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    • 4. 发明公开
    • MEMS switch and method of fabricating the same
    • MEMS开关及其制造方法
    • EP1672661A2
    • 2006-06-21
    • EP05024606.5
    • 2005-11-10
    • Samsung Electronics Co., Ltd.
    • Kim, Che-heungShin, Hyung-jaeKweon, Soon-cheolKim, Kyu-sikLee, Sang-hun
    • H01H59/00
    • H01H59/0009H01H2059/0054
    • A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.
    • 一种微机电系统开关和一种制造微机电系统开关的方法。 微机电系统开关包括:基板;多个信号线,形成在基板上,并包括开关接点和在基板上的信号线之间形成的多个不可移动电极。 多个锚定件从基板突出到预定高度并且支撑安装在同一平面上的至少两个致动梁以上下移动。 连接单元连接至少两个致动梁。 设置在基板上的支撑单元支撑连接单元,并且接触板安装在至少两个致动梁的下表面上以接触开关触点。
    • 5. 发明公开
    • Micro-mirror device
    • 微镜器件
    • EP1096289A2
    • 2001-05-02
    • EP00309201.2
    • 2000-10-19
    • SAMSUNG ELECTRONICS CO., LTD.
    • Chin, Dae-je, 1501 Samsung Borameomni Apt.Shin, Hyung-jae, 125-703 Sibeom Hanshin Apt.Lee, Sang-hun
    • G02B26/08
    • G02B26/0841Y10S359/904
    • A micro-mirror device includes a substrate (21), address electrodes (30) provided on the substrate, and a micro-mirror (51) disposed to face the substrate (21) and to be spaced a predetermined distance from the substrate (21); and is adapted so that the slope of the micro-mirror (51) can be adjusted by electrostatic attraction forces between the address electrodes (30) and the micro-mirror (51). The micro-mirror device includes auxiliary electrodes (40) which are formed on and projected from the substrate (21) and the upper portions of which are disposed in the vicinity of the micro-mirror (51) so that distances between the micro-mirror (51) and the auxiliary electrodes (40) can remain narrow even when the micro-mirror (51) is inclined by electrostatic attraction forces in one direction, and the micro-mirror (51) can be restored by electrostatic attraction forces of the auxiliary electrodes when restored.
    • 一种微镜器件包括:基板(21);设置在基板上的寻址电极(30);以及微镜(51),设置为面对基板(21)并与基板(21)隔开预定距离 ); 并且适于通过寻址电极(30)和微镜(51)之间的静电引力来调节微镜(51)的斜率。 微镜器件包括辅助电极(40),辅助电极(40)形成在基板(21)上并从基板突出,并且其上部分布置在微镜(51)的附近,使得微镜 (51)通过静电吸引力向一个方向倾斜时,能够使辅助电极(40)和辅助电极(40)保持狭窄,能够通过辅助电极的静电吸引力使微镜(51) 电极恢复时。