专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JPH01320402A SCAN TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPH01320402A
公开(公告)日：1989-12-26
申请号：JP15348588
申请日：1988-06-23
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA CORP
发明人： TOKUMOTO HIROSHI , SUGIHARA KAZUYOSHI , AKAMA YOSHIAKI , SAKAI AKIRA
IPC分类号： G01B7/34 , G01B21/00 , G01N23/00 , G01N37/00 , G01Q10/02 , G01Q30/18 , G01Q60/10 , H01J37/20 , H01J37/28 , H01L21/66
摘要： PURPOSE:To eliminate the relative displacement between a probe and a sample and to prevent a moving base from being stuck by prescribing the direction of movement by a fine moving mechanism at right angles to the vibration prevention direction of a vibration preventing mechanism. CONSTITUTION:A worm wheel 24 is rotated by driving a motor 27 to move back the moving base 19. In this state, the sample 17 is replaced or has its surface processed. Then the motor 27 is reversed to move the moving base 19 until a tunnel current flows between the probe 15 and sample 17. At this time, the moving base 19 is supported by roll bearings 20 and 20', so it moves smoothly and is never stuck. A voltage is applied between the probe 15 and sample 17 to scan the probe 15 by the fine moving mechanism 16 in parallel to the sample surface and the probe 15 is moved forward and backward so that the tunnel current is constant. Then the current variation of the forward/ backward movement of the probe 15 is extracted and images to observe the surface structure of the sample 17 on an atom scale.

2. 发明专利

JPS63236903A SCAN TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPS63236903A
公开(公告)日：1988-10-03
申请号：JP7108687
申请日：1987-03-25
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA CORP
发明人： ONO MASATOSHI , SUGIHARA KAZUYOSHI , AKAMA YOSHIAKI
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/02 , G01Q60/10 , G01Q60/46
摘要： PURPOSE:To facilitate an inspecting process by detecting the electrostatic capacity between a probe and the surface of a sample. CONSTITUTION:While the probe 12 is put close to the surface of the sample 11 by a rough moving mechanism to a distance of about 1nm, a tunnel current which flows between the sample 11 and sample 12 is detected. A Z piezoelectric element 23 is driven so that the current has a specific value; and then the probe 12 is positioned. In this state, X and Y piezoelectric elements 21 and 22 are driven to scan the probe in the in-surface direction of the sample surface and the element 23 is driven so that the tunnel current becomes constant. Then, a voltage applied to the element 23 is stored in a memory 34 together with an X and a Y scanning position. This operation is repeated to display the voltage variation of the element 23 corresponding to the scanning positions on a display device 35, and variation at atom. level on the surface of the sample 11 is displayed as image information. Thus, the easy inspecting process is realized.

3. 发明专利

JPS63236906A SCAN TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPS63236906A
公开(公告)日：1988-10-03
申请号：JP7108987
申请日：1987-03-25
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA CORP
发明人： ONO MASATOSHI , SUGIHARA KAZUYOSHI , AKAMA YOSHIAKI , KISHI TSUGIO
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/02 , G01Q30/08 , G01Q30/20 , G01Q60/10
摘要： PURPOSE:To hold a probe and a sample at a constant distance by utilizing the elastic deformation of a rotatable base which abuts on the tip of a knife edge. CONSTITUTION:The sample base 25 is turned to a position shown by an alternate long and short dash line to replace a sample and perform a surface treatment. Then a worm 18 is rotated to rotate a wheel 21 and the base 25 as shown by arrows, and the tip part of a rigid body member 23 is made to abut on the upper end of the knife edge 13. When the worm 18 is further rotated in this state, an elastic member 24 bends and the base 25 operates as a contraction lever. Thus, the sample 26 is put close to the probe 15 to such a distance that a desired tunnel current flows, and the driving of a rough moving mechanism is stopped. Then operation is performed by a fine moving mechanism 14 and the surface of the sample 26 is inspected. Consequently, the sample can be replaced at a sufficient distance from the probe, and the sample base is securely fixed to hold the probe and sample at a constant distance.

