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1. 发明公开

EP0237041A2 Projection optical system for use in precise copy 失效
标题翻译：对于精确副本的投影光学系统。
公开(公告)号：EP0237041A2
公开(公告)日：1987-09-16
申请号：EP87103472.4
申请日：1987-03-11
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Satoh, Takeo , Araki, Nobuhiro , Kawata, Koichi , Nomura, Noboru , Ueno, Atushi , Yoshida, Shotaro
IPC分类号： G02B17/08
CPC分类号： G02B17/0888 , G02B17/084 , G02B17/0892 , G03F7/70225 , G03F7/70233 , G03F7/70308
摘要： A projection optical system for use in a precise copy which uses a pair of catadioptric optical systems (I and II) consisting of convex mirrors (2, 6), concave mirrors (3, 5), and phase correction members (4, 4') is shown. Two catadioptric optical systems (I and II) commonly use an entrance pupil (E, EP) on a coaxis and are coupled so as to respectively face the phase correction members (4, 4'). Each of the concave mirrors (3, 5) has an opening at the center. Each of the convex mirrors (2, 6) has no opening in one embodiment but has an opening portion at the center in another embodiment.

2. 发明授权

EP0237041B1 Projection optical system for use in precise copy 失效
标题翻译：投影光学系统用于精密复印
公开(公告)号：EP0237041B1
公开(公告)日：1993-08-18
申请号：EP87103472.4
申请日：1987-03-11
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Satoh, Takeo , Araki, Nobuhiro , Kawata, Koichi , Nomura, Noboru , Ueno, Atushi , Yoshida, Shotaro
IPC分类号： G02B17/08
CPC分类号： G02B17/0888 , G02B17/084 , G02B17/0892 , G03F7/70225 , G03F7/70233 , G03F7/70308

3. 发明授权

EP0129340B1 Electrical discharge machining apparatus for forming minute holes in a workpiece 失效
标题翻译：用于在工作中形成分钟孔的电子放电加工装置
公开(公告)号：EP0129340B1
公开(公告)日：1988-11-17
申请号：EP84303406.7
申请日：1984-05-18
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Sato, Takeo , Araki, Nobuhiro , Matsushita, Hisato , Kawata, Koichi
IPC分类号： B23H7/26 , B23H9/14
CPC分类号： B23H9/14 , B23H7/265 , B23Q17/24

4. 发明公开

EP0229194A1 Laser beam processing apparatus 失效
标题翻译： Laserstrahlbearbeitungsgerät。
公开(公告)号：EP0229194A1
公开(公告)日：1987-07-22
申请号：EP85114657.1
申请日：1985-11-18
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Masaki, Takeshi , Kawata, Koichi , Sakagaito, Yukuo , Yamaguchi, Katsumasa , Kinoshiro, Hiromichi No. 302, Raionzu-manshon , Toba, Hiroto
IPC分类号： B23K26/06 , G02B26/04 , H01S3/121
CPC分类号： B23K26/0673 , B23K26/067 , G02B26/04
摘要： Processing of plural works can be made simultaneously by using divided laser beams which is issued from one large C 02 laser beam source, the dividing being made by one or more rotary chopper mirror(s) comprising reflecting parts and light passing parts, and its ration and pulsive start and stop of laser oscillation are controlled in interrelated manner and by controlling the duty time of the laser oscillation in PWM manner. The distribution of powers of the laser beams divided by the rotary chopper mirrors is desirably selectable, thereby enabling simultaneous processing of plural works under the different processing conditions.
摘要翻译：可以通过使用从一个大的Co 2激光束源发出的分割激光束同时进行多个工作的处理，该分割由包括反射部分和光通过部分的一个或多个旋转斩光镜制成，其分配由以相互关联的方式控制激光振荡的脉动启动和停止，并以PWM方式控制激光振荡的占空比。由旋转斩波镜分割的激光束的功率分布是可以选择的，从而能够在不同的处理条件下同时处理多个作品。

5. 发明授权

EP0332201B1 Optical projection system 失效
标题翻译：的投影光学系统。
公开(公告)号：EP0332201B1
公开(公告)日：1994-06-29
申请号：EP89104228.5
申请日：1989-03-09
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Araki, Nobuhiro , Sato, Takeo , Kawata, Koichi , Nomura, Noboru , Koga, Keisuke
IPC分类号： G02B13/00 , G02B13/18
CPC分类号： G02B13/18 , G02B13/00 , G02B13/24

6. 发明授权

EP0243950B1 Optical projection system 失效
标题翻译：光学投影系统
公开(公告)号：EP0243950B1
公开(公告)日：1993-03-24
申请号：EP87106243.6
申请日：1987-04-29
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Sato, Takeo , Araki, Nobuhiro , Kawata, Koichi , Nomura, Noboru , Ueno, Atsushi , Yoshida, Shotaro
IPC分类号： G02B17/08 , G03B41/00
CPC分类号： G02B17/0852 , G02B17/0808 , G02B17/0892 , G03F7/70225

