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    • 5. 发明公开
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • EP0951071A1
    • 1999-10-20
    • EP97913464.0
    • 1997-11-27
    • SHARP KABUSHIKI KAISHA
    • IWATA, HiroshiKAKIMOTO, SeizouNAKANO, MasayukiMATSUOKA, Toshimasa
    • H01L27/08
    • H01L29/1087H01L27/092H01L29/7832
    • A semiconductor device which realizes a dynamic threshold operation based on the use of a bulk semiconductor substrate is provided. The semiconductor substrate comprises: a well region 11 of a first conductivity type; a source region 12 and a drain region 13 of a second conductivity type provided in the vicinity of the surface of the well region 11 of the first conductivity type; a channel region 14 provided between the regions 12 and 13 ; and a gate insulation film 15 and a gate electrode 16 deposited in this order on the channel region 14 , wherein the gate electrode 16 is connected to the well region 11 via a contact hole (not shown) in the gate insulation film 15 . In this transistor, the resistance of the well region 11 can be reduced by a factor of about ten to a hundred.
    • 提供了基于使用体半导体衬底实现动态阈值操作的半导体器件。 该半导体衬底包括:第一导电类型的阱区域11; 设置在第一导电类型的阱区11的表面附近的第二导电类型的源极区12和漏极区13; 设置在区域12和13之间的沟道区域14; 以及在沟道区14上依次沉积的栅绝缘膜15和栅电极16,其中栅电极16经由栅绝缘膜15中的接触孔(未示出)连接到阱区11.在此 晶体管,阱区11的电阻可以减少大约十倍到一百倍。
    • 7. 发明授权
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • EP0951071B1
    • 2009-02-04
    • EP97913464.0
    • 1997-11-27
    • Sharp Kabushiki Kaisha
    • IWATA, HiroshiKAKIMOTO, SeizouNAKANO, MasayukiMATSUOKA, Toshimasa
    • H01L27/092H01L27/02H01L29/786
    • H01L29/1087H01L27/092H01L29/7832
    • A semiconductor device which materializes dynamic threshold operation, on the assumption of the application of a bulk semiconductor substrate. The semiconductor substrate has a first conductivity type well region (11), a source region (12) and a drain region (13) of second conductivity type are made in the vicinity of the surface of the first conductivity type of well region (11), a channel region (14) is provided between these regions (12 and 13), a gate insulating film (15) and a gate electrode (16) are stacked in order on the channel region (14), and the gate electrode (16) is connected to the well region (11) through the contact hole (not shown in the figure) of the gate insulating film (15). In this transistor, as compared with a conventional SOI substrate, the resistance of the well region (11) can be lowered to about one-tenth.
    • 假定应用体半导体衬底,实现动态阈值操作的半导体器件。 在第一导电类型的阱区(11)的表面附近形成具有第一导电类型阱区(11),第二导电类型的源区(12)和漏区(13)的半导体衬底, 在这些区域(12,13)之间设置沟道区域(14),在沟道区域(14)上依次层叠栅极绝缘膜(15)和栅极电极(16),栅极电极 )通过栅极绝缘膜(15)的接触孔(图中未示出)连接到阱区(11)。 在该晶体管中,与常规SOI衬底相比,阱区(11)的电阻可降至约十分之一。
    • 9. 发明公开
    • SEMICONDUCTOR DEVICE AND PORTABLE ELECTRONIC APPARATUS
    • HALBLEITERBAUEMENT UND TRAGBARE ELEKTRONISCHE VORRICHTUNG
    • EP1343207A1
    • 2003-09-10
    • EP01982765.8
    • 2001-11-13
    • Sharp Kabushiki Kaisha
    • SHIBATA, AkihideIWATA, HiroshiKAKIMOTO, Seizo
    • H01L27/08H01L27/085H01L27/092G06F17/60
    • H01L21/76229H01L21/823892H01L27/092H01L27/0921
    • There is provided a semiconductor device of low power consumption and high reliability having DTMOS' and substrate-bias variable transistors, and portable electronic equipment using the semiconductor device. On a semiconductor substrate (11), trilayer well regions (12, 14, 16; 13, 15, 16) are formed, and DTMOS' (29, 30) and substrate-bias variable transistors (27, 28) are provided in the shallow well regions (16, 17). Large-width device isolation regions (181, 182, 183) are provided at boundaries forming PNP, NPN or NPNP structures, where a small-width device isolation region (18) is provided on condition that well regions on both sides are of an identical conductive type. Thus, a plurality of well regions of individual conductive types where substrate-bias variable transistors (27, 28) of individual conductive types are provided can be made electrically independent of one another, allowing the power consumption to be reduced. Besides, the latch-up phenomenon can be suppressed.
    • 提供了具有DTMOS和衬底偏置可变晶体管的低功耗和高可靠性的半导体器件,以及使用该半导体器件的便携式电子设备。 在半导体衬底(11)上,形成三层阱区域(12,14,16,13,15,16),并且在所述半导体衬底(11)上设置DTMOS(29,30)和衬底偏置可变晶体管(27,28) 浅井区(16,17)。 在形成PNP,NPN或NPNP结构的边界处提供大宽度器件隔离区(181,182,183),其中在两侧的阱区具有相同的条件下提供小宽度器件隔离区(18) 导电型。 因此,可以使提供单独导电类型的衬底偏置可变晶体管(27,28)的各种导电类型的多个阱区彼此电独立,从而降低功耗。 此外,可以抑制闩锁现象。