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11. 发明专利

JPH02262092A SAMPLE MOVING APPARATUS 失效
公开(公告)号：JPH02262092A
公开(公告)日：1990-10-24
申请号：JP8359289
申请日：1989-03-31
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI , SAKAI AKIRA , SUGIHARA KAZUYOSHI
IPC分类号： G12B5/00
摘要： PURPOSE:To linearly move a sample stand by eliminating the strain of a bimorph element in the displacement direction thereof at the time of the movement of the sample stand by using the bimorph element of waveform driving fixed at both end parts thereof and displaced in the thickness direction at the central part thereof. CONSTITUTION:A bimorph element is formed into such a structure that two thin plate-shaped piezoelectric bodies 61, 62 are superposed one upon another and thin metal plates becoming electrodes 63, 64, 65 are arranged to said bodies on the inner and outer sides thereof. The supports 51 - 54 at four corners supporting the respective bimorph elements 41 - 44 are made taller than other supports 55 - 59 so that a sample stand 70 can move smoothly between the supports 55 - 59 and a floor surface without generating trouble such as friction. When the bimorph elements each having a thickness of 0.5mm or less are assembled as shown by a drawing, displacement quantity per 1V is about 1mum and, therefore, position resolving power of about 10Angstrom can be respectively realized in X- and Y- directions.

12. 发明专利

JPH0278902A SCAN TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPH0278902A
公开(公告)日：1990-03-19
申请号：JP23095488
申请日：1988-09-14
申请人： TOSHIBA CORP
发明人： SUGIHARA KAZUYOSHI , SAKAI AKIRA , AKAMA YOSHIAKI
IPC分类号： G01B7/34 , G01N23/00 , G01Q30/16 , G01Q60/10 , G01Q60/16 , G01Q70/02 , H01J37/28
摘要： PURPOSE:To improve the operability by connecting a transfer rod to a probe holder supporter through an elastic body and placing a guide which guides and positions the probe holder supporter relatively to a fine moving element nearby the fine moving element. CONSTITUTION:A conveying mechanism housing container 35 is provided successively to the right part of a preliminary chamber 31 and the magnet coupling type transfer rod 40 is provided in this container 35. This rod 40 moves linearly and also rotates by being coupled with a magnet 36 provided outside the container 35. The holder supporter 60 is connected to the tip of the rod 40 through the elastic body 50 and a probe holder 70 is held on this supporter 60; and the holder 70 is guided into the container 11 by the movement of the transfer rod 40 and fixed threadably to the fine moving element 22 of an STM unit 20. The probe holder 70 which holds a probe is securely screwed to the fine moving element 22 by using the rod 40, so that probe is conveyed with good operability even under an extremely high vacuum and easily replaced.

13. 发明专利

JPH01250002A SCANNING CAPACITANCE MICROSCOPY 失效
公开(公告)号：JPH01250002A
公开(公告)日：1989-10-05
申请号：JP7444588
申请日：1988-03-30
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI , SUGIHARA KAZUYOSHI
IPC分类号： G01B7/34 , G01Q10/02 , G01Q10/04 , G01Q30/18 , G01Q60/46
摘要： PURPOSE:To prevent a pickup stylus from colliding against the surface of a sample through the operation of a piezoelectric element by providing the piezoelectric element between the pickup stylus and a coarse adjusting mechanism as its feed mechanism. CONSTITUTION:The pickup stylus 1 is put close to the sample 2 and the electrostatic capacity between an electrode and the sample surface is obtained by a capacity detecting circuit 23. The pickup stylus 1 is integrated with a 1st piezoelectric element 22 for fine movement and a 2nd piezoelectric element 53 for coarse movement. When the pickup stylus 1 is too close to the surface of the sample 2, a signal is sent to a piezoelectric driver 63 so as to stop applying a voltage to the 2nd piezoelectric element 53 for coarse movement from a servo controller 25 if the signal from the capacity detecting circuit 23 exceeds a set value. Similarly, when the pickup stylus 1 is too close to the sample 1 at the time of the fine movement, the signal is sent to the piezoelectric driver 29 so as to stop applying the voltage to the 1st piezoelectric element 22 from the servo controller 25 to prevent the pickup stylus 1 from colliding against the sample 2.

