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1. 发明公开

EP1170778A3 Scanning and high resolution electron spectroscopy and imaging 失效
标题翻译：扫描和高分辨率电子光谱和成像
公开(公告)号：EP1170778A3
公开(公告)日：2002-01-16
申请号：EP01120822.0
申请日：1995-02-02
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： H01J49/06 , H01J49/48 , G01N23/227
CPC分类号： G01N23/2273 , G01N23/227 , H01J37/256 , H01J37/285 , H01J49/48 , H01J2237/2522
摘要： An instrument (10) for analysis of a specimen surface (14) comprises an electron gun (16) for producing a focused electron beam (20), an anode (24) with an anode surface (22) disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface, rastering means (30) for rastering the focused electron beam over the anode surface, thereby scanning the anode spot over the anode surface, focusing means (34) receptive of at least a portion of the x-rays from the scanning anode spot for focusing an energy band of x-rays of predetermined energy as an x-ray spot on a pixel area scanning correspondingly over the specimen surface, such that photoelectrons are emitted from the scanning pixel area with electron energies characteristic of chemical species at the pixel area, wherein the x-rays and thereby the photoelectrons have a natural energy shift across the specimen surface, analyzer means (54) receptive of at least a portion of the photoelectrons from the scanning pixel area for analyzing the electron energies, compensating means associated with the analyzer means for compensating for the shift, and processing means cooperative with the rastering means and the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface. Also described is an instrument for analysis of an insulating specimen surface which comprises detector (88) means receptive of the photoelectrons for generating corresponding photoelectron signals, flood means (98) for flooding the specimen surface with low energy electrons during periodic intervals so as to neutralize loss of photoelectrons from the specimen surface, and processing means receptive of the photoelectron signals and cooperative with the rastering means so as to effect an imaging of the specimen surface, wherein the photoelectron signals are omitted from the imaging during the periodic intervals.
摘要翻译：一种用于分析样品表面（14）的仪器（10）包括用于产生聚焦电子束（20）的电子枪（16），具有阳极表面（22）的阳极（24），阳极表面（22）被设置为接收聚焦电子束以便从阳极表面上的阳极点产生X射线，光栅装置（30）用于在阳极表面上光栅聚焦的电子束，由此扫描阳极表面上的阳极点，聚焦装置（34）接收在来自扫描阳极点的X射线的至少一部分用于将具有预定能量的X射线的能量带聚焦为相应地在样本表面上扫描的像素区域上的X射线点，使得光电子从扫描像素区域，其具有在像素区域处的化学物质的电子能量特性，其中x射线和由此的光电子具有穿过样本表面的自然能量漂移;分析装置（54），其接收来自t的至少一部分光电子扫描用于分析电子能量的像素区域，与用于补偿偏移的分析器装置相关联的补偿装置，以及与光栅装置和分析器装置配合的处理装置，用于生成代表电子能量的样本信息，试样表面。还描述了一种用于分析绝缘样品表面的仪器，其包括接收光电子以产生相应光电子信号的检测器（88）装置，用于在周期性间隔期间用低能量电子淹没样品表面以便中和的散射装置（98）光电子从样品表面的损失以及处理装置接收光电子信号并与光栅装置配合以实现样品表面的成像，其中在周期性间隔期间光电子信号从成像中被省略。

