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1. 发明专利

JPH08329823A FIELD ELECTRON EMISSION ELEMENT, ELECTRON EMISSION SOURCE AND FLAT-TYPE DISPLAY DEVICE USING THE ELEMENT, AND MANUFACTURE OF THE ELEMENT 失效
公开(公告)号：JPH08329823A
公开(公告)日：1996-12-13
申请号：JP12757695
申请日：1995-04-28
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI
IPC分类号： H01J9/02 , H01J1/30 , H01J1/304 , H01J31/12 , H01J31/15
摘要： PURPOSE: To enhance the electron emission efficiency by furnishing an emitter electrode which can emit electrons from the tip of a columnar crystal generated through film formation of columnar crystal gathering. CONSTITUTION: A base electrode 23, insulating film 24, conductive film 25, and insulating film 29 are laminated on a base board 22, and a resist 30 is applied to be insulative film 29 so that a pattern 30a having circular hole mating with through hole 26 is formed. The insulative film 29, conductive film 25, and insulating film 24 are subjected to anisotropic etching in such a way as to suit the shape of the resist 30, the through holes 26 are formed where the base electrode 23 is exposed. On the base electrode 23 a columnar crystal gathering 27 is provided by film formation where a number of columnar crystals are contacted closely, and thus an emitter electrode is formed which can emit electrons from the tip of each columnar crystal. Then the insulative film 24 and insulating film 29 are etched selectively, and the edge 25a of the film 25 is protruded into the through hole 26 so that a gate electrode is accomplished.

2. 发明专利

JPH08264107A FIELD ELECTRON EMITTING ELEMENT, AND PLANAR DISPLAY DEVICE USING THIS FIELD ELECTRON EMITTING ELEMENT, AND MANUFACTURE OF FIELD ELECTRON EMITTING 失效
公开(公告)号：JPH08264107A
公开(公告)日：1996-10-11
申请号：JP6607895
申请日：1995-03-24
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI
IPC分类号： H01J9/02 , H01J1/30 , H01J1/304 , H01J31/12
摘要： PURPOSE: To improve the electric field concentration of an electron emitting part and raise electron emission efficiency by sharpening the tip of an emitter electrode threedimensionally thereby forming an electron emission part, and impressing voltage to a gate electrode and a base electrode thereby impressing an electric field to an emitter. CONSTITUTION: In a field electron emitting element 10, which is constituted by stacking the emitter electrodes 18 and 19 and gate electrodes 20 and 21 through insulating layers 13 and 15 on a base electrode 12, a meandering electron emission groove 17 and an array 9 are made, and each electrode is projected in the groove 17. And, the tips o of the emitter electrodes 18 and 19 are sharpened three-dimensionally to form electron emitting parts 18a and 19a positioned one each in each element 10. In the case of emitting electrons from an emitter, electric fields concentrate on the sharpened electron emitting parts 18a and 19a by earthing the emitter electrode 18, and impressing specified voltages each to the gate electrode 20 and 21 and the base electrode 12 thereby impressing electric fields to the emitter electrodes 18 and 19, thus electrons are emitted upward efficiently Accordingly, the emission of electrons at low voltage becomes possible.

3. 发明专利

JPH02266201A SCANNING TUNNELING MICROSCOPE 失效
公开(公告)号：JPH02266201A
公开(公告)日：1990-10-31
申请号：JP8674989
申请日：1989-04-07
申请人： TOSHIBA CORP
发明人： SHODA HISAHIRO , SUGIHARA KAZUYOSHI , SAKAI AKIRA , AKAMA YOSHIAKI
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/04 , G01Q60/10 , H01J37/28
摘要： PURPOSE:To observe a high-reliability image by providing a piezoelectric actuator which can supply a tunnel current from the same position at all times without slanting a probe fitted atop at the time of horizontal scanning. CONSTITUTION:The piezoelectric actuator 21 contracts when a positive voltage is applied to its electrode, so the side of the electrode 25a of a 2nd electrode 25 contracts while the side of the electrode 25c is held as it is, so that the electrode 25 slants to the right. Further, only the side of the electrode 23c of a 1st electrode 23 contracts and the 1st electrode 23 slants to the left. Those electrodes 23 and 25 are equal in electrode shape, size, and direction and applied positive voltage values become equal to each other. Consequently, the quantities of inclination are equal, the electrode 25 which slants can be returned by the electrode 23, and the probe 3 does not slant. Thus the actuator 21 is used to make a horizontal scan without slanting the probe 3. Therefore, the area of the tip part of the probe 3 where a tunnel current flows can be made constant and the high-reliability image can be observed.

