SUDA TADASHI , TSUKADA KAZUYA , KAWAKAMI YUKIO , NAGATOMO HIROTO , AKIBA MASAKUNI
IPC分类号： G01N21/88 , G01N21/89 , G01N21/956 , G03F1/84 , H01L21/027 , H01L21/66
CPC分类号： G01N21/89
摘要： PURPOSE:To detect exactly a defect on the surface of a semiconductor chip, by recognizing the existence of DC and AC components appearing in one scanning signal as it is, envelope-detecting its signal, and thereafter, using it as comparison voltage of an original signal, and binary-coding and extracting a defect signal pulse. CONSTITUTION:A signal is amplified by an amplifier 23, and thereafter, is inputted to an absolute value circuit 25 through an atteuator 24 provided in order that adjustment is executed easily. It is executed so that detection can be executed even in case when that which inverts polarity of a defect signal pulse appears, and an output signal of the absolute value circuit 25 is made one of inputs of a comparator 29. Also, an output of the absolute value circuit 25 is separated and is envelope-detected through a low-pass filter 26. An output of the low-pass filter is amplified by prescribed times, and also an adder 28 for applying variable DC voltage 27 is provided in order to adjust upwards and downwards a level of an envelope. When envelope detection of automatic level following, which is generated in this way is inputted as comparison voltage of the comparator 29, a defect signal pulse can be extracted.
摘要翻译：目的：为了准确检测半导体芯片表面的缺陷，通过识别一个扫描信号中出现的直流和交流分量的存在原理，对其信号进行包络检测，然后将其作为原始电路的比较电压信号和二进制编码，并提取缺陷信号脉冲。构成：由放大器23放大信号，之后，通过设置在输入装置24上的绝对值电路25输入，以便容易进行调整。即使执行了使缺陷信号脉冲的极性反转的情况下也能够进行检测，并且将绝对值电路25的输出信号作为比较器29的输入之一进行检测。而且，绝对值电路25被分离，并且通过低通滤波器26被包络检测。低通滤波器的输出被放大规定时间，并且还提供了用于施加可变直流电压27的加法器28，以便调整上下一层信封。当以这种方式产生的自动电平跟随的包络检测被输入作为比较器29的比较电压时，可以提取缺陷信号脉冲。

3. 发明专利

JPS60214238A Fine particle detector 失效
标题翻译：精细粒子检测器
公开(公告)号：JPS60214238A
公开(公告)日：1985-10-26
申请号：JP7088584
申请日：1984-04-11
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： SAITOU SUSUMU , SUZUKI MICHIO , SUDA TADASHI , HACHIKAKE YASUO , TSUKADA KAZUYA
IPC分类号： G01N21/53 , G01N15/02 , G01N15/14 , G01N21/39 , G01N21/49
CPC分类号： G01N15/0205 , G01N15/14 , G01N2021/391
摘要： PURPOSE:To detect fine particles in an aerosol stably with high precision by arranging a detection cell through which the aerosol to be measured is passed in an external resonator which resonates with the output of a laser oscillator, and measuring scattered light. CONSTITUTION:The laser output light 6 from the laser oscillator 1 is made incident on the Fabry-Perot optical resonator constituted by placing mirrors 2 and 2' opposite to each other. Laser light 8 is reflected repeatedly between mirrors 2 and 2' to obtain a value nearly equal to the light intensity in the laser resonator. The aerosol 7 to be measured is passed through a detection cell 3 in the resonator from a suction nozzle 4 while crossing the laser luminous flux and discharged through a discharge nozzle 5. Laser light scattered by fine particles in the aerosol is converged through a condenser lens optical system 9 and converted into an electric signal by a photodetector 10.
摘要翻译：目的：通过在与激光振荡器的输出共振的外部谐振器中设置待测量气溶胶通过的检测单元，并测量散射光，以高精度稳定地检测气溶胶中的微粒。构成：将来自激光振荡器1的激光输出光6入射到通过将镜子2和2'彼此相对放置而构成的法布里 - 珀罗光学谐振器。激光8在反射镜2和2'之间反复反射以获得几乎等于激光谐振器中的光强度的值。被测量的气溶胶7在与激光光束交叉的同时从吸嘴4通过谐振器中的检测单元3，并通过排出喷嘴5排出。气溶胶中的细颗粒散射的激光被会聚在聚光透镜光学系统9，并由光电检测器10转换成电信号。

