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1. 发明授权

EP0939969B1 SCANNING ELECTRON MICROSCOPE 失效
标题翻译： RASTERELEKTRONENMIKROSKOP
公开(公告)号：EP0939969B1
公开(公告)日：2010-01-13
申请号：EP97912354.4
申请日：1997-11-14
申请人： Carl Zeiss SMT Limited
发明人： SUDRAUD, Pierre, Résidence de l'Arche , CORBIN, Antoine, Résidence de l'Arche , SAILER, Rainer , BATE, David, John
IPC分类号： H01J37/00
CPC分类号： H01J37/28 , H01J2237/04735 , H01J2237/188 , H01J2237/2003 , H01J2237/24445 , H01J2237/2445 , H01J2237/2608
摘要： A scanning electron microscope has means (1, 3) for generating a beam of electrons which is scanned over a specimen (11) held within a holder (12) in a chamber (5) which contains a gaseous medium. A negative potential is applied to the holder (12) so as to generate an electric field which accelerates secondary electrons, formed by the interaction of the primary beam with the specimen (11), in a direction away from the specimen surface and into a collision zone (21) in the chamber. In that zone, the accelerated secondary electrons collide with gas molecules of the gaseous medium, thereby initiating a cascade of collisions which, in effect, amplifies the secondary electron signal. That signal (which may take the form of photons generated as a result of the collisions) is detected by detecting means (10, 7), such as a photo-multiplier.

2. 发明公开

EP2061067A3 Beam device and system comprising a particle beam device and an optical microscope 审中-公开
标题翻译：辐射装置和方法用粒子束装置和光学显微镜
公开(公告)号：EP2061067A3
公开(公告)日：2010-04-07
申请号：EP07120619.7
申请日：2007-11-13
申请人： Carl Zeiss SMT Limited
发明人： Spruck, Bernd , Edelmann, Martin, Dr. , Craven, John, Dr. , Taylor, Robert , Kühner, Martin, Dr.
IPC分类号： H01J37/20 , H01J37/18 , H01J37/22 , H01J37/26 , G02B21/00
CPC分类号： H01J37/20 , G02B21/0004 , H01J37/18 , H01J37/228 , H01J37/26 , H01J2237/2003 , H01J2237/2006 , H01J2237/204 , H01J2237/2608
摘要： The invention refers to a beam device (1), in particular a particle beam device, for analyzing an object (12), as well as a system comprising a particle beam device and an optical microscope for optically analyzing an object. It is an object of the invention to provide a beam device (1) comprising a means to simplify the exchange and to reduce the time of the exchange of objects to be examined. According to the invention a beam device (1) is provided comprising at least one beam generator (2) that generates a beam, at least one objective lens (6) that focuses the beam on an object (12) arranged in a holding element (25), wherein the objective lens (6) comprises at least one connecting element (26), the holding element (25) is connected to the connecting element (26) so that the holding element (25) is removable from the connecting element (26) for modification of the object (12). Alternatively, the holding element is mounted to a beam column.

3. 发明公开

EP1903594A3 Charged particle beam instrument and method of detecting charged particles 审中-公开
标题翻译： Teilchenstrahlinstrument和方法，用于检测带电粒子的
公开(公告)号：EP1903594A3
公开(公告)日：2010-03-31
申请号：EP07253731.9
申请日：2007-09-20
申请人： Carl Zeiss SMT Limited
发明人： Hayn, Armin Heinz
IPC分类号： H01J37/244
CPC分类号： H01J37/244 , H01J2237/2444 , H01J2237/2448 , H01J2237/2449
摘要： A charged particle beam instrument (10) is provided, the instrument comprising a charged particle optical column (12), a voltage source, a detector (14) and a sample holder (18), the column (12) being operable to direct a beam of primary charged particles at a sample (20) on the sample holder (18) to cause secondary charged particles to be released from the sample, the voltage source being operable to establish in the vicinity of the sample an electric field that has a component that draws the secondary charged particles towards the detector (14), and the detector being operable to detect secondary charged particles, wherein the instrument further comprises a further voltage source (16) variable between a first voltage that establishes a component of the electric field that draws the secondary charged particles away from the sample, so as to prevent at least some of them from colliding with the sample (20) or sample holder (18), and a second voltage that establishes a component of the electric field that draws the secondary charged particles towards the sample, so as to prevent at least some of them from colliding with the column (12), thereby increasing the number of secondary charged particles detected by the detector (14).