4. 发明专利

JPS63305204A SCANNING CAPACITANCE MICROSCOPY 失效
公开(公告)号：JPS63305204A
公开(公告)日：1988-12-13
申请号：JP14143287
申请日：1987-06-08
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI , SUGIHARA KAZUYOSHI , TANAKA KUNIYOSHI
IPC分类号： G01B7/34 , G01Q60/48
摘要： PURPOSE:To prevent the damage of a specimen, by forming a pickup stylus into an axially symmetric shape with respect to the axis of the specimen in a vertical direction and providing an electrode in axially symmetric relation to the center axis of the pickup stylus. CONSTITUTION:A stylus 1 is constituted by sharpening the leading end of the diamond 40 fixed to one end of a piezoelectric element 2 in the direction approaching a specimen 20 and providing capacitance detecting electrodes 41, 42 to the sharpened part. The stylus 1 has such a shape that the same electrodes 41, 42 are bonded to the left and right side surfaces of the diamond having an axially symmetric shape. Since the same electrodes are bonded in a left and right symmetric manner as mentioned above, dielectric flux densities are uniform and equal each other and an apparent electrode 43 is formed on the center axis of the diamond and no phase shift is generated in signal response. Since the leading end of the diamond is sharpened, detection becomes possible before the edge side surface of the surface uneven part of the specimen collides with the stylus.

5. 发明专利

JPS63236906A SCAN TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPS63236906A
公开(公告)日：1988-10-03
申请号：JP7108987
申请日：1987-03-25
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA CORP
发明人： ONO MASATOSHI , SUGIHARA KAZUYOSHI , AKAMA YOSHIAKI , KISHI TSUGIO
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/02 , G01Q30/08 , G01Q30/20 , G01Q60/10
摘要： PURPOSE:To hold a probe and a sample at a constant distance by utilizing the elastic deformation of a rotatable base which abuts on the tip of a knife edge. CONSTITUTION:The sample base 25 is turned to a position shown by an alternate long and short dash line to replace a sample and perform a surface treatment. Then a worm 18 is rotated to rotate a wheel 21 and the base 25 as shown by arrows, and the tip part of a rigid body member 23 is made to abut on the upper end of the knife edge 13. When the worm 18 is further rotated in this state, an elastic member 24 bends and the base 25 operates as a contraction lever. Thus, the sample 26 is put close to the probe 15 to such a distance that a desired tunnel current flows, and the driving of a rough moving mechanism is stopped. Then operation is performed by a fine moving mechanism 14 and the surface of the sample 26 is inspected. Consequently, the sample can be replaced at a sufficient distance from the probe, and the sample base is securely fixed to hold the probe and sample at a constant distance.

6. 发明专利

JP2005127800A Electron beam irradiation device, irradiation method, and electron beam lithography system 审中-公开
标题翻译：电子束辐射装置，辐射方法和电子束光刻系统
公开(公告)号：JP2005127800A
公开(公告)日：2005-05-19
申请号：JP2003362338
申请日：2003-10-22
申请人： Toshiba Corp , 株式会社東芝
发明人： KINOSHITA HIDETOSHI , HASHIMOTO SUSUMU , AKAMA YOSHIAKI
IPC分类号： G21K5/04 , G03F7/20 , G21K5/00 , H01J37/073 , H01J37/305 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide an electron beam irradiation device and its method capable of inexpensive and high-throughput irradiation of a heavy current to a large irradiation area, and to provide an inexpensive and high-throughput electron beam lithography system and its method having a maintenance-free system and reduced running cost, and capable of high-resolution drawing compared with hitherto.
SOLUTION: An electron emission source 1 has an array formed by a plurality of micro-emitter type electron guns 1a, and a transmission part 16a of an electron flux of an electron beam taking-out window 16 has array arrangement corresponding to the array by the micro-emitter type electron guns 1a by a prescribed relation.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：解决的问题：提供一种电子束照射装置及其方法，其能够将大电流廉价且高通量地照射到大的照射区域，并且提供廉价且高通量的电子束光刻系统和其方法具有免维护系统并降低运行成本，并且与迄今为止相比能够进行高分辨率绘图。解决方案：电子发射源1具有由多个微发射体型电子枪1a形成的阵列，电子束取出窗口16的电子通量的透射部分16a具有对应于通过微发射体型电子枪1a排列规定的关系。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JPH08162060A ELECTRON DETECTING DEVICE AND ELECTRON MICROSCOPIC DEVICE 失效
公开(公告)号：JPH08162060A
公开(公告)日：1996-06-21
申请号：JP30474694
申请日：1994-12-08
申请人： TOSHIBA CORP
发明人： ISHIDA FUMIHIKO , HAYASHI MASAKAZU , UCHIDA JUNZO , AKAMA YOSHIAKI
IPC分类号： G01T1/24 , H01J37/244 , H01J37/28 , H01L31/09
摘要： PURPOSE: To provide an electron detecting device and electron microscopic device in which a secondary electron having only a low energy can be detected with high sensitivity. CONSTITUTION: A detector 11 for detecting a secondary electron 12 is formed of a pair of electrodes 13 arranged vertically to the surface, and a pn junction 16 having a pn composition plate 16a arranged vertically to the surface between the electrodes 13. Thus, the depletion layer of the pn junction 16 is exposed to the surface, whereby the secondary electron 12 need not pass the other material to allow the secondary electron 12 having only an extremely low energy to penetrate into the depletion layer without being scattered, and the secondary electron 12 having only a lower energy can be detected with high sensitivity.

