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    • 5. 发明公开
    • MEMS switch and method of fabricating the same
    • MEMS开关及其制造方法
    • EP1672661A2
    • 2006-06-21
    • EP05024606.5
    • 2005-11-10
    • Samsung Electronics Co., Ltd.
    • Kim, Che-heungShin, Hyung-jaeKweon, Soon-cheolKim, Kyu-sikLee, Sang-hun
    • H01H59/00
    • H01H59/0009H01H2059/0054
    • A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.
    • 一种微机电系统开关和一种制造微机电系统开关的方法。 微机电系统开关包括:基板;多个信号线,形成在基板上,并包括开关接点和在基板上的信号线之间形成的多个不可移动电极。 多个锚定件从基板突出到预定高度并且支撑安装在同一平面上的至少两个致动梁以上下移动。 连接单元连接至少两个致动梁。 设置在基板上的支撑单元支撑连接单元,并且接触板安装在至少两个致动梁的下表面上以接触开关触点。
    • 10. 发明公开
    • MEMS switch and method of fabricating the same
    • MEMS Schalter und Methode zu dessen Herstellung
    • EP1672662A1
    • 2006-06-21
    • EP05025063.8
    • 2005-11-16
    • Samsung Electronics Co., Ltd.
    • Kim, Che-heungShin, Hyung-jaeKweon, Soon-cheolKim, Kyu-sikLee, Sang-hun
    • H01H59/00
    • H01H1/5822H01H59/0009H01H2059/0054H01H2059/0063
    • A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.
    • 微机电系统开关及其制造方法。 微电子机械系统开关包括基板,在基板的上表面的侧面形成多个信号线,并且在基板的上表面和多个信号线之间包括开关接触点和多个不可移动的电极。 内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。 推动杆形成在内致动构件的上表面的端部处,其端部从外致动构件的上部突出并与其重叠。 接触构件形成在外部致动构件的下表面上,以被推杆推动并接触信号线的开关接触点。