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    • 8. 发明公开
    • Process for the production of porous thin films
    • 生产多孔薄膜的方法
    • EP3029175A1
    • 2016-06-08
    • EP14196567.3
    • 2014-12-05
    • BASF SE
    • Ruettinger, WolfgangWagloehner, SteffenLoeffler, DanielAhlf, Maraike
    • C23C16/455H01L21/02C23C16/30C23C16/56H01L21/768
    • H01L21/02203C23C16/401C23C16/45527C23C16/45529C23C16/45534C23C16/45553C23C16/56H01L21/02126H01L21/02219H01L21/0228H01L21/7682H01L2221/1047
    • The present invention relates to the production of porous thin films, in particular by atomic layer deposition. The present invention relates to a process for producing porous films comprising the steps
      (a) exposing a solid substrate to a vapor containing an organic compound (A), whereby a submonolayer of the organic compound (A) covalently bound to the surface of the solid substrate is formed,
      (b) exposing the solid substrate to a vapor containing a compound of general formula (I) SiX 4 (I),
      wherein X is hydrogen, a halogen, an alkoxy, an aryloxy, or an amine group,
      (c) exposing the solid substrate to a vapor containing an organic compound (B) which has at least two functional groups out of which at least one can form a covalent bond with the surface-bound organic compound (A),
      (d) performing the steps
      (d1) exposing the solid substrate to a vapor containing water, and
      (d2) exposing the solid substrate to a vapor containing a compound of general formula (I), (e) exposing the solid substrate to a vapor containing an organic compound (C) which has at least two functional groups out of which at least one can form a covalent bond to the surface-bound organic compound (B),

      (f) removing organic parts from the film formed on the surface of the solid substrate.
    • 本发明涉及多孔薄膜的生产,特别是原子层沉积。 本发明涉及一种制造多孔膜的方法,该方法包括以下步骤:(a)将固体基材暴露于含有有机化合物(A)的蒸气中,由此使有机化合物(A)的亚单分子层共价结合到固体表面 (b)将固体基质暴露于含有其中X是氢,卤素,烷氧基,芳氧基或胺基的通式(I)SiX4(I)的化合物的蒸气,(c) 将固体基材暴露于含有具有至少两个官能团的有机化合物(B)的蒸气,其中至少一个官能团可与表面结合的有机化合物(A)形成共价键,(d)执行步骤( (d2)将固体基质暴露于含有通式(I)化合物的蒸气中,(e)将固体基质暴露于含有机化合物(C)的蒸气中, 其中至少有两个功能组 可以与表面结合的有机化合物(B)形成共价键,(f)从形成在固体基质表面上的膜中除去有机部分。