8. 发明专利

JPH07225120A INSTRUMENT AND METHOD FOR MEASURING STRAIN OF MATERIAL 失效
公开(公告)号：JPH07225120A
公开(公告)日：1995-08-22
申请号：JP1811894
申请日：1994-02-15
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI
IPC分类号： G01B11/16 , G01N3/06
摘要： PURPOSE:To provide a material measuring instrument which can measure the strain of a material without large error, but with high accuracy. CONSTITUTION:A material strain measuring instrument is provided with a tensile tester 4 which deforms a material 5 to be measured on which a pair of indentations is formed, measuring section 2 equipped with a laser oscillator 10 which emits a laser beam 18 toward the indentations and independently obtains the picture data of interference fringes 19 and 20 generated in two directions, and signal processing section 3 which calculates the strain of the material 5 by performing signal processing on the picture data obtained by the measuring section 2. The measuring section 2 is provided with a lens barrel 13 which optically guides the first interference fringes 19, first CCD camera 12 which take the picture of the fringes 19 guided by the lens barrel 13, and second CCD camera 14 which take the picture of the second interference fringes 20 without passing through the lens barrel 13.

9. 发明专利

JPH0727525A MATERIAL STRAIN MEASURING SHEET 失效
公开(公告)号：JPH0727525A
公开(公告)日：1995-01-27
申请号：JP15365693
申请日：1993-06-24
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI
IPC分类号： G01B11/16 , G01N1/28 , G01N1/32 , G01N3/06
摘要： PURPOSE:To form interference fringes without providing impressions on a test material by forming a plurality of protrusions on the surface of a sheet body fixed to the test material. CONSTITUTION:Protrusions 4 are formed into a triangle pole shape, and they are arranged in parallel along the width direction of a sheet body 2. The cross sectional shape of the protrusions 4 is an isosceles triangle, and the protrusions 4 are protruded nearly vertically from the surface 3 of the sheet body 2. A sheet 1 is stuck to the surface of a test material 6 via an adhesive layer 5 prior to laser strain measurement. A laser beam is radiated to each protrusion 4, and the protrusion 4 is included in a laser spot. One of the tilt faces 7, 7 of the protrusion 4 is utilized as a reflecting face, and interference fringes of the reflected light are obtained. When strain occurs on the test material 6, the sheet body 2 is deformed together with the test material 6. The interval between the protrusions 4, 4 is changed, and the interval between the interference fringes is also changed. The local strain of the test material 6 is measured based on the change of the interval between the interference fringes.

10. 发明专利

JPH06203743A ELECTRON EMITTING ELEMENT AND FLAT DISPLAY DEVICE USING THIS ELECTRON EMITTING ELEMENT 失效
公开(公告)号：JPH06203743A
公开(公告)日：1994-07-22
申请号：JP72593
申请日：1993-01-06
申请人： TOSHIBA CORP
发明人： AKAMA YOSHIAKI
IPC分类号： H01J1/304 , H01J1/30 , H01J9/02 , H01J31/12
摘要： PURPOSE:To provide an electron emitting element of high emission current value by providing a divided groove in an insulating thin film laminated on a substrate, and forming a plurality of salient electrodes respectively in edge parts opposed to each other in this groove part. CONSTITUTION:The first conductive thin film 2 is formed in an insulating substrate 1 of Si or the like, and an insulating thin film 3 having a through hole 9 is laminated on the thin film 2. A divided groove 6 is provided on this insulating thin film 3, and the second conductive thin film 21 is laminated on the groove 6. This second conductive thin film 4 is divided into an inner side part 7 and outer side part 8 on the divided groove 6, and in edge parts of both these parts 7, 8, a plurality of salient electrodes 10, 11 of wedge shape or the like adjacent to each other are respectively formed. Further, the inner side part 7 is connected to the first conductive thin film 2 through the through hole 9. In an electron emitting device 12 thus obtained, by electrifying the outer side part 8 and the inner side part 7 through the first conduct thin film 2, an electron is selectively emitted from the salient electrodes 10, 11.

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