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1. 发明专利

JP2009300283A Vibrating gyroscope using piezoelectric film 审中-公开
标题翻译：振动胶体使用压电薄膜
公开(公告)号：JP2009300283A
公开(公告)日：2009-12-24
申请号：JP2008155802
申请日：2008-06-13
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA , IKEDA TAKASHI , MORIGUCHI TAKAFUMI , HIRATA YASUYUKI
IPC分类号： G01C19/56 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To achieve at the same time downsizing and high performance of an angular velocity sensor by using a piezoelectric film. SOLUTION: A vibrating gyroscope is provided with: a ring or polygon shaped vibrator 100 having a uniform plane; a leg part 15 being a support for flexibly supporting the vibrator; a fixed potential electrode 16; and a plurality of electrodes 13b, 13b formed on the plane and sandwiching the piezoelectric film with an upper metal film and a lower metal film. The vibrating gyroscope has the side face continuing around the outer periphery and inner periphery and in the width direction vertical cross-section of the vibrator 100, when the width of the vibrator formed by the plane is 1, all the width of the vibrator in the thickness direction of the vibrator being 1 or less and at least one part of the width of the vibrator to the thickness direction of the vibrator being 0.9 or less, and a plurality of electrode 13b, 13b are disposed on the plane. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：通过使用压电膜同时实现角速度传感器的小型化和高性能化。解决方案：振动陀螺仪设置有：具有均匀平面的环形或多边形振动器100; 腿部15是用于柔性地支撑振动器的支撑件; 固定电位电极16; 以及形成在该平面上的多个电极13b，13b，并且用上金属膜和下金属膜夹持压电膜。振动陀螺仪的侧面在振动器100的外周和内周和宽度方向的垂直截面上连续，当由该平面形成的振动体的宽度为1时，振动器的宽度振动器的厚度方向为1以下，振动器的厚度方向的振动体的宽度的至少一部分为0.9以下，多个电极13b，13b设置在该平面上。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2008170500A Two-dimensional scanning device 审中-公开
标题翻译：二维扫描装置
公开(公告)号：JP2008170500A
公开(公告)日：2008-07-24
申请号：JP2007000989
申请日：2007-01-09
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA
IPC分类号： G02B26/10 , G03B21/00 , H04N5/74
摘要： PROBLEM TO BE SOLVED: To provide a two-dimensional scanning device capable of achieving cost reduction and a small size. SOLUTION: The two-dimensional scanning device 1 is equipped with: a swinging plate 43; a first swinging means causing the swinging plate 43 a first swing around a first axis T parallel to the plane including the swinging plate 43; a second swinging means causing the swinging plate 43 a second swing around a second axis U parallel to the plane including the swinging plate 43 and perpendicular to the first axis, at the same frequency and in a phase different by about 90° from the first swing; an amplitude varying means increasing or decreasing the amplitudes in the first and second swing with time; and a light source 2 emitting light to the swinging plate 43. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供能够实现成本降低和小尺寸的二维扫描装置。解决方案：二维扫描装置1装备有摆动板43; 第一摆动装置使摆动板43围绕平行于包括摆动板43的平面的第一轴线T摆动; 第二摆动装置使摆动板43围绕平行于包括摆动板43并垂直于第一轴线的平面的第二轴线U以与第一摆动不同的相位相差大约90°的第二摆动 ; 振幅变化装置随时间增加或减小第一和第二摆动中的振幅; 以及向摇摆板43发光的光源2。（C）2008，JPO＆INPIT

