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1. 发明公开

EP1705475A2 Optical waveguide probe and its manufacturing method 有权
标题翻译： Optische Wellenleitersonde und deren Herstellungsverfahren。
公开(公告)号：EP1705475A2
公开(公告)日：2006-09-27
申请号：EP06013102.6
申请日：1998-12-15
申请人： SEIKO INSTRUMENTS INC. , Sato, Kazuo , Shikita, Mitsuhiro
发明人： Sato, Kazuo , Shikita, Mitsuhiro , Kato, Kenji , Shinogi, Masataka , Nakajima, Kunio , Chiba, Norio , Ichihara, Susumu , Niwa, Takashi , Mitsuoka, Yasuyuki , Kasama, Nobuyuki
IPC分类号： G01N13/14 , G01N37/00 , G01B11/30 , G02B21/00 , G01B7/34
CPC分类号： G02B6/132 , G01B11/30 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G02B6/241 , G02B6/262 , Y10S977/862
摘要： The present invention has an object to obtain an optical waveguide probe which is formed in a hook form to illuminate and detect light by a manufacture using a silicon process.
This optical waveguide probe is formed in a hook form and structured by an optical waveguide 1 sharpened at a probe needle portion 5 and formed of dielectric and a substrate 2 supporting this optical waveguide 1. This optical waveguide 1 is formed overlying the substrate 2. The optical waveguide 1 is structured by a core 8 to transmit light and a cladding 9 smaller in refractive index than the core 8.
摘要翻译：本发明的目的是获得一种形成为钩形的光波导探针，以通过使用硅工艺的制造来照亮和检测光。该光波导探针形成为钩形，并由在探针针5上被锐化并由电介质构成的光波导1和支撑该光波导1的基板2构成。该光波导1形成在基板2的上方。光波导1由芯8构成，以透射光和比芯8更小的折射率的包层9。

2. 发明授权

EP1705475B1 Optical waveguide probe and its manufacturing method 有权
标题翻译：光学波导探针及其制造方法。
公开(公告)号：EP1705475B1
公开(公告)日：2012-08-15
申请号：EP06013102.6
申请日：1998-12-15
申请人： Seiko Instruments Inc. , Sato, Kazuo , Shikita, Mitsuhiro
发明人： Sato, Kazuo , Shikita, Mitsuhiro , Kato, Kenji , Shinogi, Masataka , Nakajima, Kunio , Chiba, Norio , Ichihara, Susumu , Niwa, Takashi , Mitsuoka, Yasuyuki , Kasama, Nobuyuki
IPC分类号： G01Q60/06 , G02B6/132 , G02B6/24 , G02B6/26 , B82Y35/00 , B82Y20/00
CPC分类号： G02B6/132 , G01B11/30 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G02B6/241 , G02B6/262 , Y10S977/862

3. 发明公开

EP1705475A3 Optical waveguide probe and its manufacturing method 有权
标题翻译：光学波导探针及其制造方法。
公开(公告)号：EP1705475A3
公开(公告)日：2007-05-02
申请号：EP06013102.6
申请日：1998-12-15
申请人： SEIKO INSTRUMENTS INC. , Sato, Kazuo , Shikita, Mitsuhiro
发明人： Sato, Kazuo , Shikita, Mitsuhiro , Kato, Kenji , Shinogi, Masataka , Nakajima, Kunio , Chiba, Norio , Ichihara, Susumu , Niwa, Takashi , Mitsuoka, Yasuyuki , Kasama, Nobuyuki
IPC分类号： G01N13/14 , G01N37/00 , G01B11/30 , G02B21/00 , G01B7/34 , G01N13/16 , G12B21/08
CPC分类号： G02B6/132 , G01B11/30 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G02B6/241 , G02B6/262 , Y10S977/862
摘要： The present invention has an object to obtain an optical waveguide probe which is formed in a hook form to illuminate and detect light by a manufacture using a silicon process.
This optical waveguide probe is formed in a hook form and structured by an optical waveguide 1 sharpened at a probe needle portion 5 and formed of dielectric and a substrate 2 supporting this optical waveguide 1. This optical waveguide 1 is formed overlying the substrate 2. The optical waveguide 1 is structured by a core 8 to transmit light and a cladding 9 smaller in refractive index than the core 8.

