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1. 发明公开

EP2250480A1 SPM IMAGING APPARATUS, PROBE AND METHOD 有权
标题翻译： SPM测量装置，探头及测量方法
公开(公告)号：EP2250480A1
公开(公告)日：2010-11-17
申请号：EP09719209.0
申请日：2009-03-12
申请人： Orbital Instruments Limited
发明人： FINLAN, Martin F , WILKINS, Shelley
IPC分类号： G01N13/16 , G12B21/08
CPC分类号： G01Q60/38 , G01Q60/34 , G01Q70/10 , G01Q70/14
摘要： An elongate probe (50) for use in probe microscopy comprises a module (51) provided between a probe tip (53) and a driver (52). In use the driver (52) applies oscillations to the module (51) which are transmitted by the module to the tip (53). With the probe tip (53) positioned close to the surface of a sample, any phase variance in the oscillation of the tip with respect to the driving oscillation is representative of an interaction between the tip and the sample surface. The elongate arrangement of the probe (50) is particularly beneficial when used to probe samples which require a liquid environment.

2. 发明公开

EP2187197A1 CANTILEVER EVALUATION SYSTEM, CANTILEVER EVALUATION METHOD, AND CANTILEVER EVALUATION PROGRAM 审中-公开
标题翻译：系统的评价支撑臂，方法进行评估和项目评估一个支撑臂的支撑臂
公开(公告)号：EP2187197A1
公开(公告)日：2010-05-19
申请号：EP08842062.5
申请日：2008-10-22
申请人： Mizuho Information & Research Institute Inc. , Waseda University
发明人： WATANABE, Naoki , TSUKADA, Masaru
IPC分类号： G01N13/16 , G01N13/10
CPC分类号： G01Q30/12 , G01Q30/04
摘要： A controller (21) of a cantilever evaluation system (20) calculates a stream function value ψx(x, y; t + 1) and vorticity ωz(x, y; t + 1) at a subsequent time step t + 1 using boundary conditions according to displacement h(z; t) of a cantilever (C) and velocity ∂h/∂t(z; t), a stream function value ψz(x, y; t) and vorticity ωz(x, y; t) in two-dimensional planes (S2-3). The controller (21) uses the calculated stream function value ψz(x, y) and vorticity ωz(x, y) to calculate a fluid drag force (Fliq) acting on the cantilever (C) (S2-6). The controller (21) substitutes the calculated fluid drag force (Fliq) into a displacement calculation equation (6) to calculate the displacement h(z; t + 1) of the one-dimensional beam at the subsequent time step t + 1 (S3-2). The controller (21) repeats such calculation for each grid point and further repeats it at each time step.
摘要翻译：悬臂评估系统（20）的控制器（21）计算一个流函数值EX（X，Y; T + 1）和涡度EZ;在利用边界随后的时间步长t + 1（X，Y T + 1）条件根据位移h（Z; T）的悬臂（C）和速度，H /，T（Z; t）的，流函数值EZ（X，Y; t）和涡度EZ（X，Y ）吨在两维平面（S2-3）。该控制器（21）使用计算出的流函数值EZ（X，Y）和涡度的Ez（X，Y）来计算作用于悬臂的流体阻力（Fliq）（C）（S2-6）。该控制器（21）代入计算流体阻力（Fliq）转换成位移计算等式（6）来计算位移h;一维光束的（Z T + 1）在随后的时间步长t + 1（S3 -2）。该控制器（21），重复为每个网格点并且进一步重复它在每个时间步搜索计算。

3. 发明公开

EP2183569A2 FAST-SCANNING SPM AND METHOD OF OPERATING SAME 有权转让
标题翻译： SCHNELL ABTASTENDES SPM UND BETREBSVERFAHRENDAFÜR
公开(公告)号：EP2183569A2
公开(公告)日：2010-05-12
申请号：EP08797114.9
申请日：2008-08-04
申请人： Veeco Instruments Inc.
发明人： PRATER, Craig , SU, Chanmin , PHAN, Nghi , MARKAKIS, Jeffrey , CUSWORTH, Craig , SHI, Jian , KINDT, Johannes , NAGLE, Steven , FAN, Wenjun
IPC分类号： G01N13/16 , G01N13/10
CPC分类号： G01Q10/04 , G01Q10/065 , G01Q20/02 , G01Q60/38
摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe (215) of the SPM and a sample (112) to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.
摘要翻译：提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少4微米的扫描范围以至少30行/秒的速率扫描探针，并且控制探针 - 样品与力控制回转的相互作用速率至少为1毫米/秒。能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

