会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明公开
    • ELECTRON MICROSCOPE
    • ELEKTRONENMIKROSKOP
    • EP2511937A1
    • 2012-10-17
    • EP10835635.3
    • 2010-10-25
    • Hitachi High-Technologies Corporation
    • KAJI, Kazutoshi
    • H01J37/244G01N23/225H01J37/22H01J37/24H01J37/28
    • H01J37/244G01N23/04G01N2223/102G01N2223/3037H01J37/26H01J2237/24415H01J2237/24485H01J2237/24495H01J2237/28
    • An object of the present invention relates to measurement of a quantitative element image with a high S/N ratio and measurement of an electron energy loss spectrum with high energy precision and energy resolution. The present invention relates to measurement of a characteristic X-ray spectrum obtained by correcting dead time due to excessive X rays and measurement of an electron energy loss spectrum obtained by correcting energy based on a zero loss peak in the case where the characteristic X-ray spectrum and the electron energy loss spectrum are measured by irradiating one irradiation position on a sample with an electron beam for a predetermined time while scanning the surface of the sample to observe a Z-contrast image. According to the present invention, it becomes possible to measure a quantitative element image with a high S/N ratio by a characteristic X ray, an element image with a high S/N ratio by an electron energy loss spectrum and a high energy resolution spectrum.
    • 本发明的目的是测量具有高S / N比的定量元素图像,并以高能量精度和能量分辨率测量电子能量损失谱。 本发明涉及通过校正由于过量的X射线引起的死区时间而获得的特征X射线光谱的测量,以及在特征X射线的情况下基于零损耗峰值校正能量而获得的电子能量损失谱的测量 光谱和电子能量损失谱是通过在扫描样品的表面以观察Z对比度图像的同时用电子束照射一个照射位置一定时间来测量的。 根据本发明,可以通过特征X射线,通过电子能量损失谱和高能量分辨光谱具有高S / N比的元素图像来测量具有高S / N比的定量元素图像 。