4. 发明专利

JPS63236907A SCAN TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPS63236907A
公开(公告)日：1988-10-03
申请号：JP7109087
申请日：1987-03-25
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA CORP
发明人： ONO MASATOSHI , SUGIHARA KAZUYOSHI
IPC分类号： G01B7/34 , G01B21/30 , G01N37/00 , G01Q10/04 , G01Q30/08 , G01Q30/20 , G01Q60/10
摘要： PURPOSE:To improve the reliability of a scan type tunnel microscope by clipping the tip of a probe in the projection area of the cleavage surface of a sample by the tip of a driving mechanism which can be driven in the vertical direction of the probe. CONSTITUTION:A worm 9 is rotated after the sample is cleaved to turn a sample base 16, whose reverse surface is made abut on the tip of a knife edge 3. When the projection quantity of the cleaved surface of the sample 18 from a sample holding part is larger than a specific value, the cleaved surface strikes on the tip of a probe protection stylus 22. Consequently, the sample 18 is moved back by the sample holding part and the projection quantity is adjusted to a proper constant value. When the projection quantity is smaller than the specific value and no specific tunnel current flows even by putting the cleaved surface of the base 16 close to a cleaving operation position through the elastic deformation of the base 16, the base 16 is turned again to the cleaving operation position and the sample 18 is pushed out by a sample transporting mechanism to increase the projection quantity of the cleaved surface. Similarly, the projection quantity of the cleaved surface of the sample 18 is adjusted to a proper constant value. Consequently, the reliability is improved.

5. 发明专利

JPS63236905A SCAN TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPS63236905A
公开(公告)日：1988-10-03
申请号：JP7108887
申请日：1987-03-25
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA CORP
发明人： ONO MASATOSHI , SUGIHARA KAZUYOSHI , AKAMA YOSHIAKI , KISHI TSUGIO
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/02 , G01Q30/08 , G01Q30/20 , G01Q60/10
摘要： PURPOSE:To correct variation in the distance between a sample and a probe by sliding a knife edge while making the tip of the knife edge abut on the slanting surface of a base. CONSTITUTION:A sample base 33 is rotated to an alternate long and short dash line position and the sample 34 is replaced. A wheel 29 and the base 33 are turned as shown by arrows by a worm 26 and the time when the slanting surface 31a of a rigid body member 31 abuts on the tip of the knife edge 14 and a current is detected is compared with the time when a tunnel current flows. When the replaced sample 34 is thicker than a sample which is inspected last time, the tunnel current is generated before the contact current. In this case, the reverse surface of the base 33 is elevated when the edge 14 is slid by rotating the worm 16 to abut and then the contact current is generated before the tunnel current; and the edge 14 is moved to the position where the tunnel current flows within the range of the quantity of movement due to the elastic deformation of the base 33 after the generation of the contact current. When the sample is thin, the edge 14 is slid in the opposite direction. When the row 26 is further rotated, the elastic member 32 bends and inspection is performed through the operation of a fine moving mechanism 22. Consequently, the variation in the distance between the sample and probe is corrected.

6. 发明专利

JPH0197803A SCANNING-TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPH0197803A
公开(公告)日：1989-04-17
申请号：JP25500687
申请日：1987-10-09
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA CORP
发明人： TOKUMOTO HIROSHI , OKANO MAKOTO , SUGIHARA KAZUYOSHI , AKAMA YOSHIAKI
IPC分类号： H01J37/28 , G01B7/34 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q60/10 , H01J37/00
摘要： PURPOSE:To facilitate the replacement of a sample and to enable the observation of a stable STM image of a scanning-type tunnel microscope, by providing a first rough motion mechanism moving the sample from a position of replacement to a position of inspection, and a second rough motion mechanism moving a probe to the position of inspection integrally with a fine motion mechanism. CONSTITUTION:A sample 144 to be inspected is held by a sample holder 143 and moved from a position of replacement of samples indicated by an alternate long and two short dash line to a position of inspection indicated by a solid line through the intermediary of a worm 137 and a worm wheel 136, which constitute a first rough motion mechanism. Meanwhile, a probe 116 is moved to the position of inspection by an eccentric cam 121 integrally with a fine motion mechanism 117 constructed of a piezoelectric element, through the intermediary of a worm 124 and a worm wheel 123, which constitute a second rough motion mechanism. Accordingly, the sample can be replaced easily at the position being apart sufficiently from the probe 116. In addition, the sample holder 143 is fixed with sufficiently high rigidity by the self-lock of the worm wheel 136, and thus an STM image having stable reproducibility can be observed.