2. 发明公开

EP0590308A3 Scanning and hig resoloution x-ray photo electron spectroscopy and imaging 失效
标题翻译：扫描和分辨率X射线照相电子光谱和成像
公开(公告)号：EP0590308A3
公开(公告)日：1995-12-13
申请号：EP93113582.6
申请日：1993-08-25
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： G01N23/227 , H01J49/08 , G21K1/06
CPC分类号： H01J49/48 , G01N23/227 , G01N23/2273 , H01J37/256 , H01J37/285 , H01J2237/2522
摘要： An instrument (10) for surface analysis includes an electron gun (16) for selectively focusing an electron beam on an anode spot (26), or rastering the beam across an array of such spots, to generate x-rays. A concave monochromator (34) focuses an energy peak of the x-rays to a specimen surface (14), in a spot on a selected pixel area or across an array of pixel areas on the surface to emit photoelectrons. An analyzer (54) with a detector (76) provides information on the photoelectrons and thereby chemical species in the surface. A second detector (88) of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface, for viewing of a specimen to be positioned, or for imaging an insulator surface. The monochromator is formed of platelets produced by cutting an array of platelets from a single crystal member, and bonding the platelets to a concave face of a base plate juxtaposed in crystalline alignment in a positioned array identical to that of the initial array.
摘要翻译：本发明涉及一种用于分析样品表面的仪器，其包括用于产生聚焦电子束的电子枪，具有阳极表面的阳极，阳极表面设置为接收聚焦的电子束，从而产生来自阳极点的X射线阳极表面，用于在阳极表面上对聚焦电子束进行扫描的雷击装置，从而在阳极表面上扫描阳极点，聚焦装置接收来自扫描阳极点的x射线的至少一部分，用于聚焦预定能量的X射线作为在样本表面上相应扫描的像素区域上的x射线点，使得光电子从扫描像素区域以像素区域的化学物质特征的电子能量发射，其中x射线因此光电子在样品表面上具有自然能量偏移，分析器装置从扫描像素接收至少一部分光电子用于分析电子能量的区域，与用于补偿偏移的分析装置相关联的补偿装置，以及与扫描装置协调的处理装置和用于产生代表电子能量的样本信息，从而产生样品表面的试样表面的化学物种的分析装置。本发明还涉及一种用于分析绝缘样品表面的仪器，其包括接收用于产生相应光电子信号的光电子的检测器装置，用于在周期性间隔期间用低能电子淹没样品表面的淹没装置，以便中和光电子的损失样品表面和接收光电子信号的处理装置，并且与rastering装置协调，以便实现样品表面的成像，其中在周期性间隔期间从成像中省略光电子信号。

3. 发明授权

EP0669635B1 Scanning imaging high resolution electron spectroscopy 失效
标题翻译：高分辨率扫描电子能谱成像
公开(公告)号：EP0669635B1
公开(公告)日：2002-05-15
申请号：EP95101428.1
申请日：1995-02-02
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： H01J37/256 , G01N23/227 , H01J49/06 , H01J49/48
CPC分类号： G01N23/2273 , G01N23/227 , H01J37/256 , H01J37/285 , H01J49/48 , H01J2237/2522

4. 发明授权

EP0590308B1 Scanning and high resoloution x-ray photo electron spectroscopy and imaging 失效
标题翻译：高分辨率扫描型X射线光电子分光法进行成像
公开(公告)号：EP0590308B1
公开(公告)日：2002-03-20
申请号：EP93113582.6
申请日：1993-08-25
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： G01N23/227 , H01J49/08 , G21K1/06
CPC分类号： H01J49/48 , G01N23/227 , G01N23/2273 , H01J37/256 , H01J37/285 , H01J2237/2522