4. 发明专利

JPS61105447A Light collector for inspecting surface plate defect 失效
标题翻译：用于检查表面板缺陷的集光器
公开(公告)号：JPS61105447A
公开(公告)日：1986-05-23
申请号：JP23525885
申请日：1985-10-23
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： TAKAHASHI KENSAKU , HACHIKAKE YASUO , IWATANI FUKUO , ITO MAKOTO , TAKAMI KATSUMI , SUDA TADASHI
IPC分类号： G01N21/88 , G01B11/30 , G01N21/89 , G01N21/956 , H01L21/66
CPC分类号： G01N21/8901
摘要： PURPOSE:To eliminate the need to make a division scan over the entire surface plate and shorten the necessary time of inspection greatly by collecting scattered light which is generated over a wide scanning range with small sensitivity deviation. CONSTITUTION:A light source P emits light and a light beam within a range of an angle phi1 is reflected by flanks 9-1 and 9-2 to both reach a projection surface 9-4 and projected. A component exceeding an angle phi2, on the other hand, is reflected totally by the projection surface 9-4 to return to the inside, or returns when reflected by the flanks 9-1 and 9-2, so that the light is divided into a component transmitted through an incidence surface 9-3 and a component which is reflected totally and travels forward inside again. Namely, components of incident light which are within the range of the angle phi2 are collected efficiently. Even when the light source shifts to right or left from the center like a light source P' or P'', a light collector having small deviation is obtained. Further, incident light transmitted through the incidence surface 9-3 is all projected from the projection surface 9-4 through the refracting operation of the incidence surface 9-3 and the mirror surface reflecting operation of surfaces 9-5 and 9-6.
摘要翻译：目的：为了消除在整个平板上划分扫描的需要，通过收集在较小的灵敏度偏差的宽扫描范围内产生的散射光，可以大大缩短检查时间。构成：光源P发光，并且在角度phi1的范围内的光束被侧面9-1和9-2反射，以到达投影面9-4并投影。另一方面，超过角度phi2的分量被投影面9-4完全反射回到内部，或者当被侧面9-1,9-2反射时返回，使得光被分成通过入射面9-3透射的分量和被全反射并再次向前行进的分量。即，有效地收集在角度phi2的范围内的入射光的分量。即使当光源像光源P'或P“一样从中心向右或向左移动时，获得具有小偏差的集光体。此外，穿过入射表面9-3的入射光全部通过入射表面9-3的折射操作和表面9-5和9-6的镜面反射操作从突出表面9-4投影。

5. 发明专利

JPS60190835A Fine particle detector 失效
标题翻译：精细粒子检测器
公开(公告)号：JPS60190835A
公开(公告)日：1985-09-28
申请号：JP3268085
申请日：1985-02-22
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： YAMADA KUNIO , IWATANI FUKUO , TSUKADA KAZUYA , TAKAMI KATSUMI , SUDA TADASHI , TAKAHASHI KENSAKU
IPC分类号： G01N21/53 , G01N15/00 , G01N15/14 , G01N21/47 , G01N21/49
CPC分类号： G01N21/47
摘要： PURPOSE:To expand a light receiving angle, by providing a rotary elliptic mirror, which is arranged so that a converged light detecting means of scattered light occupies the first focal point in a detecting region, and providing a spherical mirror, which has a radius of curvature equal to the distance between the focal points of said rotary elliptic mirror. CONSTITUTION:A rotary elliptic mirror 19 is arranged so that a converged light detecting means of scattered light has the first focal point in a detecting region. A radius (v) of a spherical mirror 20 is made equal to the interval between two focal points S and R of the elliptic mirror 19. The center of the spherical mirror 20 is made to agree with the focal point S, i.e., the detecting region. At this time, the scattered light, which is reflected by an arbitrary point (m) of the elliptic mirror 19, is concentrated at the focal point R. Scattered light, which is reflected by an arbitrary point (n) of the spherical mirror 20, is reflected by a point (k) on the elliptic mirror 19 through the focal point S again and concentrated at the focal point R. When the gap at the connecting point of the elliptic mirror 19 and the spherical mirror 20 is eliminated, a total solid angle 4pisr can be made to be a light receiving solid angle. Thus the light receiving angle can be expanded to the limit.
摘要翻译：目的：为了扩大受光角度，通过提供一种旋转椭圆镜，其被布置成使得散射光的会聚光检测装置在检测区域中占据第一焦点，并且提供球面镜，其具有半径曲率等于所述旋转椭圆镜的焦点之间的距离。构成：旋转椭圆镜19被布置成使得散射光的会聚光检测装置具有检测区域中的第一焦点。使球面镜20的半径（v）等于椭圆镜19的两个焦点S和R之间的间隔。使球面镜20的中心与焦点S一致，即检测地区。此时，由椭圆镜19的任意点（m）反射的散射光集中在焦点R.由球面镜20的任意点（n）反射的散射光，再次通过焦点S被椭圆镜19上的点（k）反射并聚焦在焦点R.当消除了椭圆镜19和球面镜20的连接点处的间隙时，总共立体角4pisr可以做成光接收立体角。因此，光接收角度可以扩大到极限。

