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1. 发明公开

EP1787309A1 DISPOSITIF POUR L'ACQUISITION D'IMAGE ET/OU DE SPECTRES DE PERTES D'ENERGIE D'ELECTRONS 失效
标题翻译：设备对图像的获取和/或电子能量损失谱
公开(公告)号：EP1787309A1
公开(公告)日：2007-05-23
申请号：EP05776167.8
申请日：2005-08-01
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) , UNIVERSITE PARIS-SUD (PARIS 11)
发明人： PINNA, Henri , TENCE, Marcel
IPC分类号： H01J37/244
CPC分类号： H01J37/244 , H01J37/256 , H01J2237/2522
摘要： The inventive device for obtaining the electron energy loss image and/or spectra comprises an image sensor (17), a control (31) for at least two deflectors (48a, 48b) for alternately exposing at least two photosensitive parts of the image sensor, sensor reading means for generating the representative signal of an image captured by each photosensitive part of the image sensor, means (31) for synchronising the deflector and said reading means for successively controlling the exposition of said photosensitive part and the reading of the other photosensitive part for each photosensitive part and means (35) for combining the two image parts in such a way that a spectrum is formed.

2. 发明公开

EP1220280A2 Scanning and high resolution x-ray photoelectron spectroscopy and imaging 失效
标题翻译： HochauflösendeRasterröntgenphotoelektronenspektroskopie
公开(公告)号：EP1220280A2
公开(公告)日：2002-07-03
申请号：EP01120818.8
申请日：1993-08-25
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E., Physical Electronics, Inc. , Palmberg, Paul W.
IPC分类号： H01J37/256 , G01N23/227
CPC分类号： H01J49/48 , G01N23/227 , G01N23/2273 , H01J37/256 , H01J37/285 , H01J2237/2522
摘要： The invention refers to an instrument for analysis of a specimen surface which comprises an electron gun for producing a focused electron beam, an anode with an anode surface disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface, rastering means for rastering the focused electron beam over the anode surface, thereby scanning the anode spot over the anode surface, focusing means receptive of at least a portion of the x-rays from the scanning anode spot for focusing an energy band of x-rays of predetermined energy as an x-ray spot on a pixel area scanning correspondingly over the specimen surface, such that photoelectrons are emitted from the scanning pixel area with electron energies characteristic of chemical species at the pixel area, wherein the x-rays and thereby the photoelectrons have a natural energy shift across the specimen surface, analyzer means receptive of at least a portion of the photoelectrons from the scanning pixel area for analyzing the electron energies, compensating means associated with the analyzer means for compensating for the shift, and processing means cooperative with the rastering means and the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface. The invention also refers to an instrument for analysis of an insulating specimen surface which comprises detector means receptive of the photoelectrons for generating corresponding photoelectron signals, flood means for flooding the specimen surface with low energy electrons during periodic intervals so as to neutralize loss of photoelectrons from the specimen surface, and processing means receptive of the photoelectron signals and cooperative with the rastering means so as to effect an imaging of the specimen surface, wherein the photoelectron signals are omitted from the imaging during the periodic intervals.
摘要翻译：本发明涉及一种用于分析样品表面的仪器，其包括用于产生聚焦电子束的电子枪，具有阳极表面的阳极，阳极表面设置为接收聚焦的电子束，从而产生来自阳极点的X射线阳极表面，用于在阳极表面上对聚焦电子束进行扫描的雷击装置，从而在阳极表面上扫描阳极点，聚焦装置接收来自扫描阳极点的x射线的至少一部分，用于聚焦预定能量的X射线作为在样本表面上相应扫描的像素区域上的x射线点，使得光电子从扫描像素区域以像素区域的化学物质特征的电子能量发射，其中x射线因此光电子在样品表面上具有自然能量偏移，分析器装置从扫描像素接收至少一部分光电子用于分析电子能量的区域，与用于补偿偏移的分析装置相关联的补偿装置，以及与扫描装置协调的处理装置和用于产生代表电子能量的样本信息，从而产生样品表面的试样表面的化学物种的分析装置。本发明还涉及一种用于分析绝缘样品表面的仪器，其包括接收用于产生相应光电子信号的光电子的检测器装置，用于在周期性间隔期间用低能电子淹没样品表面的淹没装置，以便中和光电子的损失样品表面和接收光电子信号的处理装置，并且与rastering装置协调，以便实现样品表面的成像，其中在周期性间隔期间从成像中省略光电子信号。

