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1. 发明公开

EP0846932A3 Scanning near-field optic/atomic force microscope 失效
标题翻译：光近场原子力显微镜扫描
公开(公告)号：EP0846932A3
公开(公告)日：2000-12-20
申请号：EP98101571.2
申请日：1994-10-28
申请人： SEIKO INSTRUMENTS INC.
发明人： Chiba, Norio , Muramatsu, Hiroshi
IPC分类号： G01B7/34 , G02B21/00
CPC分类号： G01Q60/06 , G01Q60/22 , G01Q60/38
摘要： The present invention relates to a scanning near-field optic/atomic force microscope adapted to observe topography and optical characteristics of a sample (13), said microscope comprising: a cantilever (2) having a probe (1) in an end portion thereof consisting primarily of a lightpropagating medium having an optical opening for passing light, said optical opening forming a sharp front end; a light-transmitting device (6) having a light-transmitting optical opening in both ends thereof, wherein one of said ends of said light-transmitting device is disposed close to a back surface of said probe (1); a light source (10) and optics (11, 12) for generating a light to measure a feature of the sample (13) and for directing generated light to the sample (13); a photoelectric converter device (7) and optics for receiving light from the sample (13); a deflection-detecting means for optically detecting deflection of said cantilever (2), comprising a light source (3) for generating a laser light for use of deflection-detection; a condenser lens (4) for directing the laser light to a back surface of said cantilever (2); and another photoelectric converter device (5) and optics for detecting reflected light from back surface of said cantilever (2); a motion mechanism (21, 22) for making a relative movement between the sample and said probe; and a gap control means (23) for controlling a distance between the surface of the sample (13) and the sharp front end of said probe (1); wherein the the probe (1) of the cantilever (2) comprises an overhang portion (43) and the condenser lens (4) directs the laser light to said overhang portion (43).

2. 发明公开

EP0874216A2 Optical probe, method of manufacturing an optical probe, and scanning probe microscope 失效
标题翻译： Optische Sonde，Herstellungsverfahren einer optischen Sonde und Rastersondenmikroskop
公开(公告)号：EP0874216A2
公开(公告)日：1998-10-28
申请号：EP98303130.3
申请日：1998-04-23
申请人： SEIKO INSTRUMENTS INC. , AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY
发明人： Fujihira, Masamachi , Muramatsu, Hiroshi , Yamamoto, Noritaka , Hiraga, Takashi , Moriya, Tetsuo , Mito, Akihiro
IPC分类号： G01B9/04
CPC分类号： G01Q60/22 , G01B9/04 , G01Q70/02 , Y10S977/862
摘要： An optical probe 28 in the form of an optical resonator or part thereof. The optical probe 28 has a microscopic aperture so as to increase the intensity of the light within the probe 28 whereby the evanescent light field formed at the microscopic aperture portion is increased.
摘要翻译：光学谐振器形式的光学探头28或其一部分。光学探头28具有微观孔径，以增加探针28内的光的强度，从而增加在微小孔径部分形成的ev逝光场。

3. 发明授权

EP0794562B1 Method of fabricating a three-dimensional micro-structure from two-dimensional micro-structures 失效
标题翻译：一种用于生产二维微结构的三维微结构的过程
公开(公告)号：EP0794562B1
公开(公告)日：2004-02-18
申请号：EP97103778.3
申请日：1997-03-06
申请人： SEIKO INSTRUMENTS INC.
发明人： Muramatsu, Hiroshi
IPC分类号： H01L21/26 , B21D31/00 , H01H11/04 , B21D11/20
CPC分类号： B81C3/008 , B81B2201/0235 , B81B2201/13 , B81B2203/0118 , B81B2203/0353
摘要： A minute structure such as a cantilever 11 is formed on a silicon substrate 10 and heated by irradiating a laser beam to a part of the cantilever 11, by which the cantilever 11 is bent. The two bent cantilevers 11 are inserted into through holes 14 in a crystal substrate 10 formed in advance, and the tip end portions 15 thereof are heated. The heated tip end portions 15 become thicker and at the same time shorter, so that the crystal substrate 12 can be fixed to the silicon substrate 10 without play. By heating a part of the minute structure by such a method, plastic deformation is produced, so that bending and deforming can be performed. Thereby, a three-dimensional micromachined structure is constructed and assembled.
摘要翻译：一分钟结构：如悬臂11被形成在硅衬底10和通过将激光束照射到悬臂11，通过该悬臂11弯曲的一部分加热。两条弯曲悬臂11通过在预先形成的晶体基板10的孔14插入，并在前端部15上被加热。被加热的末端部15变厚，并在同一时间短，所以没有晶体衬底12可以被固定在硅基板10无间隙。通过寻求的方法加热该微小结构的一部分，塑性变形产生，所以没有弯曲，并且可以执行变形。由此，三维微结构加工被构造和组装。