6. 发明专利

JPS631954A FOREIGN MATTER DETECTOR 失效
公开(公告)号：JPS631954A
公开(公告)日：1988-01-06
申请号：JP14484786
申请日：1986-06-23
申请人： HITACHI LTD
发明人： ITO YOSHITOSHI , SUDA TADASHI
IPC分类号： G01N15/14
摘要： PURPOSE:To detect fine foreign matter with good accuracy, by a method wherein laser beam is allowed to irradiate a liquid from which foreign matter is removed and a liquid wherein the presence of the foreign matter is inspected and the scattering beams from both irradiation parts are allowed to interfere with each other to set off scattering beam components due to the liquids. CONSTITUTION:Beam is divided into two by an Wollaston polarizing prism and both beams are condensed by a lens 5 to be allowed to irradiate the liquid to be inspected and a liquid from which foreign matter is removed in the liquid cells arranged at condensing points. Scattering beam due to the liquid is generated from the irradiated part of the former and scattering beam is generated from foreign matter if said foreign mater present in the liquid. Among said scattering beams, the component which is the scattering beam from the liquid and of which the polarizing surface cross that of laser beam 12a at a right angle is reflected by a polarizing beam splitter 13 to be incident to a pipe 20. The incident beam is converted to voltage by the pipe 20 and the output voltage thereof is measured and the presence of the foreign matter is detected from the measured value.

7. 发明专利

JPS62150142A PATTERN DEFECT INSPECTOR 失效
公开(公告)号：JPS62150142A
公开(公告)日：1987-07-04
申请号：JP29058985
申请日：1985-12-25
申请人： HITACHI LTD
发明人： KIMURA SHIGEJI , ONODERA TAKASHI , SUDA TADASHI , HASE SHINOBU , MUNAKATA TADASUKE , SAITO MIKITO
IPC分类号： G01N21/88 , G01N21/956 , H01L21/66
摘要： PURPOSE:To prevent erroneous detection due to roundness of a refracting section of a reflection diffraction light pattern, by comparing information of 'roundness' obtained from a normal chip with that from another chip. CONSTITUTION:Reference information from a normal chip is stored into a RAM24. The address of the RAM corresponds to the sorting of patterns. In the inspection, a scanning is done over a chip 11 with a laser light 10, a signal generated of the reflected diffraction light 14 in the normal direction 12-1 is processed to sort patterns. The contents of the RAM24 as designated by the sorting is compared 23 with a signal in the abnormal direction 13-1 simultaneously generated. When the signal in the abnormal direction 13-1 is larger than the contents of the RAM24, it is judged that there is a defect in the pattern and a defect signal 25 is sent out.