4. 发明授权

EP1510002B1 TRANSRESISTANCE AMPLIFIER FOR A CHARGED PARTICLE DETECTOR 有权
标题翻译：用于带电粒子探测器的转换放大器
公开(公告)号：EP1510002B1
公开(公告)日：2010-08-11
申请号：EP03727668.0
申请日：2003-05-15
申请人： Carl Zeiss SMT Limited
发明人： ARMIT, Andrew Philip The Maltings
IPC分类号： H03F3/08
CPC分类号： H01J37/244 , H01J2237/2448 , H03F3/087 , H03F3/45475 , H03F2200/261 , H03F2203/45138 , H03F2203/45512 , H03F2203/45528 , H03F2203/45594 , H03G3/3084

5. 发明公开

EP2003526A1 Method and device for controlling and monitoring a position of a holding element 审中-公开
标题翻译： Verfahren und Vorrichtung zur Steuerung undÜberwachungeiner职位eines Halteelements
公开(公告)号：EP2003526A1
公开(公告)日：2008-12-17
申请号：EP07011573.8
申请日：2007-06-13
申请人： Carl Zeiss SMT Limited
发明人： Cooper, Patrick
IPC分类号： G05B19/404 , H01J37/00
CPC分类号： G05B19/4086 , G05B2219/33078 , G05B2219/37619 , G05B2219/41036 , G05B2219/41055 , H01J37/20 , H01J2237/202 , H01J2237/20292
摘要： The invention refers to a method and a device for controlling and monitoring a position of a holding element which is provided to hold a sample to be examined, in particular by a beam device such as an electron microscope. It is an object of the invention to provide a method and a device for controlling and monitoring a position of a holding element taking any errors with respect to irregularities into account. The invention is based on the idea of interpolation of possible errors.
摘要翻译：本发明涉及一种用于控制和监测保持元件的位置的方法和装置，其被设置成保持要检查的样品，特别是通过诸如电子显微镜的束装置。本发明的目的是提供一种用于控制和监视保持元件的位置的方法和装置，其考虑到不规则性的任何错误。本发明基于对可能的误差进行插值的思想。

6. 发明公开

EP1903594A2 Charged particle beam instrument and method of detecting charged particles 审中-公开
标题翻译： Teilchenstrahlinstrument und Verfahren zur Detektion geladener Teilchen
公开(公告)号：EP1903594A2
公开(公告)日：2008-03-26
申请号：EP07253731.9
申请日：2007-09-20
申请人： Carl Zeiss SMT Limited
发明人： Hayn, Armin Heinz
IPC分类号： H01J37/244
CPC分类号： H01J37/244 , H01J2237/2444 , H01J2237/2448 , H01J2237/2449
摘要： A charged particle beam instrument (10) is provided, the instrument comprising a charged particle optical column (12), a voltage source, a detector (14) and a sample holder (18), the column (12) being operable to direct a beam of primary charged particles at a sample (20) on the sample holder (18) to cause secondary charged particles to be released from the sample, the voltage source being operable to establish in the vicinity of the sample an electric field that has a component that draws the secondary charged particles towards the detector (14), and the detector being operable to detect secondary charged particles, wherein the instrument further comprises a further voltage source (16) variable between a first voltage that establishes a component of the electric field that draws the secondary charged particles away from the sample, so as to prevent at least some of them from colliding with the sample (20) or sample holder (18), and a second voltage that establishes a component of the electric field that draws the secondary charged particles towards the sample, so as to prevent at least some of them from colliding with the column (12), thereby increasing the number of secondary charged particles detected by the detector (14).
摘要翻译：提供带电的粒子束仪器（10），该仪器包括带电粒子光学柱（12），电压源，检测器（14）和样本保持器（18），该柱（12）可操作以引导在样品保持器（18）上的样品（20）处的初级带电粒子的束，以使次级带电粒子从样品中释放，电压源可操作以在样品附近建立具有成分其将所述次级带电粒子吸引到所述检测器（14），并且所述检测器可操作以检测次级带电粒子，其中所述器械还包括在建立电场分量的第一电压之间变化的另外的电压源（16）将次级带电粒子从样品中抽出，以防止其中的至少一些与样品（20）或样本保持器（18）碰撞，以及建立第二电压电场，其将次级带电粒子拉向样品，以防止其中的至少一些与柱（12）碰撞，从而增加由检测器（14）检测到的次级带电粒子的数量。