3. 发明专利

JP2007256557A Mems actuator and scanner 审中-公开
标题翻译： MEMS执行器和扫描仪
公开(公告)号：JP2007256557A
公开(公告)日：2007-10-04
申请号：JP2006080052
申请日：2006-03-23
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA
IPC分类号： G02B26/08 , B41J2/44 , B81B3/00 , G02B26/10 , H04N1/113
摘要： PROBLEM TO BE SOLVED: To provide an MEMS actuator capable of oscillating, at high speed and/or with a large amplitude, an oscillating member such as a micro mirror, and also to provide a scanner equipped with the MEMS actuator. SOLUTION: The MEMS actuator includes a substrate 20a, a plurality of the oscillating members (micro mirrors A, B, and suspension beams 23A, 23B) which are held so that they can be oscillated around the oscillation axis with respect to the substrate, driving electrodes 30A, 30B, 31A and 31B which are provided to the oscillating members and the substrate, respectively, and an AC power source 60 for applying an AC voltage between the respective driving electrodes. The MEMS actuator is characterized in that the plurality of the oscillating members are provided side by side so that the respective oscillating axes are substantially parallel to each other and that the oscillating members are connected to each other through an elastic body 22. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供能够高速和/或以大振幅振荡的MEMS致动器，例如微反射镜等摆动部件，并且还提供配备有MEMS致动器的扫描仪。解决方案：MEMS致动器包括基板20a，多个摆动构件（微反射镜A，B和悬架梁23A，23B），其被保持成使得它们能够围绕振荡轴相对于基板，驱动电极30A，30B，31A，31B分别设置在振荡部件和基板上，AC电源60用于在各驱动电极之间施加交流电压。 MEMS致动器的特征在于，多个摆动构件并排设置，使得各个摆动轴线基本上彼此平行，并且摆动构件通过弹性体22相互连接。（C）2008，JPO＆INPIT