8. 发明专利

JPS61210626A CHECKING DEVICE FOR PATTERN DEFECT 失效
公开(公告)号：JPS61210626A
公开(公告)日：1986-09-18
申请号：JP5043185
申请日：1985-03-15
申请人： HITACHI LTD
发明人： KIMURA SHIGEJI , SUDA TADASHI , HASE SHINOBU , MUNAKATA TADASUKE
IPC分类号： G01N21/88 , G01N21/956 , G03F1/84 , H01L21/027 , H01L21/30 , H01L21/66
摘要： PURPOSE:To prevent detection of error by detecting defect of pattern from combination of digitalized signal and appearance frequency thereof. CONSTITUTION:After sampling signal from an optical detector 12 every constant time, digitalization is performed and the title device is given a function to memorize appearance frequency of respective combination as to the every combination of digitalized signals from each optical detector and detects defect of pattern from the combination of digitalized signal and appearance frequency thereof. That is, a storage device 15 is set to readout-mode by lead-light controller 15 and reads out address data DOUT of the storage device 15 corresponding by one-to-one to 4Xn bit information decided by pattern formation of projecting position. Subsequently, after the storage device 15 is set to lettering-mode by the lead-light controller 16, DOUT+1 data is written to DIN (the same address) by an additional circuit 17. Whether which address of the storage device 15 is it addressed at how many times or not is detected by means of repeating such a operation every clock period.

9. 发明专利

JPS61140808A Pattern defect inspecting instrument 失效
标题翻译：图案缺陷检查仪器
公开(公告)号：JPS61140808A
公开(公告)日：1986-06-27
申请号：JP26267984
申请日：1984-12-14
申请人： Hitachi Ltd
发明人： KIMURA SHIGEJI , SUDA TADASHI , HASE SHINOBU , MUNAKATA TADASUKE
IPC分类号： G01B11/30 , H01L21/66
摘要： PURPOSE: To perform the defect detection without erroneous detection by using a reflection diffracted light by setting up an optical detector in the direction having no reflection diffracted light in the normal pattern and by deciding the defect from the difference in the detecting output of the pattern for reference and the pattern being inspected.
CONSTITUTION: Photo detector 12 (12-2W12-8) is set up in the direction where there is no or minute reflection diffracted light in case of the normal pattern without any defect of the pattern on a substrate 11 when a convergent coherent light 10 is irradiated on the substrate 11. The coherent light is irradiated by setting the defectless reference pattern in this state and the output state of the photo detector 112 by the reflection diffracted light thereof is memorized in a memory device. The coherent light 10 is then irradiated on the pattern to be inspected and the reflection diffracted light thereof is detected and when a difference is caused by comparing the output state thereof with the memory contents of the memory device a defect signal is outputted with deciding it as the pattern defect.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：通过使用反射衍射光进行缺陷检测，通过在正常图案中不具有反射衍射光的方向设置光学检测器，并根据图案的检测输出的差异来确定缺陷，参考和正在检查的模式。构成：在正常图案的情况下，光检测器12（12-2-12-8）在没有或微小的反射衍射光的方向上被设置，而当聚光相干光 10照射在基板11上。通过在该状态下设定无缺陷参考图案来照射相干光，并且通过其反射衍射光将光检测器112的输出状态存储在存储器件中。然后将相干光10照射在要检查的图案上，并检测其反射衍射光，并且当通过将其输出状态与存储器件的存储器内容进行比较而产生差异时，输出缺陷信号，并将其判定为图案缺陷。

10. 发明专利

JPS60231335A PATTERN DEFECT INSPECTING APPARATUS 失效
公开(公告)号：JPS60231335A
公开(公告)日：1985-11-16
申请号：JP8626084
申请日：1984-05-01
申请人： HITACHI LTD
发明人： SUDA TADASHI , KIMURA SHIGEJI , HASE SHINOBU , SAITOU MIKITO
IPC分类号： G01N21/88 , G01N21/94 , G01N21/956 , G03F1/84 , H01L21/027 , H01L21/26 , H01L21/66
摘要： PURPOSE:To detect any defect on a pattern and any foreign matter attached to a wafer utilizing reflected diffracted-light and make it possible to determine that a pattern which has an abnormality but seems to cause no problem in proctical use is not defective, by effecting an abnormality judgement with a level which differs for each of a plurality of classified normal patterns. CONSTITUTION:A detector group 106 detects reflected diffracted-light 102' not only in an abnormal direction but also in a normal direction at the same time. A normal-direction signal is a signal derived from a normal pattern and includes information such as a direction of a pattern edge and the number of edge directions. By using this information, a pattern profile on the wafer is classified by a defect signal extracting circuit group 110. Any abnormal-direction signal detected is judged by a normal.abnormal judging circuit provided exclusively for each of the classified pattern profiles. In consequence, a level for determination can be set for each pattern profile, so that it is possible to make precise determination as to whether a particular pattern is defective.

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