4. 发明公开

EP1939871A1 Recording apparatus 审中-公开
标题翻译：在Nahfeld - Aufzeichnungs- und Wiedergabe-Gerät的Kontrolle des Abstands
公开(公告)号：EP1939871A1
公开(公告)日：2008-07-02
申请号：EP08075135.7
申请日：1999-03-12
申请人： Seiko Instruments Inc.
发明人： Kasama, Nobuyuki , Mitsuoka, Yasuyuki , Oumi, Manabu , Kato, Kenji , Niwa, Takashi , Nakajima, Kunio , Chiba, Norio
IPC分类号： G11B7/135 , G11B7/09
CPC分类号： G11B7/0908 , B82Y10/00 , G11B7/127 , G11B7/1275 , G11B7/1387 , Y10S977/862 , Y10S977/947
摘要： The invention concerns a recording apparatus for reproducing information recorded on a recording medium by utilising near-field light. The recording apparatus comprises: an aperture element having a microscopic aperture to scatter near-field light; a light illuminating means for introducing illumination light to the recording medium such that near-field light is created on a surface of the recording medium, the illumination light comprising two different modulation frequencies; a first light detecting means for detecting first propagation light caused by the microscopic aperture scattering the near-field light having one of the two modulation frequencies, and for converting the detected first propagation light into a reproduced signal; a second light detecting means for detecting second propagation light caused by the microscopic aperture scattering the near-field light having the other of the two modulation frequencies, and for converting the detected second propagation light into a control signal; and a control means for controlling a spacing between the aperture element and the recording medium based on the control signal.
摘要翻译：本发明涉及用于通过利用近场光来再现记录在记录介质上的信息的记录装置。记录装置包括：具有微观孔径以散射近场光的孔径元件; 照明装置，用于将照明光引入记录介质，使得在记录介质的表面上产生近场光，所述照明光包括两个不同的调制频率; 第一光检测装置，用于检测由微小孔散射引起的具有两个调制频率之一的近场光的第一传播光，并将检测到的第一传播光转换成再现信号; 第二光检测装置，用于检测由微小孔径散射具有两个调制频率中的另一个的近场光引起的第二传播光，并将检测到的第二传播光转换成控制信号; 以及控制装置，用于根据控制信号控制孔径元件和记录介质之间的间隔。

5. 发明公开

EP0801318A3 Probe, manufacturing method therefore and scanning probe microscope 失效
标题翻译：扫描装置，扫描探针显微镜及其制造方法
公开(公告)号：EP0801318A3
公开(公告)日：1998-04-01
申请号：EP97103779.1
申请日：1997-03-06
申请人： SEIKO INSTRUMENTS INC.
发明人： Muramatsu, Hiroshi , Yamamoto, Noritaka , Chiba, Norio , Nakajima, Kunio
IPC分类号： G02B21/00
CPC分类号： G01Q60/06 , G01Q60/22 , G01Q60/38 , Y10S385/902 , Y10S977/862 , Y10S977/878
摘要： A tip of a probe is sharpened and a level difference portion 6 in a boundary zone between a base portion 5 and an elastic functioning portion 4 is formed into a tapered configuration. The diameter of the elastic functioning portion 4 is made smaller than that of the base portion 5. Also, a part of the elastic functioning portion 4 is shaped into a constricted configuration. Also, the probe material is an optical fiber and this probe is composed of a core portion 2 that propagates light therethrough and clad portions 3 that differ in refractive index from each other. And the portion of the probe that excludes a aperture is clothed by a metal film cladding 7.

6. 发明公开

EP0541024A2 Magnetic field detecting circuit 失效
标题翻译： Schaltung zum Detektieren von einem Magnetfeld。
公开(公告)号：EP0541024A2
公开(公告)日：1993-05-12
申请号：EP92118704.3
申请日：1992-11-01
申请人： SEIKO INSTRUMENTS INC. , AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY
发明人： Kiryu, Shogo, c/o Agency of Industry & Technology , Shimizu, Nobuhiro , Chiba, Norio
IPC分类号： G01R33/035
CPC分类号： G01R33/0356 , Y10S505/846
摘要： A magnetic field detecting circuit for measuring weak magnetic field in a high sensitivity. The circuit has a relaxation oscillator in which a coil (3) and a resistor (2) connected in series with each other are connected in parallel with a Josephson device (1), and of a magnetic field input circuit (4) magnetically coupled with the coil of the oscillator circuit for applying the detected magnetic field into the oscillator circuit, whereby oscillation frequency is shifted corresponding to the detected magnetic field. An optimum design of the magnetic field detecting circuit is achieved independently for a parameter of the relaxation oscillator and a parameter of a receiving circuit respectively, and a multi-channelization of the detecting circuit is achieved easier by the structure.
摘要翻译：一种用于以高灵敏度测量弱磁场的磁场检测电路。电路具有松弛振荡器，其中线圈和彼此串联连接的电阻器与约瑟夫森装置并联连接，并且与磁场输入电路磁耦合，该磁场输入电路与振荡器电路的线圈磁耦合以施加检测到的磁场进入振荡电路，由此振荡频率对应于检测到的磁场而偏移。独立地对松弛振荡器的参数和接收电路的参数实现磁场检测电路的最佳设计，并且通过该结构实现了检测电路的多通道化。

