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91. 发明专利

JPH03118757A TRANSFER ROD 失效
公开(公告)号：JPH03118757A
公开(公告)日：1991-05-21
申请号：JP25495689
申请日：1989-09-29
申请人： TOSHIBA CORP
发明人： SUGIHARA KAZUYOSHI , SAKAI AKIRA
IPC分类号： B65G54/02 , H02K49/10
摘要： PURPOSE:To facilitate the operation of a switch mechanism by providing an elastic unit to abut on or be separated from a vessel due to deformation to a second magnet, and providing the switch mechanism engaged with the unit for deforming and releasing the unit. CONSTITUTION:A rod 12 is coaxially disposed in a cylinder 11 made of a nonmagnetic material, a first magnet 14 is secured to the right end of the rod 12, and a second magnet 15 is movably mounted on the outer periphery of the cylinder 11 at its outside. When springs 33a, 33b are attached to a stationary pin 32 in a housing 31 and set to releasing positions by a slide button 35, a clamping mechanism 16 is fixed to the cylinder 11, and the magnet 15 is also secured to the cylinder 11. The mechanism 16 is fixed or released by one touch by means of the slide of the button 35.

92. 发明专利

JPH03116982A MICRO MACHINE 失效
公开(公告)号：JPH03116982A
公开(公告)日：1991-05-17
申请号：JP25669789
申请日：1989-09-29
申请人： TOSHIBA CORP
发明人： SUGIHARA KAZUYOSHI
IPC分类号： H01L21/302 , B81B5/00 , B81C1/00 , C23C14/48 , F01D5/28 , H01L21/3065 , H01L49/00 , H02N1/00
摘要： PURPOSE:To prevent a micro machine from decreasing in frictional force on the surface and being damaged due to abrasion and to protect it against suction caused by static electricity by a method wherein transition metal as impurity is injected into the surface of, at least, a part of the component parts of the micro machine formed on the surface of semiconductor base. CONSTITUTION:A turbine 2, which is provided with a micro rotor 3 with blades formed on a silicon board 1, is provided, and it is rotated around a shaft 5 as a center when compressed air is made to flow through a channel 4, and a Cr layer is formed on one of the sliding parts of the rotor 3 in contact with the shaft 5. In the turbin 2 formed as above, as transition metal is injected into the surface of one of two planes 3 and 5 in contact with each other, friction between these planes is made so-called mild friction, and furthermore the surface of the material becomes electrically conductive. By this setup, the reduction of frictional force on the surface, damage due to abrasion, and suction caused by static electricity can be prevented.

93. 发明专利

JPH0362546A SCANNING PROBE AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH0362546A
公开(公告)日：1991-03-18
申请号：JP19661489
申请日：1989-07-31
申请人： TOSHIBA CORP
发明人： KATO YOSHIHIDE , SUGIHARA KAZUYOSHI
IPC分类号： H01L21/66 , G01Q10/04 , G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/06 , G01Q70/16
摘要： PURPOSE:To manufacture scanning probes which can simultaneously measure multiple points by selectively forming resist masks on each probe formed by selective growth and sharpening each probe by taper etching by using the selectively formed resist masks. CONSTITUTION:A conductive material 10 is selectively grown in deep holes 7C so as to fill up the holes 7C with the material 10. Then resists 11 having almost the same dimensions as the filled holes 7C have are selectively formed only at parts where probes are to be grown. Thereafter, taper-etching is performed to the front end of W10 by reactive etching using a chlorine gas by utilizing the regression of the resist masks 11 so as to obtain a sharp projecting probe shape. When the masks 11 disappear, the reactive etching is stopped and the remaining thick resist masks 9' are released and removed by using an organic solvent or performing an oxygen plasma process so as to expose an organic insulating film 5.

94. 发明专利

JPH0341302A SCANNING TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPH0341302A
公开(公告)日：1991-02-21
申请号：JP17556589
申请日：1989-07-10
申请人： TOSHIBA CORP
发明人： SHODA HISAHIRO , SUGIHARA KAZUYOSHI , SAKAI AKIRA , AKAMA YOSHIAKI
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q60/10 , H01J37/20 , H01J37/252 , H01J37/28
摘要： PURPOSE:To make it possible to make a scanning range of a probe variable widely in a simple manner without causing an increase of the cost by enabling changes of positions of connection of a plurality of piezoelectric actuators for moving the probe. CONSTITUTION:A screw B3 of a connecting part 11 is screwed in a nut 13 of a laminate-type piezoelectric actuator 12 and a screw B2 is screwed in a nut 18 of a tube-type piezoelectric actuator 14, while a nut 17 on the opposite side to the actuator 14 is screwed on a bolt B1 of a probe holder 19. A voltage is applied on an X-Y electrode 15 of the actuator 14 and a probe is scanned in the direction X-Y by a scanner, and a tunnel current flowing between the probe and a sample on the occasion is detected by a tunnel current detector. A voltage impressed on a Z electrode 16 is changed through a servo circuit so that the current be fixed, and the changed of the voltage is recorded with the probe moved up and down. Thereby the state of the surface of the sample can be observed at an atomic level.

