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1. 发明授权

EP1672662B1 MEMS switch and method of fabricating the same 有权
标题翻译： MEMS开关以及其制备方法
公开(公告)号：EP1672662B1
公开(公告)日：2008-06-25
申请号：EP05025063.8
申请日：2005-11-16
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Che-heung , Shin, Hyung-jae , Kweon, Soon-cheol , Kim, Kyu-sik , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H1/5822 , H01H59/0009 , H01H2059/0054 , H01H2059/0063

2. 发明公开

EP1672662A1 MEMS switch and method of fabricating the same 有权
标题翻译： MEMS Schalter und Methode zu dessen Herstellung
公开(公告)号：EP1672662A1
公开(公告)日：2006-06-21
申请号：EP05025063.8
申请日：2005-11-16
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Che-heung , Shin, Hyung-jae , Kweon, Soon-cheol , Kim, Kyu-sik , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H1/5822 , H01H59/0009 , H01H2059/0054 , H01H2059/0063
摘要： A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.
摘要翻译：微机电系统开关及其制造方法。微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且在基板的上表面和多个信号线之间包括开关接触点和多个不可移动的电极。内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。推动杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。接触构件形成在外部致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。

3. 发明公开

EP1672661A3 MEMS switch and method of fabricating the same 审中-公开
标题翻译： MEMS开关及其制造方法
公开(公告)号：EP1672661A3
公开(公告)日：2007-08-29
申请号：EP05024606.5
申请日：2005-11-10
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Che-heung , Shin, Hyung-jae , Kweon, Soon-cheol , Kim, Kyu-sik , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.

4. 发明公开

EP1684420A2 Band filter using film bulk acoustic resonator and method of fabricating the same 审中-公开
标题翻译： Bandfilter mitDünnschicht-Volumenwellen-Resonator和Verfahren zu seiner Herstellung
公开(公告)号：EP1684420A2
公开(公告)日：2006-07-26
申请号：EP06001244.0
申请日：2006-01-20
申请人： Samsung Electronics Co., Ltd.
发明人： Hong, Seog-woo , Ha, Byeoung-ju , Song, In-sang , Kim, Kyu-sik
IPC分类号： H03H3/02 , H03H9/02 , H03H9/58 , B81C1/00
CPC分类号： H03H3/02 , H03H9/02047 , H03H9/588 , H03H2003/023
摘要： A band filter using a film bulk acoustic resonator and a method of fabricating the same. The method includes the steps of forming a membrane layer on a substrate, forming a plurality of resonators on an upper surface of the membrane layer, depositing a mask layer on a lower surface of the membrane layer and patterning the mask layer to form a plurality of main windows and sub windows, and forming cavities along the main windows in the substrate and forming sub walls in the cavities in such a way that the sub walls are separated apart from the membrane layer by using the notch effect caused during a dry etching. It is possible to precisely form cavities with desired sizes even if the cavities have different sizes, to reduce the notched areas in the cavities, to reduce the total size of the filter by decreasing a distance between the cavities and to reduce the total length of wires.
摘要翻译：一种使用膜体声波谐振器的带滤波器及其制造方法。该方法包括以下步骤：在衬底上形成膜层，在膜层的上表面上形成多个谐振器，在膜层的下表面上沉积掩模层，并对掩模层进行图案化以形成多个主窗口和子窗口，并且沿着基板中的主窗口形成空腔，并且以这样的方式在空腔中形成子壁，使得通过使用在干蚀刻期间引起的切口效应，子壁与膜层分离。即使空腔具有不同的尺寸，也可以精确地形成具有期望尺寸的空腔，以减少空腔中的凹口区域，以通过减小空腔之间的距离来减小过滤器的总尺寸，并减小导线的总长度。

5. 发明公开

EP1684420A3 Band filter using film bulk acoustic resonator and method of fabricating the same 审中-公开
标题翻译：与薄膜体声波谐振器和过程及其制备波段滤波器
公开(公告)号：EP1684420A3
公开(公告)日：2007-10-10
申请号：EP06001244.0
申请日：2006-01-20
申请人： Samsung Electronics Co., Ltd.
发明人： Hong, Seog-woo , Ha, Byeoung-ju , Song, In-sang , Kim, Kyu-sik
IPC分类号： H03H3/02 , H03H9/02 , H03H9/58 , B81C1/00
CPC分类号： H03H3/02 , H03H9/02047 , H03H9/588 , H03H2003/023
摘要： A band filter using a film bulk acoustic resonator and a method of fabricating the same. The method includes the steps of forming a membrane layer on a substrate, forming a plurality of resonators on an upper surface of the membrane layer, depositing a mask layer on a lower surface of the membrane layer and patterning the mask layer to form a plurality of main windows and sub windows, and forming cavities along the main windows in the substrate and forming sub walls in the cavities in such a way that the sub walls are separated apart from the membrane layer by using the notch effect caused during a dry etching. It is possible to precisely form cavities with desired sizes even if the cavities have different sizes, to reduce the notched areas in the cavities, to reduce the total size of the filter by decreasing a distance between the cavities and to reduce the total length of wires.

6. 发明公开

EP1672661A2 MEMS switch and method of fabricating the same 审中-公开
标题翻译： MEMS开关及其制造方法
公开(公告)号：EP1672661A2
公开(公告)日：2006-06-21
申请号：EP05024606.5
申请日：2005-11-10
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Che-heung , Shin, Hyung-jae , Kweon, Soon-cheol , Kim, Kyu-sik , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.
摘要翻译：一种微机电系统开关和一种制造微机电系统开关的方法。微机电系统开关包括：基板;多个信号线，形成在基板上，并包括开关接点和在基板上的信号线之间形成的多个不可移动电极。多个锚定件从基板突出到预定高度并且支撑安装在同一平面上的至少两个致动梁以上下移动。连接单元连接至少两个致动梁。设置在基板上的支撑单元支撑连接单元，并且接触板安装在至少两个致动梁的下表面上以接触开关触点。

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