4. 发明公开

EP2064534A2 BAND EXCITATION METHOD APPLICABLE TO SCANNING PROBE MICROSCOPY 有权转让
标题翻译：兰德龙根（Rastersondenmikroskopie mit Banderregung）
公开(公告)号：EP2064534A2
公开(公告)日：2009-06-03
申请号：EP07811668.8
申请日：2007-09-04
申请人： UT-Battelle, LLC
发明人： JESSE, Stephen , KALININ, Sergei V.
IPC分类号： G01N13/16
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/06 , G01Q30/04 , G01Q60/32
摘要： Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel or spectroscopy step to accommodate changes in sample properties (adaptive band excitation). An apparatus includes a band excitation signal generator; a probe coupled to the band excitation signal generator; a detector coupled to the probe; and a relevant dynamic parameter extractor component coupled to the detector, the relevant dynamic parameter extractor including a processor that performs a mathematical transform selected from the group consisting of an integral transform and a discrete transform.
摘要翻译：描述扫描探针显微镜的方法和装置。一种方法包括在至少第一预定义频带中产生具有有限和预定义的幅度和相位频谱的频带激励（BE）信号; 使用频带激发信号激发探头; 通过在至少第二预定频带中测量所述探针的响应来获得数据; 以及在预定范围内提取所述探测器的响应的至少一个相关动态参数，包括分析所获得的数据。可以在成像（静态带激发）之前合成BE信号，或者在每个像素或光谱步骤调整以适应样品性质（自适应带激发）的变化。一种装置包括：带激发信号发生器; 耦合到频带激励信号发生器的探针; 耦合到探针的检测器; 以及耦合到所述检测器的相关动态参数提取器组件，所述相关动态参数提取器包括执行从由积分变换和离散变换组成的组中选择的数学变换的处理器。

5. 发明公开

EP1994395A1 VERFAHREN ZUR ERMITTLUNG EINER DOTIERUNGSDICHTE IN EINER HALBLEITERPROBE 有权
标题翻译：掺杂浓度在半导体样品计算
公开(公告)号：EP1994395A1
公开(公告)日：2008-11-26
申请号：EP07711715.8
申请日：2007-02-28
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： ARNOLD, Walter , SCHWARZ, Kerstin , RABE, Ute
IPC分类号： G01N13/16 , G12B21/08
CPC分类号： G01Q60/30 , G01Q60/32 , G01Q60/40
摘要： The invention relates to a method for determining a dopant concentration on a surface and/or in a layer region lying close to the surface of a semiconductor sample, using an atomic force microscope, whose leaf-spring tip is brought into contact with the semiconductor sample, forming a Schottky barrier. According to the invention, an electric alternating potential is applied between the spring-leaf tip and the semiconductor sample in the region of the Schottky barrier in such a way that a space charge region inside the semiconductor sample defining the three-dimensional extension of the Schottky barrier is excited and begins to oscillate within the confines of its three-dimensional extension. Said oscillations are transmitted to the leaf-spring, are detected and form the basis for determining the dopant concentration.

6. 发明公开

EP1985991A1 MEASURING PROBE, SAMPLE SURFACE MEASURING APPARATUS AND SAMPLE SURFACE MEASURING METHOD 有权
标题翻译： MESSSONDE，VORRICHTUNG UND VERFAHREN ZUROBERFLÄCHENMESSUNGEINER PROBE
公开(公告)号：EP1985991A1
公开(公告)日：2008-10-29
申请号：EP07714179.4
申请日：2007-02-14
申请人： Japan Science and Technology Agency
发明人： FUKUZAWA, Kenji , SHIKITA, Mitsuhiro , TERADA, Satoshi
IPC分类号： G01N13/16
CPC分类号： G01Q60/38 , G01Q20/02 , G01Q60/26
摘要： A measurement probe 1 for measuring a surface of sample S comprises a base section 10, a head section 30 having a probe tip 31, and a support structure section 15 which supports the head section 30 with the base section 10 along a support axis substantially orthogonal to the vertical axis in the direction of protrusion of the probe tip 31. The support structure section 15 includes two spring structure sections of a first spring structure section 20 deformable in the direction of the vertical axis; and a second spring structure section 25 deformable in the direction of the lateral axis, and a reflection surface 32 which is formed with a reflection pattern varying the reflectance within the surface is provided at the side opposite to the probe tip 31 of the head section 30. By using this structure, there are obtained the measurement probe, the sample surface measuring apparatus, and the sample surface measuring method, which can improve the accuracy of measurement of the sample surface without using a special measuring system.
摘要翻译：用于测量样品S的表面的测量探针1包括基部10，具有探针尖端31的头部30和支撑结构部分15，该支撑结构部分15沿着支撑轴基本正交地支撑具有基部10的头部30 相对于探针尖端31的突出方向的垂直轴线。支撑结构部分15包括可在垂直轴线方向上变形的第一弹簧结构部分20的两个弹簧结构部分。以及沿横轴的方向可变形的第二弹簧结构部分25，并且在与头部30的探针头部31相对的一侧设置反射面32，该反射面32形成有改变表面内的反射率的反射图案通过使用这种结构，可以获得测量探针，样品表面测量装置和样品表面测量方法，其可以在不使用特殊测量系统的情况下提高样品表面的测量精度。

