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91. 发明专利

JPH01295606A LEVITATION CARRYING SYSTEM 失效
公开(公告)号：JPH01295606A
公开(公告)日：1989-11-29
申请号：JP12178288
申请日：1988-05-20
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , MATSUSHITA OSAMI , OOTAKE SHIYOUJI
IPC分类号： B61B13/08 , B60L13/10
摘要： PURPOSE:To move a carrier in random direction while levitating, by applying a thin superconducting film onto a flat travel face and providing a mechanism for heating the thin superconducting film above critical temperature on a levita tion table. CONSTITUTION:Five magnet members 6 are secured to a levitation carrier 1 and a mechanism for heating a thin superconducting film member 2 applied onto a flat travel face 8 is arranged closely to one 6' of five magnets 6. The most superficial face of the flat travel face 8 is composed of magnetic material 3 applied with the thin superconducting film member 2. When the flat travel face 8 is heated through the heating mechanism 7 and superconductivity thereof is eliminated, flux of the magnet member 6' intrudes into the magnetic member 3 at a position where superconductivity is eliminated thus producing attraction between this section and the magnetic member 6' and moving the levitation carrier 1. At this time, Meissner effect is exhibited between four magnet members and the flat travel face 8 applied with the thin superconducting film member.

92. 发明专利

JPH01263534A COUNTING APPARATUS FOR PARTICULATES 失效
公开(公告)号：JPH01263534A
公开(公告)日：1989-10-20
申请号：JP9144788
申请日：1988-04-15
申请人： HITACHI LTD
发明人： MASUDA TOSHIO , MIZUMOTO MUNEO , TSUMAKI NOBUO
IPC分类号： G01N15/06 , G01N15/14 , G01N21/21
摘要： PURPOSE:To enable the detection of particulates by providing polarizing plates on an optical path of an irradiation beam and an optical path of a scattered light sensing system respectively so that the respective directions of polarization intersect each other perpendicularly. CONSTITUTION:A laser beam 4 is applied to a detection area 3 provided below a particulate generating element 2 in a vacuum vessel 1, and a scattered light 6 generated when particulates 5 pass is sensed by a light-sensing system 7 and converted into an electric signal. The particulates are counted by a signal processing. Herein polarizing plates 9 are provided on the optical paths of an irradiating system and the light- sensing system so that the respective directions of polarization intersect each other perpendicularly. Accordingly, stray light 10 caused by the reflection and diffraction of the irradiating light at a transparent window is intercepted by the polarizing plate 9 of the light-sensing system, since the stray light has only a horizontal component. Meanwhile, the vertical component of the scattered light 6 from the particulates, which has both horizontal and vertical components, is not intercepted by the polarizing plate 9 of the light-sensing system, but is made to enter a detector 7. In the detector 7, in this way, the stray light 10 is not detected and only the scattered light 6 from the particulates is detected. Thereby the detection of the particulates is enabled.

93. 发明专利

JPH0138364B2 失效
公开(公告)号：JPH0138364B2
公开(公告)日：1989-08-14
申请号：JP3420984
申请日：1984-02-27
申请人： HITACHI LTD
发明人： FUJIOKA KAZUMASA , OKUNO SUMIO , MIZUMOTO MUNEO , KANBARA HIDEAKI , UEDA SHINJIRO , KURODA TAKARO , YAMAGUCHI SUMIO , TAMURA NAOYUKI
IPC分类号： H01L21/203 , C30B23/06 , C30B23/08

94. 发明专利

JPH01164261A REFRIGERANT FEEDER 失效
公开(公告)号：JPH01164261A
公开(公告)日：1989-06-28
申请号：JP31886887
申请日：1987-12-18
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , OGATA HISANAO , YAGI YASUOMI
IPC分类号： H01F6/00 , H01F6/04 , H01L39/04 , H02K55/00 , H02K55/04
摘要： PURPOSE:To prevent the external leakage of a refrigerant by narrowing the gap between a central tube sidewall and an irrotational case inner wall and by providing a rotating seal to seal said gap on both sides of said irrotational case. CONSTITUTION:The inner part of a rotor 1 is composed of a multiple tube, of which the central part is a tube for putting a low-temperature refrigerant into the central part of said rotor and surrounded by a vacuum heat insulating layer 3 to reduce the auantity of heat entering said low-temperature refrigerant. Outside said tube, there exist multiple tubes 12, 12' for cooling a superconducting coil in the inner part of the rotor and for discharging the refrigerant outward. In the sidewall of said central tube 13, a low-temperature refrigerant inlet hole 10 passes through the heat insulating layer 3; said tube 13 is surrounded by an irrotational case 2' via a narrow gap 14; and the inside thereof is covered by a vacuum layer 3' to enable reducing the quantity of heat entering the low- temperature refrigerant from the outside to a small one. Also, a magnetic fluid seal 4 is arranged on both sides of a low-temperature refrigerant inlet pipe 7 to prevent the low-temperature refrigerant from leaking outward. Thus, the refrigerant such as liquid helium can be put into the rotor stably.

