专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明专利

JP2006518119A Method of manufacturing a micro-mechanical resonance apparatus and micro-mechanical equipment 审中-公开
公开(公告)号：JP2006518119A
公开(公告)日：2006-08-03
申请号：JP2005507661
申请日：2003-12-17
申请人：ザリージェンツオブザユニバーシティオブミシガン
发明人：アブデルモネウム，ムハメッド，エー． , グエン，クラーク，ティー．，シー．
IPC分类号： H03H9/24 , B81B3/00 , B81C1/00 , H03H3/007
CPC分类号： H03H9/02338 , H03H3/0072 , H03H9/2431 , H03H9/2436 , H03H2009/02354 , H03H2009/02503
摘要：マイクロメカニカル共鳴器装置と、当該マイクロメカニカル共鳴器装置を製造する方法、同様に、前記共鳴器装置の一またはそれ以上のサイド節点でアンカリングすることによってアンカーロスを最小限にしたその他の外延的モード装置を提供する。この共鳴器は空気中動作するときの制動力がより低くなる。

12. 发明专利

JP2014143533A Resonator and oscillator 审中-公开
标题翻译：谐振器和振荡器
公开(公告)号：JP2014143533A
公开(公告)日：2014-08-07
申请号：JP2013010273
申请日：2013-01-23
申请人： Nippon Dempa Kogyo Co Ltd , 日本電波工業株式会社
发明人： OTSUKA TAKAHIRO , NAKAMURA MAKIKO , KIMURA NORITOSHI
IPC分类号： H03H9/24 , H03B5/32 , H03H3/007
CPC分类号： H02N1/00 , B81B2201/0271 , B81B2203/0127 , B81B2203/0307 , B81C1/00039 , H03H3/0072 , H03H9/02338 , H03H9/2431 , H03H9/2436
摘要： PROBLEM TO BE SOLVED: To provide a resonator and an oscillator that reliably and stably fix a resonator body and reliably suppress an increase in equivalent series resistance.SOLUTION: In a resonator 10 having a disk part (resonator body) 20, support beams 30 extending from the disk part 20 so as to support the disk part 20, and fixing parts 40 formed at tip ends of the support beams 30 so as to be fixed to a base, the fixing parts 40 have a first rodlike portion 41 extending in a first direction D1 and a second rodlike portion 42 formed in a second direction D2 orthogonal to the first direction D1.
摘要翻译：要解决的问题：提供一种谐振器和振荡器，其可靠且稳定地固定谐振器体并可靠地抑制等效串联电阻的增加。解决方案：在具有盘部（谐振器体）20的谐振器10中，支撑梁30延伸从盘部20支撑盘部20以及形成在支撑梁30的前端的固定部40固定在基座上，固定部40具有第一杆状部41，方向D1和与第一方向D1正交的第二方向D2上形成的第二杆状部分42。

13. 发明专利

JP2014107711A Oscillator and electronic apparatus 审中-公开
标题翻译：振荡器和电子设备
公开(公告)号：JP2014107711A
公开(公告)日：2014-06-09
申请号：JP2012259442
申请日：2012-11-28
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： KIHARA TATSUJI , YAJIMA ARITSUGU
IPC分类号： H03H9/24 , B81B3/00
CPC分类号： B81B3/007 , B81B2201/0242 , B81B2201/0271 , G01C19/5712 , H03H9/2405 , H03H9/2431 , H03H9/2436 , H03H2009/02354
摘要： PROBLEM TO BE SOLVED: To provide an oscillator allowed to be more downsized, capable of reducing vibration leak and allowed to be stably manufactured without generating sticking of a movable electrode in a manufacturing step.SOLUTION: A MEMS oscillator 100 includes a substrate 1, fixed portions 23 formed on a principal surface of the substrate 1, support parts (support beams 22 and connection beams 21) respectively extended from the fixed portions 23, and an upper electrode 20 (oscillator) supported by the support parts separately from the substrate 1. The upper electrode 20 has connected parts on respective side faces 31 of the upper electrode 20, which are exposed by respective notch parts 30 formed in a direction from a peripheral edge part of the upper electrode 20 to a center part 24 of the upper electrode 20 and directed from the peripheral edge part to the center part, and the connected parts are respectively connected to the support parts.
摘要翻译：要解决的问题：为了提供允许更小尺寸的振荡器，能够减少振动泄漏并允许在制造步骤中不产生可动电极的粘附而稳定地制造。解决方案：MEMS振荡器100包括基板1，固定形成在基板1的主表面上的部分23，从固定部分23分别延伸的支撑部分（支撑梁22和连接梁21）和与基板1分开支撑的上部电极20（振荡器）。上电极20在上电极20的相应侧面31上具有连接部分，它们通过在从上电极20的周缘部分到上电极20的中心部分24的方向上形成的相应凹口部分30暴露并且从周边部分引导到中心部分，并且连接部分分别连接到支撑部分。