7. 发明公开

EP1963816A1 OPTICAL DEVICE COMPRISING A CANTILEVER AND METHOD OF FABRICATION AND USE THEREOF 失效转让
标题翻译：电光装置，弯梁含，他们的制造工艺和应用
公开(公告)号：EP1963816A1
公开(公告)日：2008-09-03
申请号：EP05817433.5
申请日：2005-11-28
申请人： Vereniging voor Christelijk Hoger Onderwijs, Wetenschappelijk Onderzoek en Patiëntenzorg , UNIVERSITEIT TWENTE
发明人： IANNUZZI, Davide , DELADI, Szablocs , ELWENSPOEK, Michael, Curt
IPC分类号： G01N13/16
CPC分类号： G01Q20/02 , G01Q60/38
摘要： The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: - arranging measurement means, comprising a light source, on an opposite end of the optical fiber; - using the light source to send a beam of light into the optical fiber; - measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.

8. 发明公开

EP1952120A1 MIKROSKOP, INSBESONDERE RASTERSONDEN-MIKROSKOP MIT EINER PROGRAMMIERBAREN LOGIK 有权
标题翻译： MIKROSKOP，INSBESONDERE RASTERSONDEN-MIKROSKOP MIT EINER PROGRAMMIBAREN LOGIK
公开(公告)号：EP1952120A1
公开(公告)日：2008-08-06
申请号：EP06818273.2
申请日：2006-10-23
申请人： WITec Wissenschaftliche Instrumente und Technologie GmbH
发明人： KOENEN, Joachim , VOLSWINKLER, Gerhard , SPIZIG, Peter
IPC分类号： G01N13/16 , G12B21/20
CPC分类号： G01Q10/06 , G01Q30/04
摘要： The invention relates to a microscope, in particular to a scanning probe microscope provided with at least one peripheral electric component and comprising a programmable logic to which said peripheral electric component is connected without inserting a data bus.
摘要翻译：本发明涉及一种显微镜，特别涉及一种具有至少一个外围电气部件的扫描探针显微镜，其包括可连接所述外围电气部件的可编程逻辑，而不插入数据总线。

9. 发明公开

EP1804050A3 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever 审中-公开
标题翻译：用于装置的制造悬臂组件过程中，采用的布置和托架的控制和旋转机构，传感器，零差激光干涉仪和激光多普勒Interferomenter与样本光激励功能的扫描探针显微镜滑动装置
公开(公告)号：EP1804050A3
公开(公告)日：2007-11-21
申请号：EP07002543.2
申请日：2002-06-12
申请人： Japan Science and Technology Agency
发明人： Kawakatsu, Hideki
IPC分类号： G01N13/16 , G12B21/08 , G12B21/02 , G12B21/22 , G01H9/00
CPC分类号： G01B9/02045 , G01B9/02002 , G01H9/004 , G01Q20/02 , G01Q70/06 , G01Q70/12
摘要： There are provided a cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers.
The cantilever array includes a large number of compliant cantilevers (3) sliding on a surface (2) of a sample (1).
摘要翻译：悬臂阵列包括大量的符合悬臂（3）的表面上滑动的（2）试样的（1）试样的滑动引导和旋转机构，传感器，零差激光干涉仪和激光多普勒干涉仪装置光激发函数。

10. 发明公开

EP1845361A1 SURFACE POSITION MEASURING METHOD AND SURFACE POSITION MEASURING DEVICE 审中-公开
标题翻译： OBERFLÄCHENPOSITIONSMESSVERFAHRENUND -VORRICHTUNG
公开(公告)号：EP1845361A1
公开(公告)日：2007-10-17
申请号：EP05819516.5
申请日：2005-12-22
申请人： National University Corporation Hokkaido University
发明人： OKAJIMA, Takaharu , TANAKA, Masaru , TOKUMOTO, Hiroshi
IPC分类号： G01N13/16 , G01B21/30
CPC分类号： G01Q30/04 , G01Q60/32
摘要： A surface position measuring method capable of measuring a position on a soft surface accurately and rapidly (real time), with low invasiveness. The method comprises the steps of measuring the spectrum of thermal oscillation of a cantilever with the distance between a cantilever tip and a sample surface being changed, extracting a fundamental mode component (spectrum area) from the obtained spectrum of thermal oscillation, and measuring a change in the spectrum area of thermal oscillation (spectrum area) with respect to the distance. A position at which the area of the cantilever thermal oscillation spectrum begins to change is evaluated as a position on the sample surface.
摘要翻译：一种表面位置测量方法，能够精确，快速（实时）测量软表面上的位置，具有低侵入性。该方法包括以下步骤：测量悬臂的热振荡频谱，其中悬臂尖和样品表面之间的距离被改变，从所获得的热振荡谱提取基模分量（谱面积），并测量变化在频率范围内的热振荡（频谱面积）相对于距离。将悬臂热振动光谱的面积开始变化的位置作为样品表面的位置进行评价。

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