4. 发明专利

JP2011062780A Micro device 审中-公开
标题翻译：微型设备
公开(公告)号：JP2011062780A
公开(公告)日：2011-03-31
申请号：JP2009216410
申请日：2009-09-18
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： KIUCHI MARIO , ARAKI RYUTA
IPC分类号： B81B3/00 , G01C19/56 , G01P9/04 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To simply constitute stoppers limiting the rocking range of a rocking part. SOLUTION: An angular velocity sensor 1 includes a frame 2, an oscillation element 3 rocking relative to the frame 2, and the stoppers 5, 5 for limiting rocking of the oscillation element 3 to a predetermined rocking range. The frame 2, the oscillation element 3 and the stoppers 5, 5 are constituted as one stacked body in which a plurality of layers are stacked on a same substrate. The stoppers 5, 5 extend from the frame 2 and are positioned on a rocking locus T of the oscillation element 3 by warping. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：简单地构成限制摇摆部分的摇摆范围的挡块。解决方案：角速度传感器1包括框架2，相对于框架2摆动的振动元件3和用于将振动元件3摆动到预定摇摆范围的止动件5,5。框架2，振动元件3和止动器5,5构成为在同一基板上层叠多层的一个层叠体。止动件5,5从框架2延伸并且通过翘曲定位在振动元件3的摆动轨迹T上。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2010043955A Vibration gyro using piezoelectric film 有权
标题翻译：振动陀螺使用压电薄膜
公开(公告)号：JP2010043955A
公开(公告)日：2010-02-25
申请号：JP2008208207
申请日：2008-08-12
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： TEJIMA NOBUTAKA , IKEDA TAKASHI , NISHIDA HIROSHI , TORAYASHIKI OSAMU , TAKEMURA MITSUHIKO , FUJIMURA TAKESHI , ARAKI RYUTA , MORIGUCHI TAKAFUMI , HIRATA YASUYUKI
IPC分类号： G01C19/56 , G01C19/5677 , G01C19/5684 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/29
摘要： PROBLEM TO BE SOLVED: To provide a vibration gyro which is small, has high accuracy of detecting angular velocity, and is insusceptible to disturbance. SOLUTION: The vibration gyro includes a circular or polygonal vibrator 11, a leg section 15 which supports the vibrator 11 flexibly and includes a fixed end, and a plurality of electrodes which are formed above the vibrator 11 and sandwich a piezoelectric film in the thickness direction by a first upper-layer metallic film 50 and a first lower-layer metallic film 30. The vibration gyro further includes a second lower-layer metallic film 31 which is formed on a silicon oxide film 20 on the leg section 15 and is continuous with the first lower-layer metallic film 30 and a second upper-layer metallic film 51 which is formed on or above the silicon oxide film 20, is continuous with the first upper-layer metallic film 50 through the upper surface of the piezoelectric film 40 without being in contact with the first lower-layer metallic film 30 and the second lower-layer metallic film 31, and is substantially the same layer as the second lower-layer metallic film. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供小的振动陀螺仪，具有高的检测角速度的精度，并且不易受干扰。解决方案：振动陀螺仪包括圆形或多边形振动器11，柔性地支撑振动器11并且包括固定端的腿部15和形成在振动器11上方并将压电膜夹在中的多个电极通过第一上层金属膜50和第一下层金属膜30的厚度方向。振动陀螺仪还包括形成在腿部15上的氧化硅膜20上的第二下层金属膜31和与第一下层金属膜30连续，形成在氧化硅膜20上或上方的第二上层金属膜51通过压电体的上表面与第一上层金属膜50连续膜40不与第一下层金属膜30和第二下层金属膜31接触，并且与第二下层金属膜基本相同。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2009058940A Two-dimensional scanner and mobile terminal equipment 审中-公开
标题翻译：两维扫描仪和移动终端设备
公开(公告)号：JP2009058940A
公开(公告)日：2009-03-19
申请号：JP2008175301
申请日：2008-07-04
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA
IPC分类号： G02B26/10 , G02B26/08 , H04N1/113
摘要： PROBLEM TO BE SOLVED: To provide a two-dimensional scanner suitable for performing the rocking around a first axis and the rocking around a second axis at different frequencies, and to provide a mobile terminal equipment equipped with the same.
SOLUTION: The two-dimensional scanner 2 includes: an MEMS device 3 provided with a rocking member 31 which is rockably supported around the first axis using a resonance phenomenon; a motor 5 which generates turning force; a power transmission mechanism 6 which converts the turning force generated by the motor 5 into rocking force for rocking the MEMS device 3, transmits the rocking force to the MEMS device 3 and rocks the MEMS device 3 around the second axis which is perpendicularly intersects the first axis. Further, the mobile terminal equipment 1 equipped with the two-dimensional scanner 2 is provided.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种二维扫描器，其适用于围绕第一轴进行摇摆并围绕不同频率的第二轴摆动，并提供配备有该移动终端的移动终端设备。解决方案：二维扫描器2包括：MEMS器件3，其设置有使用谐振现象围绕第一轴线可摇动地支撑的摇摆构件31; 产生转动力的电动机5; 将由马达5产生的转动力转换成用于摆动MEMS装置3的摇摆力的动力传递机构6将摇动力传递到MEMS装置3，并围绕与第一轴垂直相交的第二轴线围绕MEMS装置3 轴。此外，提供了配备有二维扫描器2的移动终端设备1。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2011027560A Vibration gyro using piezoelectric film 审中-公开
标题翻译：振动陀螺使用压电薄膜
公开(公告)号：JP2011027560A
公开(公告)日：2011-02-10
申请号：JP2009173971
申请日：2009-07-27
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA , MORIGUCHI TAKAFUMI , IKEDA TAKASHI , NISHIDA HIROSHI , HIRATA YASUYUKI
IPC分类号： G01C19/56 , G01C19/5684
摘要： PROBLEM TO BE SOLVED: To achieve compatibility between an S/N ratio and response properties when detecting an angular velocity. SOLUTION: One vibration gyro includes: a ring vibrating body 11 having a uniform plane; a leg part 15 flexibly supporting the ring vibrating body; and a plurality of electrodes 13a, 13b, ..., 13f formed on the plane of the ring vibrating body or formed from any of upper and lower metal films sandwiching the piezoelectric film placed thereon. When one driving electrode 13a exciting the primary vibration of the ring vibrating body 11 is the reference driving electrode, as representatively shown in Fig.1, the other electrodes 13b, ..., 13f are arranged at specific places. In accordance with the arrangement, in the vibration gyro, secondary vibration in cos3θ in-plane vibration mode is detected by exciting the primary vibration of out-of plane cos2θ vibration mode, for example, and a voltage is applied to a suppression electrode 13j to prevent the secondary vibration. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：在检测角速度时实现S / N比与响应特性之间的兼容性。解决方案：一个振动陀螺仪包括：具有均匀平面的环形振动体11; 支撑环形振动体的腿部15; 以及形成在环形振动体的平面上的多个电极13a，13b，...，13f，或者由夹在其上的压电膜的上部和下部金属膜中的任何一个形成。当激励环形振动体11的主振动的一个驱动电极13a是基准驱动电极时，如图1所示，其它电极13b，...，13f被布置在特定位置。根据该结构，在振动陀螺仪中，例如通过激发外部平面cos2θ振动模式的主振动来检测cos3θ面内振动模式的二次振动，并且将电压施加到抑制电极13j至防止二次振动。版权所有（C）2011，JPO＆INPIT