15. 发明专利

JP2012105259A Microelectromechanical resonator structure, and method of designing, operating and using the same 有权
标题翻译：微电子谐振器结构及其设计，操作和使用方法
公开(公告)号：JP2012105259A
公开(公告)日：2012-05-31
申请号：JP2011232743
申请日：2011-10-24
申请人： Robert Bosch Gmbh , ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツングRobert Bosch Gmbh
发明人： LUTZ MARKUS , PARTRIDGE AARON
IPC分类号： H03H9/24 , B81B3/00 , G01L1/10 , G01P15/10
CPC分类号： H03H9/2431 , H03H9/02259 , H03H9/02338 , H03H9/02448 , H03H9/2405 , H03H2009/02354 , H03H2009/02496 , H03H2009/02503 , H03H2009/02511 , H03H2009/02527
摘要： PROBLEM TO BE SOLVED: To provide a microelectromechanical resonator structure having improved packaging stress characteristics, reduced energy loss into a substrate, and improved or optimal stability of the center of gravity during oscillation.SOLUTION: Each elongated beam section 102 is connected to another elongated beam section at an end via a curved section 104, thereby forming a geometric shape having at least two elongated beam sections that are interconnected via curved sections (a rounded triangle shape, square or rectangle shape). The structure includes one or more nodal points or areas in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator structure to the substrate. In operation, the resonator structure oscillates in a combined elongating (or breathing) mode and bending mode; that is, the beam sections (which oscillate at the same frequency) exhibit an elongating-like (or breathing-like) motion and a bending-like motion.
摘要翻译：要解决的问题：提供具有改进的包装应力特性的微机电谐振器结构，减少到衬底中的能量损失，以及在振荡期间改善或最优的重心稳定性。解决方案：每个细长梁部分102通过弯曲部分104在一端连接到另一个细长梁部分，从而形成具有至少两个细长梁部分的几何形状，所述细长梁部分经由弯曲部分（圆形三角形形状，正方形或矩形）。该结构包括结构的弯曲部分的一个或多个部分或区域中的一个或多个节点或区域。节点是合适的和/或优选的位置以将谐振器结构锚固到基底。在操作中，谐振器结构以组合延长（或呼吸）模式和弯曲模式振荡; 也就是说，以相同频率振荡的光束部分呈现伸长状（或呼吸状）运动和弯曲状运动。版权所有（C）2012，JPO＆INPIT

16. 发明专利

JP4086023B2 Micromechanical electrostatic vibrator 有权
公开(公告)号：JP4086023B2
公开(公告)日：2008-05-14
申请号：JP2004244835
申请日：2004-08-25
申请人：セイコーエプソン株式会社
发明人：卓哉中島 , 誠古畑 , 竜児木原
IPC分类号： B81B3/00 , B81C1/00 , B81C3/00 , H02N1/00 , H02N2/00 , H03H3/007 , H03H9/00 , H03H9/02 , H03H9/10 , H03H9/24
CPC分类号： H03H9/2431 , H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/1057 , H03H9/2436 , H03H9/2457 , H03H9/2463 , H03H2009/02496 , H03H2009/02503 , H03H2009/02519

17. 发明专利

JP2004279384A Oscillator manufacturing method, oscillator and photomask 审中-公开
公开(公告)号：JP2004279384A
公开(公告)日：2004-10-07
申请号：JP2003075154
申请日：2003-03-19
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA , TAKEMOTO TAKESHI
IPC分类号： G01C19/56 , G01C19/5684 , H01L41/09 , H01L41/22 , H01L41/332 , H03H9/24 , G01P9/04
CPC分类号： G01C19/567 , H03H9/2431 , H03H2009/0233 , H03H2009/02496 , H03H2009/02503 , H03H2009/02527
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for an oscillator to be manufactured in photolithographic and dry etching processes with its natural frequency having less dispersion. SOLUTION: A plurality of through-holes are formed on a ring of a ring oscillator R2. When a ring width W of the ring oscillator is reduced as a result of a machining error in manufacturing processes, a diameter d of each through-hole is increased. As a result, the mass of the ring oscillator R2 is greatly reduced, compared with that of a ring oscillator R1 having no through-hole. As the mass of the ring oscillator is reduced greater with the ring width w reduced, the fluctuation of the natural frequency of the ring oscillator is more suppressed. Thus, the fluctuation of the natural frequency of the ring oscillator R2 due to the machining error is suppressed, compared with that of the ring oscillator R1. COPYRIGHT: (C)2005,JPO&NCIPI

18. 发明专利

JP2016058893A 振動素子、振動子、発振器、電子機器および移動体审中-公开
标题翻译：振动元件，振动器，振荡器，电子设备和可移动体
公开(公告)号：JP2016058893A
公开(公告)日：2016-04-21
申请号：JP2014183733
申请日：2014-09-09
申请人：セイコーエプソン株式会社
发明人：山田明法
IPC分类号： H03H9/19 , H03H9/215 , B81B3/00 , H03H9/24
CPC分类号： H03B5/30 , H03H9/1057 , H03H9/2473 , H03H9/2484 , H03H9/2494 , H03H2009/02299 , H03H2009/02503 , H03H9/2431
摘要：【課題】Q値の低下を低減し、優れた性能を発揮する振動素子、振動子を提供する。【解決手段】振動素子2は、基部4と、基部4からY軸方向に延出する振動腕5、6と、を含み、Z軸方向を厚さ方向とし、単結晶シリコンで構成された振動基板25を備えており、XY面内方向に振動腕5、6が屈曲振動する。振動腕5、6の振動周波数をF[kHz]、振動腕5、6の幅をW[μm]、幅Wの最大値をW max [μm]、振動腕5、6の長さをL[μm]、長さLの最大値をL max [μm]としたとき、下記式(1)および下記式(2)のうちの少なくとも一方の式を満足する。【選択図】図1
摘要翻译：要解决的问题：提供减少Q值降低并显示出优异性能的振动元件，并进一步提供振动器。解决方案：振动元件2包括基部4和从基部延伸的振动臂5和6 4在Y轴方向上，将Z轴方向作为厚度方向，设置有由单晶硅构成的振动基板25。振动臂5和6在XY面内方向受到弯曲振动。当每个振动臂5和6的振动频率用F [kHz]表示时，每个振动臂5和6的宽度由W [μm]表示，宽度W的最大值由 W [μm]，每个振动臂5和6的长度由L [μm]表示，长度L的最大值由L [μm]表示，下面的公式（1）并满足以下公式（2）。选择图：图1

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式