7. 发明专利

JPS63236904A SCAN TYPE TUNNEL MICROSCOPE 失效
公开(公告)号：JPS63236904A
公开(公告)日：1988-10-03
申请号：JP7108787
申请日：1987-03-25
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA CORP
发明人： ONO MASATOSHI , SUGIHARA KAZUYOSHI
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/02 , G01Q60/10
摘要： PURPOSE:To put a sample and a probe close to each other to a slight distance by arranging the abutting point between a sample base and the tip of a knife edge on a straight line which crosses the lengthwise straight line passing the tip position of the probe at right angles. CONSTITUTION:The sample base 25 is rotated to an alternate long and short dash line position and the sample 23 is installed at a specific position of a groove 23a. Then a worm 18 is rotated to turn wheel 21 and the base 25 as shown by arrows, and reverse surfaces on both sides of the groove 23a at the tip part of a rigid body member 23 which constitutes the base 25 are made to abut on two tips of the knife edge 13. When the worm 18 is further rotated in this state, the elastic member 24 of the base 25 bends and the base 25 operates as a contraction lever. Thus, the sample 26 and probe 15 are put close to such a distance that a desired tunnel current flows and the driving of a rough driving mechanism is stopped. Then operation is performed by a fine moving mechanism 14 to inspect the surface of the sample 26. Consequently, the sample and probe are put at a slight distance.

8. 发明专利

JPH0641841B2 失效
公开(公告)号：JPH0641841B2
公开(公告)日：1994-06-01
申请号：JP7109087
申请日：1987-03-25
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA KK
发明人： ONO MASATOSHI , SUGIHARA KAZUYOSHI
IPC分类号： G01B7/34 , G01B21/30 , G01N37/00 , G01Q10/04 , G01Q30/08 , G01Q30/20 , G01Q60/10

9. 发明专利

JPH0643882B2 失效
公开(公告)号：JPH0643882B2
公开(公告)日：1994-06-08
申请号：JP7108787
申请日：1987-03-25
申请人： AGENCY IND SCIENCE TECHN , TOSHIBA KK
发明人： ONO MASATOSHI , SUGIHARA KAZUYOSHI
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/02 , G01Q60/10

10. 发明专利

JP2006253700A Pattern forming method 有权
标题翻译：图案形成方法
公开(公告)号：JP2006253700A
公开(公告)日：2006-09-21
申请号：JP2006090523
申请日：2006-03-29
申请人： Toshiba Corp , 株式会社東芝
发明人： ANDO KOJI , SUGIHARA KAZUYOSHI , NAKASUGI TETSUO , OKUMURA KATSUYA
IPC分类号： H01L21/027 , G01B15/04 , H01J37/305
摘要： PROBLEM TO BE SOLVED: To form a minute pattern at high throughput by putting both of excellent image dissection transgressing light of an electron beam exposure unit and high throughput of a light stepper into practical use, and to improve superimposition accuracy of a pattern.
SOLUTION: A resist pattern is formed by exposing a desired pattern on a resist formed on wafer 5. A pattern of a ground substrate with a sensitive material applied thereto is detected based on information on a second electron discharged from the sensitive material by irradiating electron beam on the sensitive material, and exposure is carried out by positioning at the detected pattern.
COPYRIGHT: (C)2006,JPO&NCIPI

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式