5. 发明公开

EP1220280A2 Scanning and high resolution x-ray photoelectron spectroscopy and imaging 失效
标题翻译： HochauflösendeRasterröntgenphotoelektronenspektroskopie
公开(公告)号：EP1220280A2
公开(公告)日：2002-07-03
申请号：EP01120818.8
申请日：1993-08-25
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E., Physical Electronics, Inc. , Palmberg, Paul W.
IPC分类号： H01J37/256 , G01N23/227
CPC分类号： H01J49/48 , G01N23/227 , G01N23/2273 , H01J37/256 , H01J37/285 , H01J2237/2522
摘要： The invention refers to an instrument for analysis of a specimen surface which comprises an electron gun for producing a focused electron beam, an anode with an anode surface disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface, rastering means for rastering the focused electron beam over the anode surface, thereby scanning the anode spot over the anode surface, focusing means receptive of at least a portion of the x-rays from the scanning anode spot for focusing an energy band of x-rays of predetermined energy as an x-ray spot on a pixel area scanning correspondingly over the specimen surface, such that photoelectrons are emitted from the scanning pixel area with electron energies characteristic of chemical species at the pixel area, wherein the x-rays and thereby the photoelectrons have a natural energy shift across the specimen surface, analyzer means receptive of at least a portion of the photoelectrons from the scanning pixel area for analyzing the electron energies, compensating means associated with the analyzer means for compensating for the shift, and processing means cooperative with the rastering means and the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface. The invention also refers to an instrument for analysis of an insulating specimen surface which comprises detector means receptive of the photoelectrons for generating corresponding photoelectron signals, flood means for flooding the specimen surface with low energy electrons during periodic intervals so as to neutralize loss of photoelectrons from the specimen surface, and processing means receptive of the photoelectron signals and cooperative with the rastering means so as to effect an imaging of the specimen surface, wherein the photoelectron signals are omitted from the imaging during the periodic intervals.
摘要翻译：本发明涉及一种用于分析样品表面的仪器，其包括用于产生聚焦电子束的电子枪，具有阳极表面的阳极，阳极表面设置为接收聚焦的电子束，从而产生来自阳极点的X射线阳极表面，用于在阳极表面上对聚焦电子束进行扫描的雷击装置，从而在阳极表面上扫描阳极点，聚焦装置接收来自扫描阳极点的x射线的至少一部分，用于聚焦预定能量的X射线作为在样本表面上相应扫描的像素区域上的x射线点，使得光电子从扫描像素区域以像素区域的化学物质特征的电子能量发射，其中x射线因此光电子在样品表面上具有自然能量偏移，分析器装置从扫描像素接收至少一部分光电子用于分析电子能量的区域，与用于补偿偏移的分析装置相关联的补偿装置，以及与扫描装置协调的处理装置和用于产生代表电子能量的样本信息，从而产生样品表面的试样表面的化学物种的分析装置。本发明还涉及一种用于分析绝缘样品表面的仪器，其包括接收用于产生相应光电子信号的光电子的检测器装置，用于在周期性间隔期间用低能电子淹没样品表面的淹没装置，以便中和光电子的损失样品表面和接收光电子信号的处理装置，并且与rastering装置协调，以便实现样品表面的成像，其中在周期性间隔期间从成像中省略光电子信号。

6. 发明公开

EP1170778A2 Scanning and high resolution electron spectroscopy and imaging 失效
标题翻译：扫描和高分辨率电子光谱和成像
公开(公告)号：EP1170778A2
公开(公告)日：2002-01-09
申请号：EP01120822.0
申请日：1995-02-02
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： H01J49/06 , H01J49/48 , G01N23/227
CPC分类号： G01N23/2273 , G01N23/227 , H01J37/256 , H01J37/285 , H01J49/48 , H01J2237/2522
摘要： An instrument (10) for analysis of a specimen surface (14) comprises an electron gun (16) for producing a focused electron beam (20), an anode (24) with an anode surface (22) disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface, rastering means (36) for rastering the focused electron beam over the anode surface, thereby scanning the anode spot over the anode surface, focusing means (34) receptive of at least a portion of the x-rays from the scanning anode spot for focusing an energy band of x-rays of predetermined energy as an x-ray spot on a pixel area scanning correspondingly over the specimen surface, such that photoelectrons are emitted from the scanning pixel area with electron energies characteristic of chemical species at the pixel area, wherein the x-rays and thereby the photoelectrons have a natural energy shift across the specimen surface, analyzer means (54) receptive of at least a portion of the photoelectrons from the scanning pixel area for analyzing the electron energies, compensating means associated with the analyzer means for compensating for the shift, and processing means cooperative with the rastering means and the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface. Also described is an instrument for analysis of an insulating specimen surface which comprises detector (88) means receptive of the photoelectrons for generating corresponding photoelectron signals, flood means (98) for flooding the specimen surface with low energy electrons during periodic intervals so as to neutralize loss of photoelectrons from the specimen surface, and processing means receptive of the photoelectron signals and cooperative with the rastering means so as to effect an imaging of the specimen surface, wherein the photoelectron signals are omitted from the imaging during the periodic intervals.
摘要翻译：一种用于分析样品表面（14）的仪器（10）包括用于产生聚焦电子束（20）的电子枪（16），具有阳极表面（22）的阳极（24），阳极表面（22）被设置为接收聚焦电子束以便从阳极表面上的阳极点产生X射线，光栅装置（36），用于在阳极表面上光栅聚焦的电子束，由此扫描阳极表面上的阳极点，聚焦装置（34）接收在来自扫描阳极点的X射线的至少一部分用于将具有预定能量的X射线的能量带聚焦为相应地在样本表面上扫描的像素区域上的X射线点，使得光电子从扫描像素区域，其具有在像素区域处的化学物质的电子能量特性，其中x射线和由此的光电子具有穿过样本表面的自然能量漂移;分析装置（54），其接收来自t的至少一部分光电子扫描用于分析电子能量的像素区域，与用于补偿偏移的分析器装置相关联的补偿装置，以及与光栅装置和分析器装置配合的处理装置，用于生成代表电子能量的样本信息，试样表面。还描述了一种用于分析绝缘样品表面的仪器，其包括接收光电子以产生相应光电子信号的检测器（88）装置，用于在周期性间隔期间用低能量电子淹没样品表面以便中和的散射装置（98）光电子从样品表面的损失以及处理装置接收光电子信号并与光栅装置配合以实现样品表面的成像，其中在周期性间隔期间光电子信号从成像中被省略。