7. 发明公开

EP2061067A2 Beam device and system comprising a particle beam device and an optical microscope 审中-公开
标题翻译： Strahlenvorrichtung und Verfahren mit einer Partikelstrahlenvorrichtung und optischem Mikroskop
公开(公告)号：EP2061067A2
公开(公告)日：2009-05-20
申请号：EP07120619.7
申请日：2007-11-13
申请人： Carl Zeiss SMT Limited
发明人： Spruck, Bernd , Edelmann, Martin, Dr. , Craven, John, Dr. , Taylor, Robert , Kühner, Martin, Dr.
IPC分类号： H01J37/20 , H01J37/18 , H01J37/22 , H01J37/26 , G02B21/00
CPC分类号： H01J37/20 , G02B21/0004 , H01J37/18 , H01J37/228 , H01J37/26 , H01J2237/2003 , H01J2237/2006 , H01J2237/204 , H01J2237/2608
摘要： The invention refers to a beam device (1), in particular a particle beam device, for analyzing an object (12), as well as a system comprising a particle beam device and an optical microscope for optically analyzing an object. It is an object of the invention to provide a beam device (1) comprising a means to simplify the exchange and to reduce the time of the exchange of objects to be examined. According to the invention a beam device (1) is provided comprising at least one beam generator (2) that generates a beam, at least one objective lens (6) that focuses the beam on an object (12) arranged in a holding element (25), wherein the objective lens (6) comprises at least one connecting element (26), the holding element (25) is connected to the connecting element (26) so that the holding element (25) is removable from the connecting element (26) for modification of the object (12). Alternatively, the holding element is mounted to a beam column.
摘要翻译：本发明涉及一种用于分析物体（12）的光束装置（1），特别是粒子束装置，以及包括用于光学分析物体的粒子束装置和光学显微镜的系统。本发明的目的是提供一种波束装置（1），其包括简化交换并减少被检查对象的交换时间的装置。根据本发明，提供了一种光束装置（1），其包括产生光束的至少一个光束发生器（2），将光束聚焦在布置在保持元件中的物体（12）上的至少一个物镜（6） 25，其中所述物镜（6）包括至少一个连接元件（26），所述保持元件（25）连接到所述连接元件（26），使得所述保持元件（25）可从所述连接元件 26）用于对象（12）的修改。或者，保持元件安装到梁柱。

8. 发明公开

EP1632980A3 Scanning particle beam instrument 有权
标题翻译：粒子束扫描仪
公开(公告)号：EP1632980A3
公开(公告)日：2008-07-23
申请号：EP05018964.6
申请日：2005-08-31
申请人： Carl Zeiss SMT Limited
发明人： Armit, Andrew Philip
IPC分类号： H01J37/244 , H01J37/28 , H01J37/26 , H04N5/57
CPC分类号： H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/043 , H01J2237/1501 , H01J2237/2487 , H01J2237/2826
摘要： A scanning particle beam instrument (10) is provided, the instrument including a scanner (30,32), a radiation detector (34) and a DC amplifier (36), the DC amplifier being operable to amplify a signal generated by the radiation detector (34) to produce a video signal, the instrument further including a controller (38) operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare actual and desired video signals and to adjust a DC offset of the DC amplifier so as to reduce a difference between the signals. Also provided is a method of producing a video signal using such an instrument.

9. 发明公开

EP1632980A2 Scanning particle beam instrument 有权
标题翻译： Teilchenstrahl-光栅仪
公开(公告)号：EP1632980A2
公开(公告)日：2006-03-08
申请号：EP05018964.6
申请日：2005-08-31
申请人： Carl Zeiss SMT Limited
发明人： Armit, Andrew Philip
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/043 , H01J2237/1501 , H01J2237/2487 , H01J2237/2826
摘要： A scanning particle beam instrument (10) is provided, the instrument including a scanner (30,32), a radiation detector (34) and a DC amplifier (36), the DC amplifier being operable to amplify a signal generated by the radiation detector (34) to produce a video signal, the instrument further including a controller (38) operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare actual and desired video signals and to adjust a DC offset of the DC amplifier so as to reduce a difference between the signals. Also provided is a method of producing a video signal using such an instrument.
摘要翻译：提供了一种扫描粒子束仪器（10），该仪器包括扫描器（30,32），辐射探测器（34）和DC放大器（36），该DC放大器可操作以放大由辐射探测器（34）产生视频信号，所述仪器还包括控制器（38），所述控制器可操作以使所述光束相对于样本引导，或者确定所述光束何时相对于样本如此定向，所述实际视频信号由可以将DC放大器与期望的视频信号进行比较，以比较实际和期望的视频信号并调整DC放大器的DC偏移，从而减小信号之间的差异。还提供了使用这种仪器产生视频信号的方法。

10. 发明授权

EP1179833B1 Particle detector 有权
标题翻译：粒子检测器
公开(公告)号：EP1179833B1
公开(公告)日：2007-10-03
申请号：EP01306778.0
申请日：2001-08-08
申请人： Carl Zeiss SMT Limited
发明人： Hayn, Armin Heinz
IPC分类号： H01J37/244
CPC分类号： H01J37/244

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