7. 发明公开

EP0846932A3 Scanning near-field optic/atomic force microscope 失效
标题翻译：光近场原子力显微镜扫描
公开(公告)号：EP0846932A3
公开(公告)日：2000-12-20
申请号：EP98101571.2
申请日：1994-10-28
申请人： SEIKO INSTRUMENTS INC.
发明人： Chiba, Norio , Muramatsu, Hiroshi
IPC分类号： G01B7/34 , G02B21/00
CPC分类号： G01Q60/06 , G01Q60/22 , G01Q60/38
摘要： The present invention relates to a scanning near-field optic/atomic force microscope adapted to observe topography and optical characteristics of a sample (13), said microscope comprising: a cantilever (2) having a probe (1) in an end portion thereof consisting primarily of a lightpropagating medium having an optical opening for passing light, said optical opening forming a sharp front end; a light-transmitting device (6) having a light-transmitting optical opening in both ends thereof, wherein one of said ends of said light-transmitting device is disposed close to a back surface of said probe (1); a light source (10) and optics (11, 12) for generating a light to measure a feature of the sample (13) and for directing generated light to the sample (13); a photoelectric converter device (7) and optics for receiving light from the sample (13); a deflection-detecting means for optically detecting deflection of said cantilever (2), comprising a light source (3) for generating a laser light for use of deflection-detection; a condenser lens (4) for directing the laser light to a back surface of said cantilever (2); and another photoelectric converter device (5) and optics for detecting reflected light from back surface of said cantilever (2); a motion mechanism (21, 22) for making a relative movement between the sample and said probe; and a gap control means (23) for controlling a distance between the surface of the sample (13) and the sharp front end of said probe (1); wherein the the probe (1) of the cantilever (2) comprises an overhang portion (43) and the condenser lens (4) directs the laser light to said overhang portion (43).

8. 发明公开

EP0884617A1 Scanning near-field optic/atomic-force microscope, probe for use in same, and method of fabricating said probe 失效
标题翻译：合并的近场为原子力显微镜探针及其制造探针法
公开(公告)号：EP0884617A1
公开(公告)日：1998-12-16
申请号：EP98112393.8
申请日：1994-04-06
申请人： SEIKO INSTRUMENTS INC.
发明人： Matsumura, Hiroshi , Chiba, Norio , Ataka, Tatsuaki , Fujihira, Masamichi
IPC分类号： G02B21/00 , G01B7/34
CPC分类号： G01Q30/02 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G01Q70/02 , G02B6/241 , Y10S977/862 , Y10S977/863 , Y10S977/871 , Y10S977/951
摘要： A combined scanning near field optical and atomic force microscope (NSOM/AFM) capable of measuring the topography and the optical characteristics of the surface of a sample (37) at high resolution irrespective of the transmittance and the conductivity of the sample is described. The apparatus, in one embodiment, comprises a probe (4), a light source for illuminating a sample with light (34), a photoelectric converter device (38) and optics for receiving light transmitted through the sample, a laser (30) for detecting deflections of the probe, a condenser lens (31) for directing the laser light on to the rear surface of the probe, a detection system for detecting reflected light (32,33), a rough-motion mechanism (39) and a fine-motion mechanism (40) for moving the sample and the probe relative to each other, a control means for controlling the distance between the sample and the probe, and a computer (42) for controlling the whole apparatus. The probe, comprising a cladded single mode optical fibre, has a front end portion and a light-propagating body continuous with the front end portion. The front end portion and the light-propagating body are shaped like a hook. A method for manufacturing the probe is described.
摘要翻译：近场光学和原子力显微镜（NSOM / AFM）能够测量形貌和高分辨率的样品（37）的表面的光学特性而与透射率和样品的导电性的组合扫描进行说明。的装置，在一个实施例中包括的样本（4），一个光源，用于照明光（34）的样品，一个光电转换装置（38）和光学器件，用于接收光反通过样品mitted，激光（30），用于检测探针，聚光透镜（31）的偏转上的样品的后表面引导激光光中，用于检测的检测系统反射的光（32,33），一个粗动机构（39）和一个细用于移动样品和相对于海誓山盟探针 - 运动机构（40），一个控制装置，用于控制样品和探针，和用于控制整个装置的计算机（42）之间的距离。样品，包括熔覆单模光纤，具有前端部和一个光传播体的前端部连续。前端部和所述光传播主体的形状像一个钩子。描述了一种用于制造样品的方法。