14. 发明专利

JP2001284229A ELECTRON BEAM DRAWING DEVICE AND METHOD 失效
公开(公告)号：JP2001284229A
公开(公告)日：2001-10-12
申请号：JP2000097109
申请日：2000-03-31
申请人： TOSHIBA CORP
发明人： KINOSHITA HIDETOSHI , HASHIMOTO SUSUMU , HAYASHI MASAKAZU , AKAMA YOSHIAKI
IPC分类号： G03F7/20 , H01J37/06 , H01J37/147 , H01J37/305 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide an electron beam drawing device and a method which are maintenance-free and capable of forming an optional pattern by each shot and drawing it on a specimen at a high speed without providing a stencil on which a cell pattern is previously formed in the optical path of an electron beam. SOLUTION: An electron beam drawing device for drawing a pattern on a specimen with an electron beam is equipped with an electron optical system composed of micro emitter-type electron guns (1), blanking control circuits which each control the discharge of an electron beam of the electron gun (1), an objective lens (3) which reduces the electron beam in size, and a deflector (4) which deflects the electron beam reduced by the objective lens (3) to a specimen (6).

15. 发明专利

JP2000299269A ELECTRON BEAM DRAWING APPARATUS 失效
公开(公告)号：JP2000299269A
公开(公告)日：2000-10-24
申请号：JP10537399
申请日：1999-04-13
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI , FUJII TAKAYOSHI
IPC分类号： H01L21/027 , G03F7/20 , G21K1/087 , G21K5/04
摘要： PROBLEM TO BE SOLVED: To increase the drawing speed and thereby improve the throughput by providing a control section that releases electrons toward a board from a plurality of electron guns arranged on the board. SOLUTION: An electron beam drawing apparatus 10 comprises a vacuum chamber 11, a stage 12 located within the chamber 11 for mounting a wafer W thereon, and an exposing section 13 arranged opposite to the stage 12. The apparatus 10 has the section 13 formed of a plurality of chips located together in order to implement collective transfer. The section 13 includes electron guns 20 and a control section 30 for controlling the guns 20. A point electron source and a line electron source are formed of microemitters and microcathodes prepared by a semiconductor process, and are arranged in a manner corresponding to a pattern. The point and line electron sources are formed to have pointed tips. Further, the section 30 has the function of applying a negative voltage to the point and line electron sources and a positive voltage to lead-out electrodes.

16. 发明专利

JPH11297264A SHAPE OBSERVATION DEVICE 失效
公开(公告)号：JPH11297264A
公开(公告)日：1999-10-29
申请号：JP9570998
申请日：1998-04-08
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI , OKUDA KENJI , HAYASHI MASAKAZU , FUJII TAKAYOSHI
IPC分类号： H01J37/244 , H01J37/29
摘要： PROBLEM TO BE SOLVED: To provide a shape observation device capable of observing a three- dimensional image. SOLUTION: In a shape observation device 10 for emitting an electron beam to a sample W and detecting the reflected electron from the sample W, this device comprises an electron gun 11 for emitting the electron beam to the sample W, an electrode part for absorbing the electron from the sample W and dividing it into a plurality of ranges to take out the current, and an image processing part 30 for forming the three-dimensional image of the sample W on the basis of the output current every range in the electrode part.

17. 发明专利

JPH08264108A FIELD ELECTRON EMITTING ELEMENT, AND ELECTRON EMISSION SOURCE AND PLANAR DISPLAY DEVICE USING THIS FIELD ELECTRON EMITTING ELEMENT, AND MANUFACTURE OF FIELD ELECTRON EMITTING ELEMENT 失效
公开(公告)号：JPH08264108A
公开(公告)日：1996-10-11
申请号：JP6608095
申请日：1995-03-24
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI
IPC分类号： H01J9/02 , H01J1/30 , H01J1/312 , H01J17/49 , H01J29/04 , H01J31/12
摘要： PURPOSE: To provide a field electron emitting element high in electron emission efficiency and easy of manufacture. CONSTITUTION: This is a MIM type of field electron emitting element equipped with an emitter electrode, which emits electrons, based on the quantum mechanical tunneling phenomena by an electric field being applied, an insulating film 6, which is stacked on this emitter electrode, and a conductive film 7 as an electron drawing-out electrode, which applies an electric field to the emitter electrode, being stacked on this insulating film 6. The emitter electrode is a pillar-shaped crystal aggregate 4 consisting of a plurality of pillar-shaped crystals 3 which are grown on the surface of the conductive substrate 2 and whose tips are sharpened.