8. 发明专利

JP2009180506A An angular velocity sensor 审中-公开
标题翻译：角速度传感器
公开(公告)号：JP2009180506A
公开(公告)日：2009-08-13
申请号：JP2008017061
申请日：2008-01-29
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA , KITAMURA TORU , TEJIMA NOBUTAKA , HIRATA YASUYUKI
IPC分类号： G01C19/56 , G01C19/5684 , H01L41/08 , H01L41/22
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity sensor which is superior in detection accuracy. SOLUTION: The angular velocity sensor includes an inner ring part 2; an outer ring part 3, arranged in the outside of a radial direction of the inner ring part 2 so as to surround the inner ring part 2; and a beam part 4 for interlocking the outer ring part 3 with the inner ring part 2 and connecting the inner ring part 2 and the outer ring part 3. The angular velocity sensor 1 primarily vibrates the outer ring part 3 by primarily making the inner ring part 2 vibrate, detects secondary vibrations generated in the outer ring part, 3 by using a secondary detection electrode 12 arranged facing in the outer ring part, and detects angular velocity from detected secondary vibrations. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供检测精度优异的角速度传感器。解决方案：角速度传感器包括内环部分2; 外环部3，其设置在内环部2的径向外侧，以包围内环部2; 以及用于将外圈部3与内圈部2互锁并连接内圈部2和外圈部3的梁部4。角速度传感器1通过主要使内圈3的内圈部分2振动，通过使用面向外环部分布置的次级检测电极12检测在外环部分3中产生的二次振动，并且检测检测到的二次振动的角速度。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2009006431A Mems device formed in sealed space having getter film 审中-公开
标题翻译：在具有盖膜的密封空间中形成的MEMS器件
公开(公告)号：JP2009006431A
公开(公告)日：2009-01-15
申请号：JP2007169106
申请日：2007-06-27
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： TAKEMOTO TAKESHI , NISHIDA HIROSHI , TORAYASHIKI OSAMU , IKEDA TAKASHI , ARAKI RYUTA
IPC分类号： B81B7/02 , B81B3/00 , G01C19/56 , G01P9/04 , H01L23/26
摘要： PROBLEM TO BE SOLVED: To prevent the influence of electric noise caused by getter films, in a MEMS (Micro Electronic Machining System) device formed with the getter films formed in the sealed space. SOLUTION: This MEMS device 100 is formed in the sealed space 34. The sealed space 34 is formed by a first glass substrate 30 formed with a recessed part 36a, etc. in a part, a base material 10 of the MEMS device 100, a second glass substrate 31 formed with a through hole 37 to be part of the sealed space 34 and a third glass substrate 32 formed with continuous or discontinuous getter films 40. A part 40a of the getter films 40 is held between the second glass substrate 31 and the third glass substrate 32. As a result, a sufficient distance between the getter films 40 and electrodes of the MEMS device 100 is secured, and thereby the electric noise is prevented from entering the electrodes for detecting or driving the MEMS device 100 via the getter films 40, even when the device 100 is operated. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了防止由形成在密封空间中的吸气膜形成的MEMS（微电子加工系统）装置中的由吸气膜引起的电噪声的影响。解决方案：该MEMS器件100形成在密封空间34中。密封空间34由一部分形成有凹部36a等的第一玻璃基板30，MEMS器件的基材10 100，形成有作为密封空间34的一部分的通孔37的第二玻璃基板31和形成有连续或不连续的吸气膜40的第三玻璃基板32.吸气膜40的一部分40a保持在第二玻璃衬底31和第三玻璃衬底32.结果，确保了吸气剂膜40和MEMS器件100的电极之间足够的距离，从而防止了电噪声进入用于检测或驱动MEMS器件100的电极即使当设备100被操作时也通过吸气膜40。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2007316037A Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：JP2007316037A
公开(公告)日：2007-12-06
申请号：JP2006148888
申请日：2006-05-29
申请人： Sumitomo Precision Prod Co Ltd , 住友精密工業株式会社
发明人： ARAKI RYUTA
IPC分类号： G01C19/56 , G01C19/5684
摘要： PROBLEM TO BE SOLVED: To provide a low-cost angular velocity sensor which can be easily produced by MEMS process, and can made primary vibrations change into the outside of the same plane as a ring part. SOLUTION: The ring part 11 and a drive electrode 3 are arranged within substantially the same plane, and a voltage applied to the drive electrode 3 is set the voltage value, based on the proper frequency of the ring part 11, then the ring part 11 is vibrated in three dimensions. COPYRIGHT: (C)2008,JPO&INPIT

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