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    • 3. 发明公开
    • TUNNELLING DEVICE AND METHOD OF PRODUCING A TUNNELLING DEVICE
    • 隧道设备和生产隧道设备的方法
    • EP0836232A1
    • 1998-04-15
    • EP97917492.7
    • 1997-03-25
    • Samsung Electronics Co., Ltd.Gubin, Sergei PavlovichKolesov, Vladimir VladimirovichSoldatov, Evgenii SergeevichTrifonov, Artem SergeevichKhanin, Vladimir Viktorovich
    • GUBIN, Sergei PavlovichKOLESOV, Vladimir VladimirovichSOLDATOV, Evgenii SergeevichTRIFONOV, Artem SergeevichKHANIN, Vladimir ViktorovichKHOMUTOV, Genadii BorisovichYAKOVENKO, Sergei Alexandrovich
    • H01L29/86
    • B82Y10/00H01L29/7613H01L49/006Y10S977/937
    • The tunnel-effect device comprises an input electrode 3, an output electrode 4, and N control electrodes 5 separated with tunneling barriers, the latter barriers and the interbarrier space therein appear as an ordered structure of molecules and clusters establishing tunneling junctions; each control electrode 5 is located in the region of the ordered structure of molecules and clusters 2. The dimensions and properties of the molecules provide for single-electron correlated electron tunneling at a relatively high (room) temperature.
      The tunnel-effect device functions on the base of controlled correlated electron tunneling. Possibility of controlling the tunneling current opens the way to constructing various electronic gate circuits on the base of single-electron tunneling junctions and hence to preparing single-electron analog and digital devices, in particular, high-sensitivity sensors.
      The method for preparing the tunnel-effect device consists in establishing on the surface of a solid-state substrate an input electrode, an output electrode, and control electrodes followed by formation of an inert dielectric molecular matrix with orderly built-in active molecules and clusters which are the localization centers of the tunneling electrons and thus establish single-electron tunneling junctions.
      The effect of discrete tunneling of individual current carriers through tunneling barriers at room temperature used in the tunnel-effect device may also be applied in a single-electron transistor and used for constructing single-electron gate circuits, wherein logical 1" and 0" are identified with the presence or absence of an electron.
    • 隧道效应器件包括输入电极3,输出电极4和N个控制电极5,隧道势垒隔开,后者屏障和屏障间空间表现为建立隧道结的分子和簇的有序结构; 每个控制电极5位于分子和簇2的有序结构的区域中。分子的尺寸和性质在相对高的(房间)温度下提供单电子相关电子隧道效应。 隧道效应器件在受控相关电子隧穿的基础上起作用。 控制隧穿电流的可能性打开了在单电子隧道结基础上构建各种电子门电路的方式,并因此为准备单电子模拟和数字器件,特别是高灵敏度传感器开辟了道路。 用于制备隧道效应器件的方法包括在固态衬底的表面上建立输入电极,输出电极和控制电极,接着形成具有有序内置活性分子和簇的惰性介电分子矩阵 它们是隧道电子的定位中心并因此建立单电子隧道结。 在隧道效应器件中使用的室温下各个电流载流子的离散隧道效应也可以应用于单电子晶体管并用于构建单电子门电路,其中逻辑1“和0”是 与电子的存在或不存在一致。