7. 发明公开

EP0590308A2 Scanning and hig resoloution x-ray photo electron spectroscopy and imaging 失效
标题翻译： HochauflösendeRasterröntgenphotoelektronenspektroskopiezur Bilderzeugung。
公开(公告)号：EP0590308A2
公开(公告)日：1994-04-06
申请号：EP93113582.6
申请日：1993-08-25
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： G01N23/227 , H01J49/08 , G21K1/06
CPC分类号： H01J49/48 , G01N23/227 , G01N23/2273 , H01J37/256 , H01J37/285 , H01J2237/2522
摘要： An instrument (10) for surface analysis includes an electron gun (16) for selectively focusing an electron beam on an anode spot (26), or rastering the beam across an array of such spots, to generate x-rays. A concave monochromator (34) focuses an energy peak of the x-rays to a specimen surface (14), in a spot on a selected pixel area or across an array of pixel areas on the surface to emit photoelectrons. An analyzer (54) with a detector (76) provides information on the photoelectrons and thereby chemical species in the surface. A second detector (88) of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface, for viewing of a specimen to be positioned, or for imaging an insulator surface. The monochromator is formed of platelets produced by cutting an array of platelets from a single crystal member, and bonding the platelets to a concave face of a base plate juxtaposed in crystalline alignment in a positioned array identical to that of the initial array.
摘要翻译：用于表面分析的仪器包括用于选择性地将电子束聚焦在阳极点上的枪，或者将光束穿过这样的点的阵列，以产生x射线。凹形单色仪将X射线的能量峰值聚焦到样品表面，在选定的像素区域上或者表面上的像素区域阵列上的点中以发射光电子。具有检测器的分析仪提供关于光电子的信息，从而提供表面上的化学物质的信息。低能量光电子的第二检测器与扫描相协调以产生表面的扫描光电子图像，用于观察待定位的样品或用于对绝缘体表面进行成像。单色仪由通过从单晶构件切割血小板阵列而产生的血小板形成，并且将血小板结合到以与初始阵列相同的定位阵列中以结晶对准并列的基板的凹面。