4. 发明授权

EP0896201B1 Scanning probe microscope 失效
标题翻译： Rastersondenmikroskop
公开(公告)号：EP0896201B1
公开(公告)日：2003-05-02
申请号：EP98306153.2
申请日：1998-07-31
申请人： SEIKO INSTRUMENTS INC.
发明人： Muramatsu, Hiroshi , Tomita, Eisuke
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q60/38 , G01Q20/02 , Y10S977/873

5. 发明授权

EP0884617B1 Scanning near-field optic/atomic-force microscope, probe for use in same, and method of fabricating said probe 失效
标题翻译：合并的近场为原子力显微镜探针及其制造探针法
公开(公告)号：EP0884617B1
公开(公告)日：2002-09-04
申请号：EP98112393.8
申请日：1994-04-06
申请人： SEIKO INSTRUMENTS INC.
发明人： Muramatsu, Hiroshi , Chiba, Norio , Ataka, Tatsuaki , Fujihira, Masamichi
IPC分类号： G02B21/00 , G01B7/34
CPC分类号： G01Q30/02 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G01Q70/02 , G02B6/241 , Y10S977/862 , Y10S977/863 , Y10S977/871 , Y10S977/951

6. 发明公开

EP0846932A2 Scanning near-field optic/atomic force microscope 失效
标题翻译： Optisches Nahfeld- und Atomkraft-Rastermikroskop
公开(公告)号：EP0846932A2
公开(公告)日：1998-06-10
申请号：EP98101571.2
申请日：1994-10-28
申请人： SEIKO INSTRUMENTS INC.
发明人： Chiba, Norio , Muramatsu, Hiroshi
IPC分类号： G01B7/34 , G02B21/00
CPC分类号： G01Q60/06 , G01Q60/22 , G01Q60/38
摘要： The present invention relates to a scanning near-field optic/atomic force microscope adapted to observe topography and optical characteristics of a sample (13), said microscope comprising:

a cantilever (2) having a probe (1) in an end portion thereof consisting primarily of a lightpropagating medium having an optical opening for passing light, said optical opening forming a sharp front end;
a light-transmitting device (6) having a light-transmitting optical opening in both ends thereof, wherein one of said ends of said light-transmitting device is disposed close to a back surface of said probe (1);
a light source (10) and optics (11, 12) for generating a light to measure a feature of the sample (13) and for directing generated light to the sample (13);
a photoelectric converter device (7) and optics for receiving light from the sample (13);
a deflection-detecting means for optically detecting deflection of said cantilever (2), comprising a light source (3) for generating a laser light for use of deflection-detection; a condenser lens (4) for directing the laser light to a back surface of said cantilever (2); and another photoelectric converter device (5) and optics for detecting reflected light from back surface of said cantilever (2);
a motion mechanism (21, 22) for making a relative movement between the sample and said probe; and
a gap control means (23) for controlling a distance between the surface of the sample (13) and the sharp front end of said probe (1);
wherein the the probe (1) of the cantilever (2) comprises an overhang portion (43) and the condenser lens (4) directs the laser light to said overhang portion (43).
摘要翻译：本发明涉及适于观察样品（13）的形貌和光学特性的扫描近场光学/原子力显微镜，所述显微镜包括：在其末端部分中具有探针（1）的悬臂（2），其包括主要是具有用于通过光的光学开口的光传播介质，所述光学开口形成尖锐的前端; 具有在其两端具有透光光学开口的透光装置（6），其中所述透光装置的所述端部之一设置成靠近所述探针（1）的后表面; 光源（10）和光学器件（11,12），用于产生光以测量样品（13）的特征并将所产生的光引导到样品（13）; 光电转换器装置（7）和用于从样品（13）接收光的光学器件; 用于光学地检测所述悬臂（2）的偏转的偏转检测装置，包括用于产生用于偏转检测的激光的光源（3）; 用于将激光引导到所述悬臂（2）的后表面的聚光透镜（4）; 和另一个光电转换器装置（5）和用于检测来自所述悬臂（2）的后表面的反射光的光学器件; 用于在样品和所述探针之间进行相对运动的运动机构（21,22）; 以及用于控制样品（13）的表面与所述探针（1）的锋利前端之间的距离的间隙控制装置（23）。其中所述悬臂（2）的所述探针（1）包括突出部分（43），并且所述聚光透镜（4）将所述激光引导到所述突出部分（43）。