18. 发明专利

JPH08162061A ELECTRON MICROSCOPE 失效
公开(公告)号：JPH08162061A
公开(公告)日：1996-06-21
申请号：JP30474794
申请日：1994-12-08
申请人： TOSHIBA CORP
发明人： UCHIDA JUNZO , HAYASHI MASAKAZU , ISHIDA FUMIHIKO , AKAMA YOSHIAKI
IPC分类号： G01B15/00 , G01B15/08 , H01J37/244 , H01J37/28
摘要： PURPOSE: To detect the inclination or irregular state of a sample surface without rotating the sample, and provide an image observed from a certain specified direction. CONSTITUTION: An electron detecting system 30 has a reflected electron detecting part 31 for detecting a reflected electron and a secondary electron detecting part 32 for detecting a secondary electron, and the reflected electron detecting part 31 is formed of four circumferentially divided electrodes 31a, 31b, 31c, 31d. The reflected electron generated from the surface of a sample 10 is detected by the four divided electrodes 31a, 31b, 31c, 31d, whereby a form observation such as the inclination or irregular state of the surface of the sample 10 can be easily performed without rotating the sample 10. Further, the images by the reflected electron and the secondary electron are mutually superposed, whereby an image with good contrast can be provided.

19. 发明专利

JPH0712528A MATERIAL STRAIN MEASURING DEVICE 失效
公开(公告)号：JPH0712528A
公开(公告)日：1995-01-17
申请号：JP15365793
申请日：1993-06-24
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI , UNO TETSUO
IPC分类号： G01B11/16 , G01N3/06
摘要： PURPOSE:To measure elongation and local strain simultaneously by displacing an elongation measurement system along with the elongation of a test material and then displacing a strain measurement system following it for moving measurement light. CONSTITUTION:Laser beams 20 from a laser oscillator 16 pass through a shift optical system 17 and enter a pair of indentations at the measurement position of a test material 8 in a strain measurement system 3. Generated interference light 22 enters a light reception element 18 and the image data of interference fringe images are sent to a computer 21 and are analyzed there. When the material 8 is elongated, a hand 4 of an elongation measurement system 2 is displaced for a fixing body 5 and the spacing of the hand 4 increases. Then, a different induction voltage is generated at the elongation detection parts at two locations provided between the hand 4 and the fixing body 5 and then the amount of spacing change of the hand 4 is obtained according to the difference. In this case, the fixing body 5 follows the displacement of the hand 4 and the measurement system 3 changes in one piece, thus continuing to apply the laser beams 20 to the measurement position constantly and measuring the local material strain accurately and simultaneously with the elongation of the material 8.

20. 发明专利

JPH06333497A NEEDLE-LIKE SUBSTANCE PREPARATION METHOD AND ELECTRIC FIELD DISCHARGING ELEMENT WITH NEEDLE-LIKE ELECTRODE 失效
公开(公告)号：JPH06333497A
公开(公告)日：1994-12-02
申请号：JP11709293
申请日：1993-05-19
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI
IPC分类号： H01J1/30 , H01J1/304 , H01J3/02 , H01J9/02
摘要： PURPOSE:To prepare a plurality of needle-like substance uniformly and easily by exciting and decomposing conductive molecules existing in a closed environment by minutely divided exciting beam to deposite them like needles on a base board. CONSTITUTION:Light beam 7 having 8 Gauss distribution shape 8 from a light source 2 is transmitted through a first optical system 3 and converted into light beam for showing uniform distribution shape 9. The light beam 7a with that shape is transmitted through a mask base plate 4 to convert the beam into Gaussian intensity distribution 9a. The resulting minutely divided light beam 7b is transmitted through a second optical system 5 to give contracted light beam 7c. The light beam 7c is led into a chamber 6 as exciting beam and conductive molecules existing in the chamber are excited and decomposed. Consequently, sharp needle-like substance 21 is deposited uniformly on a base plate 15 made of such as Si, etc.

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