8. 发明公开

EP0669635A3 Scanning imaging high resolution electron spectroscopy 失效
标题翻译： Ho。。。。。。。。。。。。。。
公开(公告)号：EP0669635A3
公开(公告)日：1995-12-06
申请号：EP95101428.1
申请日：1995-02-02
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： H01J37/256 , G01N23/227 , H01J49/06 , H01J49/48
CPC分类号： G01N23/2273 , G01N23/227 , H01J37/256 , H01J37/285 , H01J49/48 , H01J2237/2522
摘要： An instrument for surface analysis includes rastering an electron beam across an anode to generate x-rays. A concave Bragg monochromator focuses an energy peak of the x-rays to a specimen surface, the x-rays rastering the surface to emit photoelectrons. An analyzer provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface for imaging of the specimen. Alternatively a lens formed of two concave grids transits the photoelectrons to the analyzer with selectively modified energy so that the analyzer detects either higher energy electrons characteristic of chemical species or lower electrons for the image. The monochromator is formed of platelets cut from an array of platelets in a single crystal member. For imaging of insulating specimens, the surface is flooded periodically with electrons, and the signals are omitted from the image during the flooding. For chemometric information summed over the surface of insulators, data from the edges is omitted from the summing.
摘要翻译：用于分析样品表面（14）的仪器（10）包括用于产生聚焦电子束（20）的电子枪（16），具有阳极表面（22）的阳极（24），用于接收聚焦电子束从而从阳极表面上的阳极点产生X射线，用于在阳极表面上扫描聚焦电子束的扫描装置（30），从而在阳极表面上扫描阳极点，聚焦装置（34）可接受将来自扫描阳极点的X射线的至少一部分用于将预定能量的x射线的能带作为X射线光点聚焦在对应于样品表面的扫描像素区域上，使得光电子从扫描像素区域，其具有像素区域处的化学物质特征的电子能量，其中所述x射线并且由此所述光电子在所述样本表面上具有自然能量偏移;分析器装置（54），接收来自t的所述光电子的至少一部分扫描像素区域用于分析电子能量，与用于补偿偏移的分析器装置相关联的补偿装置，以及与扫描装置和分析装置协作的处理装置，用于产生代表电子能量的样本信息，从而产生代表电子能量的化学物质试样表面。还描述了一种用于分析绝缘样品表面的仪器，其包括检测器（88）接收用于产生相应光电子信号的光电子的装置，用于在周期性间隔期间用低能电子淹没样品表面的淹没装置（98），以便中和从样品表面损失光电子，以及接受光电子信号的处理装置，并且与扫描装置配合，以便实现样品表面的成像，其中在周期性间隔期间，从成像中省略光电子信号。

9. 发明公开

EP0669635A2 Scanning imaging high resolution electron spectroscopy 失效
标题翻译：扫描成像高分辨电子光谱
公开(公告)号：EP0669635A2
公开(公告)日：1995-08-30
申请号：EP95101428.1
申请日：1995-02-02
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： H01J37/256 , G01N23/227 , H01J49/06 , H01J49/48
CPC分类号： G01N23/2273 , G01N23/227 , H01J37/256 , H01J37/285 , H01J49/48 , H01J2237/2522
摘要： An instrument for surface analysis includes rastering an electron beam across an anode to generate x-rays. A concave Bragg monochromator focuses an energy peak of the x-rays to a specimen surface, the x-rays rastering the surface to emit photoelectrons. An analyzer provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface for imaging of the specimen. Alternatively a lens formed of two concave grids transits the photoelectrons to the analyzer with selectively modified energy so that the analyzer detects either higher energy electrons characteristic of chemical species or lower electrons for the image. The monochromator is formed of platelets cut from an array of platelets in a single crystal member. For imaging of insulating specimens, the surface is flooded periodically with electrons, and the signals are omitted from the image during the flooding. For chemometric information summed over the surface of insulators, data from the edges is omitted from the summing.
摘要翻译：用于表面分析的仪器包括通过阳极扫描电子束以产生X射线。凹面布拉格单色仪将X射线的能量峰值聚焦到样品表面，X射线光栅表面发射光电子。分析仪提供有关光电子的信息，从而提供有关表面的化学物质的信息。低能量光电子的第二检测器与光栅配合以产生用于成像样品的表面的扫描光电子图像。或者，由两个凹面栅格形成的透镜以选择性修改的能量将光电子传输至分析仪，使得分析仪检测化学物质的较高能量电子特征或图像的较低电子特征。单色仪由在单晶构件中从一排血小板切下的血小板形成。对于绝缘样品的成像，表面周期性地被电子淹没，并且在淹没期间图像中的信号被省略。对于在绝缘子表面上求和的化学计量学信息，来自边缘的数据从求和中省略。

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