7. 发明公开

EP0332201A3 Optical projection system 失效
标题翻译：光学投影系统
公开(公告)号：EP0332201A3
公开(公告)日：1991-07-17
申请号：EP89104228.5
申请日：1989-03-09
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Araki, Nobuhiro , Sato, Takeo , Kawata, Koichi , Nomura, Noboru , Koga, Keisuke
IPC分类号： G02B13/00 , G02B13/18
CPC分类号： G02B13/18 , G02B13/00 , G02B13/24
摘要： A first lens, a second lens, and a third lens are arranged successively in a direction of travel of a ray. The first lens has a predetermined negative refracting power. The second lens has a predetermined negative refracting power. The third lens has a predetermined positive refracting power. A group of fourth lenses follows the third lens in the direction of travel of the ray and has a predetermined positive refracting power. At least one of surfaces of the first, second, third, and fourth lenses is aspherical. The following conditions (1), (2), and (3) are satisfied:
(1) 4f (2) 0.65 (3) 10f where the character "f" denotes a focal length of the optical projection system, the character "f3" denotes a focal length of the third lens, the character "f4" denotes a focal length of the fourth lens group, the character "d34" denotes a distance between a rear principal point of the third lens and a front principal point of the fourth lens group, and the character "R5" denotes a radius of curvature of a front surface of the third lens.

8. 发明公开

EP0243950A3 Optical projection system 失效
标题翻译：光学投影系统
公开(公告)号：EP0243950A3
公开(公告)日：1989-02-08
申请号：EP87106243.6
申请日：1987-04-29
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Sato, Takeo , Araki, Nobuhiro , Kawata, Koichi , Nomura, Noboru , Ueno, Atsushi , Yoshida, Shotaro
IPC分类号： G02B17/08 , G03B41/00
CPC分类号： G02B17/0852 , G02B17/0808 , G02B17/0892 , G03F7/70225
摘要： A projection optical system for photolithography includes a refraction sub-system (X) and a cata-dioptric sub-system (Y) optically connected to each other. The refraction sub-system extends at an object side. The cata-dioptric sub-system extends at an image side. The refraction sub-system is generally composed of refracting members (1,2,3,4). The cata-dioptric sub-system is generally composed of a phase compensating member (5), a concave mirror (6), and a convex mirror (7). The phase compensating member adjoins the refraction sub-system. At least the concave mirror has a central opening through which light passes. The light forms an image at a rear of the concave mirror.

9. 发明授权

EP0229194B1 Laser beam processing apparatus 失效
标题翻译：激光加工设备
公开(公告)号：EP0229194B1
公开(公告)日：1990-08-01
申请号：EP85114657.1
申请日：1985-11-18
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Masaki, Takeshi , Kawata, Koichi , Sakagaito, Yukuo , Yamaguchi, Katsumasa , Kinoshiro, Hiromichi No. 302, Raionzu-manshon , Toba, Hiroto
IPC分类号： B23K26/06 , G02B26/04 , H01S3/121
CPC分类号： B23K26/0673 , B23K26/067 , G02B26/04

10. 发明公开

EP0332201A2 Optical projection system 失效
标题翻译： Optisches Projektionssystem。
公开(公告)号：EP0332201A2
公开(公告)日：1989-09-13
申请号：EP89104228.5
申请日：1989-03-09
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人： Araki, Nobuhiro , Sato, Takeo , Kawata, Koichi , Nomura, Noboru , Koga, Keisuke
IPC分类号： G02B13/00 , G02B13/18
CPC分类号： G02B13/18 , G02B13/00 , G02B13/24
摘要： A first lens, a second lens, and a third lens are arranged successively in a direction of travel of a ray. The first lens has a predetermined negative refracting power. The second lens has a predetermined negative refracting power. The third lens has a predetermined positive refracting power. A group of fourth lenses follows the third lens in the direction of travel of the ray and has a predetermined positive refracting power. At least one of surfaces of the first, second, third, and fourth lenses is aspherical. The following conditions (1), (2), and (3) are satisfied:

(1) 4f
(2) 0.65
(3) 10f
where the character "f" denotes a focal length of the optical projection system, the character "f3" denotes a focal length of the third lens, the character "f4" denotes a focal length of the fourth lens group, the character "d34" denotes a distance between a rear principal point of the third lens and a front principal point of the fourth lens group, and the character "R5" denotes a radius of curvature of a front surface of the third lens.
摘要翻译：第一透镜，第二透镜和第三透镜在光线的行进方向上连续布置。第一透镜具有预定的负折射光焦度。第二透镜具有预定的负折射光焦度。第三透镜具有预定的正折射率。一组第四透镜沿着光线的行进方向跟随第三透镜，并具有预定的正折射率。第一，第二，第三和第四透镜的至少一个表面是非球面的。满足以下条件（1），（2）和（3）：（1）4f

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