3. 发明公开

EP1170778A2 Scanning and high resolution electron spectroscopy and imaging 失效
标题翻译：扫描和高分辨率电子光谱和成像
公开(公告)号：EP1170778A2
公开(公告)日：2002-01-09
申请号：EP01120822.0
申请日：1995-02-02
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： H01J49/06 , H01J49/48 , G01N23/227
CPC分类号： G01N23/2273 , G01N23/227 , H01J37/256 , H01J37/285 , H01J49/48 , H01J2237/2522
摘要： An instrument (10) for analysis of a specimen surface (14) comprises an electron gun (16) for producing a focused electron beam (20), an anode (24) with an anode surface (22) disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface, rastering means (36) for rastering the focused electron beam over the anode surface, thereby scanning the anode spot over the anode surface, focusing means (34) receptive of at least a portion of the x-rays from the scanning anode spot for focusing an energy band of x-rays of predetermined energy as an x-ray spot on a pixel area scanning correspondingly over the specimen surface, such that photoelectrons are emitted from the scanning pixel area with electron energies characteristic of chemical species at the pixel area, wherein the x-rays and thereby the photoelectrons have a natural energy shift across the specimen surface, analyzer means (54) receptive of at least a portion of the photoelectrons from the scanning pixel area for analyzing the electron energies, compensating means associated with the analyzer means for compensating for the shift, and processing means cooperative with the rastering means and the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface. Also described is an instrument for analysis of an insulating specimen surface which comprises detector (88) means receptive of the photoelectrons for generating corresponding photoelectron signals, flood means (98) for flooding the specimen surface with low energy electrons during periodic intervals so as to neutralize loss of photoelectrons from the specimen surface, and processing means receptive of the photoelectron signals and cooperative with the rastering means so as to effect an imaging of the specimen surface, wherein the photoelectron signals are omitted from the imaging during the periodic intervals.
摘要翻译：一种用于分析样品表面（14）的仪器（10）包括用于产生聚焦电子束（20）的电子枪（16），具有阳极表面（22）的阳极（24），阳极表面（22）被设置为接收聚焦电子束以便从阳极表面上的阳极点产生X射线，光栅装置（36），用于在阳极表面上光栅聚焦的电子束，由此扫描阳极表面上的阳极点，聚焦装置（34）接收在来自扫描阳极点的X射线的至少一部分用于将具有预定能量的X射线的能量带聚焦为相应地在样本表面上扫描的像素区域上的X射线点，使得光电子从扫描像素区域，其具有在像素区域处的化学物质的电子能量特性，其中x射线和由此的光电子具有穿过样本表面的自然能量漂移;分析装置（54），其接收来自t的至少一部分光电子扫描用于分析电子能量的像素区域，与用于补偿偏移的分析器装置相关联的补偿装置，以及与光栅装置和分析器装置配合的处理装置，用于生成代表电子能量的样本信息，试样表面。还描述了一种用于分析绝缘样品表面的仪器，其包括接收光电子以产生相应光电子信号的检测器（88）装置，用于在周期性间隔期间用低能量电子淹没样品表面以便中和的散射装置（98）光电子从样品表面的损失以及处理装置接收光电子信号并与光栅装置配合以实现样品表面的成像，其中在周期性间隔期间光电子信号从成像中被省略。

4. 发明公开

EP0590308A2 Scanning and hig resoloution x-ray photo electron spectroscopy and imaging 失效
标题翻译： HochauflösendeRasterröntgenphotoelektronenspektroskopiezur Bilderzeugung。
公开(公告)号：EP0590308A2
公开(公告)日：1994-04-06
申请号：EP93113582.6
申请日：1993-08-25
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： G01N23/227 , H01J49/08 , G21K1/06
CPC分类号： H01J49/48 , G01N23/227 , G01N23/2273 , H01J37/256 , H01J37/285 , H01J2237/2522
摘要： An instrument (10) for surface analysis includes an electron gun (16) for selectively focusing an electron beam on an anode spot (26), or rastering the beam across an array of such spots, to generate x-rays. A concave monochromator (34) focuses an energy peak of the x-rays to a specimen surface (14), in a spot on a selected pixel area or across an array of pixel areas on the surface to emit photoelectrons. An analyzer (54) with a detector (76) provides information on the photoelectrons and thereby chemical species in the surface. A second detector (88) of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface, for viewing of a specimen to be positioned, or for imaging an insulator surface. The monochromator is formed of platelets produced by cutting an array of platelets from a single crystal member, and bonding the platelets to a concave face of a base plate juxtaposed in crystalline alignment in a positioned array identical to that of the initial array.
摘要翻译：用于表面分析的仪器包括用于选择性地将电子束聚焦在阳极点上的枪，或者将光束穿过这样的点的阵列，以产生x射线。凹形单色仪将X射线的能量峰值聚焦到样品表面，在选定的像素区域上或者表面上的像素区域阵列上的点中以发射光电子。具有检测器的分析仪提供关于光电子的信息，从而提供表面上的化学物质的信息。低能量光电子的第二检测器与扫描相协调以产生表面的扫描光电子图像，用于观察待定位的样品或用于对绝缘体表面进行成像。单色仪由通过从单晶构件切割血小板阵列而产生的血小板形成，并且将血小板结合到以与初始阵列相同的定位阵列中以结晶对准并列的基板的凹面。