9. 发明公开

EP1942501A1 Distance control in optical near-field recording/reproducing apparatus 审中-公开
标题翻译： Kontrolle des Abstands in Nahfeld- Aufzeichnungs- und Wiedergabe-Gerät
公开(公告)号：EP1942501A1
公开(公告)日：2008-07-09
申请号：EP08075136.5
申请日：1999-03-12
申请人： Seiko Instruments Inc.
发明人： Kasama, Nobuyuki , Chiba, Norio , Mitsuoka, Yasuyuki , Oumi, Manabu , Kato, Kenji , Niwa, Takashi , Nakajima, Kunio
IPC分类号： G11B7/135 , G11B7/09
CPC分类号： G11B7/0908 , B82Y10/00 , G11B7/127 , G11B7/1275 , G11B7/1387 , Y10S977/862 , Y10S977/947
摘要： The invention concerns a recording apparatus for reproducing information recorded on a recording medium by utilising near-field light. The recording apparatus comprises: an aperture element having two microscopic apertures to scatter near-field light; a light illuminating means for introducing illumination light to the recording medium such that near-field light is created on a surface of the recording medium; a first light detecting means for detecting first propagation light caused by one of the microscopic apertures scattering the near-field light and for converting the detected first propagation light into a reproduced signal the reproduced signal representative of recorded information; a second light detecting means for detecting second propagation light caused by the other of the microscopic apertures scattering the near-field light, and for converting the detected second propagation light into a control signal, the control signal for use in controlling the spacing between the aperture element and the recording medium; and a control means for controlling a spacing between the aperture element and the recording medium based on the control signal.
摘要翻译：本发明涉及用于通过利用近场光来再现记录在记录介质上的信息的记录装置。记录装置包括：具有两个微小孔径的孔径元件，用于散射近场光; 光照射装置，用于将照明光引入记录介质，使得在记录介质的表面上产生近场光; 第一光检测装置，用于检测散射近场光的微小孔之一引起的第一传播光，并将检测到的第一传播光转换成再现信号，表示记录信息的再现信号; 第二光检测装置，用于检测由另一个微观孔径散射近场光的第二传播光，并将检测到的第二传播光转换成控制信号，该控制信号用于控制孔径之间的间隔元件和记录介质; 以及控制装置，用于根据控制信号控制孔径元件和记录介质之间的间隔。

10. 发明公开

EP1130379A1 OPTICAL CANTILEVER AND PRODUCTION METHOD THEREFOR 有权
标题翻译： OPTISCHER AUSLEGERFÜRRASTERMIKROSKOP UND DESSEN HERSTELLUNGSVERFAHREN
公开(公告)号：EP1130379A1
公开(公告)日：2001-09-05
申请号：EP99951218.9
申请日：1999-11-02
申请人： Seiko Instruments Inc.
发明人： Niwa, Takashi , Ichihara, Susumu , Mitsuoka, Yasuyuki , Kato, Kenji , Chiba, Norio , Oumi, Manabu , Kasama, Nobuyuki
IPC分类号： G01N13/14 , G01N13/16 , G01B21/30 , G12B21/06 , G12B21/08
CPC分类号： G01Q20/02 , G01Q60/22
摘要： There is provided an optical cantilever which is an optical cantilever for SNOM for irradiating and / or detecting light to or from a very small aperture, and is excellent in mass production performance and uniformity and capable of observing even a soft sample at high speed without damaging the sample.
There is provided an optical cantilever characterized in including a base portion 1, a cantilever portion 2 extended from the base portion 1, a light propagating portion 5 of a dielectric member penetrating the cantilever portion 2, formed to project above the cantilever on a side opposed to the base portion and having a sharpened front end and a light propagating tip 3, a light shielding film 6 covering a surrounding of the sharpened dielectric member and a very small aperture 4 formed at the sharpened front end of the dielectric member.
摘要翻译：提供了一种光学悬臂，其是用于向非常小的孔径照射和/或检测光的SNOM的光学悬臂，并且具有优异的批量生产性能和均匀性，并且甚至可以高速地观察软样品而不损坏例子。提供了一种光学悬臂，其特征在于包括基部1，从基部1延伸的悬臂部分2，穿透悬臂部分2的电介质构件的光传播部分5，形成为在悬臂的相对侧上突出并且具有锋利的前端和光传播尖端3，覆盖锐化电介质构件的周围的遮光膜6和形成在电介质构件的锋利前端的非常小的孔4。

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