95. 发明专利

JPS6478192A MAGNETIC SHIELD COVER 失效
公开(公告)号：JPS6478192A
公开(公告)日：1989-03-23
申请号：JP23483287
申请日：1987-09-21
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , TOKISUE HIROMITSU , MASUDA TOSHIO , OGATA HISANAO
IPC分类号： H01L39/00 , A61B5/055 , A61B10/00 , G12B17/02 , H01F7/20 , H05K9/00
摘要： PURPOSE:To protect the human body against strong magnetic fields by using an ordinary temp. superconductive material to constitute a shield cover which protects the unnecessary part of the human body against the strong magnetic fields. CONSTITUTION:The shield cover 1 is made of the ordinary temp. superconductive material. The magnetic shielding of the part where the irradiation with the strong magnetic fields is prohibitive is enabled if this shield cover 1 is put on the part except the part 2 to be magnetically irradiated. This cover is particularly effective for protecting the human body except the part to be inspected against the strong magnetic fields in a nuclear magnetic resonator. The entire part of the human body is fully covered by the shield cover made of the ordinary temp. superconductive material so that only the part 4a to be transmitted with magnetism, i.e., the part desired to be irradiated with the magnetic fields can be heated by a heating mechanism 5 up to the critical temp. or above. The heating mechanism 5 includes, for example, a lamp heating source such as laser light source or direct contact heating by a heater, etc. Only the heated part becomes normally conducting state and the magnetic fields are transmitted therethrough if only the required part of the shield cover consisting of the ordinary temp. superconductive material is heated up to the critical temp. or above by using the heating mechanism 5.

96. 发明专利

JPS63266832A WAFER CLEANER 失效
公开(公告)号：JPS63266832A
公开(公告)日：1988-11-02
申请号：JP9981287
申请日：1987-04-24
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , TSUMAKI NOBUO , OTAKA KENJI
IPC分类号： H01L21/304 , H01L21/027 , H01L21/30 , H01L21/66
摘要： PURPOSE:To remove a fine foreign matter without damaging a wafer surface by so softly contacting a micro foreign matter removing mechanism for removing the matter with the wafer that the contacting surface pressure becomes very small. CONSTITUTION:When a foreign matter exists on a wafer, a scattered light is generated when a laser light is passed and introduced through a condensing lens 6 to a photomultiplier 5. The intensity of an input to the photomultiplier 5 is proportional to the magnitude of the matter. The laser light reflected on a half mirror 8 is partly irradiated to a position sensor 9, and the positional coordinates of the matter on the wafer 12 is identified when the output of the photomultiplier 5 is corresponded to the positions of the sensor 9 and a sample stage 1. The matter on the wafer 12 is sequentially moved by moving stands 2, 3 to a micro foreign matter removing mechanism 34, and the matter is hitted and flown while a hinge 13 is being moved. In this case, since the mechanism 34 is elevationally moved by a vertically moving stand 14 to prevent the end of the mechanism 34 from contacting with the upper surface of the wafer at an unnecessary time, it can prevent the wafer 12 from damaging.

97. 发明专利

JPS6279994A DUSTING PREVENTIVE DEVICE FOR ROBOT 失效
公开(公告)号：JPS6279994A
公开(公告)日：1987-04-13
申请号：JP22001485
申请日：1985-10-04
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , HONMA KAZUO , INOUE KO
IPC分类号： B25J19/00