5. 发明公开

EP0510334A2 Apparatus and method for locating target area for electron microanalysis 失效
标题翻译： Gerätund Verfahren zur Lokalisierung des Auftreffereeres in der Elektronen-Mikroanalyse。
公开(公告)号：EP0510334A2
公开(公告)日：1992-10-28
申请号：EP92103620.8
申请日：1992-03-03
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E.
IPC分类号： H01J37/22 , H01J37/256
CPC分类号： H01J37/256 , H01J2237/2448 , H01J2237/24495 , H01J2237/2511 , H01J2237/2522
摘要： Target area on a specimen surface is located in an electron microanalyzer system that includes an electron energy analyzer and an analyzer detector. An electron gun impinges a rastering beam of incident electrons across the surface, and a secondary electron detector provides corresponding signals for producing a scanning electron microscope image of the surface. Backscattered electrons effected from the incident electrons are passed through the analyzer for producing a further image that is superimposed on the SEM image to locate the target area to be subject to a separate microanalysis. Particularly for an electrically insulating specimen surface, the images are produced in a single frame of rastering, and surface area and beam current are sufficient to produce the images without substantial charge buildup.
摘要翻译：样品表面上的目标区域位于包括电子能量分析仪和分析仪检测器的电子微量分析仪系统中。电子枪冲击入射电子的掠过光束穿过表面，二次电子检测器提供相应的信号以产生表面的扫描电子显微镜图像。从入射的电子产生的背散射电子通过分析器，以产生叠加在SEM图像上的另外的图像，以将目标区域定位成单独的微量分析。特别是对于电绝缘的样品表面，图像以单一的扫描框架产生，并且表面积和束流电流足以产生图像而没有实质的电荷积聚。

6. 发明授权

EP1787309B1 DISPOSITIF POUR L'ACQUISITION D'IMAGE ET/OU DE SPECTRES DE PERTES D'ENERGIE D'ELECTRONS 失效
标题翻译：设备对图像的获取和/或电子能量损失谱
公开(公告)号：EP1787309B1
公开(公告)日：2010-01-06
申请号：EP05776167.8
申请日：2005-08-01
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) , UNIVERSITE PARIS-SUD (PARIS 11)
发明人： PINNA, Henri , TENCE, Marcel
IPC分类号： H01J37/244
CPC分类号： H01J37/244 , H01J37/256 , H01J2237/2522

7. 发明公开

EP1793410A4 SPHERICAL ABERRATION CORRECTION ELECTROSTATIC LENS, INPUT LENS, ELECTRON SPECTROSCOPIC DEVICE, PHOTOELECTRON MICROSCOPE, AND MEASUREMENT SYSTEM 有权
标题翻译：静电透镜校正球面像差，输入镜头，电子分光设备，光电子显微镜和测量系统
公开(公告)号：EP1793410A4
公开(公告)日：2009-10-21
申请号：EP04822204
申请日：2004-11-09
申请人： NAT UNIV CORP NARA INST , JEOL LTD
发明人： DAIMON HIROSHI , MATSUDA HIROYUKI , KATO MAKOTO , KUDO MASATO
IPC分类号： H01J37/244 , G01N23/227 , H01J37/12 , H01J37/285
CPC分类号： H01J37/12 , G01N23/227 , H01J37/153 , H01J37/244 , H01J37/285 , H01J49/067 , H01J49/48 , H01J2237/2448 , H01J2237/24485 , H01J2237/2522

8. 发明公开

EP1875485A2 DETERMINING LAYER THICKNESS USING PHOTOELECTRON SPECTROSCOPY 审中-公开
标题翻译：厘定使用光电子能谱厚度
公开(公告)号：EP1875485A2
公开(公告)日：2008-01-09
申请号：EP06750862.2
申请日：2006-04-19
申请人： ReVera Incorporated
发明人： SCHUELER, Bruno
IPC分类号： H01J40/00
CPC分类号： G01B15/02 , H01J2237/2511 , H01J2237/2522 , H01J2237/2814
摘要： [0095] According to one embodiment of the invention, photoelectron spectroscopy is used to determine the thickness of one or more layers in a single or multi-layer structure on a substrate. The thickness may be determined by measuring the intensities of two photoelectron species or other atom-specific characteristic electron species emitted by the structure when bombarded with photons. A predictive intensity function that is dependent on the thickness of a layer is determined for each photoelectron species. A ratio of two predictive intensity functions is formulated, and the ratio is iterated to determine the thickness of a layer of the structure. According to one embodiment, two photoelectron species may be measured from a single layer to determine a thickness of that layer. According to another embodiment, two photoelectron species from different layers or from a substrate may be measured to determine a thickness of a layer.