7. 发明授权

EP0794406B1 Probe for atomic force microscope, method of fabricating same, and atomic force microscope 失效
标题翻译：探针，用于原子力显微镜，用于制备探针和原子力显微镜
公开(公告)号：EP0794406B1
公开(公告)日：2002-07-31
申请号：EP97103780.9
申请日：1997-03-06
申请人： SEIKO INSTRUMENTS INC.
发明人： Muramatsu, Hiroshi , Shimizu, Nobuhiro
IPC分类号： G01B7/34
CPC分类号： G01Q60/38 , G01Q20/04 , Y10S977/878 , Y10S977/879

8. 发明公开

EP0938012A1 Probe for near-field optical microscope, method for manufacturing the same and scanning near-field optical microscope 有权
标题翻译：主讲人Nahfeldmikroskop，Verfahren zu ihrer Herstellung und optisches Nahfeldrastermikroskop
公开(公告)号：EP0938012A1
公开(公告)日：1999-08-25
申请号：EP99301323.4
申请日：1999-02-23
申请人： Seiko Instruments Inc.
发明人： Muramatsu, Hiroshi
IPC分类号： G02B21/00
CPC分类号： G01Q20/02 , G01Q60/06 , G01Q60/22 , G01Q60/38 , Y10S977/862
摘要： A probe for near-field optical microscope in which a tube is thermally bent in the form of a hook (13); a microscopic aperture (12) of the tube which has been thermally extended and cut away is provided at an end thereof; a part of the tube opposite to the microscopic aperture is removed to form an aperture (14) at the removed portion to thereby provide a structure having no obstacle in the space between said aperture and said microscopic aperture. The invention also provides a near-field optical microscope utilising the probe.
摘要翻译：用于近场光学显微镜的探针，其中管以钩（13）的形式热弯曲; 在其末端设置有热延伸和切除的管的微小孔（12）; 去除与微小孔相对的管的一部分，以在去除部分处形成孔（14），从而提供在所述孔和所述微孔之间的空间中没有障碍物的结构。本发明还提供了利用该探针的近场光学显微镜。

9. 发明公开

EP0801318A3 Probe, manufacturing method therefore and scanning probe microscope 失效
标题翻译：扫描装置，扫描探针显微镜及其制造方法
公开(公告)号：EP0801318A3
公开(公告)日：1998-04-01
申请号：EP97103779.1
申请日：1997-03-06
申请人： SEIKO INSTRUMENTS INC.
发明人： Muramatsu, Hiroshi , Yamamoto, Noritaka , Chiba, Norio , Nakajima, Kunio
IPC分类号： G02B21/00
CPC分类号： G01Q60/06 , G01Q60/22 , G01Q60/38 , Y10S385/902 , Y10S977/862 , Y10S977/878
摘要： A tip of a probe is sharpened and a level difference portion 6 in a boundary zone between a base portion 5 and an elastic functioning portion 4 is formed into a tapered configuration. The diameter of the elastic functioning portion 4 is made smaller than that of the base portion 5. Also, a part of the elastic functioning portion 4 is shaped into a constricted configuration. Also, the probe material is an optical fiber and this probe is composed of a core portion 2 that propagates light therethrough and clad portions 3 that differ in refractive index from each other. And the portion of the probe that excludes a aperture is clothed by a metal film cladding 7.

10. 发明公开

EP0794406A1 Probe for atomic force microscope, method of fabricating same, and atomic force microscope 失效
标题翻译： SondefürAtomkraftmikroskop，Verfahren zur Herstellung der Sonde und Atomkraftmikroskop
公开(公告)号：EP0794406A1
公开(公告)日：1997-09-10
申请号：EP97103780.9
申请日：1997-03-06
申请人： SEIKO INSTRUMENTS INC.
发明人： Muramatsu, Hiroshi , Shimizu, Nobuhiro
IPC分类号： G01B7/34
CPC分类号： G01Q60/38 , G01Q20/04 , Y10S977/878 , Y10S977/879
摘要： An AFM (atomic force microscope) probe having a sharpened probe tip is fabricated by a simple fabrication method.
A probe whose tip is formed by crystal planes of a piezoelectric crystal substrate is offered. Also, a probe whose tip is formed by an isotropic method is proposed. Furthermore, methods of fabricating these probes are offered. Moreover, scanning atomic force microscopes are constructed, using these probes.
摘要翻译：通过简单的制造方法制造具有尖锐的探针尖端的AFM（原子力显微镜）探针。提供其顶端由压电晶体基板的晶面形成的探针。此外，提出了通过各向同性方法形成尖端的探针。此外，提供了制造这些探针的方法。此外，使用这些探针构建扫描原子力显微镜。

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