95. 发明专利

JPH0197803A SCANNING-TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPH0197803A
公开(公告)日：1989-04-17
申请号：JP25500687
申请日：1987-10-09
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA CORP
发明人： TOKUMOTO HIROSHI , OKANO MAKOTO , SUGIHARA KAZUYOSHI , AKAMA YOSHIAKI
IPC分类号： H01J37/28 , G01B7/34 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q60/10 , H01J37/00
摘要： PURPOSE:To facilitate the replacement of a sample and to enable the observation of a stable STM image of a scanning-type tunnel microscope, by providing a first rough motion mechanism moving the sample from a position of replacement to a position of inspection, and a second rough motion mechanism moving a probe to the position of inspection integrally with a fine motion mechanism. CONSTITUTION:A sample 144 to be inspected is held by a sample holder 143 and moved from a position of replacement of samples indicated by an alternate long and two short dash line to a position of inspection indicated by a solid line through the intermediary of a worm 137 and a worm wheel 136, which constitute a first rough motion mechanism. Meanwhile, a probe 116 is moved to the position of inspection by an eccentric cam 121 integrally with a fine motion mechanism 117 constructed of a piezoelectric element, through the intermediary of a worm 124 and a worm wheel 123, which constitute a second rough motion mechanism. Accordingly, the sample can be replaced easily at the position being apart sufficiently from the probe 116. In addition, the sample holder 143 is fixed with sufficiently high rigidity by the self-lock of the worm wheel 136, and thus an STM image having stable reproducibility can be observed.

96. 发明专利

JPS6347601A SCANNING CAPACITANCE MICROSCOPY 失效
公开(公告)号：JPS6347601A
公开(公告)日：1988-02-29
申请号：JP18956286
申请日：1986-08-14
申请人： TOSHIBA CORP
发明人： SUGIHARA KAZUYOSHI
IPC分类号： G01B7/34 , G01Q60/46
摘要： PURPOSE:To detect the surface shape of a specimen in a non-contact state with high accuracy, by moving a pickup stylus in the direction vertical to the surface of the specimen using a piezoelectric element with high accuracy and taking out the undulation component of the specimen from the signal obtained using a low-pass filter. CONSTITUTION:A specimen 20 is placed on an X-Y table 21 made horizontally movable by a motor 22 and the pickup stylus mounted to a piezoelectric element 2 is provided above said specimen in a state freely movable up and down. Next, this stylus 1 is connected to a transmission line pickup circuit 4 by a fly lead 3 and the output signal therefrom is divided into two and one of the signals is sent to a servo controller 6 as the low frequency component corresponding to the surface undulation of the specimen through a low-pass filter 5. The controller 6 predetermines the distance between the stylus 1 and the specimen 20 to obtain a deviation signal with an output signal to apply said signal to a piezoelectric driver 7 and converts the same to voltage to supply said voltage to the piezoelectric element 2. The other signal is used in the detection of the high frequency component corresponding to surface roughness.

97. 发明专利

JPS6262518A ELECTRON BEAM TRANSFER APPARATUS 失效
公开(公告)号：JPS6262518A
公开(公告)日：1987-03-19
申请号：JP20159485
申请日：1985-09-13
申请人： TOSHIBA CORP
发明人： ITO TSUTOMU , GOTO MINEO , MORI ICHIRO , SUGIHARA KAZUYOSHI
IPC分类号： H01L21/027 , H01L21/30
摘要： PURPOSE:To accurately measure an emission current flowing between mask wafers by adding a photon emission amount measuring window only for emitting photon to the prescribed region of a photoelectric mask. CONSTITUTION:Ultraviolet light is emitted from a light source 7 into a vessel 3 through a transparent plate 6 to inadiate the upper surface of a mask 1. A shutter 14 for controlling the ultraviolet ray emitted to the photoelectric mask 1 is mounted on the plate, and controlled by a control computer 11. Photon emission amount measuring windows 9 having no pattern are formed in the mask 1 in which chip array patterns are regularly aligned. When ultraviolet ray is directed to the mask 1, the emission current generated thereby obtains emission current value of the photon emitting region than that only based on the chip pattern.