9. 发明公开

EP1219956A3 Method for providing a substantially uniform surface potential on an insulating specimen 失效
标题翻译：一种用于实现绝缘物的基本上均匀的表面电势的方法
公开(公告)号：EP1219956A3
公开(公告)日：2006-05-03
申请号：EP01127723.3
申请日：1997-11-21
申请人： ReVera Incorporated
发明人： Larson, Paul E. , Kelly, Michael A.
IPC分类号： G01N23/227 , H01J37/02 , G01N23/20
CPC分类号： H01J37/026 , G01N23/2273 , H01J2237/0044 , H01J2237/2522
摘要： A method for providing a substantially uniform surface potential on an insulating specimen in an analytical instrument, wherein the specimen has an irradiation region receptive of an energy beam to effect an emission from the specimen so as to cause positive charging of the irradiation region, the method comprising: flooding an area of the specimen including the irradiation region with an electron beam of low energy electrons to neutralize the positive charging such that the flooding causes negative charging of the flooding area outside of the irradiation region; and directing positive ions onto at least a portion of the flooding area proximate to the irradiation region to neutralize the negative charging in such a portion; characterized by the low energy electrons having an energy less than 2 eV and an energy spread less than 0.5 eV.

10. 发明公开

EP1220280A3 Scanning and high resolution x-ray photoelectron spectroscopy and imaging 失效
标题翻译： HochauflösendeRasterröntgenphotoelektronenspektroskopiezur Bilderzeugung
公开(公告)号：EP1220280A3
公开(公告)日：2004-08-25
申请号：EP01120818.8
申请日：1993-08-25
申请人： High Voltage Engineering Corporation
发明人： Larson, Paul E., Physical Electronics, Inc. , Palmberg, Paul W.
IPC分类号： G01N23/227 , H01J49/08 , G21K1/06 , H01J37/256
CPC分类号： H01J49/48 , G01N23/227 , G01N23/2273 , H01J37/256 , H01J37/285 , H01J2237/2522
摘要： The invention refers to an instrument (10) for analysis of a specimen surface which comprises an electron gun (16) for producing a focused electron beam, an anode with an anode surface (22) disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface, rastering means for rastering the focused electron beam over the anode surface, thereby scanning the anode spot over the anode surface, focusing means receptive of at least a portion of the x-rays from the scanning anode spot for focusing an energy band of x-rays of predetermined energy as an x-ray spot on a pixel area scanning correspondingly over the specimen surface (14), such that photoelectrons are emitted from the scanning pixel area with electron energies characteristic of chemical species at the pixel area, wherein the x-rays and thereby the photoelectrons have a natural energy shift across the specimen surface, analyzer means (54) receptive of at least a portion of the photoelectrons from the scanning pixel area for analyzing the electron energies, compensating means associated with the analyzer means for compensating for the shift, and processing means (76) cooperative with the rastering means and the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface. The invention also refers to an instrument for analysis of an insulating specimen surface which comprises detector means (70) receptive of the photoelectrons for generating corresponding photoelectron signals, flood means for flooding the specimen surface with low energy electrons during periodic intervals so as to neutralize loss of photoelectrons from the specimen surface, and processing means receptive of the photoelectron signals and cooperative with the rastering means so as to effect an imaging of the specimen surface, wherein the photoelectron signals are omitted from the imaging during the periodic intervals.
摘要翻译：本发明涉及一种用于分析样品表面的仪器（10），其包括用于产生聚焦电子束的电子枪（16），具有阳极表面（22）的阳极，阳极表面设置成接收聚焦电子束，以产生来自阳极表面上的阳极点的X射线，用于将聚焦的电子束在阳极表面上扫描的雷射装置，从而在阳极表面上扫描阳极点，聚焦装置接收来自阳极表面的x射线的至少一部分扫描阳极点，用于将预定能量的x射线的能带作为x射线点聚焦在对应于样本表面（14）上扫描的像素区域上，使得光电子从扫描像素区域以电子能量在像素区域处的化学物质，其中所述X射线并且由此所述光电子在所述样品表面上具有自然能量偏移;分析器装置（54），其接收所述光电子的至少一部分用于分析电子能量的扫描像素区域的补偿装置，与用于补偿偏移的分析装置相关联的补偿装置，以及与扫描装置和分析装置协作的处理装置（76），用于生成代表电子能量的样本信息，从而使样品表面成为化学物质。本发明还涉及一种用于分析绝缘试样表面的仪器，其包括接收用于产生相应光电子信号的光电子的检测器装置（70），用于在周期性间隔期间以低能电子淹没试样表面的淹没装置，以便中和损失的光电子，以及接受光电子信号的处理装置，并且与rastering装置协调，以便对样本表面进行成像，其中在周期性间隔期间从成像中省略光电子信号。

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