98. 发明专利

JPS6212118A MOLECULAR BEAM EPITAXY EQUIPMENT 失效
公开(公告)号：JPS6212118A
公开(公告)日：1987-01-21
申请号：JP15014085
申请日：1985-07-10
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , KANBARA HIDEAKI , UEDA SHINJIRO , TAKAHASHI KUNIHIRO , KANAI NORIO
IPC分类号： H01L21/203 , H01L21/26
摘要： PURPOSE:To prevent the contamination of susceptor due to H2O, Co, etc. and improve the quality of the crystal film, by installing the mechanism which mounts or dismounts the substrate to or from the susceptor in the vacuum vessel, taking out only the substrate into the air after crystal growth, and reserving the susceptor always in the vacuum vessel. CONSTITUTION:The substrate equipted with the susceptor is delivered between the growth chamber 1 and the preliminary analysis chamber 2 by the manipulator 4'. The substrate after crystal growth is taken off from the susceptor 7' in the mounting/dismounting chamber 11, after being carried through the preliminary analysis chamber 2. Then the substrate only is pulled out from the load lock chamber 3 into the air. What is exposed to the air is only the substrate, and the susceptor 7' is always reserved in the vacuum, so that the susceptor does not suffer the contamination due to impure gases in the air like H2O, Co, etc. which give the crystal growth adverse effects, and the quality of the crystal growth film can be improved.

99. 发明专利

JPS6153195A Molecular beam epitaxial device 失效
标题翻译：分子束外延装置
公开(公告)号：JPS6153195A
公开(公告)日：1986-03-17
申请号：JP17493084
申请日：1984-08-24
申请人： Hitachi Ltd
发明人： OKUNO SUMIO , OKANO KINPEI , MIZUMOTO MUNEO , TAMURA NAOYUKI
IPC分类号： C30B23/08 , C30B25/02 , H01L21/20 , H01L21/203
摘要： PURPOSE: To determine and to control surely a specimen position not through a view point, by setting internally a specimen transporting means capable of controlling position of specimen in a specimen transportation tank to be exhausted under reduced pressure.
CONSTITUTION: The drive motor 23 of the specimen transporting means 20 capable of controlling the position of specimen set internally in the specimen transportation tank 10 to be evacuated under reduced pressure, the pole screw 21 is rotated through the gears 24 and 25, and the transporter 30 is transferred in the right and left direction through the saddle 22. An amount of movement of the transporter 30 is made to correspond accurately to number of revolutions of the gear 25 of the pole screw 21, detected by the detector 26 of number of revolutions, the motor 23 is operated, and stopped. Consequently, the specimen is surely and easily transferred, motion introduction means from the outside is not required, so cost and time for maintenance can be saved.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：为了确定和控制样本位置，不能通过观察点，通过内部设置一个能够将试样位置放置在样品输送罐中以在减压下排出的位置进行设置。构成：能够将试样输送槽10内的试样的位置控制在减压下抽真空的试样输送机构20的驱动马达23，极螺杆21通过齿轮24,25转动，运送器 30通过鞍座22在左右方向上传递。传送器30的移动量准确地对应于由检测器26检测到的转数螺杆21的齿轮25的转数电动机23动作停止。因此，可以容易地转移试样，不需要外部的动作引导装置，因此可以节省维护成本和时间。

100. 发明专利

JPS60254627A CARRYING MECHANISM FOR SEMICONDUCTOR SUBSTRATE 失效
公开(公告)号：JPS60254627A
公开(公告)日：1985-12-16
申请号：JP10996384
申请日：1984-05-30
申请人： HITACHI LTD
发明人： TAKAHASHI TOSHIO , SATOU KAZUO , YAMAGUCHI SUMIO , MIZUMOTO MUNEO , OKUNO SUMIO , MIYATA TOSHIMITSU , KONDOU YOSHIMASA
IPC分类号： H01L21/677 , H01L21/203 , H01L21/67 , H01L21/68
摘要： PURPOSE:To reduce weight to be carried on a carrying truck, by providing with a plural of shelves inside the cassette and a fork being possible to insert in the caseette in the direction perpendicular to rails. CONSTITUTION:The fork 18 on which a semiconductor substrate 8 is put, is inserted into a vacuum vessel 14 from an insertion port 19 and is fed through an opening 20 into a cassette 15. After the substrate 8 is put on a shelf 21 by incrementally rising the cassette 15, the fork 18 is retreated and the cassette is incrementally rised to position the next opening 20 so as to cause the fork 18 to be fed. By repeating such operations, the substrates 8 are put on all the shelves 21 in the cassette 15. Thereafter, the insertion port 19 is closed and the carrying chamber 2 and the vacuum vessel 14 is evacuated to make a vacuum state.

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