98. 发明专利

JPS622553A TRIMMING UNIT 失效
公开(公告)号：JPS622553A
公开(公告)日：1987-01-08
申请号：JP14117585
申请日：1985-06-27
申请人： TOSHIBA CORP
发明人： SUGIHARA KAZUYOSHI , ITO TSUTOMU
IPC分类号： H01L21/68 , B23Q15/22 , G05D3/00 , H01L21/67 , H02N2/00
摘要： PURPOSE:To accomplish high-precision positioning by a method wherein a displacement gauge accurately determines the position of a trimming mechanism and the difference between the actual position signals and target position signals is fed back into a controlling unit for the actuating of driving members. CONSTITUTION:A closed loop servo is constructed for the actuation of a trimming mechanism. The attitude of the trimming mechanism is determined by an eddy current type non-contact displacement gauge 41 detecting the positions of the X, Y and theta axes of the trimming mechanism. The detected signals are amplified by a pre-amplifier 42 and then digitized in an AD converter, whereafter they are applied to a comparator 44. Target position signals yielded by a computer 45 are also applied to the comparator 44. A controlling circuit 46 goes into operation and actuates driving members 6-9, which continues until the difference is small enough to fall within the range of tolerance outputted by the computer 45. This neutralizes the interference with each other of the three axes in a trimming mechanism, and allows the trimming mechanism to accomplish its inherent long-stroke movement and high-precision positioning.

99. 发明专利

JPS60197335A Electrostatic chuck device 失效
标题翻译：静电切割装置
公开(公告)号：JPS60197335A
公开(公告)日：1985-10-05
申请号：JP4856784
申请日：1984-03-14
申请人： Toshiba Corp , Toshiba Mach Co Ltd
发明人： TOUJIYOU TOORU , SUGIHARA KAZUYOSHI , SUZUKI YOSHIO
IPC分类号： B23Q3/15 , H01L21/67 , H01L21/68 , H01L21/683
摘要： PURPOSE: To obtain a chuck which is usable under a low voltage, by sticking a dielectric material on one main surface of an electrode with the use of a chemical vapor developing method to increase the mechanical strength and wear-resistance of the thus obtained dielectric layer.
CONSTITUTION: A dielectric insulating layer 13 made of Al
2 O
3 is stucked on an electrode 12 made of titanium alloy which is in turn stucked on an insulating substrate 11 made of Al
2 O
3 by a CVD method. A DC power source 16 is connected between a specimen 14 such as, for example, a semiconductor wafer, etc. laid on the layer 13 and the electrode through a switch 15. With this arrangement a sufficient chucking force may be obtained.
COPYRIGHT: (C)1985,JPO&Japio
摘要翻译：目的：为了获得可在低电压下使用的卡盘，通过使用化学气相显影方法将电介质材料粘附在电极的一个主表面上以提高由此获得的介电层的机械强度和耐磨性。构成：由Al 2 O 3制成的电介质绝缘层13粘合在由钛合金制成的电极12上，该钛合金又通过CVD法粘附在由Al2O3制成的绝缘基板11上。直流电源16通过开关15连接在诸如例如半导体晶片等的样本14和通过开关15的电极之间。由此，可以获得足够的夹持力。

100. 发明专利

JPS59200428A Electron-beam tester 失效
标题翻译：电子束测试仪
公开(公告)号：JPS59200428A
公开(公告)日：1984-11-13
申请号：JP7380683
申请日：1983-04-28
申请人： Toshiba Corp
发明人： TOUJIYOU TOORU , KOYAMA KIYOMI , SUGIHARA KAZUYOSHI
IPC分类号： H01J37/28 , G01R31/302 , H01L21/66
CPC分类号： H01L22/00
摘要： PURPOSE:To observe the state of operation at a plurality of measuring points simultaneously at a real-time by irradiating electron beams onto a sample surface in a stroboscope manner at the driving frequency of an IC or a period of integer times as many as said driving frequency while changing measuring coordinates to be projected at arbitrary frequency. CONSTITUTION:A sample 5 receives supply voltage for itself and timing signals, etc. from a control logic circuit 8. The control logic circuit controls a delay signal generator 11 forming a controller to an interrupter 3 together with a pulse generator 10 through a repetitive signal generator 9 simultaneously functioning as a pulse shaping appliance. The delay of pulses from the delay signal generator 11 is determined by a synchronizer 14 for the scanning voltage, etc. of a Braun tube when it is recorded from a computer or on the Braun tube. Primary electron beams move to a coordinate point S previously designated from a coordinate point M at appropriate frequency by using a repetitive signal generator 12. Signals from the repetitive signal generator 12 separate data transmitted over a converter 13 for separating signals from a secondary electron detector 7 into signals from the point M and signals from the point S.
摘要翻译：目的：通过以频闪显示方式将电子束照射到样品表面上，同时实时观察多个测量点的操作状态，以IC的驱动频率或整数倍于所述驾驶的整数倍同时改变要以任意频率投影的测量坐标。示例：样本5从控制逻辑电路8接收其自身的电源电压和定时信号等。控制逻辑电路通过重复信号控制延迟信号发生器11，其通过脉冲发生器10与断续器3形成控制器发电机9同时用作脉冲整形装置。当从计算机或Braun管记录时，来自延迟信号发生器11的脉冲的延迟由用于扫描管的扫描电压等的同步器14确定。一次电子束通过使用重复信号发生器12移动到以适当频率从坐标点M预先指定的坐标点S.来自重复信号发生器12的信号分离通过转换器13发送的数据，用于从二次电子检测器7分离信号来自点M的信号和来自点S的信号。

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